[Scan]
initial_time=2015-12-15T18:28:18
final_time=2015-12-15T18:28:37
ip_count=19
run=1017
dataset=3
scan=140
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09634E0
qbias_imon=-1.0882E-4
ql1_vset=
ql1_vmon=-8.17132E-1
ql1_imon=1.35658E-8
ql2_vset=
ql2_vmon=-7.98273E-1
ql2_imon=2.01654E-9
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=3.41499E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=-5.06043E-11
mult1=-9.34305E-9
mult2=-2.7246E-9
rf_tmon=-5.97844E-3
rf_agc=3.24804E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.34193E-3
ql5_imon=1.6991E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66614E0
bslens_imon=2.53775E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19887E1
lens5a_imon=2.00722E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.05215E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53607E1
cs_ef1b_imon=3.1774E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02197E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05361E1
cs_ea1_imon=1.08364E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38698E0
lens1_imon=2.69277E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64712E1
os_ef1alow_imon=2.97925E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04591E1
cs_ea2_imon=1.3796E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84373E1
cs_ef1a_imon=3.04895E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.2428E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.31147E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15143E1
os_ea1_imon=2.41531E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63744E1
os_ef1bup_imon=3.10026E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24729E0
cs_ionrep_imon=9.31867E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93474E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01715E1
cs_anode1_imon=1.95628E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=3.23858E-8
tplens_vset=1.4E-1
tplens_vmon=1.63182E0
tplens_imon=-3.4621E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26206E1
iondef3_imon=1.51587E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26621E1
iondef2_imon=1.57247E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98414E-4
ql6_vset=1.0E-1
ql6_vmon=9.27448E-2
ql6_imon=4.05042E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27673E0
ionrepsh_imon=8.38859E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33802E1
lens5b_imon=2.20946E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74955E1
cs_ef2b_imon=3.13388E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3993E0
os_ea2_imon=-7.13916E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.0085E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71152E1
cs_ef2a_imon=3.1866E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09908E0
os_ef2alow_imon=-2.64794E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.218E-1
os_ef2bup_imon=-5.38316E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11059E1
os_restr2_imon=3.42509E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.28775E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01862E1
cs_anode2_imon=2.10313E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72919E1
iondef1_imon=1.11248E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67746E1
iondef4_imon=1.07557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=4.39239E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.28709E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15963E0
cs_ionaccel_imon=-8.85799E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02053E2
cs_ionfocb_imon=1.47339E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.66307E-6
window_vset=0.0E0
window_vmon=1.66505E-1
window_imon=-9.56568E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.39063E-4
mask2_vset=0.0E0
mask2_vmon=-1.86244E1
mask2_imon=-5.60262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92716E3
multa_neg_imon=6.92859E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.44552E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=6.93219E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37149E0
defgridb_imon=6.05979E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33238E1
os_fil1_imon=9.41872E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07913E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63746E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31826E1
cs_fil1_imon=5.96029E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.0348E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65954E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58961E-2
os_fil2_imon=-2.6735E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19775E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.52154E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31876E-1
cs_fil2_imon=-2.30197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.82031E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22275E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.00192E-1
chamber_ion_pmon=1.17023E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40057E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.4303E-1
res40_imon=-2.36133E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09642E0	-8.17394E-1	-7.9844E-1	-9.13126E0	-9.14202E0	6.4373E-3	9.30786E-2	2.73225E1	-3.262E1	-3.265E1	2.68069E1	1.16829E-7	2.51771E-3	2.51771E-3	6.29098E-3	2.00151E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.17418E-1	-7.98488E-1	-9.13134E0	-9.14168E0	6.1512E-3	9.30309E-2	2.72851E1	-3.26978E1	-3.26335E1	2.68022E1	1.16981E-7	2.50898E-3	2.50898E-3	6.31837E-3	1.99977E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.17323E-1	-7.98321E-1	-9.13107E0	-9.1419E0	6.19888E-3	9.29117E-2	2.72968E1	-3.26655E1	-3.2636E1	2.67896E1	1.16999E-7	2.51838E-3	2.51838E-3	6.3245E-3	2.00787E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.17347E-1	-7.98535E-1	-9.131E0	-9.14142E0	6.05583E-3	9.31263E-2	2.73405E1	-3.26891E1	-3.26482E1	2.68022E1	1.16873E-7	2.52492E-3	2.52492E-3	6.34518E-3	2.00876E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.17132E-1	-7.98583E-1	-9.13067E0	-9.14128E0	5.96046E-3	9.29356E-2	2.73346E1	-3.26773E1	-3.26419E1	2.68166E1	1.16981E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.00325E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.17299E-1	-7.98702E-1	-9.13081E0	-9.14168E0	6.12736E-3	9.25779E-2	2.72853E1	-3.2647E1	-3.26422E1	2.67884E1	1.16923E-7	2.52492E-3	2.52492E-3	6.32896E-3	2.00021E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.17323E-1	-7.98678E-1	-9.13074E0	-9.14152E0	5.88894E-3	9.27925E-2	2.72961E1	-3.26621E1	-3.26032E1	2.67956E1	1.17134E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.17418E-1	-7.98535E-1	-9.13103E0	-9.14183E0	6.31809E-3	9.31263E-2	2.73279E1	-3.26873E1	-3.2632E1	2.68064E1	1.16778E-7	2.52757E-3	2.52757E-3	6.31837E-3	1.99283E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.1737E-1	-7.98512E-1	-9.13069E0	-9.14159E0	6.1512E-3	9.28879E-2	2.72991E1	-3.26849E1	-3.2608E1	2.68169E1	1.16677E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99456E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.17394E-1	-7.98225E-1	-9.13095E0	-9.14173E0	5.8651E-3	9.28879E-2	2.72883E1	-3.26506E1	-3.26579E1	2.68142E1	1.17134E-7	2.52318E-3	2.52318E-3	6.29645E-3	1.98937E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.17132E-1	-7.98178E-1	-9.1311E0	-9.14168E0	5.98431E-3	9.30786E-2	2.72756E1	-3.26455E1	-3.26065E1	2.68166E1	1.17032E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.99456E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16798E-1	-7.98178E-1	-9.13095E0	-9.14176E0	6.00815E-3	9.31501E-2	2.72979E1	-3.2644E1	-3.2641E1	2.68346E1	1.17073E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.00021E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-8.16965E-1	-7.98249E-1	-9.13091E0	-9.14161E0	6.07967E-3	9.32693E-2	2.73287E1	-3.26266E1	-3.26449E1	2.6804E1	1.16778E-7	2.52318E-3	2.52318E-3	6.29098E-3	2.01197E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.17132E-1	-7.97868E-1	-9.13079E0	-9.14147E0	6.07967E-3	9.32455E-2	2.73461E1	-3.26627E1	-3.2637E1	2.68076E1	1.16823E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.01219E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.16846E-1	-7.98321E-1	-9.13115E0	-9.14187E0	6.05583E-3	9.28164E-2	2.72799E1	-3.26305E1	-3.26355E1	2.683E1	1.1693E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.01197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.17084E-1	-7.98273E-1	-9.13122E0	-9.14173E0	6.19888E-3	9.28879E-2	2.72757E1	-3.27023E1	-3.26236E1	2.6819E1	1.17053E-7	2.52197E-3	2.52197E-3	6.2815E-3	1.99776E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.17299E-1	-7.98392E-1	-9.13105E0	-9.14195E0	6.29425E-3	9.30786E-2	2.73051E1	-3.26322E1	-3.25773E1	2.67895E1	1.16861E-7	2.52083E-3	2.52083E-3	6.32138E-3	2.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.1718E-1	-7.98011E-1	-9.13129E0	-9.14192E0	6.12736E-3	9.27925E-2	2.73412E1	-3.26713E1	-3.26358E1	2.68462E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.17704E-1	-7.9782E-1	-9.13129E0	-9.14164E0	6.1512E-3	9.29832E-2	2.73134E1	-3.2688E1	-3.26095E1	2.67989E1	1.16835E-7	2.51581E-3	2.51581E-3	6.31858E-3	2.02245E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09634E0	-8.17132E-1	-7.98273E-1	-9.13115E0	-9.14195E0	6.34193E-3	9.27448E-2	2.72919E1	-3.26621E1	-3.26206E1	2.67746E1	1.17023E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.00192E-1