[Scan]
initial_time=2015-12-15T18:10:59
final_time=2015-12-15T18:11:18
ip_count=19
run=1017
dataset=3
scan=101
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08768E-4
ql1_vset=
ql1_vmon=-8.20398E-1
ql1_imon=1.60527E-8
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=1.87197E-9
ql3_vset=
ql3_vmon=-9.13093E0
ql3_imon=7.25219E-9
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=-6.34217E-10
mult1=-8.83734E-9
mult2=-2.86433E-9
rf_tmon=-4.7107E-3
rf_agc=3.28229E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.27041E-3
ql5_imon=1.49022E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65532E0
bslens_imon=2.63509E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19803E1
lens5a_imon=2.00831E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.04981E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53634E1
cs_ef1b_imon=3.17299E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04802E1
cs_ea1_imon=1.07282E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4717E0
lens1_imon=2.55938E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.98234E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04051E1
cs_ea2_imon=1.407E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=3.02919E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.2293E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1152E1
os_restr1_imon=4.31653E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15414E1
os_ea1_imon=2.37457E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63882E1
os_ef1bup_imon=3.10091E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25751E0
cs_ionrep_imon=9.44124E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93258E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=1.95485E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=3.20988E-8
tplens_vset=1.4E-1
tplens_vmon=1.57594E0
tplens_imon=-4.0389E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.49244E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26921E1
iondef2_imon=1.5804E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.98382E-4
ql6_vset=1.0E-1
ql6_vmon=9.28879E-2
ql6_imon=3.87268E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=8.30928E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33904E1
lens5b_imon=2.16837E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7482E1
cs_ef2b_imon=3.13443E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.30317E0
os_ea2_imon=-5.01223E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71089E1
cs_ef2a_imon=3.18164E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09721E0
os_ef2alow_imon=-2.59428E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.32248E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11111E1
os_restr2_imon=3.44112E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23093E2
cs_ionfoca_imon=6.31406E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01941E1
cs_anode2_imon=2.08675E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7406E1
iondef1_imon=1.09012E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68292E1
iondef4_imon=1.08737E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=3.96569E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.22403E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13134E0
cs_ionaccel_imon=-8.60768E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47179E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.63738E-6
window_vset=0.0E0
window_vmon=2.13138E-1
window_imon=-1.04817E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86146E1
mask2_imon=-6.6255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=5.24507E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93555E3
defgrida_imon=8.41383E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50446E3
multb_neg_imon=4.62142E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.19404E0
defgridb_imon=6.51041E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33236E1
os_fil1_imon=9.40498E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07696E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63092E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31813E1
cs_fil1_imon=7.16685E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.02062E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66483E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6154E-2
os_fil2_imon=-2.37164E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98315E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.86957E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3263E-1
cs_fil2_imon=-2.25752E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2201E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=1.9963E-1
chamber_ion_pmon=1.1693E-7
chamber_cvt_pmon=2.52977E-3
foreline_cvt_pmon=2.52977E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.54487E-1
res40_imon=-2.38885E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.22163E-1	-7.98798E-1	-9.13188E0	-9.14192E0	5.93662E-3	9.3174E-2	2.72561E1	-3.26661E1	-3.26001E1	2.68117E1	1.16727E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00151E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.22377E-1	-7.98941E-1	-9.13196E0	-9.14168E0	6.24657E-3	9.29117E-2	2.73565E1	-3.26401E1	-3.2593E1	2.67751E1	1.16923E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.00876E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09619E0	-8.219E-1	-7.98726E-1	-9.13203E0	-9.14183E0	6.22272E-3	9.33409E-2	2.73458E1	-3.2672E1	-3.25983E1	2.68036E1	1.17032E-7	2.5188E-3	2.5188E-3	6.32661E-3	2.00325E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.21519E-1	-7.98798E-1	-9.13136E0	-9.14149E0	6.19888E-3	9.28879E-2	2.72868E1	-3.26638E1	-3.26419E1	2.67986E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.2128E-1	-7.98798E-1	-9.1316E0	-9.14183E0	6.19888E-3	9.28879E-2	2.73237E1	-3.26585E1	-3.26308E1	2.68046E1	1.17023E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.01562E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-8.21018E-1	-7.98941E-1	-9.13179E0	-9.14214E0	6.41346E-3	9.26733E-2	2.72877E1	-3.26705E1	-3.2608E1	2.68046E1	1.16778E-7	2.52428E-3	2.52428E-3	6.30192E-3	2.00325E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.20875E-1	-7.98798E-1	-9.13167E0	-9.14199E0	6.19888E-3	9.31263E-2	2.73165E1	-3.26723E1	-3.26224E1	2.68244E1	1.16727E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.2078E-1	-7.98941E-1	-9.13177E0	-9.14176E0	6.05583E-3	9.27925E-2	2.73308E1	-3.26572E1	-3.26138E1	2.6831E1	1.17083E-7	2.51662E-3	2.51662E-3	6.34588E-3	1.9963E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.20684E-1	-7.99155E-1	-9.1315E0	-9.14183E0	5.79357E-3	9.26733E-2	2.73321E1	-3.26554E1	-3.26284E1	2.68328E1	1.1699E-7	2.52139E-3	2.52139E-3	6.34099E-3	2.0064E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.2078E-1	-7.99179E-1	-9.13115E0	-9.14159E0	6.24657E-3	9.31263E-2	2.72662E1	-3.26626E1	-3.26467E1	2.68046E1	1.16778E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.00151E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.20518E-1	-7.99131E-1	-9.13177E0	-9.14176E0	6.05583E-3	9.30786E-2	2.72999E1	-3.26677E1	-3.2615E1	2.68041E1	1.16994E-7	2.5199E-3	2.5199E-3	6.32075E-3	2.00043E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.20708E-1	-7.99012E-1	-9.13146E0	-9.14178E0	6.19888E-3	9.28879E-2	2.73314E1	-3.26664E1	-3.26199E1	2.68076E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.20732E-1	-7.98798E-1	-9.13105E0	-9.1414E0	6.05583E-3	9.28879E-2	2.73411E1	-3.26897E1	-3.26134E1	2.68046E1	1.16783E-7	2.52027E-3	2.52027E-3	6.3074E-3	1.99577E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.20661E-1	-7.99084E-1	-9.13117E0	-9.14166E0	6.19888E-3	9.31501E-2	2.73039E1	-3.26753E1	-3.2626E1	2.67817E1	1.16956E-7	2.52099E-3	2.52099E-3	6.32661E-3	1.9989E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.20661E-1	-7.98869E-1	-9.13155E0	-9.14164E0	6.34193E-3	9.30786E-2	2.72971E1	-3.26425E1	-3.26487E1	2.68394E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.20661E-1	-7.98726E-1	-9.13136E0	-9.14185E0	6.31809E-3	9.30309E-2	2.72841E1	-3.26777E1	-3.26284E1	2.68346E1	1.16938E-7	2.51804E-3	2.51804E-3	6.32978E-3	2.00818E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.2078E-1	-7.9906E-1	-9.13105E0	-9.1418E0	6.36578E-3	9.30548E-2	2.72853E1	-3.26633E1	-3.26182E1	2.68118E1	1.16981E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99977E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.20446E-1	-7.98869E-1	-9.13093E0	-9.14168E0	6.27041E-3	9.28402E-2	2.72799E1	-3.26783E1	-3.26308E1	2.67962E1	1.1688E-7	2.52538E-3	2.52538E-3	6.31288E-3	1.9963E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.20756E-1	-7.98941E-1	-9.131E0	-9.14168E0	6.22272E-3	9.27687E-2	2.73207E1	-3.26362E1	-3.26182E1	2.68256E1	1.1693E-7	2.52538E-3	2.52538E-3	6.32936E-3	1.99456E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.20398E-1	-7.98488E-1	-9.13093E0	-9.14183E0	6.27041E-3	9.28879E-2	2.7406E1	-3.26921E1	-3.26236E1	2.68292E1	1.1693E-7	2.52977E-3	2.52977E-3	6.32386E-3	1.9963E-1