[Scan]
initial_time=2015-12-15T18:05:01
final_time=2015-12-15T18:05:21
ip_count=19
run=1017
dataset=2
scan=88
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.82867E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-7.56943E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.50814E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.29318E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.5887E-8
mult1=-2.69103E-8
mult2=-2.68268E-9
rf_tmon=-3.44896E-3
rf_agc=3.41627E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.03199E-3
ql5_imon=6.23953E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65652E0
bslens_imon=2.58101E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19977E1
lens5a_imon=1.9892E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12523E2
lens4a_imon=2.04945E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=2.84863E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.0224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05355E1
cs_ea1_imon=2.52237E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00951E0
lens1_imon=1.43464E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64885E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0375E1
cs_ea2_imon=1.54363E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=2.94234E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=1.22635E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11213E1
os_restr1_imon=4.29851E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15059E1
os_ea1_imon=2.38574E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6381E1
os_ef1bup_imon=3.07857E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26892E0
cs_ionrep_imon=1.2026E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93485E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=2.95964E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=3.90842E-8
tplens_vset=1.4E-1
tplens_vmon=1.56573E0
tplens_imon=-3.20976E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26428E1
iondef3_imon=1.49676E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2647E1
iondef2_imon=1.57139E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98346E-4
ql6_vset=1.0E-1
ql6_vmon=9.28402E-2
ql6_imon=9.87828E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=1.7592E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3379E1
lens5b_imon=2.19036E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.11352E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.34042E0
os_ea2_imon=-6.92286E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06117E2
lens4b_imon=2.00424E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71354E1
cs_ef2a_imon=3.1802E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06056E0
os_ef2alow_imon=-2.68437E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82407E-1
os_ef2bup_imon=-5.32608E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.41446E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.2654E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02037E1
cs_anode2_imon=2.26623E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72931E1
iondef1_imon=1.07787E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.07656E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=4.43246E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=7.2026E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13134E0
cs_ionaccel_imon=-1.89511E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0204E2
cs_ionfocb_imon=1.4728E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56279E1
einzel_imon=7.43917E-6
window_vset=0.0E0
window_vmon=2.19745E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.38976E-4
mask2_vset=0.0E0
mask2_vmon=-1.8611E1
mask2_imon=-6.87777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92611E3
multa_neg_imon=7.99205E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93743E3
defgrida_imon=6.19678E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5009E3
multb_neg_imon=7.58469E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51886E0
defgridb_imon=6.25446E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33332E1
os_fil1_imon=9.4221E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07011E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63116E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30845E1
cs_fil1_imon=9.94077E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62059E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6536E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26717E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04922E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.94691E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.63593E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23232E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21991E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3245E-3
inlet_lpb_pmon=1.97731E-1
chamber_ion_pmon=1.1721E-7
chamber_cvt_pmon=2.52179E-3
foreline_cvt_pmon=2.52179E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.77022E-1
res40_imon=-2.39966E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.404E3	1.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80021E1	-3.57628E-4	-8.80001E1	4.76837E-5	6.07967E-3	9.28879E-2	2.73134E1	-3.26703E1	-3.2662E1	2.68134E1	1.17223E-7	2.51739E-3	2.51739E-3	6.34518E-3	2.00705E-1
2.0E0	1.17632E5	1.03E2	3.16E2	1.6E2	-7.40192E-2	-8.8002E1	-3.57628E-4	-8.80004E1	2.38419E-5	6.05583E-3	9.2864E-2	2.72898E1	-3.26572E1	-3.26297E1	2.67837E1	1.16778E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.00847E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80021E1	-7.62939E-4	-8.8E1	-9.53674E-5	6.12736E-3	9.26971E-2	2.72958E1	-3.2648E1	-3.26486E1	2.68253E1	1.16778E-7	2.51662E-3	2.51662E-3	6.3514E-3	2.00673E-1
4.0E0	2.2747E4	8.0E0	6.55E2	3.98E2	-7.38649E-2	-8.80019E1	-7.39098E-4	-8.80002E1	2.38419E-5	6.00815E-3	9.30071E-2	2.73243E1	-3.26825E1	-3.2623E1	2.68159E1	1.17063E-7	2.51287E-3	2.51287E-3	6.33388E-3	2.01072E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80019E1	-5.96046E-4	-8.80002E1	3.57628E-4	6.17504E-3	9.31263E-2	2.72974E1	-3.26655E1	-3.26508E1	2.68235E1	1.17134E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.00151E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80018E1	-7.39098E-4	-8.80002E1	9.53674E-5	6.1512E-3	9.32217E-2	2.73086E1	-3.26764E1	-3.26382E1	2.68389E1	1.16823E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.00192E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80018E1	-7.86781E-4	-8.80002E1	0.0E0	5.8651E-3	9.32932E-2	2.73082E1	-3.26572E1	-3.26535E1	2.68119E1	1.16973E-7	2.52384E-3	2.52384E-3	6.31817E-3	2.00534E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.8002E1	-9.77516E-4	-8.80003E1	2.86102E-4	6.27041E-3	9.27925E-2	2.73234E1	-3.26691E1	-3.26331E1	2.68058E1	1.16938E-7	2.51804E-3	2.51804E-3	6.31858E-3	2.00285E-1
1.2E1	3.05E2	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80019E1	-7.62939E-4	-8.79997E1	-1.66893E-4	6.19888E-3	9.29356E-2	2.73086E1	-3.2659E1	-3.2625E1	2.68239E1	1.16923E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.00363E-1
1.3E1	2.8E1	1.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80023E1	-9.53674E-4	-8.8E1	0.0E0	5.79357E-3	9.2864E-2	2.73201E1	-3.26603E1	-3.26272E1	2.68268E1	1.1682E-7	2.52293E-3	2.52293E-3	6.32107E-3	2.00389E-1
1.4E1	3.673E3	2.0E0	5.66E2	3.82E2	-7.286E-2	-8.80022E1	-1.40667E-3	-8.8E1	7.15256E-5	5.84126E-3	9.26971E-2	2.73399E1	-3.26602E1	-3.26425E1	2.67998E1	1.17185E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.00847E-1
1.5E1	1.5E2	1.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80025E1	-1.21593E-3	-8.80001E1	-2.38419E-5	5.88894E-3	9.2721E-2	2.72991E1	-3.26446E1	-3.26008E1	2.68244E1	1.16774E-7	2.52707E-3	2.52707E-3	6.32896E-3	2.00363E-1
1.6E1	1.2E3	1.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80021E1	-1.0252E-3	-8.80001E1	-2.14577E-4	5.62668E-3	9.26971E-2	2.73299E1	-3.26738E1	-3.26136E1	2.68112E1	1.16981E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.00673E-1
1.7E1	1.671E3	3.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80018E1	-1.19209E-3	-8.80003E1	-4.76837E-5	5.8651E-3	9.29117E-2	2.73129E1	-3.26681E1	-3.26591E1	2.68268E1	1.16873E-7	2.52061E-3	2.52061E-3	6.28056E-3	1.9951E-1
1.8E1	7.053E3	2.0E0	7.27E2	5.0E2	-7.24736E-2	-8.8002E1	-9.29832E-4	-8.80001E1	-1.19209E-4	5.53131E-3	9.29117E-2	2.73243E1	-3.26705E1	-3.26248E1	2.68196E1	1.16829E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99803E-1
1.9E1	2.565E3	2.0E0	7.68E2	5.29E2	-7.24736E-2	-8.8002E1	-8.10623E-4	-8.80002E1	2.38419E-5	5.81741E-3	9.27687E-2	2.72925E1	-3.26585E1	-3.26122E1	2.68166E1	1.16576E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.00325E-1
2.0E1	3.058E4	1.4E1	8.08E2	5.58E2	-7.16233E-2	-8.80021E1	-8.82149E-4	-8.79999E1	-7.15256E-5	5.8651E-3	9.28879E-2	2.72981E1	-3.2699E1	-3.26335E1	2.68065E1	1.16778E-7	2.52647E-3	2.52647E-3	6.31837E-3	1.9963E-1
2.1E1	5.6E1	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.8002E1	-4.29153E-4	-8.8E1	2.38419E-5	5.6982E-3	9.31263E-2	2.7319E1	-3.26978E1	-3.26341E1	2.68175E1	1.16965E-7	2.51814E-3	2.51814E-3	6.32328E-3	1.99394E-1
2.2E1	2.227E3	0.0E0	8.89E2	6.17E2	-7.13915E-2	-8.8002E1	-6.67572E-4	-8.80003E1	7.15256E-5	6.07967E-3	9.30309E-2	2.73095E1	-3.26497E1	-3.2636E1	2.68144E1	1.16769E-7	2.52553E-3	2.52553E-3	6.31798E-3	1.98561E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80022E1	-6.67572E-4	-8.80002E1	3.09944E-4	6.03199E-3	9.28402E-2	2.72931E1	-3.2647E1	-3.26428E1	2.68088E1	1.1721E-7	2.52179E-3	2.52179E-3	6.3245E-3	1.97731E-1