[Scan]
initial_time=2015-12-15T18:09:28
final_time=2015-12-15T18:09:47
ip_count=19
run=1017
dataset=2
scan=98
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.79524E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-7.84743E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.51907E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-2.2637E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=1.59075E-8
mult1=-2.46505E-8
mult2=-2.68532E-9
rf_tmon=-5.397E-3
rf_agc=3.22326E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.1512E-3
ql5_imon=6.33514E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65972E0
bslens_imon=2.29196E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20155E1
lens5a_imon=1.9766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.05171E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53935E1
cs_ef1b_imon=2.83025E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04658E2
lens23_imon=1.02149E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05041E1
cs_ea1_imon=2.54043E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03596E0
lens1_imon=1.42127E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.97081E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03513E1
cs_ea2_imon=1.55506E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=2.9445E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=1.23155E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=4.3068E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15117E1
os_ea1_imon=2.36558E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63839E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23794E0
cs_ionrep_imon=1.19262E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93367E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=2.96108E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=3.91199E-8
tplens_vset=1.4E-1
tplens_vmon=1.58539E0
tplens_imon=-2.59954E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26315E1
iondef3_imon=1.48993E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26376E1
iondef2_imon=1.55258E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98211E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=9.82666E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26921E0
ionrepsh_imon=1.77167E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33563E1
lens5b_imon=2.18932E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.13335E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35415E0
os_ea2_imon=-7.80247E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00446E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.17984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08279E0
os_ef2alow_imon=-2.79249E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0343E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.41518E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2309E2
cs_ionfoca_imon=6.31061E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01689E1
cs_anode2_imon=2.25866E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72904E1
iondef1_imon=1.07936E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68262E1
iondef4_imon=1.08521E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71791E1
olens3_imon=4.45161E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.21874E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12594E0
cs_ionaccel_imon=-1.90592E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47125E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56441E1
einzel_imon=7.63018E-6
window_vset=0.0E0
window_vmon=1.92115E-1
window_imon=-1.12386E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82582E2
mask1_imon=2.39044E-4
mask2_vset=0.0E0
mask2_vmon=-1.8599E1
mask2_imon=-7.09401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.72849E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.20301E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50078E3
multb_neg_imon=7.909E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30811E0
defgridb_imon=5.99418E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33324E1
os_fil1_imon=9.40384E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07071E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63247E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30902E1
cs_fil1_imon=9.94966E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62798E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65753E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31923E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.94299E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.52782E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25034E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22091E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=2.01219E-1
chamber_ion_pmon=1.16923E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.9382E-1
res40_imon=-2.51859E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.462E3	1.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80019E1	-5.00679E-4	-8.80002E1	4.76837E-5	5.96046E-3	9.29356E-2	2.73184E1	-3.26474E1	-3.2626E1	2.68279E1	1.17023E-7	2.51954E-3	2.51954E-3	6.29128E-3	2.00021E-1
2.0E0	1.16689E5	1.09E2	3.16E2	1.6E2	-7.22418E-2	-8.80025E1	-6.4373E-4	-8.80002E1	0.0E0	6.10352E-3	9.27925E-2	2.72889E1	-3.26516E1	-3.26129E1	2.68207E1	1.16923E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.00705E-1
3.0E0	2.4E1	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80021E1	-6.67572E-4	-8.80003E1	1.66893E-4	6.07967E-3	9.29594E-2	2.73323E1	-3.26839E1	-3.26341E1	2.68007E1	1.16783E-7	2.52139E-3	2.52139E-3	6.31858E-3	1.99931E-1
4.0E0	2.2178E4	1.4E1	6.55E2	3.98E2	-7.31692E-2	-8.80021E1	-4.76837E-4	-8.8E1	-1.90735E-4	6.24657E-3	9.28164E-2	2.72962E1	-3.26567E1	-3.26107E1	2.6828E1	1.16867E-7	2.52025E-3	2.52025E-3	6.31269E-3	2.00064E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80024E1	-5.24521E-4	-8.79999E1	-4.76837E-5	6.19888E-3	9.29594E-2	2.72957E1	-3.26661E1	-3.26402E1	2.68123E1	1.17032E-7	2.52099E-3	2.52099E-3	6.29098E-3	2.00325E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80023E1	-7.15256E-4	-8.8E1	-1.19209E-4	6.19888E-3	9.31501E-2	2.72665E1	-3.2664E1	-3.26119E1	2.68244E1	1.16867E-7	2.52659E-3	2.52659E-3	6.3074E-3	1.98894E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80023E1	-6.91414E-4	-8.8E1	-1.66893E-4	6.17504E-3	9.32217E-2	2.7278E1	-3.26366E1	-3.26142E1	2.68004E1	1.17093E-7	2.52139E-3	2.52139E-3	6.32418E-3	2.00463E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80021E1	-1.00136E-3	-8.8E1	-7.15256E-5	6.22272E-3	9.30309E-2	2.72763E1	-3.26344E1	-3.26284E1	2.68028E1	1.1693E-7	2.52538E-3	2.52538E-3	6.31837E-3	1.99977E-1
1.2E1	2.95E2	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80023E1	-1.04904E-3	-8.80001E1	-2.38419E-4	5.98431E-3	9.33409E-2	2.72919E1	-3.26681E1	-3.26597E1	2.68166E1	1.16829E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.00847E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80023E1	-1.14441E-3	-8.80002E1	-2.38419E-4	6.48499E-3	9.29832E-2	2.73399E1	-3.26626E1	-3.26083E1	2.6818E1	1.16823E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.01907E-1
1.4E1	3.662E3	4.0E0	5.66E2	3.82E2	-7.34782E-2	-8.8002E1	-7.15256E-4	-8.8E1	2.38419E-5	6.1512E-3	9.2721E-2	2.72985E1	-3.26675E1	-3.26272E1	2.68208E1	1.16873E-7	2.52492E-3	2.52492E-3	6.32896E-3	2.01734E-1
1.5E1	1.39E2	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80023E1	-1.04904E-3	-8.80002E1	-1.90735E-4	6.10352E-3	9.28402E-2	2.72793E1	-3.26795E1	-3.26002E1	2.68225E1	1.1688E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.01372E-1
1.6E1	1.187E3	3.0E0	6.47E2	4.41E2	-7.39421E-2	-8.80021E1	-9.77516E-4	-8.8E1	-3.57628E-4	6.03199E-3	9.30786E-2	2.73284E1	-3.26817E1	-3.26321E1	2.68034E1	1.17093E-7	2.52139E-3	2.52139E-3	6.28511E-3	2.02245E-1
1.7E1	1.621E3	1.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80023E1	-8.10623E-4	-8.80001E1	-1.90735E-4	5.8651E-3	9.30786E-2	2.73237E1	-3.26645E1	-3.26386E1	2.68148E1	1.18002E-7	2.51116E-3	2.51116E-3	6.34588E-3	2.01022E-1
1.8E1	7.112E3	5.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80025E1	-7.15256E-4	-8.80002E1	1.66893E-4	6.17504E-3	9.26733E-2	2.73387E1	-3.2682E1	-3.26071E1	2.67992E1	1.17746E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.99977E-1
1.9E1	2.657E3	3.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80019E1	-8.34465E-4	-8.80003E1	-9.53674E-5	6.07967E-3	9.28164E-2	2.73279E1	-3.26518E1	-3.26506E1	2.67688E1	1.1693E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.00499E-1
2.0E1	3.0317E4	2.1E1	8.08E2	5.58E2	-7.26282E-2	-8.80018E1	-8.58307E-4	-8.8E1	2.38419E-5	6.34193E-3	9.30309E-2	2.73087E1	-3.26843E1	-3.26356E1	2.68532E1	1.16873E-7	2.52384E-3	2.52384E-3	6.3074E-3	1.9934E-1
2.1E1	6.0E1	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.80022E1	-8.34465E-4	-8.80001E1	-1.66893E-4	6.1512E-3	9.29594E-2	2.73222E1	-3.26773E1	-3.2626E1	2.68226E1	1.16778E-7	2.51225E-3	2.51225E-3	6.29098E-3	1.99803E-1
2.2E1	2.275E3	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80023E1	-9.05991E-4	-8.80002E1	2.38419E-4	6.34193E-3	9.28164E-2	2.7334E1	-3.26703E1	-3.26272E1	2.6849E1	1.17032E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.00325E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80024E1	-7.86781E-4	-8.8E1	2.38419E-5	6.1512E-3	9.29832E-2	2.72904E1	-3.26376E1	-3.26315E1	2.68262E1	1.16923E-7	2.51847E-3	2.51847E-3	6.34518E-3	2.01219E-1