[Scan]
initial_time=2015-12-15T18:21:38
final_time=2015-12-15T18:21:57
ip_count=19
run=1017
dataset=3
scan=125
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08759E-4
ql1_vset=
ql1_vmon=-8.17275E-1
ql1_imon=1.35265E-8
ql2_vset=
ql2_vmon=-7.9813E-1
ql2_imon=2.01606E-9
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=4.26674E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-3.64304E-11
mult1=-9.41529E-9
mult2=-2.67669E-9
rf_tmon=-3.97769E-3
rf_agc=3.34297E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.00815E-3
ql5_imon=1.73396E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65029E0
bslens_imon=2.60697E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=1.99855E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05118E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53771E1
cs_ef1b_imon=3.17852E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.0205E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05171E1
cs_ea1_imon=1.09423E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42801E0
lens1_imon=2.7627E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6455E1
os_ef1alow_imon=2.98461E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0415E1
cs_ea2_imon=1.40499E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84249E1
cs_ef1a_imon=3.03639E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.25075E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.31215E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15223E1
os_ea1_imon=2.37868E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63658E1
os_ef1bup_imon=3.08678E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26508E0
cs_ionrep_imon=9.42741E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.93356E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01931E1
cs_anode1_imon=1.95106E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.24242E-8
tplens_vset=1.4E-1
tplens_vmon=1.60545E0
tplens_imon=-2.17481E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26278E1
iondef3_imon=1.48569E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26813E1
iondef2_imon=1.58373E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.98406E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=4.05872E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29457E0
ionrepsh_imon=8.6629E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33793E1
lens5b_imon=2.18366E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7453E1
cs_ef2b_imon=3.13543E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41196E0
os_ea2_imon=-5.89119E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00471E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71229E1
cs_ef2a_imon=3.18652E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07657E0
os_ef2alow_imon=-2.46337E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25612E-1
os_ef2bup_imon=-5.27138E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10764E1
os_restr2_imon=3.4343E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.30707E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01902E1
cs_anode2_imon=2.09842E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72528E1
iondef1_imon=1.08078E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67698E1
iondef4_imon=1.09476E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=4.38198E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.30013E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13941E0
cs_ionaccel_imon=-9.16887E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47244E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56231E1
einzel_imon=7.69479E-6
window_vset=0.0E0
window_vmon=2.28112E-1
window_imon=-9.48164E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86477E1
mask2_imon=-6.00639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.6931E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.35874E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50085E3
multb_neg_imon=7.86653E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37012E0
defgridb_imon=6.18531E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33223E1
os_fil1_imon=9.41725E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0748E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63816E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31818E1
cs_fil1_imon=7.83187E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.65638E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66272E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.64847E-2
os_fil2_imon=-2.57072E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04557E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.60509E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30151E-1
cs_fil2_imon=-2.34483E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2926E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22243E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.00705E-1
chamber_ion_pmon=1.16873E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.40092E-1
res40_imon=-2.47032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=196
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09348E0	-8.17156E-1	-7.98321E-1	-9.13112E0	-9.14173E0	6.36578E-3	9.29117E-2	2.73484E1	-3.26615E1	-3.26326E1	2.68046E1	1.16774E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.00534E-1
2.0E0	4.5E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.17299E-1	-7.98321E-1	-9.13136E0	-9.14168E0	6.12736E-3	9.31025E-2	2.73135E1	-3.26651E1	-3.26332E1	2.6801E1	1.16981E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.00499E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.17442E-1	-7.98368E-1	-9.13095E0	-9.14173E0	6.27041E-3	9.29356E-2	2.72616E1	-3.26532E1	-3.26417E1	2.68204E1	1.16981E-7	2.52757E-3	2.52757E-3	6.31837E-3	2.01547E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09379E0	-8.17442E-1	-7.98106E-1	-9.13134E0	-9.14183E0	6.12736E-3	9.30786E-2	2.73093E1	-3.26434E1	-3.26146E1	2.67968E1	1.16769E-7	2.51919E-3	2.51919E-3	6.33919E-3	2.01578E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.17537E-1	-7.98202E-1	-9.13155E0	-9.1419E0	6.24657E-3	9.31025E-2	2.73454E1	-3.26723E1	-3.25906E1	2.6804E1	1.1693E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.01372E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09371E0	-8.17561E-1	-7.98345E-1	-9.13119E0	-9.14211E0	6.1512E-3	9.29117E-2	2.73141E1	-3.26627E1	-3.2626E1	2.68244E1	1.1688E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.01197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-8.17466E-1	-7.9813E-1	-9.13134E0	-9.14216E0	6.1512E-3	9.32455E-2	2.72632E1	-3.26608E1	-3.25936E1	2.68016E1	1.1693E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-8.17418E-1	-7.97892E-1	-9.13138E0	-9.14214E0	6.03199E-3	9.29594E-2	2.73039E1	-3.26315E1	-3.26064E1	2.68298E1	1.16981E-7	2.52977E-3	2.52977E-3	6.29098E-3	2.00847E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.17442E-1	-7.98464E-1	-9.13124E0	-9.1418E0	6.07967E-3	9.32217E-2	2.73246E1	-3.2652E1	-3.26449E1	2.68112E1	1.16778E-7	2.52867E-3	2.52867E-3	6.31837E-3	2.00151E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-8.17442E-1	-7.98225E-1	-9.13115E0	-9.14223E0	6.24657E-3	9.31025E-2	2.72791E1	-3.2649E1	-3.26667E1	2.68117E1	1.16823E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.01047E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.17299E-1	-7.98392E-1	-9.13129E0	-9.14199E0	6.36578E-3	9.30786E-2	2.73153E1	-3.26657E1	-3.26236E1	2.67962E1	1.16778E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.01022E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.17323E-1	-7.98464E-1	-9.13122E0	-9.14185E0	6.05583E-3	9.31501E-2	2.73201E1	-3.26867E1	-3.25828E1	2.67938E1	1.16923E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.00021E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.1718E-1	-7.98345E-1	-9.13122E0	-9.14183E0	5.96046E-3	9.31501E-2	2.73087E1	-3.26699E1	-3.2611E1	2.67836E1	1.17083E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.00673E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.17394E-1	-7.9844E-1	-9.13115E0	-9.14211E0	5.81741E-3	9.35078E-2	2.73237E1	-3.26314E1	-3.26374E1	2.68184E1	1.16778E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.00499E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.17323E-1	-7.98583E-1	-9.13136E0	-9.1418E0	6.24657E-3	9.33409E-2	2.72985E1	-3.26795E1	-3.26218E1	2.68214E1	1.16981E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.99803E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09634E0	-8.17275E-1	-7.9875E-1	-9.13131E0	-9.14192E0	5.96046E-3	9.31263E-2	2.72898E1	-3.26384E1	-3.26337E1	2.68076E1	1.1693E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.00325E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.17323E-1	-7.98607E-1	-9.13131E0	-9.14192E0	6.22272E-3	9.29117E-2	2.73574E1	-3.26693E1	-3.26332E1	2.68028E1	1.17073E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.01219E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.1718E-1	-7.98368E-1	-9.13126E0	-9.14216E0	6.34193E-3	9.31501E-2	2.73033E1	-3.26714E1	-3.26708E1	2.68134E1	1.17032E-7	2.52647E-3	2.52647E-3	6.31837E-3	2.00499E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.1737E-1	-7.98273E-1	-9.13138E0	-9.14195E0	5.76973E-3	9.30548E-2	2.72909E1	-3.26726E1	-3.26443E1	2.6828E1	1.16923E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.01219E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.17275E-1	-7.9813E-1	-9.13112E0	-9.14187E0	6.00815E-3	9.30548E-2	2.72528E1	-3.26813E1	-3.26278E1	2.67698E1	1.16873E-7	2.52492E-3	2.52492E-3	6.3074E-3	2.00705E-1