[Scan]
initial_time=2015-12-15T18:13:12
final_time=2015-12-15T18:13:31
ip_count=19
run=1017
dataset=3
scan=106
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08801E-4
ql1_vset=
ql1_vmon=-8.19039E-1
ql1_imon=1.38614E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=2.01967E-9
ql3_vset=
ql3_vmon=-9.13062E0
ql3_imon=1.45431E-9
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-1.30689E-10
mult1=-9.18652E-9
mult2=-2.74855E-9
rf_tmon=-5.49778E-3
rf_agc=3.34297E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.17504E-3
ql5_imon=1.73464E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66031E0
bslens_imon=2.92197E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19919E1
lens5a_imon=1.99324E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12525E2
lens4a_imon=2.05072E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53569E1
cs_ef1b_imon=3.16914E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04651E2
lens23_imon=1.02146E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04941E1
cs_ea1_imon=1.09741E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37964E0
lens1_imon=2.69899E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64886E1
os_ef1alow_imon=2.98356E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04044E1
cs_ea2_imon=1.38234E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84226E1
cs_ef1a_imon=3.03743E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.24849E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11506E1
os_restr1_imon=4.31945E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.156E1
os_ea1_imon=2.35072E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63404E1
os_ef1bup_imon=3.08921E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25328E0
cs_ionrep_imon=9.49466E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02157E1
cs_anode1_imon=1.94724E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.25362E-8
tplens_vset=1.4E-1
tplens_vmon=1.6025E0
tplens_imon=-1.07759E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26699E1
iondef3_imon=1.4917E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26464E1
iondef2_imon=1.57417E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98229E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.05129E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26626E0
ionrepsh_imon=8.493E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33587E1
lens5b_imon=2.19852E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7442E1
cs_ef2b_imon=3.12744E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43143E0
os_ea2_imon=-6.35131E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0614E2
lens4b_imon=2.00467E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71582E1
cs_ef2a_imon=3.17957E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06267E0
os_ef2alow_imon=-2.4599E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.11711E-1
os_ef2bup_imon=-5.37216E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10834E1
os_restr2_imon=3.43813E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.30848E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01769E1
cs_anode2_imon=2.09529E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72805E1
iondef1_imon=1.08255E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.09685E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=4.35351E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.29875E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15389E0
cs_ionaccel_imon=-1.00724E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02041E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56527E1
einzel_imon=7.71912E-6
window_vset=0.0E0
window_vmon=2.45488E-1
window_imon=-1.05937E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39028E-4
mask2_vset=0.0E0
mask2_vmon=-1.86159E1
mask2_imon=-5.58936E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92423E3
multa_neg_imon=9.95832E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93842E3
defgrida_imon=6.23132E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.49878E3
multb_neg_imon=9.72826E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.88688E0
defgridb_imon=5.68979E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33261E1
os_fil1_imon=9.41366E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0774E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63711E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31793E1
cs_fil1_imon=8.01143E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.40732E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66282E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.64847E-2
os_fil2_imon=-2.59968E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97607E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.61142E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.309E-1
cs_fil2_imon=-2.37379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.13394E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2218E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32799E-3
inlet_lpb_pmon=1.99153E-1
chamber_ion_pmon=1.17019E-7
chamber_cvt_pmon=2.5158E-3
foreline_cvt_pmon=2.5158E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.9089E-1
res40_imon=-2.43557E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.18706E-1	-7.98821E-1	-9.1306E0	-9.14199E0	6.12736E-3	9.29356E-2	2.73201E1	-3.26717E1	-3.26122E1	2.68677E1	1.16916E-7	2.51709E-3	2.51709E-3	6.31798E-3	1.99227E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.18682E-1	-7.98655E-1	-9.13062E0	-9.14178E0	6.07967E-3	9.31978E-2	2.73369E1	-3.26376E1	-3.26395E1	2.68192E1	1.1668E-7	2.52027E-3	2.52027E-3	6.31858E-3	1.99224E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.1861E-1	-7.98726E-1	-9.13062E0	-9.14195E0	6.29425E-3	9.32217E-2	2.73122E1	-3.26661E1	-3.26349E1	2.68111E1	1.16783E-7	2.52473E-3	2.52473E-3	6.32418E-3	1.99577E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.19063E-1	-7.98941E-1	-9.13055E0	-9.14228E0	6.55651E-3	9.30309E-2	2.72732E1	-3.26691E1	-3.2626E1	2.68099E1	1.16873E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.00363E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.19063E-1	-7.98965E-1	-9.13041E0	-9.14223E0	6.50883E-3	9.3174E-2	2.73623E1	-3.26874E1	-3.2616E1	2.6837E1	1.16769E-7	2.51814E-3	2.51814E-3	6.32858E-3	2.01409E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.19063E-1	-7.98845E-1	-9.13069E0	-9.14211E0	6.19888E-3	9.27687E-2	2.73457E1	-3.26567E1	-3.25889E1	2.67955E1	1.1693E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.01897E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.19063E-1	-7.98678E-1	-9.13062E0	-9.14195E0	6.27041E-3	9.29117E-2	2.72867E1	-3.2637E1	-3.26548E1	2.68142E1	1.16867E-7	2.52131E-3	2.52131E-3	6.33388E-3	2.00399E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.18706E-1	-7.98821E-1	-9.13031E0	-9.14214E0	6.19888E-3	9.29832E-2	2.72727E1	-3.26416E1	-3.26567E1	2.68298E1	1.17093E-7	2.51693E-3	2.51693E-3	6.31858E-3	1.99754E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.19063E-1	-7.98965E-1	-9.13064E0	-9.14192E0	5.76973E-3	9.26733E-2	2.72775E1	-3.26669E1	-3.26789E1	2.68268E1	1.1688E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.9963E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.19111E-1	-7.98821E-1	-9.13053E0	-9.1419E0	5.98431E-3	9.2864E-2	2.72845E1	-3.26685E1	-3.2636E1	2.68274E1	1.16873E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.00192E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.18896E-1	-7.98726E-1	-9.13079E0	-9.14195E0	5.98431E-3	9.24587E-2	2.72515E1	-3.26545E1	-3.26068E1	2.68082E1	1.16677E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.99456E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.18729E-1	-7.98655E-1	-9.13072E0	-9.14199E0	6.24657E-3	9.2721E-2	2.73219E1	-3.26428E1	-3.26314E1	2.67944E1	1.16774E-7	2.52707E-3	2.52707E-3	6.32986E-3	1.99567E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.18658E-1	-7.98917E-1	-9.13069E0	-9.14207E0	5.84126E-3	9.24587E-2	2.73383E1	-3.26955E1	-3.25766E1	2.68113E1	1.16829E-7	2.52538E-3	2.52538E-3	6.32386E-3	1.98592E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.18968E-1	-7.98726E-1	-9.1306E0	-9.14202E0	5.96046E-3	9.31501E-2	2.73393E1	-3.26986E1	-3.26195E1	2.68208E1	1.16807E-7	2.52213E-3	2.52213E-3	6.33492E-3	2.00088E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.19087E-1	-7.98845E-1	-9.13069E0	-9.14197E0	6.07967E-3	9.28402E-2	2.73159E1	-3.2644E1	-3.26645E1	2.68232E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0965E0	-8.18729E-1	-7.98559E-1	-9.13074E0	-9.14202E0	6.1512E-3	9.27925E-2	2.72498E1	-3.26464E1	-3.26494E1	2.67914E1	1.17236E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.01197E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.18777E-1	-7.98297E-1	-9.13084E0	-9.14185E0	5.93662E-3	9.28879E-2	2.72847E1	-3.26753E1	-3.26068E1	2.6813E1	1.16829E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.00673E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.18729E-1	-7.98583E-1	-9.1305E0	-9.14221E0	5.79357E-3	9.27925E-2	2.72803E1	-3.2662E1	-3.26408E1	2.681E1	1.16923E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.00021E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.18825E-1	-7.98607E-1	-9.13064E0	-9.14195E0	5.76973E-3	9.29356E-2	2.73453E1	-3.26941E1	-3.25958E1	2.68352E1	1.1693E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.9963E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.19039E-1	-7.98655E-1	-9.13062E0	-9.14199E0	6.17504E-3	9.31263E-2	2.72805E1	-3.26464E1	-3.26699E1	2.68178E1	1.17019E-7	2.5158E-3	2.5158E-3	6.32799E-3	1.99153E-1