[Scan]
initial_time=2015-12-15T18:25:11
final_time=2015-12-15T18:25:30
ip_count=19
run=1017
dataset=3
scan=133
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.0876E-4
ql1_vset=
ql1_vmon=-8.17108E-1
ql1_imon=1.35299E-8
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=2.12448E-9
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=3.10302E-10
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=-4.15206E-11
mult1=-9.63847E-9
mult2=-2.75661E-9
rf_tmon=-5.85076E-3
rf_agc=3.22716E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=1.73371E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6666E0
bslens_imon=2.45498E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19744E1
lens5a_imon=2.00387E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12525E2
lens4a_imon=2.04999E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53583E1
cs_ef1b_imon=3.17796E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02439E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05375E1
cs_ea1_imon=1.07471E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42684E0
lens1_imon=2.55605E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.98151E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03709E1
cs_ea2_imon=1.39254E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8433E1
cs_ef1a_imon=3.05164E-5
olens2_vset=9.7E-1
olens2_vmon=9.70674E-1
olens2_imon=1.24563E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11258E1
os_restr1_imon=4.32104E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15412E1
os_ea1_imon=2.39021E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63577E1
os_ef1bup_imon=3.09057E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22839E0
cs_ionrep_imon=9.60901E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93368E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02029E1
cs_anode1_imon=1.95263E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2058E0
olens4_imon=3.25791E-8
tplens_vset=1.4E-1
tplens_vmon=1.63083E0
tplens_imon=-2.77855E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26277E1
iondef3_imon=1.48126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26689E1
iondef2_imon=1.58159E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98286E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=4.13554E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26582E0
ionrepsh_imon=8.35864E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33695E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74679E1
cs_ef2b_imon=3.1328E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38E0
os_ea2_imon=-7.27088E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06153E2
lens4b_imon=2.00892E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.19669E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07934E0
os_ef2alow_imon=-2.49819E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.19864E-1
os_ef2bup_imon=-5.20443E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10891E1
os_restr2_imon=3.435E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.30864E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.09216E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7297E1
iondef1_imon=1.07321E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67908E1
iondef4_imon=1.08971E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=4.36975E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.29455E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12219E0
cs_ionaccel_imon=-8.75184E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47344E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56344E1
einzel_imon=7.6805E-6
window_vset=0.0E0
window_vmon=2.72547E-1
window_imon=-9.81671E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82608E2
mask1_imon=2.39249E-4
mask2_vset=0.0E0
mask2_vmon=-1.8643E1
mask2_imon=-5.26347E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=6.39325E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93674E3
defgrida_imon=6.79382E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50199E3
multb_neg_imon=6.41197E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34939E0
defgridb_imon=6.26971E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3324E1
os_fil1_imon=9.41722E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07984E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63776E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31787E1
cs_fil1_imon=8.03951E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.93669E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66078E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.51867E-2
os_fil2_imon=-2.47455E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09705E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.67141E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28531E-1
cs_fil2_imon=-2.26035E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.36265E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2221E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.9934E-1
chamber_ion_pmon=1.16973E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.37367E-1
res40_imon=-2.38069E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.17013E-1	-7.98154E-1	-9.13117E0	-9.14164E0	5.96046E-3	9.29356E-2	2.73086E1	-3.26579E1	-3.26359E1	2.67935E1	1.1699E-7	2.52027E-3	2.52027E-3	6.32978E-3	2.00285E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.16822E-1	-7.97963E-1	-9.13103E0	-9.14152E0	6.07967E-3	9.2864E-2	2.73165E1	-3.26452E1	-3.26464E1	2.67998E1	1.16724E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.00876E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.17084E-1	-7.98082E-1	-9.13126E0	-9.14178E0	5.57899E-3	9.31025E-2	2.73257E1	-3.26608E1	-3.26472E1	2.68296E1	1.16774E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.00876E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.1718E-1	-7.98392E-1	-9.13115E0	-9.14159E0	5.72205E-3	9.3174E-2	2.72953E1	-3.26982E1	-3.26334E1	2.67932E1	1.16923E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.01219E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.17084E-1	-7.97987E-1	-9.13115E0	-9.14168E0	6.19888E-3	9.32455E-2	2.72833E1	-3.26702E1	-3.26739E1	2.68035E1	1.17093E-7	2.51915E-3	2.51915E-3	6.34099E-3	2.00818E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.17227E-1	-7.98154E-1	-9.13105E0	-9.14185E0	6.22272E-3	9.32455E-2	2.7307E1	-3.25955E1	-3.26325E1	2.68063E1	1.17118E-7	2.51694E-3	2.51694E-3	6.31727E-3	2.02266E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.1718E-1	-7.98202E-1	-9.13095E0	-9.1419E0	5.88894E-3	9.33886E-2	2.73249E1	-3.26494E1	-3.26242E1	2.68208E1	1.1717E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.00386E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.1718E-1	-7.98154E-1	-9.13103E0	-9.14211E0	5.6982E-3	9.33886E-2	2.73207E1	-3.26651E1	-3.26278E1	2.67884E1	1.17042E-7	2.52473E-3	2.52473E-3	6.31858E-3	1.99931E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.16965E-1	-7.98059E-1	-9.13072E0	-9.14176E0	5.98431E-3	9.33647E-2	2.73228E1	-3.26425E1	-3.26089E1	2.67914E1	1.16973E-7	2.51417E-3	2.51417E-3	6.34518E-3	1.98661E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.16965E-1	-7.98154E-1	-9.13088E0	-9.1419E0	6.05583E-3	9.30071E-2	2.73045E1	-3.26976E1	-3.26095E1	2.68052E1	1.16829E-7	2.52647E-3	2.52647E-3	6.31837E-3	1.9963E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.1687E-1	-7.98488E-1	-9.13122E0	-9.14192E0	5.96046E-3	9.32217E-2	2.73364E1	-3.26431E1	-3.26679E1	2.67848E1	1.17083E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.99803E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.16989E-1	-7.98512E-1	-9.13103E0	-9.1419E0	6.24657E-3	9.3317E-2	2.72787E1	-3.26549E1	-3.26278E1	2.68094E1	1.16778E-7	2.52099E-3	2.52099E-3	6.29098E-3	2.01197E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.16774E-1	-7.98392E-1	-9.13103E0	-9.14166E0	6.34193E-3	9.31025E-2	2.73285E1	-3.26747E1	-3.262E1	2.68176E1	1.16823E-7	2.52384E-3	2.52384E-3	6.32896E-3	1.9985E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16846E-1	-7.98392E-1	-9.13086E0	-9.14166E0	6.1512E-3	9.3317E-2	2.72877E1	-3.26687E1	-3.26597E1	2.68163E1	1.16938E-7	2.52139E-3	2.52139E-3	6.33538E-3	1.99931E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16941E-1	-7.98464E-1	-9.13079E0	-9.14171E0	5.81741E-3	9.31978E-2	2.73117E1	-3.26398E1	-3.26518E1	2.68268E1	1.17073E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9968E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.16941E-1	-7.98225E-1	-9.13093E0	-9.14168E0	6.05583E-3	9.29832E-2	2.73228E1	-3.26508E1	-3.26467E1	2.68244E1	1.17032E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.98419E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.16941E-1	-7.98202E-1	-9.13095E0	-9.14183E0	6.10352E-3	9.30309E-2	2.72931E1	-3.26795E1	-3.26633E1	2.6819E1	1.16823E-7	2.51954E-3	2.51954E-3	6.33977E-3	1.98491E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.17156E-1	-7.97987E-1	-9.13131E0	-9.14133E0	5.8651E-3	9.29832E-2	2.73117E1	-3.26663E1	-3.26236E1	2.6831E1	1.17145E-7	2.51804E-3	2.51804E-3	6.31858E-3	1.99048E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.17084E-1	-7.98392E-1	-9.13131E0	-9.14154E0	5.79357E-3	9.30309E-2	2.73016E1	-3.26561E1	-3.26467E1	2.6825E1	1.17173E-7	2.52384E-3	2.52384E-3	6.32356E-3	1.9968E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.17108E-1	-7.98631E-1	-9.13126E0	-9.14168E0	5.65052E-3	9.30071E-2	2.7297E1	-3.26689E1	-3.26277E1	2.67908E1	1.16973E-7	2.52061E-3	2.52061E-3	6.32896E-3	1.9934E-1