[Scan]
initial_time=2015-12-15T18:19:25
final_time=2015-12-15T18:19:44
ip_count=19
run=1017
dataset=3
scan=120
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08874E-4
ql1_vset=
ql1_vmon=-8.17704E-1
ql1_imon=1.35688E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=1.99965E-9
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=4.79329E-10
ql4_vset=
ql4_vmon=-9.14154E0
ql4_imon=-5.9247E-11
mult1=-9.48754E-9
mult2=-2.81751E-9
rf_tmon=-5.23171E-3
rf_agc=3.20918E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.12736E-3
ql5_imon=1.66187E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67624E0
bslens_imon=2.69545E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19848E1
lens5a_imon=1.99253E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.05019E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.537E1
cs_ef1b_imon=3.17659E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05159E1
cs_ea1_imon=1.0914E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39616E0
lens1_imon=2.59989E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.98666E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03437E1
cs_ea2_imon=1.38269E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=3.03892E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.24929E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11232E1
os_restr1_imon=4.32013E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15465E1
os_ea1_imon=2.36735E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63731E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23735E0
cs_ionrep_imon=9.34954E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9187E2
cs_nozzle_imon=1.93303E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=1.94764E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.24948E-8
tplens_vset=1.4E-1
tplens_vmon=1.61607E0
tplens_imon=-2.63493E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26187E1
iondef3_imon=1.50338E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26536E1
iondef2_imon=1.56497E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98452E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=4.06432E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29575E0
ionrepsh_imon=8.32311E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33852E1
lens5b_imon=2.18791E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38424E0
os_ea2_imon=-6.13894E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06127E2
lens4b_imon=2.0081E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.1975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.096E0
os_ef2alow_imon=-2.49336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1244E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=3.43896E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.30955E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.10045E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73118E1
iondef1_imon=1.096E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68118E1
iondef4_imon=1.08918E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=4.38011E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=7.28245E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13194E0
cs_ionaccel_imon=-9.07619E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47208E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.76352E-6
window_vset=0.0E0
window_vmon=1.84306E-1
window_imon=-1.05899E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82585E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-5.36411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.66124E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.54987E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.63647E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42623E0
defgridb_imon=5.99064E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33266E1
os_fil1_imon=9.41531E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07726E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63838E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31832E1
cs_fil1_imon=6.87253E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.56349E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66259E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.62314E-2
os_fil2_imon=-2.55184E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.21741E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.53169E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.325E-1
cs_fil2_imon=-2.31158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.61074E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22173E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.99803E-1
chamber_ion_pmon=1.16829E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.98335E-1
res40_imon=-2.41047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.18062E-1	-7.98678E-1	-9.13103E0	-9.14156E0	6.10352E-3	9.30071E-2	2.72998E1	-3.26856E1	-3.26284E1	2.68123E1	1.17273E-7	2.52384E-3	2.52384E-3	6.3074E-3	2.00021E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.17776E-1	-7.98726E-1	-9.131E0	-9.14159E0	5.98431E-3	9.26495E-2	2.73259E1	-3.26842E1	-3.26052E1	2.6792E1	1.16873E-7	2.51632E-3	2.51632E-3	6.33977E-3	2.00876E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.178E-1	-7.98225E-1	-9.13091E0	-9.14156E0	6.10352E-3	9.31025E-2	2.72686E1	-3.26503E1	-3.25831E1	2.68123E1	1.1688E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.99977E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.17728E-1	-7.98416E-1	-9.13093E0	-9.14154E0	6.29425E-3	9.27448E-2	2.72721E1	-3.26356E1	-3.26206E1	2.68172E1	1.16873E-7	2.52384E-3	2.52384E-3	6.31817E-3	2.00705E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.1749E-1	-7.98535E-1	-9.13098E0	-9.14149E0	6.1512E-3	9.2721E-2	2.73234E1	-3.26478E1	-3.2616E1	2.67885E1	1.17223E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9985E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.17418E-1	-7.98678E-1	-9.13095E0	-9.14156E0	6.03199E-3	9.29356E-2	2.72815E1	-3.26531E1	-3.2603E1	2.68172E1	1.16829E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.00847E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09611E0	-8.17704E-1	-7.98678E-1	-9.13076E0	-9.14176E0	5.8651E-3	9.2721E-2	2.73129E1	-3.26765E1	-3.26254E1	2.68273E1	1.16923E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.00192E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09611E0	-8.17871E-1	-7.98678E-1	-9.13088E0	-9.14133E0	5.96046E-3	9.29117E-2	2.73092E1	-3.26962E1	-3.26042E1	2.68166E1	1.16923E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.00534E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.17609E-1	-7.98726E-1	-9.13093E0	-9.14145E0	6.17504E-3	9.27925E-2	2.73111E1	-3.26831E1	-3.26224E1	2.68208E1	1.16829E-7	2.52428E-3	2.52428E-3	6.29098E-3	2.02424E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.1768E-1	-7.98559E-1	-9.13086E0	-9.14147E0	6.41346E-3	9.28879E-2	2.72847E1	-3.2641E1	-3.26434E1	2.68352E1	1.17032E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.01722E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.17299E-1	-7.98678E-1	-9.13091E0	-9.1414E0	6.10352E-3	9.29117E-2	2.73204E1	-3.26484E1	-3.26443E1	2.67932E1	1.16778E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.00325E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.1749E-1	-7.98869E-1	-9.1311E0	-9.14149E0	5.91278E-3	9.28402E-2	2.73063E1	-3.2626E1	-3.26104E1	2.68004E1	1.16776E-7	2.52134E-3	2.52134E-3	6.32099E-3	2.00516E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.17418E-1	-7.98917E-1	-9.13115E0	-9.14173E0	5.88894E-3	9.28402E-2	2.73069E1	-3.26536E1	-3.26362E1	2.6816E1					
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.1737E-1	-7.98726E-1	-9.13069E0	-9.14161E0	5.98431E-3	9.28402E-2	2.73039E1	-3.26691E1	-3.26189E1	2.67926E1	1.16873E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.00876E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.17442E-1	-7.98821E-1	-9.13091E0	-9.14161E0	6.12736E-3	9.31263E-2	2.73008E1	-3.26407E1	-3.26376E1	2.68076E1	1.17123E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.9985E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.1768E-1	-7.98821E-1	-9.13103E0	-9.14156E0	6.1512E-3	9.32455E-2	2.73069E1	-3.26464E1	-3.265E1	2.68034E1	1.16886E-7	2.52362E-3	2.52362E-3	6.33538E-3	2.00285E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.17442E-1	-7.98607E-1	-9.13136E0	-9.14178E0	5.79357E-3	9.29832E-2	2.73193E1	-3.26437E1	-3.26484E1	2.67931E1	1.16829E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00847E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.17704E-1	-7.98631E-1	-9.13126E0	-9.14176E0	6.03199E-3	9.30548E-2	2.73762E1	-3.27051E1	-3.25788E1	2.6818E1	1.16677E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.99456E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.17776E-1	-7.98416E-1	-9.13091E0	-9.14156E0	6.29425E-3	9.30309E-2	2.73087E1	-3.26825E1	-3.26188E1	2.6807E1	1.16909E-7	2.51575E-3	2.51575E-3	6.3074E-3	1.99447E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.17704E-1	-7.98559E-1	-9.1311E0	-9.14154E0	6.12736E-3	9.29832E-2	2.73118E1	-3.26536E1	-3.26187E1	2.68118E1	1.16829E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.99803E-1