[Scan]
initial_time=2015-12-15T18:05:28
final_time=2015-12-15T18:05:47
ip_count=19
run=1017
dataset=2
scan=89
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.813E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-7.76601E-10
ql2_vset=
ql2_vmon=-1.04904E-3
ql2_imon=1.49517E-9
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-2.28918E-9
ql4_vset=
ql4_vmon=-1.43051E-4
ql4_imon=1.5851E-8
mult1=-2.18044E-8
mult2=-2.65888E-9
rf_tmon=-5.02358E-3
rf_agc=3.2655E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.72205E-3
ql5_imon=6.1897E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66803E0
bslens_imon=2.63895E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19799E1
lens5a_imon=1.97488E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.05048E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53887E1
cs_ef1b_imon=2.83386E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04639E2
lens23_imon=1.0217E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05185E1
cs_ea1_imon=2.52134E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99194E0
lens1_imon=1.32842E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64416E1
os_ef1alow_imon=2.96216E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04148E1
cs_ea2_imon=1.55113E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84544E1
cs_ef1a_imon=2.91999E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.22759E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11195E1
os_restr1_imon=4.30644E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.36178E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63984E1
os_ef1bup_imon=3.07676E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2353E0
cs_ionrep_imon=1.191E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.93312E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01557E1
cs_anode1_imon=2.95964E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=3.91263E-8
tplens_vset=1.4E-1
tplens_vmon=1.58118E0
tplens_imon=-3.29731E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26621E1
iondef3_imon=1.48682E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26731E1
iondef2_imon=1.59285E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98478E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=9.93741E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25673E0
ionrepsh_imon=1.77048E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33507E1
lens5b_imon=2.19493E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74928E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.32973E0
os_ea2_imon=-8.85923E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00491E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.17623E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10561E0
os_ef2alow_imon=-2.63752E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77001E-1
os_ef2bup_imon=-5.54232E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=3.42851E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.28885E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.2356E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72886E1
iondef1_imon=1.10653E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.08377E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=4.48456E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.20145E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12113E0
cs_ionaccel_imon=-1.78699E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47089E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56363E1
einzel_imon=7.70226E-6
window_vset=0.0E0
window_vmon=6.958E-2
window_imon=-1.25E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.3921E-4
mask2_vset=0.0E0
mask2_vmon=-1.86434E1
mask2_imon=-9.47263E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92611E3
multa_neg_imon=8.05835E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93751E3
defgrida_imon=5.99349E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=8.20783E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3195E0
defgridb_imon=5.88225E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.41663E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0644E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63265E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30851E1
cs_fil1_imon=9.94269E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6272E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6537E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31968E-2
os_fil2_imon=-2.61191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81496E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.98024E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.29956E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37648E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22022E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.00363E-1
chamber_ion_pmon=1.16973E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.28368E-1
res40_imon=-2.76006E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=194
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.375E3	2.0E0	1.47E2	4.1E1	-7.39421E-2	-8.80025E1	-3.09944E-4	-8.8E1	7.15256E-5	6.1512E-3	9.28879E-2	2.73069E1	-3.26639E1	-3.26254E1	2.68204E1	1.16818E-7	2.51814E-3	2.51814E-3	6.3074E-3	2.00903E-1
2.0E0	1.17976E5	1.1E2	3.16E2	1.6E2	-7.44831E-2	-8.80021E1	-2.86102E-4	-8.80001E1	1.43051E-4	5.79357E-3	9.31025E-2	2.73124E1	-3.26493E1	-3.26254E1	2.68163E1	1.16981E-7	2.52538E-3	2.52538E-3	6.3074E-3	2.01547E-1
3.0E0	2.6E1	0.0E0	4.85E2	2.79E2	-7.37874E-2	-8.80023E1	-7.86781E-4	-8.79998E1	9.53674E-5	6.00815E-3	9.30548E-2	2.73654E1	-3.26625E1	-3.2655E1	2.68146E1	1.17145E-7	2.52362E-3	2.52362E-3	6.31299E-3	2.00463E-1
4.0E0	2.2852E4	1.0E1	6.55E2	3.98E2	-7.37103E-2	-8.80018E1	-5.00679E-4	-8.79999E1	5.00679E-4	5.88894E-3	9.31978E-2	2.73057E1	-3.26661E1	-3.26443E1	2.68267E1	1.17063E-7	2.52765E-3	2.52765E-3	6.33919E-3	2.00231E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80019E1	-6.91414E-4	-8.80001E1	2.86102E-4	5.88894E-3	9.30071E-2	2.72898E1	-3.26823E1	-3.26383E1	2.67914E1	1.17023E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.00534E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80023E1	-8.34465E-4	-8.8E1	1.90735E-4	5.6982E-3	9.32217E-2	2.72829E1	-3.26807E1	-3.26254E1	2.68028E1	1.16835E-7	2.5225E-3	2.5225E-3	6.29624E-3	2.00108E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80023E1	-6.19888E-4	-8.80003E1	3.57628E-4	5.96046E-3	9.28402E-2	2.73171E1	-3.26687E1	-3.26494E1	2.68388E1	1.1693E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.00499E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80025E1	-1.12057E-3	-8.80002E1	2.86102E-4	5.57899E-3	9.29832E-2	2.73222E1	-3.2652E1	-3.26242E1	2.68064E1	1.1693E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.9911E-1
1.2E1	3.17E2	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80024E1	-7.62939E-4	-8.80001E1	1.43051E-4	5.48363E-3	9.31978E-2	2.72892E1	-3.26472E1	-3.26402E1	2.68041E1	1.16823E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.99E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.44059E-2	-8.80022E1	-6.67572E-4	-8.79999E1	1.90735E-4	5.74589E-3	9.30309E-2	2.73117E1	-3.26615E1	-3.26404E1	2.68046E1	1.17023E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.9934E-1
1.4E1	3.716E3	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.80024E1	-5.48363E-4	-8.8E1	1.66893E-4	5.79357E-3	9.31501E-2	2.72961E1	-3.26603E1	-3.26008E1	2.68004E1	1.16829E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.99977E-1
1.5E1	1.28E2	1.0E0	6.06E2	4.11E2	-7.39421E-2	-8.80023E1	-5.96046E-4	-8.79998E1	7.15256E-5	5.72205E-3	9.3317E-2	2.72853E1	-3.26753E1	-3.2632E1	2.68196E1	1.16778E-7	2.52538E-3	2.52538E-3	6.29098E-3	2.00325E-1
1.6E1	1.163E3	3.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80022E1	-5.24521E-4	-8.80002E1	4.76837E-5	5.65052E-3	9.31263E-2	2.7308E1	-3.26726E1	-3.26136E1	2.6803E1	1.16727E-7	2.52538E-3	2.52538E-3	6.3074E-3	2.00325E-1
1.7E1	1.655E3	0.0E0	6.87E2	4.7E2	-7.36328E-2	-8.80022E1	-3.33786E-4	-8.79998E1	2.38419E-5	5.88894E-3	9.29832E-2	2.73544E1	-3.26699E1	-3.26476E1	2.67932E1	1.16923E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9917E-1
1.8E1	6.974E3	4.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80022E1	-6.4373E-4	-8.79996E1	2.38419E-4	5.81741E-3	9.30071E-2	2.73075E1	-3.26585E1	-3.26392E1	2.68215E1	1.17134E-7	2.5199E-3	2.5199E-3	6.33486E-3	1.99803E-1
1.9E1	2.593E3	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80025E1	-6.91414E-4	-8.79998E1	2.38419E-4	5.96046E-3	9.33647E-2	2.72811E1	-3.26873E1	-3.26326E1	2.6801E1	1.1688E-7	2.52318E-3	2.52318E-3	6.32386E-3	1.99803E-1
2.0E1	3.0101E4	1.4E1	8.08E2	5.58E2	-7.3401E-2	-8.80022E1	-5.96046E-4	-8.79998E1	1.66893E-4	5.67436E-3	9.31501E-2	2.73706E1	-3.26523E1	-3.25985E1	2.68069E1	1.17032E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.00325E-1
2.1E1	6.4E1	1.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80023E1	-8.82149E-4	-8.79997E1	1.66893E-4	6.10352E-3	9.32455E-2	2.72473E1	-3.26585E1	-3.2652E1	2.68178E1	1.17197E-7	2.51915E-3	2.51915E-3	6.3074E-3	1.99931E-1
2.2E1	2.076E3	3.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80024E1	-9.05991E-4	-8.79998E1	-9.53674E-5	6.22272E-3	9.31501E-2	2.7337E1	-3.26655E1	-3.26207E1	2.68041E1	1.17023E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.00192E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80023E1	-1.04904E-3	-8.79997E1	-1.43051E-4	5.72205E-3	9.29594E-2	2.72886E1	-3.26731E1	-3.26621E1	2.68082E1	1.16973E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.00363E-1