[Scan]
initial_time=2015-12-15T18:27:51
final_time=2015-12-15T18:28:11
ip_count=19
run=1017
dataset=3
scan=139
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08807E-4
ql1_vset=
ql1_vmon=-8.16941E-1
ql1_imon=1.35046E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=2.00574E-9
ql3_vset=
ql3_vmon=-9.13098E0
ql3_imon=2.98631E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=-6.01292E-11
mult1=-1.00294E-8
mult2=-2.75853E-9
rf_tmon=-4.38024E-3
rf_agc=3.36039E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.36578E-3
ql5_imon=1.66543E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65626E0
bslens_imon=2.53204E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19847E1
lens5a_imon=1.98024E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1252E2
lens4a_imon=2.05185E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53514E1
cs_ef1b_imon=3.16758E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04639E2
lens23_imon=1.02183E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04841E1
cs_ea1_imon=1.08807E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42398E0
lens1_imon=2.54306E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04192E1
cs_ea2_imon=1.41092E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=3.04865E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.24434E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.31797E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15226E1
os_ea1_imon=2.37471E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24475E0
cs_ionrep_imon=9.49232E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93493E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=1.94296E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=3.24525E-8
tplens_vset=1.4E-1
tplens_vmon=1.58695E0
tplens_imon=-2.2269E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26488E1
iondef3_imon=1.49283E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26675E1
iondef2_imon=1.57694E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98195E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=4.07796E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27536E0
ionrepsh_imon=8.45654E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33633E1
lens5b_imon=2.18739E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74784E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38432E0
os_ea2_imon=-4.39395E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00564E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.18452E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07438E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10638E-1
os_ef2bup_imon=-5.29365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11069E1
os_restr2_imon=3.43896E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.31801E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01947E1
cs_anode2_imon=2.09757E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.09982E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.09963E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=4.36721E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=7.2847E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14215E0
cs_ionaccel_imon=-8.42748E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56183E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=1.23639E-1
window_imon=-1.1599E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.86236E1
mask2_imon=-4.39104E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92674E3
multa_neg_imon=6.98368E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.27847E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.14162E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27178E0
defgridb_imon=6.28214E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33249E1
os_fil1_imon=9.4203E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07365E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63774E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31816E1
cs_fil1_imon=7.49722E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.63557E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66173E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.73878E-2
os_fil2_imon=-2.5158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01318E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.53334E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29004E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.49661E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22269E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.00363E-1
chamber_ion_pmon=1.16873E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.4002E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.65899E-1
res40_imon=-2.41047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.1718E-1	-7.97987E-1	-9.13169E0	-9.14187E0	5.84126E-3	9.28402E-2	2.72992E1	-3.27104E1	-3.26065E1	2.681E1	1.16886E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.00463E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.17585E-1	-7.98035E-1	-9.13134E0	-9.14171E0	5.84126E-3	9.26018E-2	2.72984E1	-3.2645E1	-3.26315E1	2.67788E1	1.16923E-7	2.51954E-3	2.51954E-3	6.32896E-3	1.98491E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.17227E-1	-7.98249E-1	-9.13105E0	-9.14195E0	5.98431E-3	9.2721E-2	2.73086E1	-3.27338E1	-3.25982E1	2.68082E1	1.17249E-7	2.51359E-3	2.51359E-3	6.30182E-3	1.98872E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.17251E-1	-7.98392E-1	-9.131E0	-9.14192E0	6.1512E-3	9.28879E-2	2.73129E1	-3.26254E1	-3.26398E1	2.68166E1	1.16818E-7	2.52025E-3	2.52025E-3	6.32858E-3	1.98561E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.17227E-1	-7.98154E-1	-9.13117E0	-9.14207E0	6.07967E-3	9.29356E-2	2.73051E1	-3.26413E1	-3.26413E1	2.68204E1	1.16981E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.98764E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.1706E-1	-7.98178E-1	-9.13134E0	-9.14197E0	6.24657E-3	9.29594E-2	2.73087E1	-3.26597E1	-3.2602E1	2.67992E1	1.1693E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.00151E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.1687E-1	-7.98154E-1	-9.13122E0	-9.14202E0	6.05583E-3	9.29356E-2	2.73105E1	-3.26326E1	-3.26194E1	2.67956E1	1.16774E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.01047E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.17275E-1	-7.98321E-1	-9.1311E0	-9.14185E0	6.17504E-3	9.2864E-2	2.72903E1	-3.27015E1	-3.26095E1	2.68214E1	1.1693E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.99803E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.17323E-1	-7.98249E-1	-9.13126E0	-9.1418E0	6.1512E-3	9.32693E-2	2.72935E1	-3.26556E1	-3.2644E1	2.68076E1	1.16873E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.00705E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.1718E-1	-7.97915E-1	-9.13107E0	-9.14178E0	5.84126E-3	9.31025E-2	2.73088E1	-3.26516E1	-3.2636E1	2.68069E1	1.16916E-7	2.51814E-3	2.51814E-3	6.30212E-3	2.00399E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.16941E-1	-7.98059E-1	-9.13119E0	-9.14168E0	6.17504E-3	9.3174E-2	2.7302E1	-3.26468E1	-3.2634E1	2.67998E1	1.16999E-7	2.51952E-3	2.51952E-3	6.30171E-3	1.99703E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.1718E-1	-7.98202E-1	-9.1311E0	-9.14185E0	6.05583E-3	9.2864E-2	2.73351E1	-3.26386E1	-3.25695E1	2.68292E1	1.16835E-7	2.51693E-3	2.51693E-3	6.32978E-3	2.01174E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09665E0	-8.1718E-1	-7.98178E-1	-9.13131E0	-9.14187E0	5.98431E-3	9.29356E-2	2.73249E1	-3.26302E1	-3.26386E1	2.6786E1	1.16829E-7	2.52428E-3	2.52428E-3	6.32936E-3	2.00847E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09673E0	-8.17251E-1	-7.98225E-1	-9.1311E0	-9.14197E0	6.03199E-3	9.28164E-2	2.73219E1	-3.26549E1	-3.26218E1	2.67902E1	1.1688E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.01197E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0965E0	-8.16894E-1	-7.98488E-1	-9.13112E0	-9.14154E0	6.03199E-3	9.29594E-2	2.72859E1	-3.26512E1	-3.25852E1	2.68004E1	1.1688E-7	2.52318E-3	2.52318E-3	6.29645E-3	1.99977E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.17013E-1	-7.98249E-1	-9.13143E0	-9.1419E0	6.03199E-3	9.29356E-2	2.7285E1	-3.2659E1	-3.26024E1	2.68124E1	1.16677E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.00673E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.17084E-1	-7.98488E-1	-9.13129E0	-9.14199E0	5.98431E-3	9.32217E-2	2.73327E1	-3.26819E1	-3.26573E1	2.68192E1	1.16923E-7	2.52492E-3	2.52492E-3	6.31817E-3	2.00705E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09665E0	-8.17013E-1	-7.98392E-1	-9.1311E0	-9.1419E0	5.8651E-3	9.27925E-2	2.72962E1	-3.2626E1	-3.26278E1	2.67842E1	1.17032E-7	2.51662E-3	2.51662E-3	6.29098E-3	2.01022E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.16989E-1	-7.98416E-1	-9.13093E0	-9.1419E0	5.93662E-3	9.29356E-2	2.73417E1	-3.26124E1	-3.26608E1	2.68088E1	1.16823E-7	2.51739E-3	2.51739E-3	6.30202E-3	1.98491E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.16941E-1	-7.98321E-1	-9.13098E0	-9.14176E0	6.36578E-3	9.30309E-2	2.73375E1	-3.26675E1	-3.26488E1	2.6807E1	1.16873E-7	2.52276E-3	2.52276E-3	6.29128E-3	2.00363E-1