[Scan]
initial_time=2015-12-15T18:17:11
final_time=2015-12-15T18:17:31
ip_count=19
run=1017
dataset=3
scan=115
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08745E-4
ql1_vset=
ql1_vmon=-8.17513E-1
ql1_imon=1.36249E-8
ql2_vset=
ql2_vmon=-7.98917E-1
ql2_imon=2.05977E-9
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=5.95427E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-6.92964E-11
mult1=-9.71215E-9
mult2=-2.78401E-9
rf_tmon=-1.53637E-3
rf_agc=3.55743E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.31809E-3
ql5_imon=1.67012E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68871E0
bslens_imon=2.59448E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20154E1
lens5a_imon=2.01476E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05019E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53652E1
cs_ef1b_imon=3.1665E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02216E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05208E1
cs_ea1_imon=1.07852E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41664E0
lens1_imon=2.76711E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64855E1
os_ef1alow_imon=2.97982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03819E1
cs_ea2_imon=1.40174E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=3.04289E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.24908E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.3104E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1522E1
os_ea1_imon=2.37361E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63864E1
os_ef1bup_imon=3.09623E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25761E0
cs_ionrep_imon=9.47395E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93479E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02007E1
cs_anode1_imon=1.94115E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=3.25334E-8
tplens_vset=1.4E-1
tplens_vmon=1.5796E0
tplens_imon=-2.2269E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26278E1
iondef3_imon=1.49504E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26897E1
iondef2_imon=1.57694E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02917E2
lens6_imon=2.98313E-4
ql6_vset=1.0E-1
ql6_vmon=9.26733E-2
ql6_imon=4.05459E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24965E0
ionrepsh_imon=8.48593E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33897E1
lens5b_imon=2.18776E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40085E0
os_ea2_imon=-4.68779E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00546E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.19281E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08579E0
os_ef2alow_imon=-2.4321E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13041E-1
os_ef2bup_imon=-5.24319E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10757E1
os_restr2_imon=3.43139E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.30589E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02061E1
cs_anode2_imon=2.09288E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73134E1
iondef1_imon=1.09321E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6814E1
iondef4_imon=1.10648E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=4.36941E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=7.29305E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13314E0
cs_ionaccel_imon=-1.00493E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02053E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.70586E-6
window_vset=0.0E0
window_vmon=1.61481E-1
window_imon=-9.58075E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86254E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.08285E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.35193E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.21508E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3392E0
defgridb_imon=6.23439E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33258E1
os_fil1_imon=9.4239E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07329E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63935E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31773E1
cs_fil1_imon=7.97174E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.86983E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66154E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.56795E-2
os_fil2_imon=-2.67197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08526E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.4598E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.07131E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.5747E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22142E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32328E-3
inlet_lpb_pmon=2.00735E-1
chamber_ion_pmon=1.17308E-7
chamber_cvt_pmon=2.51919E-3
foreline_cvt_pmon=2.51919E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.07345E-1
res40_imon=-2.41768E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09627E0	-8.18276E-1	-7.98774E-1	-9.13117E0	-9.14183E0	5.98431E-3	9.2864E-2	2.72657E1	-3.26553E1	-3.2617E1	2.68347E1	1.17042E-7	2.5225E-3	2.5225E-3	6.32978E-3	1.9852E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09619E0	-8.18062E-1	-7.98917E-1	-9.13117E0	-9.14161E0	6.34193E-3	9.28402E-2	2.73248E1	-3.26521E1	-3.26366E1	2.67913E1	1.17064E-7	2.51861E-3	2.51861E-3	6.30255E-3	2.00256E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.18133E-1	-7.98464E-1	-9.13117E0	-9.1414E0	6.17504E-3	9.27925E-2	2.72967E1	-3.26467E1	-3.26406E1	2.68188E1	1.16882E-7	2.51819E-3	2.51819E-3	6.31384E-3	2.01189E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.18348E-1	-7.98583E-1	-9.13124E0	-9.14164E0	6.10352E-3	9.29117E-2	2.73016E1	-3.26561E1	-3.26561E1	2.68151E1	1.1695E-7	2.5216E-3	2.5216E-3	6.33297E-3	1.99983E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.18276E-1	-7.98559E-1	-9.13124E0	-9.14166E0	6.17504E-3	9.28402E-2	2.72945E1	-3.26638E1	-3.26337E1	2.68232E1	1.16774E-7	2.52276E-3	2.52276E-3	6.31817E-3	1.97984E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.18133E-1	-7.98559E-1	-9.13129E0	-9.14195E0	6.1512E-3	9.29117E-2	2.72974E1	-3.26714E1	-3.26337E1	2.68262E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09627E0	-8.18324E-1	-7.98249E-1	-9.13129E0	-9.14192E0	6.1512E-3	9.26971E-2	2.72985E1	-3.26422E1	-3.2623E1	2.68148E1	1.16902E-7	2.52406E-3	2.52406E-3	6.32644E-3	1.98541E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.17943E-1	-7.98726E-1	-9.13124E0	-9.14166E0	6.10352E-3	9.29356E-2	2.72979E1	-3.26813E1	-3.26014E1	2.68208E1					
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.18372E-1	-7.98941E-1	-9.13112E0	-9.14164E0	6.4373E-3	9.26971E-2	2.73093E1	-3.26765E1	-3.26038E1	2.68204E1	1.16727E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.01197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.178E-1	-7.98655E-1	-9.13126E0	-9.14192E0	6.05583E-3	9.27687E-2	2.73287E1	-3.26696E1	-3.26395E1	2.68224E1	1.16768E-7	2.51926E-3	2.51926E-3	6.31935E-3	2.00518E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.17871E-1	-7.98702E-1	-9.13126E0	-9.14171E0	6.17504E-3	9.29594E-2	2.73169E1	-3.2639E1	-3.26602E1	2.68136E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.18014E-1	-7.98702E-1	-9.13103E0	-9.14192E0	6.1512E-3	9.3317E-2	2.73388E1	-3.26744E1	-3.2648E1	2.6783E1	1.17023E-7	2.52276E-3	2.52276E-3	6.30202E-3	2.00021E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.17823E-1	-7.98416E-1	-9.13126E0	-9.14152E0	6.07967E-3	9.28879E-2	2.73021E1	-3.26633E1	-3.26362E1	2.67878E1	1.16981E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.01022E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.1799E-1	-7.98512E-1	-9.13143E0	-9.14209E0	6.05583E-3	9.31025E-2	2.72564E1	-3.26729E1	-3.2599E1	2.68166E1	1.1668E-7	2.52697E-3	2.52697E-3	6.35223E-3	2.00463E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.18086E-1	-7.98774E-1	-9.131E0	-9.14176E0	5.88894E-3	9.28879E-2	2.73151E1	-3.27021E1	-3.26354E1	2.68046E1	1.16677E-7	2.52428E-3	2.52428E-3	6.3074E-3	2.00499E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.17966E-1	-7.98631E-1	-9.13098E0	-9.14173E0	5.96046E-3	9.28879E-2	2.73826E1	-3.2611E1	-3.26368E1	2.68256E1	1.16774E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.9934E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.18205E-1	-7.98774E-1	-9.131E0	-9.14202E0	6.03199E-3	9.28402E-2	2.72979E1	-3.26573E1	-3.26266E1	2.68196E1	1.17032E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.99283E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.18014E-1	-7.98559E-1	-9.13103E0	-9.14185E0	6.10352E-3	9.29356E-2	2.72992E1	-3.26537E1	-3.26396E1	2.68118E1	1.17134E-7	2.51552E-3	2.51552E-3	6.3514E-3	1.9963E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.17752E-1	-7.98559E-1	-9.13112E0	-9.14176E0	6.36578E-3	9.26495E-2	2.73016E1	-3.26537E1	-3.26272E1	2.67839E1	1.16981E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.00847E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.17513E-1	-7.98917E-1	-9.13112E0	-9.14199E0	6.31809E-3	9.26733E-2	2.73134E1	-3.26897E1	-3.26278E1	2.6814E1	1.17308E-7	2.51919E-3	2.51919E-3	6.32328E-3	2.00735E-1