[Scan]
initial_time=2015-12-15T18:15:25
final_time=2015-12-15T18:15:44
ip_count=19
run=1017
dataset=3
scan=111
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08789E-4
ql1_vset=
ql1_vmon=-8.18348E-1
ql1_imon=1.37183E-8
ql2_vset=
ql2_vmon=-7.98702E-1
ql2_imon=2.04923E-9
ql3_vset=
ql3_vmon=-9.1305E0
ql3_imon=8.74293E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=-4.80056E-11
mult1=-9.77651E-9
mult2=-2.74456E-9
rf_tmon=-4.58452E-3
rf_agc=3.33095E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.22272E-3
ql5_imon=1.7347E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66914E0
bslens_imon=2.51252E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19989E1
lens5a_imon=1.97442E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05006E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53675E1
cs_ef1b_imon=3.16915E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02056E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=1.07643E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43625E0
lens1_imon=2.81533E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64764E1
os_ef1alow_imon=2.98078E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03654E1
cs_ea2_imon=1.41745E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84275E1
cs_ef1a_imon=3.03586E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=1.25207E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11142E1
os_restr1_imon=4.32692E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15696E1
os_ea1_imon=2.3688E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.08065E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22446E0
cs_ionrep_imon=9.17447E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9185E2
cs_nozzle_imon=1.93337E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0195E1
cs_anode1_imon=1.94895E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=3.25474E-8
tplens_vset=1.4E-1
tplens_vmon=1.59096E0
tplens_imon=-2.20037E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2653E1
iondef3_imon=1.49965E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26236E1
iondef2_imon=1.58148E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98447E-4
ql6_vset=1.0E-1
ql6_vmon=9.27687E-2
ql6_imon=4.04327E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26772E0
ionrepsh_imon=8.59407E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.1662E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74734E1
cs_ef2b_imon=3.12619E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35184E0
os_ea2_imon=-5.69717E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00558E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71215E1
cs_ef2a_imon=3.1853E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06527E0
os_ef2alow_imon=-2.64874E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13132E-1
os_ef2bup_imon=-5.31459E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11007E1
os_restr2_imon=3.43537E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.2982E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.08886E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72751E1
iondef1_imon=1.08183E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67836E1
iondef4_imon=1.09008E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=4.36635E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=7.30972E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14911E0
cs_ionaccel_imon=-9.63311E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47351E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56356E1
einzel_imon=7.6805E-6
window_vset=0.0E0
window_vmon=2.11347E-1
window_imon=-9.22919E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82592E2
mask1_imon=2.39128E-4
mask2_vset=0.0E0
mask2_vmon=-1.86375E1
mask2_imon=-5.92442E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92774E3
multa_neg_imon=5.57312E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.47076E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50248E3
multb_neg_imon=7.02952E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28126E0
defgridb_imon=6.30493E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33259E1
os_fil1_imon=9.41625E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0769E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6389E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31756E1
cs_fil1_imon=7.83143E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.9269E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6645E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6541E-2
os_fil2_imon=-2.52351E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95017E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.5267E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31169E-1
cs_fil2_imon=-2.35827E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44833E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22188E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.00567E-1
chamber_ion_pmon=1.17063E-7
chamber_cvt_pmon=2.52553E-3
foreline_cvt_pmon=2.52553E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.54747E-1
res40_imon=-2.43577E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.18372E-1	-7.98631E-1	-9.13076E0	-9.14197E0	6.12736E-3	9.28164E-2	2.73117E1	-3.26711E1	-3.2611E1	2.68082E1	1.16829E-7	2.52647E-3	2.52647E-3	6.30192E-3	1.99456E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.18491E-1	-7.98607E-1	-9.13053E0	-9.1418E0	6.29425E-3	9.28164E-2	2.73069E1	-3.26493E1	-3.26272E1	2.68369E1	1.16774E-7	2.51847E-3	2.51847E-3	6.29128E-3	1.98661E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.18467E-1	-7.98512E-1	-9.13088E0	-9.14199E0	6.36578E-3	9.29117E-2	2.73225E1	-3.27083E1	-3.26173E1	2.68204E1	1.16731E-7	2.5147E-3	2.5147E-3	6.34661E-3	2.00285E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.18491E-1	-7.98273E-1	-9.13093E0	-9.1419E0	6.22272E-3	9.29594E-2	2.73033E1	-3.26741E1	-3.26368E1	2.68088E1	1.16867E-7	2.52236E-3	2.52236E-3	6.30212E-3	1.99394E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.18348E-1	-7.98059E-1	-9.13105E0	-9.1419E0	6.41346E-3	9.31025E-2	2.72937E1	-3.26579E1	-3.26086E1	2.681E1	1.17032E-7	2.52428E-3	2.52428E-3	6.30192E-3	2.00151E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.18419E-1	-7.98368E-1	-9.13095E0	-9.14164E0	6.10352E-3	9.32693E-2	2.73118E1	-3.26566E1	-3.2656E1	2.68148E1	1.17093E-7	2.51581E-3	2.51581E-3	6.32418E-3	2.00996E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.18539E-1	-7.98821E-1	-9.1311E0	-9.14192E0	6.07967E-3	9.28879E-2	2.72827E1	-3.26537E1	-3.26502E1	2.68226E1	1.17032E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.99977E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.18348E-1	-7.98464E-1	-9.13107E0	-9.14183E0	6.05583E-3	9.30309E-2	2.73183E1	-3.26687E1	-3.26044E1	2.68094E1	1.1693E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.00325E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09611E0	-8.18253E-1	-7.98559E-1	-9.13072E0	-9.14176E0	6.4373E-3	9.27687E-2	2.73472E1	-3.26951E1	-3.26188E1	2.68136E1	1.16674E-7	2.52384E-3	2.52384E-3	6.28592E-3	1.9917E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.18276E-1	-7.98225E-1	-9.13091E0	-9.14202E0	6.1512E-3	9.29594E-2	2.73417E1	-3.26518E1	-3.26434E1	2.68034E1	1.16626E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.98764E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.18348E-1	-7.98488E-1	-9.13084E0	-9.14176E0	6.07967E-3	9.30548E-2	2.72333E1	-3.26631E1	-3.26602E1	2.6796E1	1.16981E-7	2.5199E-3	2.5199E-3	6.29645E-3	1.99803E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.18396E-1	-7.98273E-1	-9.13076E0	-9.1419E0	6.31809E-3	9.32455E-2	2.72589E1	-3.26616E1	-3.26647E1	2.68325E1	1.16916E-7	2.51603E-3	2.51603E-3	6.31269E-3	1.99729E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.18634E-1	-7.98178E-1	-9.13076E0	-9.14195E0	5.8651E-3	9.2721E-2	2.73165E1	-3.26404E1	-3.26579E1	2.68064E1	1.16912E-7	2.52306E-3	2.52306E-3	6.32138E-3	1.99842E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.18634E-1	-7.98607E-1	-9.13088E0	-9.14199E0	6.12736E-3	9.28402E-2	2.72821E1	-3.26921E1	-3.26101E1	2.68111E1					
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09379E0	-8.18563E-1	-7.98512E-1	-9.13081E0	-9.14199E0	6.24657E-3	9.30071E-2	2.72732E1	-3.26679E1	-3.26543E1	2.6843E1	1.16823E-7	2.52492E-3	2.52492E-3	6.31817E-3	2.00705E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.18372E-1	-7.98655E-1	-9.13076E0	-9.14199E0	6.07967E-3	9.3317E-2	2.728E1	-3.26585E1	-3.26432E1	2.67968E1	1.1693E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99803E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.183E-1	-7.98464E-1	-9.13079E0	-9.14207E0	5.84126E-3	9.30548E-2	2.73488E1	-3.26655E1	-3.2626E1	2.6777E1	1.16778E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99456E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.18348E-1	-7.98583E-1	-9.13079E0	-9.14185E0	5.88894E-3	9.2721E-2	2.72373E1	-3.26773E1	-3.26649E1	2.68024E1	1.16923E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9968E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.18443E-1	-7.9844E-1	-9.13033E0	-9.14185E0	5.88894E-3	9.26733E-2	2.72732E1	-3.26805E1	-3.26463E1	2.68204E1	1.16774E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.9985E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.18348E-1	-7.98702E-1	-9.1305E0	-9.14211E0	6.22272E-3	9.27687E-2	2.72751E1	-3.26236E1	-3.2653E1	2.67836E1	1.17063E-7	2.52553E-3	2.52553E-3	6.3074E-3	2.00567E-1