[Scan]
initial_time=2015-12-15T18:19:51
final_time=2015-12-15T18:20:11
ip_count=19
run=1017
dataset=3
scan=121
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08755E-4
ql1_vset=
ql1_vmon=-8.17847E-1
ql1_imon=1.35856E-8
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=2.01908E-9
ql3_vset=
ql3_vmon=-9.13086E0
ql3_imon=5.03957E-10
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=-3.91722E-11
mult1=-9.84219E-9
mult2=-2.79577E-9
rf_tmon=-5.28815E-3
rf_agc=3.31026E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=1.73577E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65592E0
bslens_imon=2.59904E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20187E1
lens5a_imon=1.99857E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.04999E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53706E1
cs_ef1b_imon=3.17984E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02153E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05072E1
cs_ea1_imon=1.09517E-5
lens1_vset=-5.0E0
lens1_vmon=-5.399E0
lens1_imon=2.76126E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.97585E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03714E1
cs_ea2_imon=1.40556E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=3.0328E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.25078E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11117E1
os_restr1_imon=4.32482E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15444E1
os_ea1_imon=2.38466E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28154E0
cs_ionrep_imon=9.50252E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91885E2
cs_nozzle_imon=1.93532E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02061E1
cs_anode1_imon=1.95413E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=3.2517E-8
tplens_vset=1.4E-1
tplens_vmon=1.62221E0
tplens_imon=-4.25519E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26531E1
iondef3_imon=1.5256E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2639E1
iondef2_imon=1.56418E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98461E-4
ql6_vset=1.0E-1
ql6_vmon=9.27448E-2
ql6_imon=4.04134E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26772E0
ionrepsh_imon=8.47151E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33868E1
lens5b_imon=2.19108E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.13731E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3981E0
os_ea2_imon=-4.61569E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00684E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12123E0
os_ef2alow_imon=-2.49697E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.26256E-1
os_ef2bup_imon=-5.20715E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10859E1
os_restr2_imon=3.44221E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.31695E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.10117E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72797E1
iondef1_imon=1.07823E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68157E1
iondef4_imon=1.09026E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=4.39032E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.3013E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13975E0
cs_ionaccel_imon=-9.25639E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47266E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56165E1
einzel_imon=7.69144E-6
window_vset=0.0E0
window_vmon=2.55184E-1
window_imon=-9.29243E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86068E1
mask2_imon=-6.6255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92692E3
multa_neg_imon=7.56666E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.95022E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=6.80241E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35044E0
defgridb_imon=6.07782E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33238E1
os_fil1_imon=9.41081E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0775E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63773E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31827E1
cs_fil1_imon=6.76441E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.2091E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66265E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.70568E-2
os_fil2_imon=-2.53382E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19338E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.69556E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.24551E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.52665E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2215E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.00705E-1
chamber_ion_pmon=1.16923E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.72507E-1
res40_imon=-2.39606E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.17513E-1	-7.98249E-1	-9.13079E0	-9.14176E0	6.12736E-3	9.27687E-2	2.73204E1	-3.2659E1	-3.26236E1	2.68052E1	1.16774E-7	2.52169E-3	2.52169E-3	6.32896E-3	1.9985E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.17251E-1	-7.98392E-1	-9.13088E0	-9.1418E0	5.98431E-3	9.27925E-2	2.72898E1	-3.26768E1	-3.26187E1	2.68016E1	1.16981E-7	2.51116E-3	2.51116E-3	6.34588E-3	1.99283E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.17513E-1	-7.98559E-1	-9.13107E0	-9.14185E0	5.88894E-3	9.29117E-2	2.73287E1	-3.26484E1	-3.26708E1	2.67674E1	1.1693E-7	2.52647E-3	2.52647E-3	6.30192E-3	1.99977E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.178E-1	-7.98726E-1	-9.13112E0	-9.14214E0	6.19888E-3	9.30548E-2	2.73275E1	-3.26915E1	-3.26402E1	2.67879E1	1.16848E-7	2.52276E-3	2.52276E-3	6.29396E-3	2.0079E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.17585E-1	-7.98583E-1	-9.13093E0	-9.14204E0	6.10352E-3	9.28879E-2	2.72696E1	-3.26771E1	-3.26422E1	2.68196E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.17609E-1	-7.98464E-1	-9.13117E0	-9.14199E0	6.1512E-3	9.29117E-2	2.73435E1	-3.26711E1	-3.26002E1	2.684E1	1.17083E-7	2.52154E-3	2.52154E-3	6.30466E-3	2.00412E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.17633E-1	-7.98464E-1	-9.13119E0	-9.14195E0	6.36578E-3	9.31501E-2	2.72839E1	-3.26077E1	-3.26496E1	2.68046E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.17943E-1	-7.98655E-1	-9.13122E0	-9.14161E0	6.1512E-3	9.31501E-2	2.72468E1	-3.26404E1	-3.26344E1	2.68046E1	1.16981E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.00499E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.17776E-1	-7.98607E-1	-9.13129E0	-9.14185E0	5.81741E-3	9.28402E-2	2.73484E1	-3.26524E1	-3.26206E1	2.67956E1	1.1693E-7	2.51116E-3	2.51116E-3	6.29645E-3	2.01197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.17823E-1	-7.98774E-1	-9.13134E0	-9.14159E0	5.96046E-3	9.26018E-2	2.73004E1	-3.26608E1	-3.2649E1	2.6807E1	1.16873E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.00363E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.17919E-1	-7.98821E-1	-9.13122E0	-9.14166E0	6.19888E-3	9.27925E-2	2.72824E1	-3.26689E1	-3.26015E1	2.68126E1	1.16981E-7	2.52647E-3	2.52647E-3	6.32936E-3	2.00499E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.17871E-1	-7.98559E-1	-9.13105E0	-9.14211E0	5.91278E-3	9.2721E-2	2.72898E1	-3.26655E1	-3.26201E1	2.68163E1	1.16731E-7	2.52362E-3	2.52362E-3	6.30182E-3	1.99754E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.17847E-1	-7.98821E-1	-9.13117E0	-9.14199E0	6.10352E-3	9.26495E-2	2.73153E1	-3.26374E1	-3.26074E1	2.68196E1	1.16965E-7	2.52025E-3	2.52025E-3	6.3074E-3	1.98894E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.17847E-1	-7.98678E-1	-9.13115E0	-9.14164E0	6.17504E-3	9.25541E-2	2.72799E1	-3.26687E1	-3.26879E1	2.68016E1	1.1688E-7	2.52428E-3	2.52428E-3	6.32936E-3	1.98764E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.17823E-1	-7.98774E-1	-9.13105E0	-9.14166E0	5.98431E-3	9.26495E-2	2.72931E1	-3.26699E1	-3.26272E1	2.6813E1	1.16576E-7	2.52362E-3	2.52362E-3	6.3074E-3	2.00996E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.17633E-1	-7.9875E-1	-9.13119E0	-9.14199E0	6.00815E-3	9.26971E-2	2.73045E1	-3.26699E1	-3.26242E1	2.6819E1	1.16774E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.00192E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.17418E-1	-7.98583E-1	-9.13143E0	-9.14166E0	5.93662E-3	9.29832E-2	2.73273E1	-3.26657E1	-3.25707E1	2.68352E1	1.17185E-7	2.52209E-3	2.52209E-3	6.33486E-3	2.01022E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.17537E-1	-7.98821E-1	-9.13091E0	-9.1418E0	6.41346E-3	9.28402E-2	2.71954E1	-3.258E1	-3.27163E1	2.67962E1	1.17083E-7	2.52757E-3	2.52757E-3	6.31288E-3	2.00499E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.17609E-1	-7.98726E-1	-9.13103E0	-9.14192E0	5.98431E-3	9.26971E-2	2.73273E1	-3.26789E1	-3.26218E1	2.68088E1	1.1688E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.00151E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.17847E-1	-7.98607E-1	-9.13086E0	-9.14168E0	5.6982E-3	9.27448E-2	2.72797E1	-3.2639E1	-3.26531E1	2.68157E1	1.16923E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.00705E-1