[Scan]
initial_time=2015-12-15T18:09:54
final_time=2015-12-15T18:10:14
ip_count=19
run=1017
dataset=2
scan=99
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.50241E-2
qbias_imon=-3.78874E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-7.89177E-10
ql2_vset=
ql2_vmon=-1.09673E-3
ql2_imon=1.48306E-9
ql3_vset=
ql3_vmon=-8.79996E1
ql3_imon=-2.32019E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.59029E-8
mult1=-1.51883E-8
mult2=-2.77008E-9
rf_tmon=-4.02576E-3
rf_agc=3.36273E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.12736E-3
ql5_imon=6.40202E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64631E0
bslens_imon=2.44402E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20109E1
lens5a_imon=1.99785E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12518E2
lens4a_imon=2.04941E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53652E1
cs_ef1b_imon=2.84503E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05042E1
cs_ea1_imon=2.53643E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96385E0
lens1_imon=1.30125E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.95675E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03973E1
cs_ea2_imon=1.54543E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84484E1
cs_ef1a_imon=2.93801E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.23303E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.30752E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1539E1
os_ea1_imon=2.37781E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63617E1
os_ef1bup_imon=3.07604E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29055E0
cs_ionrep_imon=1.19214E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91885E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=2.96072E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=3.92107E-8
tplens_vset=1.4E-1
tplens_vmon=1.58856E0
tplens_imon=-4.61569E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26492E1
iondef3_imon=1.50073E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26782E1
iondef2_imon=1.57139E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.98328E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=9.65381E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29055E0
ionrepsh_imon=1.75596E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33808E1
lens5b_imon=2.16296E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.11425E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.32179E0
os_ea2_imon=-5.87742E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71372E1
cs_ef2a_imon=3.17767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06657E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0283E-1
os_ef2bup_imon=-5.50988E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=3.41554E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23081E2
cs_ionfoca_imon=6.30036E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01929E1
cs_anode2_imon=2.23524E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73028E1
iondef1_imon=1.07607E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68285E1
iondef4_imon=1.08449E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=4.48668E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.21174E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12053E0
cs_ionaccel_imon=-1.83023E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47111E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56231E1
einzel_imon=7.69144E-6
window_vset=0.0E0
window_vmon=7.49859E-2
window_imon=-7.77877E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.3903E-4
mask2_vset=0.0E0
mask2_vmon=-1.86368E1
mask2_imon=-7.27421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92697E3
multa_neg_imon=7.16651E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93762E3
defgrida_imon=5.89757E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=8.21555E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34442E0
defgridb_imon=5.89036E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.42318E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06891E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63503E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30851E1
cs_fil1_imon=9.95278E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62684E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65583E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38325E-2
os_fil2_imon=-2.90023E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88704E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.76645E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33536E-1
cs_fil2_imon=-2.62392E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26836E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22098E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.23563E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.4E3	2.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80024E1	-5.72205E-4	-8.80003E1	2.6226E-4	6.27041E-3	9.26733E-2	2.73109E1	-3.26863E1	-3.26324E1	2.68277E1	1.16829E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.00847E-1
2.0E0	1.18019E5	1.1E2	3.16E2	1.6E2	-7.32464E-2	-8.80024E1	-5.96046E-4	-8.80002E1	2.38419E-5	6.00815E-3	9.31501E-2	2.73131E1	-3.26548E1	-3.26529E1	2.68217E1	1.16769E-7	2.52236E-3	2.52236E-3	6.29684E-3	2.01072E-1
3.0E0	3.1E1	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80025E1	-6.91414E-4	-8.79999E1	-2.38419E-5	6.48499E-3	9.30309E-2	2.73231E1	-3.26724E1	-3.2622E1	2.68059E1	1.17042E-7	2.52362E-3	2.52362E-3	6.34661E-3	2.00285E-1
4.0E0	2.2738E4	1.0E1	6.55E2	3.98E2	-7.27828E-2	-8.80023E1	-7.15256E-4	-8.8E1	-4.76837E-5	6.48499E-3	9.34839E-2	2.73622E1	-3.26873E1	-3.2614E1	2.68304E1	1.16923E-7	2.52061E-3	2.52061E-3	6.29128E-3	2.00876E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80023E1	-5.72205E-4	-8.80002E1	3.8147E-4	6.74725E-3	9.29356E-2	2.72877E1	-3.26657E1	-3.26404E1	2.68154E1	1.16873E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.00534E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.40967E-2	-8.80021E1	-5.24521E-4	-8.80002E1	1.90735E-4	6.74725E-3	9.30071E-2	2.73027E1	-3.26744E1	-3.2593E1	2.68016E1	1.16829E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.9963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.38649E-2	-8.80023E1	-5.24521E-4	-8.80001E1	4.76837E-5	6.24657E-3	9.30786E-2	2.73255E1	-3.26645E1	-3.26224E1	2.68358E1	1.16829E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.97903E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37874E-2	-8.80023E1	-8.82149E-4	-8.79997E1	1.19209E-4	5.96046E-3	9.30309E-2	2.73123E1	-3.26957E1	-3.2635E1	2.67885E1	1.16873E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.97647E-1
1.2E1	2.95E2	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80023E1	-1.16825E-3	-8.80001E1	1.66893E-4	6.41346E-3	9.34124E-2	2.73234E1	-3.26791E1	-3.26172E1	2.68334E1	1.1688E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.98764E-1
1.3E1	2.5E1	0.0E0	5.25E2	3.53E2	-7.38649E-2	-8.80023E1	-5.24521E-4	-8.8E1	0.0E0	6.36578E-3	9.32217E-2	2.73033E1	-3.26536E1	-3.2596E1	2.67908E1	1.16923E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.00192E-1
1.4E1	3.634E3	3.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80025E1	-4.76837E-4	-8.80002E1	-2.38419E-5	6.48499E-3	9.31263E-2	2.73122E1	-3.26461E1	-3.26301E1	2.68166E1	1.16727E-7	2.52977E-3	2.52977E-3	6.31837E-3	2.01897E-1
1.5E1	1.27E2	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.80022E1	-7.86781E-4	-8.8E1	0.0E0	6.55651E-3	9.31978E-2	2.73105E1	-3.26464E1	-3.26392E1	2.67992E1	1.16829E-7	2.52318E-3	2.52318E-3	6.33486E-3	2.01372E-1
1.6E1	1.248E3	0.0E0	6.47E2	4.41E2	-7.38649E-2	-8.8002E1	-8.58307E-4	-8.79998E1	-1.66893E-4	6.00815E-3	9.30071E-2	2.73081E1	-3.26723E1	-3.26212E1	2.68117E1	1.17023E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.00363E-1
1.7E1	1.688E3	1.0E0	6.87E2	4.7E2	-7.41738E-2	-8.80023E1	-8.34465E-4	-8.8E1	1.66893E-4	6.07967E-3	9.29594E-2	2.73157E1	-3.27003E1	-3.26301E1	2.67974E1	1.1693E-7	2.52428E-3	2.52428E-3	6.3074E-3	1.98937E-1
1.8E1	7.054E3	5.0E0	7.27E2	5.0E2	-7.44831E-2	-8.80021E1	-8.34465E-4	-8.80002E1	-4.76837E-5	6.24657E-3	9.31263E-2	2.73003E1	-3.26741E1	-3.26488E1	2.6819E1	1.16724E-7	2.52923E-3	2.52923E-3	6.32356E-3	1.99E-1
1.9E1	2.608E3	1.0E0	7.68E2	5.29E2	-7.40192E-2	-8.80023E1	-6.4373E-4	-8.79999E1	-3.09944E-4	6.12736E-3	9.3317E-2	2.73129E1	-3.26843E1	-3.26182E1	2.68707E1	1.16727E-7	2.52209E-3	2.52209E-3	6.32936E-3	1.9911E-1
2.0E1	3.0216E4	1.6E1	8.08E2	5.58E2	-7.40967E-2	-8.80021E1	-7.86781E-4	-8.79997E1	-2.14577E-4	6.1512E-3	9.31025E-2	2.73219E1	-3.26482E1	-3.25972E1	2.6813E1	1.16626E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.00325E-1
2.1E1	5.9E1	0.0E0	8.49E2	5.88E2	-7.40967E-2	-8.80022E1	-8.10623E-4	-8.79997E1	-4.52995E-4	6.1512E-3	9.31978E-2	2.73074E1	-3.26357E1	-3.26448E1	2.68256E1	1.16778E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.01022E-1
2.2E1	2.2E3	0.0E0	8.89E2	6.17E2	-7.43285E-2	-8.80021E1	-6.91414E-4	-8.79995E1	-9.53674E-5	6.29425E-3	9.31978E-2	2.73186E1	-3.2664E1	-3.26389E1	2.68178E1	1.16948E-7	2.52223E-3	2.52223E-3	6.29665E-3	1.99085E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.50241E-2	-8.80023E1	-1.09673E-3	-8.79996E1	1.19209E-4	6.12736E-3	9.31263E-2	2.73028E1	-3.26782E1	-3.26492E1	2.68285E1