[Scan]
initial_time=2015-12-15T18:21:11
final_time=2015-12-15T18:21:30
ip_count=19
run=1017
dataset=3
scan=124
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08797E-4
ql1_vset=
ql1_vmon=-8.17513E-1
ql1_imon=1.35612E-8
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=2.0215E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=4.77362E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=-6.16074E-11
mult1=-1.11853E-8
mult2=-2.62879E-9
rf_tmon=-3.73135E-3
rf_agc=3.38863E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.27041E-3
ql5_imon=1.6862E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66914E0
bslens_imon=2.60264E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19863E1
lens5a_imon=1.99244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.05165E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=3.17515E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02377E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0494E1
cs_ea1_imon=1.08652E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37677E0
lens1_imon=2.81173E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.99207E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0363E1
cs_ea2_imon=1.42791E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=3.04289E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=1.24952E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.31689E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=2.38394E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.09587E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26351E0
cs_ionrep_imon=9.31506E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93384E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02001E1
cs_anode1_imon=1.95809E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=3.24427E-8
tplens_vset=1.4E-1
tplens_vmon=1.60418E0
tplens_imon=-1.73173E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26098E1
iondef3_imon=1.49857E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26651E1
iondef2_imon=1.58364E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98577E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.01495E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29656E0
ionrepsh_imon=8.57244E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33598E1
lens5b_imon=2.19E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37707E0
os_ea2_imon=-7.6799E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.1993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07558E0
os_ef2alow_imon=-2.59067E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.17246E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10817E1
os_restr2_imon=3.43103E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.30685E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.09324E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73405E1
iondef1_imon=1.08544E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6781E1
iondef4_imon=1.0917E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=4.40828E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=7.30603E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13314E0
cs_ionaccel_imon=-9.07619E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47385E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56381E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=3.03838E-1
window_imon=-1.06619E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.39297E-4
mask2_vset=0.0E0
mask2_vmon=-1.8638E1
mask2_imon=-7.16609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92692E3
multa_neg_imon=6.70508E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=5.88675E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.85866E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37149E0
defgridb_imon=6.14631E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3325E1
os_fil1_imon=9.423E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0769E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63744E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31828E1
cs_fil1_imon=7.28098E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.38329E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66276E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.6412E-2
os_fil2_imon=-2.38366E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16935E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.54861E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.3356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.73087E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22202E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.00363E-1
chamber_ion_pmon=1.16823E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.16355E-1
res40_imon=-2.33119E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.17919E-1	-7.98368E-1	-9.13119E0	-9.14185E0	5.79357E-3	9.31025E-2	2.73057E1	-3.26747E1	-3.25966E1	2.67998E1	1.16677E-7	2.52647E-3	2.52647E-3	6.34588E-3	2.00673E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.17704E-1	-7.98154E-1	-9.13169E0	-9.14192E0	5.93662E-3	9.30548E-2	2.72935E1	-3.26762E1	-3.26444E1	2.68032E1	1.16829E-7	2.52099E-3	2.52099E-3	6.34037E-3	1.99977E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09657E0	-8.17704E-1	-7.98035E-1	-9.13112E0	-9.14171E0	6.03199E-3	9.30309E-2	2.7308E1	-3.26744E1	-3.26083E1	2.68082E1	1.17093E-7	2.5225E-3	2.5225E-3	6.31858E-3	2.00818E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.1768E-1	-7.98225E-1	-9.13105E0	-9.14161E0	5.81741E-3	9.33886E-2	2.73147E1	-3.2647E1	-3.26296E1	2.67932E1	1.16973E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.00021E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.17251E-1	-7.98249E-1	-9.13124E0	-9.14164E0	6.31809E-3	9.32455E-2	2.72871E1	-3.26368E1	-3.25767E1	2.68334E1	1.16677E-7	2.52428E-3	2.52428E-3	6.32936E-3	2.00499E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.17919E-1	-7.98154E-1	-9.1311E0	-9.1419E0	6.27041E-3	9.31263E-2	2.73231E1	-3.26567E1	-3.2623E1	2.67836E1	1.1693E-7	2.52647E-3	2.52647E-3	6.34037E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.17561E-1	-7.9813E-1	-9.13103E0	-9.14178E0	6.03199E-3	9.30309E-2	2.72558E1	-3.26561E1	-3.26476E1	2.6825E1	1.1688E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.98419E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.17895E-1	-7.98202E-1	-9.13143E0	-9.14173E0	5.84126E-3	9.29356E-2	2.73411E1	-3.26691E1	-3.26183E1	2.68094E1	1.1688E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.00325E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.1749E-1	-7.98059E-1	-9.13091E0	-9.14149E0	5.91278E-3	9.30071E-2	2.73275E1	-3.26467E1	-3.26543E1	2.68244E1	1.16873E-7	2.52061E-3	2.52061E-3	6.29665E-3	2.00876E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.17561E-1	-7.98607E-1	-9.13131E0	-9.14149E0	5.76973E-3	9.30548E-2	2.73051E1	-3.2662E1	-3.25936E1	2.68166E1	1.16829E-7	2.52647E-3	2.52647E-3	6.32386E-3	2.00325E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.17585E-1	-7.98273E-1	-9.13138E0	-9.14171E0	5.72205E-3	9.30786E-2	2.73003E1	-3.26362E1	-3.2614E1	2.67902E1	1.16867E-7	2.51603E-3	2.51603E-3	6.30212E-3	2.00399E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.17323E-1	-7.98345E-1	-9.13124E0	-9.1413E0	5.91278E-3	9.34362E-2	2.73009E1	-3.26609E1	-3.26134E1	2.67848E1	1.16854E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.00499E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0941E0	-8.1749E-1	-7.98368E-1	-9.13153E0	-9.1418E0	5.8651E-3	9.34124E-2	2.73213E1	-3.26404E1	-3.2635E1	2.68298E1					
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.17442E-1	-7.98345E-1	-9.13129E0	-9.14173E0	6.10352E-3	9.32455E-2	2.72957E1	-3.26933E1	-3.26107E1	2.67955E1	1.1693E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.02248E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.17609E-1	-7.9844E-1	-9.13112E0	-9.14168E0	5.76973E-3	9.30071E-2	2.72937E1	-3.26591E1	-3.26633E1	2.68172E1	1.16778E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.9963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.17919E-1	-7.98321E-1	-9.13126E0	-9.14195E0	6.00815E-3	9.29832E-2	2.73093E1	-3.26729E1	-3.25996E1	2.68136E1	1.16774E-7	2.52169E-3	2.52169E-3	6.33977E-3	1.9985E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.17633E-1	-7.98416E-1	-9.13129E0	-9.14183E0	6.05583E-3	9.27925E-2	2.72871E1	-3.26494E1	-3.2632E1	2.67938E1	1.16731E-7	2.51915E-3	2.51915E-3	6.34661E-3	2.00108E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.17752E-1	-7.98464E-1	-9.13136E0	-9.1418E0	5.88894E-3	9.30309E-2	2.74211E1	-3.27852E1	-3.25978E1	2.68028E1	1.16829E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.00151E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.17418E-1	-7.98583E-1	-9.13122E0	-9.14171E0	6.24657E-3	9.2864E-2	2.72744E1	-3.26449E1	-3.26461E1	2.68154E1	1.16674E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.00363E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.17513E-1	-7.98297E-1	-9.13124E0	-9.14195E0	6.27041E-3	9.31263E-2	2.73405E1	-3.26651E1	-3.26098E1	2.6781E1	1.16823E-7	2.52492E-3	2.52492E-3	6.30202E-3	2.00363E-1