[Scan]
initial_time=2015-12-15T18:22:04
final_time=2015-12-15T18:22:24
ip_count=19
run=1017
dataset=3
scan=126
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08772E-4
ql1_vset=
ql1_vmon=-8.1737E-1
ql1_imon=1.35806E-8
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=2.09514E-9
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=4.26579E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-2.06947E-11
mult1=-9.78855E-9
mult2=-2.81442E-9
rf_tmon=-5.7321E-3
rf_agc=3.26486E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.00815E-3
ql5_imon=1.73366E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66208E0
bslens_imon=2.73439E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19801E1
lens5a_imon=1.99748E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.04881E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53917E1
cs_ef1b_imon=3.16903E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.01979E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05094E1
cs_ea1_imon=1.10237E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41208E0
lens1_imon=2.54326E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03714E1
cs_ea2_imon=1.40109E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84694E1
cs_ef1a_imon=3.04793E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.24298E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10901E1
os_restr1_imon=4.32446E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15435E1
os_ea1_imon=2.35249E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.09983E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25623E0
cs_ionrep_imon=9.31415E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93487E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01587E1
cs_anode1_imon=1.93827E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2058E0
olens4_imon=3.24794E-8
tplens_vset=1.4E-1
tplens_vmon=1.61194E0
tplens_imon=-2.42257E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.50728E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.56992E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.9842E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=4.08385E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25092E0
ionrepsh_imon=8.60627E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33711E1
lens5b_imon=2.18897E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7494E1
cs_ef2b_imon=3.11785E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4037E0
os_ea2_imon=-6.10355E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06144E2
lens4b_imon=2.00517E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71011E1
cs_ef2a_imon=3.19101E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10802E0
os_ef2alow_imon=-2.67717E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.37668E-1
os_ef2bup_imon=-5.49186E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=3.43932E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.31627E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01269E1
cs_anode2_imon=2.08603E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72919E1
iondef1_imon=1.12148E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67601E1
iondef4_imon=1.10431E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=4.42406E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.29542E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10251E0
cs_ionaccel_imon=-7.05797E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47093E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.7455E-6
window_vset=0.0E0
window_vmon=1.0622E-1
window_imon=-1.13107E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82581E2
mask1_imon=2.39509E-4
mask2_vset=0.0E0
mask2_vmon=-1.86098E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.926E3
multa_neg_imon=7.96917E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.60296E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.08432E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43508E0
defgridb_imon=5.99418E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33249E1
os_fil1_imon=9.42024E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07569E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63795E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31804E1
cs_fil1_imon=6.15774E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.96593E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66052E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.62314E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.34955E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.71393E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-1.86709E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.88104E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22096E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.16774E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.77912E-1
res40_imon=-2.57265E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.17633E-1	-7.98273E-1	-9.13122E0	-9.14185E0	6.1512E-3	9.31263E-2	2.73103E1	-3.26706E1	-3.26376E1	2.68088E1	1.16823E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.00705E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.17394E-1	-7.98273E-1	-9.13124E0	-9.14199E0	6.41346E-3	9.31501E-2	2.73431E1	-3.26952E1	-3.26254E1	2.68045E1	1.16965E-7	2.52236E-3	2.52236E-3	6.32328E-3	2.00567E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.17394E-1	-7.98106E-1	-9.13141E0	-9.14185E0	5.76973E-3	9.30548E-2	2.73157E1	-3.26573E1	-3.26455E1	2.67914E1	1.16886E-7	2.51804E-3	2.51804E-3	6.31858E-3	2.00285E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.17657E-1	-7.98106E-1	-9.1311E0	-9.14192E0	5.96046E-3	9.28164E-2	2.73333E1	-3.26579E1	-3.26422E1	2.67932E1	1.17023E-7	2.52384E-3	2.52384E-3	6.3074E-3	2.00876E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.17466E-1	-7.98368E-1	-9.13153E0	-9.14211E0	5.8651E-3	9.30309E-2	2.73021E1	-3.26747E1	-3.26386E1	2.68124E1	1.17083E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.01547E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.17466E-1	-7.98297E-1	-9.13129E0	-9.14209E0	6.00815E-3	9.2864E-2	2.73328E1	-3.26467E1	-3.26107E1	2.68232E1	1.1693E-7	2.52538E-3	2.52538E-3	6.31288E-3	1.99456E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.17513E-1	-7.97892E-1	-9.13126E0	-9.14178E0	6.41346E-3	9.30071E-2	2.72829E1	-3.2653E1	-3.26314E1	2.6789E1	1.16751E-7	2.51972E-3	2.51972E-3	6.32644E-3	2.01035E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.17537E-1	-7.9782E-1	-9.13134E0	-9.14209E0	5.91278E-3	9.32693E-2	2.72528E1	-3.26356E1	-3.26308E1	2.68088E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.17585E-1	-7.97987E-1	-9.13124E0	-9.14168E0	5.96046E-3	9.30071E-2	2.7334E1	-3.26549E1	-3.26408E1	2.67914E1	1.17185E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.98937E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.17561E-1	-7.98345E-1	-9.13105E0	-9.14145E0	6.03199E-3	9.29832E-2	2.72802E1	-3.26642E1	-3.25634E1	2.68058E1	1.17073E-7	2.52223E-3	2.52223E-3	6.32356E-3	2.00106E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-8.17394E-1	-7.98297E-1	-9.13103E0	-9.14195E0	6.34193E-3	9.31501E-2	2.73219E1	-3.26391E1	-3.2606E1	2.68166E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09348E0	-8.17466E-1	-7.98321E-1	-9.13115E0	-9.14183E0	6.07967E-3	9.29356E-2	2.72979E1	-3.26657E1	-3.2596E1	2.68298E1	1.16938E-7	2.52362E-3	2.52362E-3	6.3074E-3	2.00996E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.17585E-1	-7.9844E-1	-9.13138E0	-9.14168E0	6.07967E-3	9.31978E-2	2.72943E1	-3.26699E1	-3.26302E1	2.67854E1	1.17032E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.00325E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.17418E-1	-7.98368E-1	-9.13107E0	-9.14156E0	5.84126E-3	9.33647E-2	2.73039E1	-3.26831E1	-3.26032E1	2.68232E1	1.16829E-7	2.52428E-3	2.52428E-3	6.30192E-3	1.98937E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.1737E-1	-7.98178E-1	-9.13103E0	-9.14161E0	6.07967E-3	9.31263E-2	2.72829E1	-3.26849E1	-3.2602E1	2.68238E1	1.16829E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98592E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.17585E-1	-7.98345E-1	-9.13131E0	-9.14161E0	6.1512E-3	9.33409E-2	2.73039E1	-3.26633E1	-3.2647E1	2.68202E1	1.1688E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.97903E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.17275E-1	-7.98368E-1	-9.13115E0	-9.14156E0	6.19888E-3	9.32455E-2	2.73309E1	-3.26885E1	-3.26284E1	2.6804E1	1.16778E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.99283E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.17156E-1	-7.98202E-1	-9.13103E0	-9.14171E0	6.05583E-3	9.34601E-2	2.72809E1	-3.26349E1	-3.26042E1	2.67932E1	1.17083E-7	2.51771E-3	2.51771E-3	6.28552E-3	2.00325E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.1737E-1	-7.98106E-1	-9.13084E0	-9.14209E0	5.81741E-3	9.30071E-2	2.73293E1	-3.26467E1	-3.26455E1	2.6825E1	1.16724E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.00192E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.1737E-1	-7.98154E-1	-9.13115E0	-9.14202E0	6.00815E-3	9.29356E-2	2.72919E1	-3.26573E1	-3.26236E1	2.67601E1	1.16774E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.00021E-1