[Scan]
initial_time=2015-12-15T18:17:38
final_time=2015-12-15T18:17:58
ip_count=19
run=1017
dataset=3
scan=116
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-8.17609E-1
ql1_imon=1.35938E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=2.01513E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=5.68724E-10
ql4_vset=
ql4_vmon=-9.14152E0
ql4_imon=-5.11527E-11
mult1=-9.90959E-9
mult2=-2.75475E-9
rf_tmon=-3.8493E-3
rf_agc=3.31489E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.22272E-3
ql5_imon=1.71043E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67875E0
bslens_imon=2.68916E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19965E1
lens5a_imon=1.9874E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.0483E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53784E1
cs_ef1b_imon=3.17804E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02352E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05072E1
cs_ea1_imon=1.07607E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3996E0
lens1_imon=3.06408E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04273E1
cs_ea2_imon=1.40808E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=3.03496E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.25308E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=4.31869E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15438E1
os_ea1_imon=2.36952E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63647E1
os_ef1bup_imon=3.08001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27553E0
cs_ionrep_imon=9.49531E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91853E2
cs_nozzle_imon=1.93398E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=1.95341E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=3.2582E-8
tplens_vset=1.4E-1
tplens_vmon=1.56092E0
tplens_imon=-2.84926E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26488E1
iondef3_imon=1.50217E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2659E1
iondef2_imon=1.56778E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98559E-4
ql6_vset=1.0E-1
ql6_vmon=9.2411E-2
ql6_imon=4.05941E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=8.37417E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.19721E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3981E0
os_ea2_imon=-7.35545E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00486E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71366E1
cs_ef2a_imon=3.19461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.14586E0
os_ef2alow_imon=-2.54022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.18447E-1
os_ef2bup_imon=-5.34771E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10925E1
os_restr2_imon=3.43464E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.29315E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.08279E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73244E1
iondef1_imon=1.09085E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67943E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=4.4332E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.32651E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14215E0
cs_ionaccel_imon=-9.25639E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.81398E-6
window_vset=0.0E0
window_vmon=2.49778E-1
window_imon=-1.01574E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82551E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.86242E1
mask2_imon=-4.85955E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92605E3
multa_neg_imon=7.33234E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93783E3
defgrida_imon=6.20399E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50066E3
multb_neg_imon=7.81901E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42863E0
defgridb_imon=6.08142E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3326E1
os_fil1_imon=9.42006E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07269E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63826E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31841E1
cs_fil1_imon=7.19689E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.59352E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66572E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.67989E-2
os_fil2_imon=-2.55184E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98315E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.44678E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.54584E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46658E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2232E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.00192E-1
chamber_ion_pmon=1.16973E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.18157E-1
res40_imon=-2.42849E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.17513E-1	-7.98607E-1	-9.13095E0	-9.14199E0	6.19888E-3	9.28879E-2	2.73045E1	-3.26313E1	-3.26537E1	2.68123E1	1.16778E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.00151E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.17633E-1	-7.98702E-1	-9.13143E0	-9.14199E0	6.07967E-3	9.29594E-2	2.72929E1	-3.26627E1	-3.26266E1	2.68176E1	1.17073E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.9951E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.17871E-1	-7.98512E-1	-9.13119E0	-9.1418E0	6.38962E-3	9.27925E-2	2.73163E1	-3.2649E1	-3.26502E1	2.6814E1	1.16783E-7	2.51915E-3	2.51915E-3	6.29067E-3	2.0064E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.17895E-1	-7.98988E-1	-9.13117E0	-9.1418E0	5.96046E-3	9.2864E-2	2.73021E1	-3.26844E1	-3.26195E1	2.68118E1	1.16774E-7	2.52384E-3	2.52384E-3	6.31817E-3	2.00021E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.18038E-1	-7.99012E-1	-9.13081E0	-9.14187E0	6.12736E-3	9.29594E-2	2.72793E1	-3.26711E1	-3.2608E1	2.6825E1	1.17023E-7	2.52707E-3	2.52707E-3	6.30202E-3	1.98491E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-8.18157E-1	-7.98583E-1	-9.13117E0	-9.14199E0	6.10352E-3	9.29832E-2	2.72835E1	-3.26687E1	-3.26404E1	2.68214E1	1.17185E-7	2.52757E-3	2.52757E-3	6.3074E-3	2.00847E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.183E-1	-7.98869E-1	-9.1311E0	-9.14237E0	6.36578E-3	9.30071E-2	2.73021E1	-3.26615E1	-3.26338E1	2.67872E1	1.16981E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.00151E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.18062E-1	-7.9875E-1	-9.13124E0	-9.14178E0	6.19888E-3	9.28402E-2	2.72961E1	-3.265E1	-3.26242E1	2.68106E1	1.17053E-7	2.51701E-3	2.51701E-3	6.31827E-3	2.01121E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.1811E-1	-7.98655E-1	-9.13148E0	-9.1419E0	5.88894E-3	9.28164E-2	2.73021E1	-3.26777E1	-3.26098E1	2.68172E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09642E0	-8.18014E-1	-7.98965E-1	-9.13117E0	-9.14176E0	6.07967E-3	9.26256E-2	2.72823E1	-3.26362E1	-3.26729E1	2.67884E1	1.16835E-7	2.52585E-3	2.52585E-3	6.29624E-3	2.00285E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09634E0	-8.1811E-1	-7.98798E-1	-9.13115E0	-9.14199E0	6.17504E-3	9.26495E-2	2.72803E1	-3.26732E1	-3.26396E1	2.68041E1	1.16981E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.00673E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.17823E-1	-7.98583E-1	-9.13117E0	-9.14171E0	6.22272E-3	9.27687E-2	2.72835E1	-3.26579E1	-3.26446E1	2.68196E1	1.16923E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.00192E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.18133E-1	-7.98583E-1	-9.13126E0	-9.14183E0	6.19888E-3	9.29832E-2	2.72859E1	-3.2638E1	-3.26344E1	2.68232E1	1.16778E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.00325E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.18133E-1	-7.98798E-1	-9.131E0	-9.14187E0	6.07967E-3	9.30071E-2	2.73279E1	-3.26669E1	-3.26296E1	2.68178E1	1.1688E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.01022E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.17966E-1	-7.98726E-1	-9.13107E0	-9.14214E0	5.98431E-3	9.30071E-2	2.73195E1	-3.26434E1	-3.26266E1	2.68232E1	1.17236E-7	2.51662E-3	2.51662E-3	6.28552E-3	2.00151E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.1811E-1	-7.98678E-1	-9.13095E0	-9.14187E0	6.00815E-3	9.24826E-2	2.7301E1	-3.26708E1	-3.26113E1	2.68136E1	1.16823E-7	2.51954E-3	2.51954E-3	6.34518E-3	2.00192E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.17871E-1	-7.98488E-1	-9.13091E0	-9.14197E0	5.84126E-3	9.29832E-2	2.73403E1	-3.2678E1	-3.26109E1	2.68132E1	1.16891E-7	2.52131E-3	2.52131E-3	6.32858E-3	2.00735E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.17919E-1	-7.98464E-1	-9.13095E0	-9.1418E0	6.05583E-3	9.27925E-2	2.73096E1	-3.26591E1	-3.26228E1	2.68057E1					
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.17633E-1	-7.98321E-1	-9.13107E0	-9.14173E0	5.98431E-3	9.29117E-2	2.73183E1	-3.26591E1	-3.26002E1	2.678E1	1.16847E-7	2.51874E-3	2.51874E-3	6.31321E-3	2.00386E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.17609E-1	-7.98464E-1	-9.13124E0	-9.14152E0	6.22272E-3	9.2411E-2	2.73244E1	-3.2659E1	-3.26488E1	2.67943E1	1.16973E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.00192E-1