[Scan]
initial_time=2015-12-15T18:12:19
final_time=2015-12-15T18:12:38
ip_count=19
run=1017
dataset=3
scan=104
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08731E-4
ql1_vset=
ql1_vmon=-8.19278E-1
ql1_imon=1.40909E-8
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=2.009E-9
ql3_vset=
ql3_vmon=-9.13053E0
ql3_imon=2.13182E-9
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-1.77419E-10
mult1=-9.5357E-9
mult2=-2.65673E-9
rf_tmon=-3.83349E-3
rf_agc=3.39644E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.07967E-3
ql5_imon=1.67772E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67506E0
bslens_imon=2.70607E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19901E1
lens5a_imon=1.97731E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05082E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53754E1
cs_ef1b_imon=3.1629E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.02096E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05307E1
cs_ea1_imon=1.1144E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37787E0
lens1_imon=2.61405E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.9791E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03407E1
cs_ea2_imon=1.40039E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=3.02955E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.24858E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11514E1
os_restr1_imon=4.31797E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15282E1
os_ea1_imon=2.37195E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63449E1
os_ef1bup_imon=3.09118E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24502E0
cs_ionrep_imon=9.42387E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93254E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=1.94187E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=3.25261E-8
tplens_vset=1.4E-1
tplens_vmon=1.58362E0
tplens_imon=-2.77651E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26218E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.59116E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0295E2
lens6_imon=2.98335E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=4.00759E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25623E0
ionrepsh_imon=8.40806E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33899E1
lens5b_imon=2.18437E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.13695E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37834E0
os_ea2_imon=-5.46646E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71348E1
cs_ef2a_imon=3.17912E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09781E0
os_ef2alow_imon=-2.57265E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05232E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10937E1
os_restr2_imon=3.44221E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.3145E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02007E1
cs_anode2_imon=2.08856E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73243E1
iondef1_imon=1.07511E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6798E1
iondef4_imon=1.09206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=4.36991E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=7.2984E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11753E0
cs_ionaccel_imon=-8.24728E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47154E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56363E1
einzel_imon=7.85002E-6
window_vset=0.0E0
window_vmon=1.90313E-1
window_imon=-8.39144E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.39268E-4
mask2_vset=0.0E0
mask2_vmon=-1.86128E1
mask2_imon=-5.03975E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92747E3
multa_neg_imon=6.81178E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93778E3
defgrida_imon=4.97129E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.90546E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.14275E0
defgridb_imon=6.16761E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33252E1
os_fil1_imon=9.42114E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07449E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63628E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31782E1
cs_fil1_imon=8.26606E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.25715E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66088E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.61048E-2
os_fil2_imon=-2.5158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04321E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.79239E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-1.98121E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04612E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22208E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.98727E-1
chamber_ion_pmon=1.16818E-7
chamber_cvt_pmon=2.52448E-3
foreline_cvt_pmon=2.52448E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.28969E-1
res40_imon=-2.46093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09364E0	-8.19755E-1	-7.98655E-1	-9.13057E0	-9.14192E0	6.17504E-3	9.30786E-2	2.73165E1	-3.26603E1	-3.2623E1	2.68328E1					
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09333E0	-8.19612E-1	-7.98988E-1	-9.13084E0	-9.14183E0	5.84126E-3	9.29832E-2	2.729E1	-3.26579E1	-3.2633E1	2.68314E1	1.16727E-7	2.52318E-3	2.52318E-3	6.29645E-3	2.00325E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09371E0	-8.19325E-1	-7.98702E-1	-9.13057E0	-9.14166E0	6.00815E-3	9.31263E-2	2.73173E1	-3.26744E1	-3.26554E1	2.6813E1	1.16867E-7	2.52025E-3	2.52025E-3	6.33388E-3	2.00399E-1
4.0E0	1.1E1	0.0E0	6.55E2	3.98E2	-2.09371E0	-8.19397E-1	-7.9875E-1	-9.13067E0	-9.14195E0	5.79357E-3	9.31501E-2	2.73364E1	-3.26425E1	-3.26189E1	2.68214E1	1.1699E-7	2.52139E-3	2.52139E-3	6.32418E-3	2.00108E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.19492E-1	-7.9906E-1	-9.13084E0	-9.14176E0	5.74589E-3	9.29594E-2	2.72715E1	-3.26494E1	-3.26627E1	2.68376E1	1.16923E-7	2.52492E-3	2.52492E-3	6.33436E-3	2.00534E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.19778E-1	-7.9875E-1	-9.13053E0	-9.1419E0	5.88894E-3	9.31501E-2	2.73228E1	-3.26738E1	-3.25865E1	2.68018E1	1.17083E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00499E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.19731E-1	-7.98821E-1	-9.13072E0	-9.14197E0	5.93662E-3	9.28879E-2	2.72775E1	-3.26416E1	-3.26368E1	2.67848E1	1.16973E-7	2.52276E-3	2.52276E-3	6.33436E-3	2.00363E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-8.19635E-1	-7.98821E-1	-9.13072E0	-9.14195E0	5.96046E-3	9.31025E-2	2.73269E1	-3.26826E1	-3.26325E1	2.67788E1	1.16829E-7	2.52867E-3	2.52867E-3	6.31288E-3	2.00673E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.19612E-1	-7.98941E-1	-9.13064E0	-9.14202E0	6.10352E-3	9.30786E-2	2.736E1	-3.2698E1	-3.26231E1	2.68256E1	1.16674E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.00363E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.19063E-1	-7.98678E-1	-9.1306E0	-9.14173E0	6.1512E-3	9.29356E-2	2.72847E1	-3.265E1	-3.26398E1	2.67857E1	1.17173E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.9951E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.19421E-1	-7.98678E-1	-9.13033E0	-9.14183E0	5.93662E-3	9.29594E-2	2.73279E1	-3.26897E1	-3.26176E1	2.67943E1	1.16981E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.01197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.19492E-1	-7.98607E-1	-9.13069E0	-9.14197E0	5.72205E-3	9.28879E-2	2.73303E1	-3.26579E1	-3.26404E1	2.67986E1	1.17185E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.01722E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.19325E-1	-7.98631E-1	-9.13043E0	-9.14197E0	5.98431E-3	9.27687E-2	2.73093E1	-3.26603E1	-3.26506E1	2.68136E1	1.16981E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.01547E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.19182E-1	-7.98798E-1	-9.13079E0	-9.14178E0	6.05583E-3	9.27925E-2	2.72774E1	-3.2695E1	-3.26543E1	2.68094E1	1.16923E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.00192E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.19349E-1	-7.98798E-1	-9.13033E0	-9.14147E0	5.96046E-3	9.29594E-2	2.73147E1	-3.26687E1	-3.26074E1	2.68454E1	1.16778E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.01372E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.19635E-1	-7.98702E-1	-9.13095E0	-9.14185E0	6.10352E-3	9.28402E-2	2.73171E1	-3.26591E1	-3.26158E1	2.67872E1	1.16973E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.01734E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.19588E-1	-7.98535E-1	-9.13072E0	-9.14202E0	5.84126E-3	9.29356E-2	2.73075E1	-3.2652E1	-3.26673E1	2.68227E1	1.17301E-7	2.52362E-3	2.52362E-3	6.32978E-3	1.99754E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.19325E-1	-7.98559E-1	-9.13053E0	-9.14176E0	6.1512E-3	9.28879E-2	2.73093E1	-3.26585E1	-3.25924E1	2.67968E1	1.17023E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.00021E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.19397E-1	-7.98798E-1	-9.13062E0	-9.14218E0	6.24657E-3	9.31263E-2	2.72886E1	-3.2659E1	-3.26337E1	2.68028E1	1.16981E-7	2.51116E-3	2.51116E-3	6.31288E-3	1.98247E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.19278E-1	-7.98512E-1	-9.13053E0	-9.14192E0	6.07967E-3	9.30309E-2	2.73243E1	-3.26554E1	-3.26218E1	2.6798E1	1.16818E-7	2.52448E-3	2.52448E-3	6.3074E-3	1.98727E-1