[Scan]
initial_time=2015-12-15T18:09:01
final_time=2015-12-15T18:09:20
ip_count=19
run=1017
dataset=2
scan=97
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.83016E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-7.43675E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.50521E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-2.31893E-9
ql4_vset=
ql4_vmon=-9.53674E-5
ql4_imon=1.59399E-8
mult1=-2.43336E-8
mult2=-2.75654E-9
rf_tmon=-4.206E-3
rf_agc=3.38263E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.12736E-3
ql5_imon=6.20139E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67395E0
bslens_imon=2.3575E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19863E1
lens5a_imon=1.98307E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.04887E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53917E1
cs_ef1b_imon=2.83169E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02193E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05108E1
cs_ea1_imon=2.51697E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04977E0
lens1_imon=1.35893E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.645E1
os_ef1alow_imon=2.97045E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04003E1
cs_ea2_imon=1.53065E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=2.9308E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.23123E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11213E1
os_restr1_imon=4.30464E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14969E1
os_ea1_imon=2.3706E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63846E1
os_ef1bup_imon=3.07857E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22266E0
cs_ionrep_imon=1.19395E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93352E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01737E1
cs_anode1_imon=2.96144E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=3.91448E-8
tplens_vset=1.4E-1
tplens_vmon=1.58496E0
tplens_imon=-2.56087E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26434E1
iondef3_imon=1.48703E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26434E1
iondef2_imon=1.57247E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.9836E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=9.5737E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28034E0
ionrepsh_imon=1.77362E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33772E1
lens5b_imon=2.17017E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74946E1
cs_ef2b_imon=3.11785E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3236E0
os_ea2_imon=-7.5357E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00572E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71138E1
cs_ef2a_imon=3.17623E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05996E0
os_ef2alow_imon=-2.78529E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01629E-1
os_ef2bup_imon=-5.48466E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11063E1
os_restr2_imon=3.41373E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.30253E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01995E1
cs_anode2_imon=2.25001E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73009E1
iondef1_imon=1.09589E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67836E1
iondef4_imon=1.08269E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=4.46011E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82857E-1
olens1_imon=7.21536E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-1.98521E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47201E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56159E1
einzel_imon=7.64459E-6
window_vset=0.0E0
window_vmon=1.40458E-1
window_imon=-1.15269E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.862E1
mask2_imon=-7.56253E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92584E3
multa_neg_imon=7.13767E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93689E3
defgrida_imon=7.02592E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50202E3
multb_neg_imon=6.2833E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30833E0
defgridb_imon=6.18236E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33313E1
os_fil1_imon=9.42402E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06855E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63333E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=9.9493E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62972E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65309E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31876E-2
os_fil2_imon=-2.82815E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79094E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.86957E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.64795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44255E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2216E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.17023E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.79114E-1
res40_imon=-2.60869E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.508E3	3.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80023E1	-7.86781E-4	-8.80003E1	0.0E0	5.88894E-3	9.33409E-2	2.72993E1	-3.26857E1	-3.26179E1	2.68151E1	1.16778E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.01022E-1
2.0E0	1.17961E5	1.03E2	3.16E2	1.6E2	-7.23189E-2	-8.80025E1	-7.62939E-4	-8.8E1	4.76837E-5	5.79357E-3	9.32693E-2	2.73082E1	-3.2645E1	-3.26223E1	2.68148E1	1.16867E-7	2.52131E-3	2.52131E-3	6.32858E-3	2.00903E-1
3.0E0	2.7E1	1.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80026E1	-7.62939E-4	-8.80001E1	2.14577E-4	6.27041E-3	9.31263E-2	2.73033E1	-3.26602E1	-3.26207E1	2.68208E1	1.16783E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.00108E-1
4.0E0	2.2763E4	1.3E1	6.55E2	3.98E2	-7.19325E-2	-8.80029E1	-6.19888E-4	-8.79995E1	2.14577E-4	5.98431E-3	9.32693E-2	2.73285E1	-3.26543E1	-3.26591E1	2.68118E1	1.16923E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.00192E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80028E1	-5.72205E-4	-8.79997E1	2.38419E-4	5.79357E-3	9.3317E-2	2.72892E1	-3.26779E1	-3.26236E1	2.68123E1	1.1688E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.01022E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80024E1	-5.00679E-4	-8.8E1	-2.38419E-5	6.19888E-3	9.3174E-2	2.73069E1	-3.26615E1	-3.26591E1	2.68262E1	1.16873E-7	2.52492E-3	2.52492E-3	6.3074E-3	2.00705E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80019E1	-5.72205E-4	-8.79997E1	-4.76837E-5	6.12736E-3	9.29832E-2	2.72939E1	-3.26472E1	-3.26325E1	2.68238E1	1.17032E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.41738E-2	-8.80019E1	-7.15256E-4	-8.80001E1	9.53674E-5	6.10352E-3	9.28402E-2	2.7288E1	-3.26682E1	-3.26254E1	2.68244E1	1.16829E-7	2.52154E-3	2.52154E-3	6.33211E-3	1.99977E-1
1.2E1	3.15E2	1.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80019E1	-6.4373E-4	-8.80001E1	0.0E0	6.05583E-3	9.30071E-2	2.72933E1	-3.26242E1	-3.26384E1	2.68004E1					
1.3E1	3.0E1	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80022E1	-7.62939E-4	-8.80004E1	1.66893E-4	6.19888E-3	9.31263E-2	2.72889E1	-3.2653E1	-3.26236E1	2.68328E1	1.16923E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.9934E-1
1.4E1	3.706E3	3.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80023E1	-7.15256E-4	-8.80002E1	-1.19209E-4	5.96046E-3	9.30548E-2	2.73165E1	-3.26807E1	-3.26272E1	2.68268E1	1.16829E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.00499E-1
1.5E1	1.42E2	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80025E1	-6.91414E-4	-8.80001E1	9.53674E-5	6.34193E-3	9.29832E-2	2.73111E1	-3.26765E1	-3.262E1	2.68124E1	1.16829E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.00325E-1
1.6E1	1.164E3	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80023E1	-5.72205E-4	-8.79998E1	1.19209E-4	5.98431E-3	9.32693E-2	2.72895E1	-3.26851E1	-3.26301E1	2.68204E1	1.1693E-7	2.52867E-3	2.52867E-3	6.31288E-3	1.98592E-1
1.7E1	1.637E3	0.0E0	6.87E2	4.7E2	-7.26282E-2	-8.80021E1	-5.72205E-4	-8.79999E1	7.15256E-5	6.22272E-3	9.31978E-2	2.73496E1	-3.26699E1	-3.26314E1	2.6849E1	1.16769E-7	2.52236E-3	2.52236E-3	6.3074E-3	1.99227E-1
1.8E1	7.048E3	6.0E0	7.27E2	5.0E2	-7.40967E-2	-8.80022E1	-8.10623E-4	-8.80001E1	-9.53674E-5	5.8651E-3	9.33647E-2	2.73039E1	-3.26783E1	-3.2632E1	2.68142E1	1.16829E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.00151E-1
1.9E1	2.57E3	2.0E0	7.68E2	5.29E2	-7.286E-2	-8.80025E1	-5.48363E-4	-8.79998E1	1.66893E-4	5.84126E-3	9.2864E-2	2.72815E1	-3.26856E1	-3.26366E1	2.68028E1	1.16778E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.01722E-1
2.0E1	3.0509E4	2.4E1	8.08E2	5.58E2	-7.17779E-2	-8.80023E1	-5.72205E-4	-8.80002E1	-7.15256E-5	5.6982E-3	9.30548E-2	2.73291E1	-3.26777E1	-3.26657E1	2.68001E1	1.16727E-7	2.52318E-3	2.52318E-3	6.28006E-3	2.02952E-1
2.1E1	6.5E1	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80024E1	-7.62939E-4	-8.79997E1	-2.6226E-4	6.07967E-3	9.33647E-2	2.73004E1	-3.26496E1	-3.26714E1	2.68274E1	1.16823E-7	2.52599E-3	2.52599E-3	6.32356E-3	2.01047E-1
2.2E1	2.269E3	1.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80023E1	-7.86781E-4	-8.79997E1	4.76837E-5	6.05583E-3	9.31263E-2	2.72756E1	-3.2672E1	-3.26413E1	2.68094E1	1.17123E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.01047E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80021E1	-5.96046E-4	-8.8E1	-9.53674E-5	6.12736E-3	9.29594E-2	2.73009E1	-3.26434E1	-3.26434E1	2.67836E1	1.17023E-7	2.51847E-3	2.51847E-3	6.33977E-3	2.00021E-1