[Scan]
initial_time=2015-12-15T18:27:24
final_time=2015-12-15T18:27:44
ip_count=19
run=1017
dataset=3
scan=138
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08771E-4
ql1_vset=
ql1_vmon=-8.17347E-1
ql1_imon=1.3574E-8
ql2_vset=
ql2_vmon=-7.9813E-1
ql2_imon=1.99869E-9
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=2.82109E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-4.22597E-11
mult1=-1.04026E-8
mult2=-2.71462E-9
rf_tmon=-5.34156E-3
rf_agc=3.30272E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=1.71777E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6609E0
bslens_imon=2.84411E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19889E1
lens5a_imon=1.98757E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05047E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53818E1
cs_ef1b_imon=3.18165E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05147E1
cs_ea1_imon=1.09847E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41444E0
lens1_imon=2.96445E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6455E1
os_ef1alow_imon=2.98808E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03867E1
cs_ea2_imon=1.40286E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=3.03604E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.24415E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11361E1
os_restr1_imon=4.32501E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15559E1
os_ea1_imon=2.39992E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.0913E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23322E0
cs_ionrep_imon=9.46634E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93367E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=1.94863E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=3.2522E-8
tplens_vset=1.4E-1
tplens_vmon=1.59129E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26446E1
iondef3_imon=1.48781E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26398E1
iondef2_imon=1.60426E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98257E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=4.08336E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26213E0
ionrepsh_imon=8.58149E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.17976E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74634E1
cs_ef2b_imon=3.13752E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39013E0
os_ea2_imon=-4.90015E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.0064E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71316E1
cs_ef2a_imon=3.18999E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04008E0
os_ef2alow_imon=-2.56068E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22137E-1
os_ef2bup_imon=-5.32003E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10892E1
os_restr2_imon=3.43674E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.29999E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01514E1
cs_anode2_imon=2.08973E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.0875E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67956E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=4.39433E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=7.28236E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14404E0
cs_ionaccel_imon=-9.34263E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47362E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56266E1
einzel_imon=7.7782E-6
window_vset=0.0E0
window_vmon=1.55131E-1
window_imon=-8.50857E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39247E-4
mask2_vset=0.0E0
mask2_vmon=-1.86321E1
mask2_imon=-7.22272E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.40641E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.68437E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=6.99937E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.64179E0
defgridb_imon=6.26318E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33242E1
os_fil1_imon=9.4169E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0785E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63807E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31798E1
cs_fil1_imon=6.65028E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.80118E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66142E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.67379E-2
os_fil2_imon=-2.52438E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98765E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.4912E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28903E-1
cs_fil2_imon=-2.36221E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28102E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22216E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29157E-3
inlet_lpb_pmon=1.99562E-1
chamber_ion_pmon=1.16916E-7
chamber_cvt_pmon=2.51393E-3
foreline_cvt_pmon=2.51393E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.1038E-1
res40_imon=-2.32784E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.17299E-1	-7.98202E-1	-9.13091E0	-9.14178E0	6.05583E-3	9.29117E-2	2.73151E1	-3.26573E1	-3.26124E1	2.6789E1	1.17073E-7	2.52599E-3	2.52599E-3	6.32896E-3	1.9985E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.17323E-1	-7.98106E-1	-9.13117E0	-9.14168E0	5.79357E-3	9.29594E-2	2.73045E1	-3.26811E1	-3.26505E1	2.68082E1	1.16823E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9985E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.17299E-1	-7.98321E-1	-9.13134E0	-9.14168E0	6.05583E-3	9.29117E-2	2.73144E1	-3.26961E1	-3.26631E1	2.68016E1	1.16886E-7	2.5225E-3	2.5225E-3	6.31858E-3	2.00818E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.17132E-1	-7.98392E-1	-9.1315E0	-9.1418E0	5.84126E-3	9.31025E-2	2.72915E1	-3.26992E1	-3.26484E1	2.68204E1	1.16867E-7	2.52553E-3	2.52553E-3	6.32858E-3	2.01747E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.17204E-1	-7.97987E-1	-9.13091E0	-9.14185E0	6.17504E-3	9.28402E-2	2.73297E1	-3.26681E1	-3.2629E1	2.681E1	1.17023E-7	2.51096E-3	2.51096E-3	6.33436E-3	2.02597E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.17466E-1	-7.98106E-1	-9.1311E0	-9.14166E0	6.05583E-3	9.30548E-2	2.7288E1	-3.26697E1	-3.26166E1	2.6828E1	1.16956E-7	2.5188E-3	2.5188E-3	6.31563E-3	2.01809E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.17609E-1	-7.98416E-1	-9.13131E0	-9.1418E0	6.03199E-3	9.28879E-2	2.72943E1	-3.26711E1	-3.26386E1	2.68064E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.17585E-1	-7.98321E-1	-9.13122E0	-9.14154E0	6.24657E-3	9.33409E-2	2.72903E1	-3.26614E1	-3.26071E1	2.68088E1	1.16973E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.00705E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.17585E-1	-7.98321E-1	-9.13126E0	-9.14168E0	6.10352E-3	9.30548E-2	2.72769E1	-3.26759E1	-3.25954E1	2.68022E1	1.16923E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.97984E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.17657E-1	-7.98416E-1	-9.13091E0	-9.14164E0	5.81741E-3	9.29832E-2	2.73171E1	-3.26615E1	-3.26062E1	2.67968E1	1.17032E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.98419E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.17513E-1	-7.9844E-1	-9.131E0	-9.14185E0	5.62668E-3	9.29356E-2	2.72841E1	-3.26735E1	-3.26236E1	2.68034E1	1.1693E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.98419E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.17418E-1	-7.98225E-1	-9.13069E0	-9.14183E0	5.88894E-3	9.26256E-2	2.72573E1	-3.27121E1	-3.26508E1	2.6801E1	1.16778E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.99283E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.1768E-1	-7.98607E-1	-9.13112E0	-9.14178E0	5.93662E-3	9.30071E-2	2.73003E1	-3.26488E1	-3.26458E1	2.67914E1	1.16823E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.01047E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.17633E-1	-7.98774E-1	-9.13131E0	-9.1418E0	6.10352E-3	9.30309E-2	2.73252E1	-3.26655E1	-3.26461E1	2.68058E1	1.1688E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.00673E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.17347E-1	-7.9844E-1	-9.13143E0	-9.14192E0	5.76973E-3	9.27925E-2	2.72769E1	-3.26567E1	-3.2608E1	2.68076E1	1.16727E-7	2.51116E-3	2.51116E-3	6.31288E-3	1.9963E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.1737E-1	-7.98178E-1	-9.13126E0	-9.14199E0	5.88894E-3	9.30071E-2	2.73149E1	-3.26052E1	-3.26272E1	2.67962E1	1.16923E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9934E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.17657E-1	-7.98154E-1	-9.13136E0	-9.14209E0	5.81741E-3	9.29356E-2	2.72945E1	-3.26296E1	-3.26372E1	2.6801E1	1.16731E-7	2.52139E-3	2.52139E-3	6.29067E-3	1.99577E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.17394E-1	-7.98488E-1	-9.13115E0	-9.14195E0	5.6982E-3	9.30071E-2	2.73075E1	-3.26455E1	-3.26467E1	2.6804E1	1.16774E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9917E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.17418E-1	-7.98035E-1	-9.13112E0	-9.1418E0	5.8651E-3	9.3174E-2	2.72886E1	-3.26437E1	-3.2613E1	2.68036E1	1.16778E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.00325E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.17347E-1	-7.9813E-1	-9.13131E0	-9.14204E0	5.8651E-3	9.30548E-2	2.73063E1	-3.26398E1	-3.26446E1	2.67956E1	1.16916E-7	2.51393E-3	2.51393E-3	6.29157E-3	1.99562E-1