[Scan]
initial_time=2015-12-15T18:05:55
final_time=2015-12-15T18:06:14
ip_count=19
run=1017
dataset=2
scan=90
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.81202E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-8.20982E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.50539E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-2.33287E-9
ql4_vset=
ql4_vmon=-2.14577E-4
ql4_imon=1.58845E-8
mult1=-2.04806E-8
mult2=-2.69865E-9
rf_tmon=-5.13127E-3
rf_agc=3.33696E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.10352E-3
ql5_imon=6.34086E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70084E0
bslens_imon=2.41619E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19558E1
lens5a_imon=1.9874E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.04867E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=2.84843E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02195E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05196E1
cs_ea1_imon=2.52507E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96842E0
lens1_imon=1.29491E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64634E1
os_ef1alow_imon=2.96948E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04112E1
cs_ea2_imon=1.54784E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84569E1
cs_ef1a_imon=2.93562E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.22775E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10981E1
os_restr1_imon=4.29986E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15189E1
os_ea1_imon=2.39503E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63746E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24626E0
cs_ionrep_imon=1.19121E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91835E2
cs_nozzle_imon=1.93276E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01653E1
cs_anode1_imon=2.95391E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=3.9103E-8
tplens_vset=1.4E-1
tplens_vmon=1.58303E0
tplens_imon=-4.18165E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.46919E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26951E1
iondef2_imon=1.5564E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98233E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=9.34136E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29233E0
ionrepsh_imon=1.78183E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33476E1
lens5b_imon=2.18946E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74936E1
cs_ef2b_imon=3.11778E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.30531E0
os_ea2_imon=-4.99926E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.0042E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71031E1
cs_ef2a_imon=3.17928E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07207E0
os_ef2alow_imon=-2.64617E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08236E-1
os_ef2bup_imon=-5.44472E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10942E1
os_restr2_imon=3.41826E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.29189E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01711E1
cs_anode2_imon=2.24629E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73387E1
iondef1_imon=1.09582E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68448E1
iondef4_imon=1.08639E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=4.47447E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=7.1865E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.03219E0
cs_ionaccel_imon=-2.01562E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47039E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5621E1
einzel_imon=7.66449E-6
window_vset=0.0E0
window_vmon=8.16413E-2
window_imon=-1.23327E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82589E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86415E1
mask2_imon=-8.24584E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92611E3
multa_neg_imon=8.07712E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.18885E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=8.11995E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39699E0
defgridb_imon=5.97471E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33333E1
os_fil1_imon=9.41908E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06784E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63299E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30906E1
cs_fil1_imon=9.93792E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62573E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65417E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.3167E-2
os_fil2_imon=-2.77553E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01847E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.01146E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36783E-1
cs_fil2_imon=-2.79499E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07134E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22104E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32418E-3
inlet_lpb_pmon=2.00108E-1
chamber_ion_pmon=1.17093E-7
chamber_cvt_pmon=2.51915E-3
foreline_cvt_pmon=2.51915E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.84233E-1
res40_imon=-2.72013E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=198
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.453E3	3.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80023E1	-6.19888E-4	-8.80001E1	1.19209E-4	5.96046E-3	9.30071E-2	2.73303E1	-3.26717E1	-3.26585E1	2.68226E1	1.16908E-7	2.51321E-3	2.51321E-3	6.31332E-3	2.00534E-1
2.0E0	1.17407E5	1.03E2	3.16E2	1.6E2	-7.32464E-2	-8.80023E1	-7.39098E-4	-8.79999E1	1.66893E-4	5.76973E-3	9.30548E-2	2.73247E1	-3.26578E1	-3.2656E1	2.68263E1	1.1693E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.99977E-1
3.0E0	1.8E1	1.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80021E1	-5.96046E-4	-8.79997E1	2.6226E-4	5.8651E-3	9.32217E-2	2.73175E1	-3.26408E1	-3.2659E1	2.68053E1	1.16938E-7	2.51804E-3	2.51804E-3	6.30182E-3	2.00818E-1
4.0E0	2.2476E4	1.1E1	6.55E2	3.98E2	-7.30918E-2	-8.80023E1	-5.48363E-4	-8.79996E1	-1.19209E-4	5.76973E-3	9.29356E-2	2.73289E1	-3.26318E1	-3.25907E1	2.6807E1	1.16823E-7	2.52707E-3	2.52707E-3	6.28592E-3	2.00021E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80022E1	-5.96046E-4	-8.79996E1	2.38419E-5	6.27041E-3	9.30548E-2	2.72817E1	-3.26284E1	-3.26356E1	2.6831E1	1.16818E-7	2.52236E-3	2.52236E-3	6.33388E-3	2.00903E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80022E1	-6.19888E-4	-8.79999E1	-1.43051E-4	6.19888E-3	9.31263E-2	2.73177E1	-3.26867E1	-3.25683E1	2.68082E1	1.16981E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.9963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80022E1	-4.52995E-4	-8.79999E1	-2.14577E-4	6.24657E-3	9.29117E-2	2.73423E1	-3.26602E1	-3.26018E1	2.68082E1	1.16829E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.99977E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80022E1	-4.76837E-4	-8.80001E1	-7.15256E-5	5.74589E-3	9.29117E-2	2.73435E1	-3.26573E1	-3.26428E1	2.68247E1	1.16923E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.00363E-1
1.2E1	3.43E2	1.0E0	4.85E2	3.23E2	-7.40192E-2	-8.80022E1	-6.91414E-4	-8.8E1	-2.38419E-5	6.03199E-3	9.31263E-2	2.73279E1	-3.26987E1	-3.26242E1	2.68265E1	1.16778E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.00847E-1
1.3E1	2.8E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.8002E1	-7.86781E-4	-8.79999E1	-4.76837E-5	6.07967E-3	9.3174E-2	2.72998E1	-3.26767E1	-3.26779E1	2.68052E1	1.17023E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.00192E-1
1.4E1	3.711E3	3.0E0	5.66E2	3.82E2	-7.286E-2	-8.80021E1	-6.91414E-4	-8.8E1	5.24521E-4	6.27041E-3	9.31978E-2	2.73405E1	-3.26699E1	-3.26122E1	2.68172E1	1.1693E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99977E-1
1.5E1	1.4E2	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.80024E1	-5.00679E-4	-8.79998E1	7.15256E-5	6.1512E-3	9.3317E-2	2.72909E1	-3.26502E1	-3.26413E1	2.6819E1	1.17073E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.00876E-1
1.6E1	1.214E3	2.0E0	6.47E2	4.41E2	-7.36328E-2	-8.80021E1	-5.72205E-4	-8.79999E1	1.90735E-4	6.41346E-3	9.32455E-2	2.73201E1	-3.26723E1	-3.26272E1	2.68214E1	1.17134E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.01722E-1
1.7E1	1.655E3	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80022E1	-2.38419E-4	-8.8E1	1.66893E-4	6.05583E-3	9.30548E-2	2.73327E1	-3.26567E1	-3.26158E1	2.67845E1	1.17083E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.02073E-1
1.8E1	7.095E3	3.0E0	7.27E2	5.0E2	-7.29374E-2	-8.8002E1	-2.14577E-4	-8.80002E1	9.53674E-5	5.96046E-3	9.27448E-2	2.73275E1	-3.26762E1	-3.26449E1	2.68202E1	1.1688E-7	2.51552E-3	2.51552E-3	6.3514E-3	2.01372E-1
1.9E1	2.593E3	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.8002E1	2.38419E-5	-8.80002E1	-4.76837E-5	6.10352E-3	9.30786E-2	2.72775E1	-3.26744E1	-3.26315E1	2.67845E1	1.1693E-7	2.52428E-3	2.52428E-3	6.30192E-3	1.99716E-1
2.0E1	3.0356E4	1.8E1	8.08E2	5.58E2	-7.30146E-2	-8.80021E1	-1.90735E-4	-8.80003E1	2.6226E-4	6.12736E-3	9.29356E-2	2.73285E1	-3.26428E1	-3.26963E1	2.68178E1					
2.1E1	6.2E1	0.0E0	8.49E2	5.88E2	-7.37874E-2	-8.80022E1	-1.66893E-4	-8.80002E1	1.43051E-4	6.19888E-3	9.30309E-2	2.7326E1	-3.26602E1	-3.26469E1	2.68308E1	1.17083E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99803E-1
2.2E1	2.226E3	0.0E0	8.89E2	6.17E2	-7.44059E-2	-8.80023E1	-2.6226E-4	-8.8E1	1.43051E-4	6.31809E-3	9.30309E-2	2.73033E1	-3.26829E1	-3.26272E1	2.68118E1	1.16818E-7	2.51919E-3	2.51919E-3	6.31269E-3	2.00399E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80021E1	-3.57628E-4	-8.8E1	-2.14577E-4	6.10352E-3	9.31978E-2	2.73387E1	-3.26951E1	-3.26224E1	2.68448E1	1.17093E-7	2.51915E-3	2.51915E-3	6.32418E-3	2.00108E-1