[Scan]
initial_time=2015-12-15T18:14:58
final_time=2015-12-15T18:15:18
ip_count=19
run=1017
dataset=3
scan=110
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08807E-4
ql1_vset=
ql1_vmon=-8.18563E-1
ql1_imon=1.37361E-8
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=1.9912E-9
ql3_vset=
ql3_vmon=-9.13041E0
ql3_imon=9.73642E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-5.83291E-11
mult1=-8.86143E-9
mult2=-2.73059E-9
rf_tmon=-4.81284E-3
rf_agc=3.33216E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.98431E-3
ql5_imon=1.70834E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6415E0
bslens_imon=2.5702E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19893E1
lens5a_imon=2.0011E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.05006E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53719E1
cs_ef1b_imon=3.17563E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02226E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0491E1
cs_ea1_imon=1.07102E-5
lens1_vset=-5.0E0
lens1_vmon=-5.47891E0
lens1_imon=2.55578E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64611E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04027E1
cs_ea2_imon=1.40556E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84415E1
cs_ef1a_imon=3.03586E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.25284E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11401E1
os_restr1_imon=4.30616E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1536E1
os_ea1_imon=2.36844E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63815E1
os_ef1bup_imon=3.09E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26712E0
cs_ionrep_imon=9.44124E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9185E2
cs_nozzle_imon=1.93344E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02033E1
cs_anode1_imon=1.95275E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.25248E-8
tplens_vset=1.4E-1
tplens_vmon=1.60478E0
tplens_imon=-3.10161E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26218E1
iondef3_imon=1.4636E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26494E1
iondef2_imon=1.57896E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98497E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=4.02998E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29476E0
ionrepsh_imon=8.45348E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33676E1
lens5b_imon=2.18819E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74666E1
cs_ef2b_imon=3.13529E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35123E0
os_ea2_imon=-7.35545E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00749E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71169E1
cs_ef2a_imon=3.18695E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06606E0
os_ef2alow_imon=-2.65148E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14133E-1
os_ef2bup_imon=-5.14608E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10899E1
os_restr2_imon=3.43606E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23085E2
cs_ionfoca_imon=6.3238E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.10348E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73291E1
iondef1_imon=1.09806E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6792E1
iondef4_imon=1.08194E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=4.42195E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.33475E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13132E0
cs_ionaccel_imon=-8.39799E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02046E2
cs_ionfocb_imon=1.47198E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56547E1
einzel_imon=7.75861E-6
window_vset=0.0E0
window_vmon=1.48223E-1
window_imon=-1.23257E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82587E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86267E1
mask2_imon=-5.24878E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92797E3
multa_neg_imon=4.88458E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93553E3
defgrida_imon=8.90049E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50405E3
multb_neg_imon=4.43035E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.04968E0
defgridb_imon=6.69426E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33245E1
os_fil1_imon=9.41081E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08603E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63895E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31808E1
cs_fil1_imon=7.9772E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.02241E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66543E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48643E-2
os_fil2_imon=-2.52017E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06801E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.61177E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32258E-1
cs_fil2_imon=-2.40812E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.48416E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2237E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.00499E-1
chamber_ion_pmon=1.16981E-7
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.82543E-1
res40_imon=-2.44271E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=218
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.18539E-1	-7.98631E-1	-9.13072E0	-9.14161E0	5.98431E-3	9.31263E-2	2.72793E1	-3.26549E1	-3.26386E1	2.68244E1	1.16624E-7	2.51847E-3	2.51847E-3	6.29665E-3	1.9917E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09379E0	-8.18372E-1	-7.98702E-1	-9.13079E0	-9.14195E0	6.1512E-3	9.32455E-2	2.73131E1	-3.26493E1	-3.26303E1	2.68232E1	1.1693E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.01547E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09348E0	-8.18396E-1	-7.98368E-1	-9.13086E0	-9.14161E0	5.88894E-3	9.31025E-2	2.72657E1	-3.26388E1	-3.26509E1	2.68169E1	1.16905E-7	2.52428E-3	2.52428E-3	6.31563E-3	2.00412E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.18467E-1	-7.98416E-1	-9.13079E0	-9.14142E0	5.81741E-3	9.31978E-2	2.7247E1	-3.26448E1	-3.26476E1	2.67937E1	1.16902E-7	2.51956E-3	2.51956E-3	6.31761E-3	1.99983E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.18443E-1	-7.98726E-1	-9.13048E0	-9.14207E0	6.17504E-3	9.29832E-2	2.73401E1	-3.26387E1	-3.26088E1	2.68205E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-8.1811E-1	-7.98678E-1	-9.13053E0	-9.14207E0	5.93662E-3	9.28402E-2	2.72558E1	-3.26627E1	-3.2617E1	2.68184E1	1.17008E-7	2.5199E-3	2.5199E-3	6.3016E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.18086E-1	-7.98225E-1	-9.13036E0	-9.14218E0	5.79357E-3	9.27448E-2	2.72508E1	-3.26667E1	-3.26296E1	2.68099E1	1.1688E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.9963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-8.18491E-1	-7.98273E-1	-9.13079E0	-9.14192E0	5.93662E-3	9.28402E-2	2.72684E1	-3.26958E1	-3.26315E1	2.68219E1	1.16973E-7	2.52492E-3	2.52492E-3	6.28592E-3	1.9917E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.18515E-1	-7.98297E-1	-9.13069E0	-9.14178E0	6.00815E-3	9.27925E-2	2.72829E1	-3.26476E1	-3.26296E1	2.6822E1	1.16835E-7	2.5225E-3	2.5225E-3	6.31858E-3	1.99224E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.18682E-1	-7.98321E-1	-9.1305E0	-9.14207E0	5.76973E-3	9.2864E-2	2.73147E1	-3.26705E1	-3.2629E1	2.67842E1	1.1688E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.98764E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.18443E-1	-7.98512E-1	-9.13072E0	-9.14211E0	6.00815E-3	9.30071E-2	2.73231E1	-3.26753E1	-3.2608E1	2.68016E1	1.16778E-7	2.52538E-3	2.52538E-3	6.3074E-3	1.97731E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.18467E-1	-7.98583E-1	-9.1306E0	-9.14197E0	6.00815E-3	9.30309E-2	2.73596E1	-3.26399E1	-3.26341E1	2.67659E1	1.17032E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.98764E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.18539E-1	-7.9844E-1	-9.13069E0	-9.14178E0	5.96046E-3	9.31025E-2	2.73039E1	-3.26585E1	-3.26438E1	2.68358E1	1.16916E-7	2.52236E-3	2.52236E-3	6.31269E-3	1.98229E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.18372E-1	-7.98655E-1	-9.1305E0	-9.14166E0	6.05583E-3	9.31501E-2	2.72927E1	-3.26419E1	-3.26248E1	2.67848E1	1.16938E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.00818E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.18419E-1	-7.98631E-1	-9.13098E0	-9.14197E0	5.98431E-3	9.31501E-2	2.72733E1	-3.26675E1	-3.26549E1	2.6819E1	1.16774E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.00705E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.18372E-1	-7.98821E-1	-9.13098E0	-9.14211E0	6.19888E-3	9.30548E-2	2.73261E1	-3.26591E1	-3.26236E1	2.67926E1	1.16981E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.01022E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.183E-1	-7.98845E-1	-9.13093E0	-9.14195E0	6.07967E-3	9.33409E-2	2.72591E1	-3.26644E1	-3.26095E1	2.68279E1	1.16727E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.01022E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.18586E-1	-7.98798E-1	-9.13074E0	-9.14168E0	6.50883E-3	9.31978E-2	2.73676E1	-3.26242E1	-3.26068E1	2.6804E1	1.17032E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.01547E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.18443E-1	-7.98512E-1	-9.13069E0	-9.14211E0	6.46114E-3	9.30786E-2	2.73564E1	-3.26531E1	-3.26443E1	2.68028E1	1.17073E-7	2.52707E-3	2.52707E-3	6.31817E-3	2.01734E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.18563E-1	-7.98678E-1	-9.13041E0	-9.14187E0	5.98431E-3	9.29356E-2	2.73291E1	-3.26494E1	-3.26218E1	2.6792E1	1.16981E-7	2.52428E-3	2.52428E-3	6.32386E-3	2.00499E-1