[Scan]
initial_time=2015-12-15T18:18:05
final_time=2015-12-15T18:18:24
ip_count=19
run=1017
dataset=3
scan=117
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.0878E-4
ql1_vset=
ql1_vmon=-8.1768E-1
ql1_imon=1.36463E-8
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=2.0089E-9
ql3_vset=
ql3_vmon=-9.13093E0
ql3_imon=6.14965E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=-5.48124E-11
mult1=-1.03063E-8
mult2=-2.76452E-9
rf_tmon=-4.59654E-3
rf_agc=3.2901E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=1.7343E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67903E0
bslens_imon=2.60071E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19857E1
lens5a_imon=1.99644E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12534E2
lens4a_imon=2.0486E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5376E1
cs_ef1b_imon=3.17515E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04642E2
lens23_imon=1.0217E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04953E1
cs_ea1_imon=1.07211E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43745E0
lens1_imon=2.778E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.98666E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03835E1
cs_ea2_imon=1.39123E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=3.03496E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.24664E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11364E1
os_restr1_imon=4.3259E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15491E1
os_ea1_imon=2.36874E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.0883E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27238E0
cs_ionrep_imon=9.60526E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91813E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=1.95413E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=3.24534E-8
tplens_vset=1.4E-1
tplens_vmon=1.61362E0
tplens_imon=-2.70635E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26092E1
iondef3_imon=1.48926E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2653E1
iondef2_imon=1.5852E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98429E-4
ql6_vset=1.0E-1
ql6_vmon=9.29117E-2
ql6_imon=4.06443E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28396E0
ionrepsh_imon=8.49983E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33768E1
lens5b_imon=2.20466E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37145E0
os_ea2_imon=-6.14779E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00591E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.18813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0966E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.17846E-1
os_ef2bup_imon=-5.21075E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10985E1
os_restr2_imon=3.44257E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.32327E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.08928E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73039E1
iondef1_imon=1.09784E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68004E1
iondef4_imon=1.08629E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=4.39307E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.29321E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-7.59857E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.82119E-6
window_vset=0.0E0
window_vmon=1.45263E-1
window_imon=-9.61679E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.393E-4
mask2_vset=0.0E0
mask2_vmon=-1.86362E1
mask2_imon=-6.2651E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92599E3
multa_neg_imon=7.59254E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=7.16497E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=6.83125E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50801E0
defgridb_imon=6.04563E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33243E1
os_fil1_imon=9.41946E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07287E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63683E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31824E1
cs_fil1_imon=7.26897E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.82778E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66316E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.65548E-2
os_fil2_imon=-2.38366E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.2114E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.55888E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.35362E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.4846E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2212E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.99E-1
chamber_ion_pmon=1.16873E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.50592E-1
res40_imon=-2.39245E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.17847E-1	-7.98273E-1	-9.13146E0	-9.1419E0	5.93662E-3	9.30071E-2	2.73381E1	-3.26969E1	-3.26086E1	2.67746E1	1.16873E-7	2.52599E-3	2.52599E-3	6.29128E-3	2.00705E-1
2.0E0	2.3E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.17895E-1	-7.9844E-1	-9.1311E0	-9.14183E0	6.1512E-3	9.28879E-2	2.72714E1	-3.26578E1	-3.26389E1	2.68256E1	1.1693E-7	2.52538E-3	2.52538E-3	6.33486E-3	2.00673E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.17966E-1	-7.98869E-1	-9.13115E0	-9.14159E0	5.81741E-3	9.31025E-2	2.73161E1	-3.26654E1	-3.26185E1	2.68178E1	1.16829E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.01722E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.17728E-1	-7.99084E-1	-9.13107E0	-9.14176E0	5.79357E-3	9.28879E-2	2.73183E1	-3.26458E1	-3.26302E1	2.67926E1	1.16774E-7	2.51847E-3	2.51847E-3	6.36144E-3	2.01047E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.18133E-1	-7.98678E-1	-9.13124E0	-9.14171E0	5.8651E-3	9.32455E-2	2.73333E1	-3.2653E1	-3.26116E1	2.68148E1	1.16677E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.98937E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.17966E-1	-7.98655E-1	-9.13076E0	-9.14185E0	6.1512E-3	9.30071E-2	2.72985E1	-3.26699E1	-3.26206E1	2.68202E1	1.16981E-7	2.52538E-3	2.52538E-3	6.34588E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.18324E-1	-7.98655E-1	-9.13105E0	-9.14187E0	6.05583E-3	9.33647E-2	2.7321E1	-3.26364E1	-3.26291E1	2.68136E1	1.1688E-7	2.52867E-3	2.52867E-3	6.32936E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.17823E-1	-7.98488E-1	-9.13112E0	-9.14178E0	6.4373E-3	9.29832E-2	2.72892E1	-3.26372E1	-3.26201E1	2.67986E1	1.1688E-7	2.52428E-3	2.52428E-3	6.32936E-3	1.99977E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.17943E-1	-7.98368E-1	-9.13095E0	-9.14214E0	5.96046E-3	9.30548E-2	2.72666E1	-3.2653E1	-3.25864E1	2.67968E1	1.16923E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.00192E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.17966E-1	-7.98368E-1	-9.13091E0	-9.14204E0	6.22272E-3	9.30309E-2	2.73177E1	-3.26747E1	-3.26615E1	2.67956E1	1.1699E-7	2.51581E-3	2.51581E-3	6.29067E-3	1.99401E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.17776E-1	-7.98583E-1	-9.1311E0	-9.14197E0	6.22272E-3	9.30786E-2	2.73081E1	-3.26506E1	-3.26104E1	2.6792E1	1.1693E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.99803E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09634E0	-8.17585E-1	-7.98774E-1	-9.13095E0	-9.14195E0	6.27041E-3	9.27925E-2	2.73057E1	-3.26484E1	-3.26254E1	2.68169E1	1.16778E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.9963E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.17776E-1	-7.98416E-1	-9.13074E0	-9.1418E0	6.1512E-3	9.28164E-2	2.73345E1	-3.2641E1	-3.26278E1	2.67878E1	1.16823E-7	2.52492E-3	2.52492E-3	6.32356E-3	2.00363E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.18062E-1	-7.98631E-1	-9.13103E0	-9.14166E0	6.12736E-3	9.27925E-2	2.72702E1	-3.26603E1	-3.26705E1	2.68358E1	1.16778E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.00673E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.18038E-1	-7.98488E-1	-9.13103E0	-9.14202E0	5.84126E-3	9.27448E-2	2.72636E1	-3.2644E1	-3.26158E1	2.67866E1	1.16823E-7	2.52815E-3	2.52815E-3	6.31278E-3	2.00021E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.17943E-1	-7.98368E-1	-9.13105E0	-9.1418E0	6.17504E-3	9.25303E-2	2.72955E1	-3.265E1	-3.26254E1	2.684E1	1.16938E-7	2.52362E-3	2.52362E-3	6.31858E-3	1.99224E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.18038E-1	-7.98106E-1	-9.13067E0	-9.14195E0	5.79357E-3	9.28402E-2	2.73075E1	-3.26308E1	-3.26386E1	2.68094E1	1.16829E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.98592E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.17657E-1	-7.98202E-1	-9.13091E0	-9.14183E0	5.60284E-3	9.29594E-2	2.7337E1	-3.26472E1	-3.26567E1	2.68076E1	1.1693E-7	2.52538E-3	2.52538E-3	6.34588E-3	1.9911E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09657E0	-8.17704E-1	-7.98154E-1	-9.13103E0	-9.14183E0	5.84126E-3	9.30071E-2	2.73063E1	-3.26679E1	-3.26301E1	2.68128E1	1.16823E-7	2.51525E-3	2.51525E-3	6.28592E-3	1.9934E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.1768E-1	-7.98416E-1	-9.13093E0	-9.14178E0	5.74589E-3	9.29117E-2	2.73039E1	-3.2653E1	-3.26092E1	2.68004E1	1.16873E-7	2.52492E-3	2.52492E-3	6.31817E-3	1.99E-1