[Scan]
initial_time=2015-12-15T18:12:45
final_time=2015-12-15T18:13:05
ip_count=19
run=1017
dataset=3
scan=105
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08745E-4
ql1_vset=
ql1_vmon=-8.19325E-1
ql1_imon=1.39326E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=2.0344E-9
ql3_vset=
ql3_vmon=-9.1306E0
ql3_imon=1.76319E-9
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=-1.47712E-10
mult1=-9.40478E-9
mult2=-2.69974E-9
rf_tmon=-4.9696E-3
rf_agc=3.27487E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.53267E-3
ql5_imon=1.69164E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67329E0
bslens_imon=2.44415E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19836E1
lens5a_imon=1.99571E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12461E2
lens4a_imon=2.0504E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53887E1
cs_ef1b_imon=3.17047E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02209E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04846E1
cs_ea1_imon=1.09529E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36607E0
lens1_imon=2.8972E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64584E1
os_ef1alow_imon=2.98342E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04103E1
cs_ea2_imon=1.39862E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=3.04325E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.24628E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=4.31184E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.154E1
os_ea1_imon=2.37479E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64014E1
os_ef1bup_imon=3.0883E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28159E0
cs_ionrep_imon=9.346E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91848E2
cs_nozzle_imon=1.9347E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02049E1
cs_anode1_imon=1.94187E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=3.23728E-8
tplens_vset=1.4E-1
tplens_vmon=1.58775E0
tplens_imon=-3.23663E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26278E1
iondef3_imon=1.50905E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26732E1
iondef2_imon=1.58302E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0296E2
lens6_imon=2.98473E-4
ql6_vset=1.0E-1
ql6_vmon=9.28879E-2
ql6_imon=4.01599E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2869E0
ionrepsh_imon=8.2594E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33941E1
lens5b_imon=2.17587E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74699E1
cs_ef2b_imon=3.14164E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37716E0
os_ea2_imon=-7.48392E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00499E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.19137E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.19648E-1
os_ef2bup_imon=-5.32248E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10769E1
os_restr2_imon=3.42599E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.30495E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.08639E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72178E1
iondef1_imon=1.0829E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6819E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=4.37015E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=7.26438E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12053E0
cs_ionaccel_imon=-9.36451E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.82119E-6
window_vset=0.0E0
window_vmon=1.5127E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.86374E1
mask2_imon=-7.31025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92682E3
multa_neg_imon=7.53029E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93784E3
defgrida_imon=5.03854E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50095E3
multb_neg_imon=8.61334E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38193E0
defgridb_imon=5.96587E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33233E1
os_fil1_imon=9.41892E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07503E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63624E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31804E1
cs_fil1_imon=7.25095E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.5755E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66097E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.74977E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08526E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.56333E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-2.28154E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.41252E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22189E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.16724E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.72216E-1
res40_imon=-2.48255E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=183
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.19278E-1	-7.98607E-1	-9.13055E0	-9.14209E0	5.72205E-3	9.2864E-2	2.72886E1	-3.26413E1	-3.26502E1	2.68117E1	1.16774E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.98153E-1
2.0E0	2.6E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.19206E-1	-7.98726E-1	-9.13064E0	-9.14211E0	5.84126E-3	9.29117E-2	2.73095E1	-3.26691E1	-3.26273E1	2.67929E1	1.16778E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.98764E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.19874E-1	-7.98821E-1	-9.13103E0	-9.14233E0	5.8651E-3	9.29832E-2	2.73287E1	-3.26472E1	-3.26325E1	2.68235E1	1.16893E-7	2.52293E-3	2.52293E-3	6.28468E-3	2.0115E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.19373E-1	-7.98726E-1	-9.13067E0	-9.14237E0	6.07967E-3	9.31025E-2	2.73111E1	-3.26428E1	-3.26494E1	2.68064E1	1.17273E-7	2.52276E-3	2.52276E-3	6.35059E-3	2.00876E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.19182E-1	-7.98821E-1	-9.1306E0	-9.14197E0	6.17504E-3	9.31501E-2	2.73322E1	-3.26614E1	-3.26195E1	2.68065E1	1.16778E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.00499E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.1923E-1	-7.98774E-1	-9.13072E0	-9.14176E0	5.65052E-3	9.29832E-2	2.7275E1	-3.26703E1	-3.26189E1	2.67998E1	1.17123E-7	2.52815E-3	2.52815E-3	6.32356E-3	2.00705E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.19397E-1	-7.98941E-1	-9.13062E0	-9.14178E0	5.74589E-3	9.31978E-2	2.73351E1	-3.26689E1	-3.2664E1	2.68112E1	1.17023E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.00705E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.19325E-1	-7.98655E-1	-9.13062E0	-9.14171E0	5.84126E-3	9.32932E-2	2.73009E1	-3.26218E1	-3.26158E1	2.68063E1	1.16835E-7	2.52362E-3	2.52362E-3	6.35223E-3	2.0064E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.19159E-1	-7.99084E-1	-9.13091E0	-9.14218E0	5.76973E-3	9.32217E-2	2.73051E1	-3.26873E1	-3.26182E1	2.68082E1	1.17134E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.00325E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.19373E-1	-7.98535E-1	-9.13105E0	-9.14204E0	5.8651E-3	9.31978E-2	2.72781E1	-3.26621E1	-3.26609E1	2.68466E1	1.17134E-7	2.5199E-3	2.5199E-3	6.28006E-3	2.00325E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.19159E-1	-7.98392E-1	-9.13064E0	-9.14218E0	6.10352E-3	9.32693E-2	2.72895E1	-3.26518E1	-3.2611E1	2.68214E1	1.16778E-7	2.52428E-3	2.52428E-3	6.29098E-3	2.00325E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.19182E-1	-7.98392E-1	-9.13038E0	-9.14195E0	6.07967E-3	9.29832E-2	2.72775E1	-3.26855E1	-3.26452E1	2.68106E1	1.1693E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.00499E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.19159E-1	-7.98464E-1	-9.13062E0	-9.14178E0	5.93662E-3	9.30071E-2	2.73381E1	-3.26753E1	-3.26446E1	2.68226E1	1.16973E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.01219E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.19421E-1	-7.98512E-1	-9.13069E0	-9.14173E0	6.10352E-3	9.3317E-2	2.72935E1	-3.2666E1	-3.2626E1	2.68146E1	1.17185E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.00673E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.19254E-1	-7.98607E-1	-9.13088E0	-9.14187E0	5.96046E-3	9.32217E-2	2.73637E1	-3.26716E1	-3.26123E1	2.68138E1	1.16671E-7	2.51814E-3	2.51814E-3	6.30212E-3	2.01072E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.19063E-1	-7.98512E-1	-9.13088E0	-9.14154E0	6.17504E-3	9.32932E-2	2.72951E1	-3.26472E1	-3.26148E1	2.6819E1	1.16999E-7	2.51952E-3	2.51952E-3	6.3074E-3	2.00064E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.19063E-1	-7.98798E-1	-9.13076E0	-9.14202E0	6.07967E-3	9.3174E-2	2.73694E1	-3.26621E1	-3.26524E1	2.68052E1	1.1693E-7	2.52757E-3	2.52757E-3	6.31288E-3	2.01197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.19612E-1	-7.98488E-1	-9.13079E0	-9.14183E0	6.10352E-3	9.30786E-2	2.72762E1	-3.26779E1	-3.26419E1	2.68204E1	1.16873E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.00876E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.19325E-1	-7.98512E-1	-9.13045E0	-9.1419E0	6.12736E-3	9.33886E-2	2.72672E1	-3.26573E1	-3.26446E1	2.678E1	1.16829E-7	2.51443E-3	2.51443E-3	6.29098E-3	2.01722E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.19325E-1	-7.98535E-1	-9.1306E0	-9.1418E0	6.53267E-3	9.28879E-2	2.72178E1	-3.26732E1	-3.26278E1	2.6819E1	1.16724E-7	2.52384E-3	2.52384E-3	6.31817E-3	1.9951E-1