[Scan]
initial_time=2015-12-15T18:13:39
final_time=2015-12-15T18:13:58
ip_count=19
run=1017
dataset=3
scan=107
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08809E-4
ql1_vset=
ql1_vmon=-8.1861E-1
ql1_imon=1.38648E-8
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=2.06054E-9
ql3_vset=
ql3_vmon=-9.13084E0
ql3_imon=1.28713E-9
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=-1.21427E-10
mult1=-9.45207E-9
mult2=-2.77421E-9
rf_tmon=-4.9342E-3
rf_agc=3.29021E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.88894E-3
ql5_imon=1.6731E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66974E0
bslens_imon=2.61706E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20067E1
lens5a_imon=2.00074E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.04999E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=3.18416E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.01973E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05084E1
cs_ea1_imon=1.08796E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43024E0
lens1_imon=2.66393E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.96756E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03816E1
cs_ea2_imon=1.40916E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=3.04433E-5
olens2_vset=9.7E-1
olens2_vmon=9.70721E-1
olens2_imon=1.24801E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=4.3086E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15191E1
os_ea1_imon=2.37817E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6381E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2557E0
cs_ionrep_imon=9.45205E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93319E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=1.92638E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20589E0
olens4_imon=3.24489E-8
tplens_vset=1.4E-1
tplens_vmon=1.60659E0
tplens_imon=-4.86804E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25953E1
iondef3_imon=1.4928E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26785E1
iondef2_imon=1.58292E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0296E2
lens6_imon=2.98447E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=4.04449E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24849E0
ionrepsh_imon=8.4643E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33856E1
lens5b_imon=2.17954E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.13731E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35544E0
os_ea2_imon=-3.28186E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.16975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06117E0
os_ef2alow_imon=-2.48976E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.18447E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=3.43175E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.31082E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01635E1
cs_anode2_imon=2.09432E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73016E1
iondef1_imon=1.08328E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68192E1
iondef4_imon=1.09098E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.39401E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=7.30243E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-9.61679E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47378E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.49178E-1
window_imon=-9.65283E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.3916E-4
mask2_vset=0.0E0
mask2_vmon=-1.86524E1
mask2_imon=-5.47223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92693E3
multa_neg_imon=7.21338E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.08863E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.58829E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41359E0
defgridb_imon=6.30853E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3327E1
os_fil1_imon=9.40528E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0766E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63703E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3182E1
cs_fil1_imon=7.72547E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01581E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66312E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6154E-2
os_fil2_imon=-2.5158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01318E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.59373E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30429E-1
cs_fil2_imon=-2.09534E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06414E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22204E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.99577E-1
chamber_ion_pmon=1.16783E-7
chamber_cvt_pmon=2.52027E-3
foreline_cvt_pmon=2.52027E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.18157E-1
res40_imon=-2.38885E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.19111E-1	-7.98917E-1	-9.13088E0	-9.14221E0	6.03199E-3	9.32693E-2	2.72992E1	-3.26608E1	-3.26343E1	2.68036E1	1.16873E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.9985E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.18968E-1	-7.98726E-1	-9.13072E0	-9.1419E0	6.00815E-3	9.29832E-2	2.73357E1	-3.2647E1	-3.26543E1	2.6816E1	1.17073E-7	2.52276E-3	2.52276E-3	6.3074E-3	1.9917E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.18849E-1	-7.98416E-1	-9.13072E0	-9.14173E0	6.36578E-3	9.31025E-2	2.72544E1	-3.26354E1	-3.26372E1	2.68082E1	1.16731E-7	2.52027E-3	2.52027E-3	6.28511E-3	2.01174E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.19039E-1	-7.98464E-1	-9.13086E0	-9.14192E0	5.76973E-3	9.30786E-2	2.72979E1	-3.26597E1	-3.26182E1	2.68154E1	1.16671E-7	2.52025E-3	2.52025E-3	6.32858E-3	1.99729E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.18825E-1	-7.9844E-1	-9.13076E0	-9.14187E0	5.81741E-3	9.30309E-2	2.73149E1	-3.26915E1	-3.26352E1	2.6795E1	1.1693E-7	2.52318E-3	2.52318E-3	6.33486E-3	2.00325E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.1892E-1	-7.98512E-1	-9.13076E0	-9.14156E0	6.12736E-3	9.29356E-2	2.73098E1	-3.26697E1	-3.26413E1	2.68034E1	1.16886E-7	2.52362E-3	2.52362E-3	6.33538E-3	1.99931E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.18777E-1	-7.98678E-1	-9.13069E0	-9.14187E0	6.17504E-3	9.30548E-2	2.73499E1	-3.2695E1	-3.25965E1	2.6804E1	1.17123E-7	2.52276E-3	2.52276E-3	6.31817E-3	1.9951E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.19063E-1	-7.98297E-1	-9.13055E0	-9.14214E0	5.76973E-3	9.26018E-2	2.73393E1	-3.262E1	-3.26038E1	2.68412E1	1.16829E-7	2.5188E-3	2.5188E-3	6.34588E-3	1.99803E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.18753E-1	-7.98535E-1	-9.13062E0	-9.14178E0	6.00815E-3	9.2721E-2	2.726E1	-3.26633E1	-3.26476E1	2.6795E1	1.16973E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.00534E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.18586E-1	-7.98726E-1	-9.13045E0	-9.14187E0	5.84126E-3	9.26733E-2	2.73628E1	-3.26536E1	-3.26524E1	2.68112E1	1.16835E-7	2.5225E-3	2.5225E-3	6.30182E-3	1.99577E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.18682E-1	-7.98512E-1	-9.13069E0	-9.1418E0	5.74589E-3	9.27687E-2	2.73075E1	-3.26649E1	-3.26384E1	2.68268E1	1.16973E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.00192E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.18968E-1	-7.9875E-1	-9.13084E0	-9.14185E0	5.93662E-3	9.28879E-2	2.73658E1	-3.26639E1	-3.2626E1	2.68106E1	1.17083E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.99803E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.18992E-1	-7.98988E-1	-9.13057E0	-9.14171E0	5.6982E-3	9.2864E-2	2.72915E1	-3.26319E1	-3.26614E1	2.68314E1	1.1693E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00499E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09627E0	-8.18825E-1	-7.98631E-1	-9.13091E0	-9.1419E0	6.1512E-3	9.29356E-2	2.72552E1	-3.26446E1	-3.26218E1	2.6798E1	1.16973E-7	2.52492E-3	2.52492E-3	6.33436E-3	2.00876E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.18634E-1	-7.98583E-1	-9.13057E0	-9.14168E0	6.03199E-3	9.29356E-2	2.73375E1	-3.26437E1	-3.26089E1	2.68148E1	1.16778E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.00325E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.18753E-1	-7.98583E-1	-9.13076E0	-9.14178E0	5.96046E-3	9.30548E-2	2.73442E1	-3.27023E1	-3.25864E1	2.68178E1	1.16774E-7	2.51954E-3	2.51954E-3	6.33977E-3	2.00021E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.18634E-1	-7.98082E-1	-9.13053E0	-9.14207E0	5.8651E-3	9.31501E-2	2.73928E1	-3.26897E1	-3.26657E1	2.68154E1	1.16677E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.00151E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.18563E-1	-7.98178E-1	-9.13064E0	-9.14183E0	5.91278E-3	9.30786E-2	2.73346E1	-3.26851E1	-3.26382E1	2.67972E1	1.17073E-7	2.52384E-3	2.52384E-3	6.32896E-3	2.01734E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.18539E-1	-7.98297E-1	-9.13086E0	-9.14183E0	5.98431E-3	9.26733E-2	2.73113E1	-3.2689E1	-3.26123E1	2.68176E1	1.16873E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.01562E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.1861E-1	-7.98225E-1	-9.13084E0	-9.14173E0	5.88894E-3	9.30071E-2	2.73016E1	-3.26785E1	-3.25953E1	2.68192E1	1.16783E-7	2.52027E-3	2.52027E-3	6.3074E-3	1.99577E-1