[Scan]
initial_time=2015-12-15T18:18:31
final_time=2015-12-15T18:18:51
ip_count=19
run=1017
dataset=3
scan=118
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.0877E-4
ql1_vset=
ql1_vmon=-8.18253E-1
ql1_imon=1.36168E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=2.00351E-9
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=4.67205E-10
ql4_vset=
ql4_vmon=-9.14159E0
ql4_imon=-7.26223E-11
mult1=-9.90129E-9
mult2=-2.77225E-9
rf_tmon=-4.23222E-3
rf_agc=3.37043E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.96046E-3
ql5_imon=1.71195E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64127E0
bslens_imon=2.59534E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19844E1
lens5a_imon=1.98348E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05095E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53708E1
cs_ef1b_imon=3.17585E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02255E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05241E1
cs_ea1_imon=1.09382E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43492E0
lens1_imon=2.59787E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64766E1
os_ef1alow_imon=2.98201E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03716E1
cs_ea2_imon=1.40099E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8427E1
cs_ef1a_imon=3.04167E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.2465E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11461E1
os_restr1_imon=4.31998E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15279E1
os_ea1_imon=2.37989E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63896E1
os_ef1bup_imon=3.10723E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24493E0
cs_ionrep_imon=9.42892E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93592E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01854E1
cs_anode1_imon=1.94671E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=3.24381E-8
tplens_vset=1.4E-1
tplens_vmon=1.57275E0
tplens_imon=-2.38717E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.5001E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2649E1
iondef2_imon=1.5767E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98407E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.06542E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26516E0
ionrepsh_imon=8.44295E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33626E1
lens5b_imon=2.18826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74809E1
cs_ef2b_imon=3.13104E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39705E0
os_ea2_imon=-5.92658E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.0057E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71356E1
cs_ef2a_imon=3.18379E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0648E0
os_ef2alow_imon=-2.48331E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.18479E-1
os_ef2bup_imon=-5.35899E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10808E1
os_restr2_imon=3.42117E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.30763E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01627E1
cs_anode2_imon=2.08576E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72892E1
iondef1_imon=1.09155E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67962E1
iondef4_imon=1.10449E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=4.36609E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.29007E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1152E0
cs_ionaccel_imon=-8.77744E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.473E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5623E1
einzel_imon=7.72369E-6
window_vset=0.0E0
window_vmon=1.73178E-1
window_imon=-9.36641E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.3914E-4
mask2_vset=0.0E0
mask2_vmon=-1.864E1
mask2_imon=-5.93505E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92676E3
multa_neg_imon=7.35584E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.69094E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50104E3
multb_neg_imon=7.56821E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43972E0
defgridb_imon=6.16761E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33253E1
os_fil1_imon=9.41456E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08042E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63606E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31813E1
cs_fil1_imon=6.85087E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.9408E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66142E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.76062E-2
os_fil2_imon=-2.47012E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13916E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.72984E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29008E-1
cs_fil2_imon=-1.89823E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.03806E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2216E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=1.9911E-1
chamber_ion_pmon=1.17083E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.35845E-1
res40_imon=-2.43466E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=819
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.1799E-1	-7.98607E-1	-9.1311E0	-9.1418E0	5.93662E-3	9.27925E-2	2.72947E1	-3.26486E1	-3.26211E1	2.68239E1	1.16926E-7	2.51754E-3	2.51754E-3	6.29951E-3	1.99657E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.1799E-1	-7.98488E-1	-9.13124E0	-9.14178E0	6.07967E-3	9.27687E-2	2.72653E1	-3.26567E1	-3.26266E1	2.67984E1	1.16707E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.98972E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.18014E-1	-7.98607E-1	-9.13124E0	-9.14199E0	6.00815E-3	9.27448E-2	2.73263E1	-3.269E1	-3.26265E1	2.67987E1	1.16717E-7	2.51575E-3	2.51575E-3	6.3282E-3	2.0027E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.18062E-1	-7.98726E-1	-9.13098E0	-9.14223E0	5.88894E-3	9.27925E-2	2.73098E1	-3.26779E1	-3.26183E1	2.68088E1	1.16781E-7	2.52375E-3	2.52375E-3	6.30971E-3	1.99624E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.18133E-1	-7.98607E-1	-9.13124E0	-9.1419E0	5.8651E-3	9.27448E-2	2.73464E1	-3.26703E1	-3.25818E1	2.68392E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.18086E-1	-7.98392E-1	-9.13126E0	-9.14211E0	6.00815E-3	9.2864E-2	2.72913E1	-3.26633E1	-3.26506E1	2.68052E1	1.16655E-7	2.51709E-3	2.51709E-3	6.29333E-3	1.98395E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.18181E-1	-7.98559E-1	-9.13138E0	-9.14216E0	5.96046E-3	9.24587E-2	2.73393E1	-3.2653E1	-3.26476E1	2.68166E1	1.16727E-7	2.52538E-3	2.52538E-3	6.32936E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.18205E-1	-7.98106E-1	-9.13115E0	-9.14199E0	6.1512E-3	9.26971E-2	2.73128E1	-3.26626E1	-3.26124E1	2.68274E1	1.1688E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.00673E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.18062E-1	-7.98035E-1	-9.13117E0	-9.1418E0	5.98431E-3	9.26495E-2	2.72937E1	-3.26464E1	-3.26236E1	2.68082E1	1.16973E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.00705E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.17728E-1	-7.98321E-1	-9.13095E0	-9.14166E0	5.74589E-3	9.2721E-2	2.72889E1	-3.26795E1	-3.265E1	2.67908E1	1.17134E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.01197E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.17895E-1	-7.98655E-1	-9.13138E0	-9.14197E0	5.76973E-3	9.28879E-2	2.73147E1	-3.26482E1	-3.26554E1	2.6804E1	1.16778E-7	2.52538E-3	2.52538E-3	6.3074E-3	2.00325E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.17704E-1	-7.98488E-1	-9.13124E0	-9.14197E0	5.98431E-3	9.28402E-2	2.73171E1	-3.2623E1	-3.26242E1	2.68052E1	1.17032E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.01547E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.17847E-1	-7.98178E-1	-9.13131E0	-9.14164E0	6.00815E-3	9.27687E-2	2.73015E1	-3.26615E1	-3.26158E1	2.67812E1	1.17134E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.00499E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.17919E-1	-7.98392E-1	-9.13115E0	-9.1418E0	5.72205E-3	9.30071E-2	2.72913E1	-3.26549E1	-3.2653E1	2.6813E1	1.16778E-7	2.51116E-3	2.51116E-3	6.32386E-3	2.00673E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.17943E-1	-7.98655E-1	-9.13081E0	-9.14207E0	5.96046E-3	9.28164E-2	2.73267E1	-3.26675E1	-3.26302E1	2.68112E1	1.16981E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.00499E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.17871E-1	-7.98154E-1	-9.13093E0	-9.14173E0	5.81741E-3	9.29117E-2	2.73293E1	-3.26708E1	-3.26301E1	2.68082E1	1.16774E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.00363E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.1768E-1	-7.98512E-1	-9.1306E0	-9.1414E0	6.00815E-3	9.27925E-2	2.73279E1	-3.27101E1	-3.26014E1	2.68022E1	1.16727E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.00325E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.17871E-1	-7.98225E-1	-9.13103E0	-9.14137E0	5.98431E-3	9.3317E-2	2.72616E1	-3.26196E1	-3.26306E1	2.68123E1	1.17123E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.02251E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.17895E-1	-7.98392E-1	-9.131E0	-9.14168E0	5.74589E-3	9.3174E-2	2.73327E1	-3.265E1	-3.26086E1	2.67986E1	1.16823E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.00021E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.18253E-1	-7.98583E-1	-9.1311E0	-9.14159E0	5.96046E-3	9.3174E-2	2.72892E1	-3.2649E1	-3.2629E1	2.67962E1	1.17083E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.9911E-1