[Scan]
initial_time=2015-12-15T18:58:25
final_time=2015-12-15T18:58:44
ip_count=19
run=1017
dataset=3
scan=141
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.76817E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-8.58569E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=4.55034E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-2.31811E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=9.81879E-10
mult1=-2.02759E-8
mult2=-2.72859E-9
rf_tmon=-5.23942E-3
rf_agc=3.32915E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.19888E-3
ql5_imon=5.06055E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6744E0
bslens_imon=2.55204E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2021E1
lens5a_imon=1.98253E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53621E1
cs_ef1b_imon=2.85741E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04581E2
lens23_imon=1.02048E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04866E1
cs_ea1_imon=2.52517E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98441E0
lens1_imon=1.47094E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64718E1
os_ef1alow_imon=2.98426E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04264E1
cs_ea2_imon=1.54314E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8411E1
cs_ef1a_imon=2.94464E-5
olens2_vset=0.0E0
olens2_vmon=1.88351E-3
olens2_imon=4.92835E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1132E1
os_restr1_imon=2.88104E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15618E1
os_ea1_imon=1.86295E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63682E1
os_ef1bup_imon=3.10172E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26426E0
cs_ionrep_imon=1.19795E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93142E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=2.94881E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99984E1
olens4_imon=4.18186E-11
tplens_vset=0.0E0
tplens_vmon=-1.60841E0
tplens_imon=-5.24398E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99967E1
iondef3_imon=8.62497E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98699E1
iondef2_imon=9.27502E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02987E2
lens6_imon=2.98172E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=6.04188E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27353E0
ionrepsh_imon=1.80003E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3353E1
lens5b_imon=2.18206E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74397E1
cs_ef2b_imon=3.13856E-5
os_ea2_vset=2.0E1
os_ea2_vmon=1.99749E1
os_ea2_imon=9.2785E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06139E2
lens4b_imon=2.00362E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7146E1
cs_ef2a_imon=3.17887E-5
os_ef2alow_vset=-6.7E1
os_ef2alow_vmon=-6.73158E1
os_ef2alow_imon=3.09408E-5
os_ef2bup_vset=-7.0E1
os_ef2bup_vmon=-7.02419E1
os_ef2bup_imon=2.99225E-5
os_restr2_vset=4.1E1
os_restr2_vmon=4.10886E1
os_restr2_imon=2.87305E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.30658E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0174E1
cs_anode2_imon=2.25862E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58107E1
iondef1_imon=4.92977E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50311E1
iondef4_imon=5.32467E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27964E1
olens3_imon=2.37385E-9
olens1_vset=0.0E0
olens1_vmon=4.29153E-4
olens1_imon=4.74906E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16547E0
cs_ionaccel_imon=-1.74747E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47285E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.71217E-6
window_vset=0.0E0
window_vmon=1.96255E-1
window_imon=-1.02809E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86234E1
mask2_imon=-6.56243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.26925E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.46973E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.09197E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2354E0
defgridb_imon=6.09082E-5
os_fil1_bias_vset=0.0E0
os_fil1_bias_vmon=9.85333E-2
os_fil1_imon=5.64825E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.52489E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65526E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30879E1
cs_fil1_imon=9.99362E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63501E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66331E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1301E-4
os_fil2_imon=-2.44909E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.97206E-4
os_fil2_shield_vset=-7.3E1
os_fil2_shield_vmon=-7.64495E1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33647E-1
cs_fil2_imon=-2.35062E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62454E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22653E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.00325E-1
chamber_ion_pmon=1.16981E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.56889E-1
res40_imon=2.84334E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.115E3	0.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80021E1	-6.4373E-4	-8.80001E1	-4.76837E-5	5.84126E-3	9.30071E-2	1.58191E1	-1.98537E1	-1.99726E1	1.50112E1	1.16965E-7	2.52342E-3	2.52342E-3	6.29157E-3	1.98894E-1
2.0E0	1.24542E5	1.04E2	3.16E2	1.6E2	-7.33239E-2	-8.80021E1	-6.91414E-4	-8.8E1	4.76837E-5	5.96046E-3	9.32693E-2	1.58132E1	-1.99012E1	-1.99956E1	1.49986E1	1.16829E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.98247E-1
3.0E0	2.9E1	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80023E1	-4.76837E-4	-8.79999E1	1.66893E-4	6.05583E-3	9.30548E-2	1.57961E1	-1.98458E1	-1.99874E1	1.50132E1	1.16778E-7	2.52538E-3	2.52538E-3	6.30192E-3	1.99456E-1
4.0E0	2.3822E4	1.3E1	6.55E2	3.98E2	-7.23189E-2	-8.80024E1	-4.52995E-4	-8.8E1	1.66893E-4	6.22272E-3	9.32932E-2	1.57796E1	-1.98629E1	-1.99272E1	1.50016E1	1.16774E-7	2.52115E-3	2.52115E-3	6.3074E-3	1.99595E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80025E1	-4.29153E-4	-8.80002E1	2.86102E-4	5.8651E-3	9.30548E-2	1.58149E1	-1.98705E1	-1.9987E1	1.49944E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80025E1	-7.62939E-4	-8.79998E1	3.57628E-4	5.8651E-3	9.31263E-2	1.58209E1	-1.98645E1	-1.99642E1	1.50184E1	1.17032E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.00499E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80023E1	-4.52995E-4	-8.80002E1	1.43051E-4	6.17504E-3	9.27687E-2	1.57831E1	-1.98543E1	-1.9969E1	1.50106E1	1.16923E-7	2.52599E-3	2.52599E-3	6.31817E-3	2.01047E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80026E1	-9.05991E-4	-8.80001E1	5.00679E-4	5.81741E-3	9.27687E-2	1.57927E1	-1.98669E1	-1.99594E1	1.50094E1	1.17042E-7	2.51804E-3	2.51804E-3	6.33538E-3	1.99931E-1
1.2E1	2.32E2	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80025E1	-7.15256E-4	-8.79999E1	5.24521E-4	5.96046E-3	9.31025E-2	1.57992E1	-1.98451E1	-1.99544E1	1.50057E1	1.16973E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.00363E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80023E1	-8.10623E-4	-8.8E1	3.57628E-4	5.96046E-3	9.30548E-2	1.57885E1	-1.98753E1	-1.99751E1	1.50191E1	1.16916E-7	2.52448E-3	2.52448E-3	6.32858E-3	2.00064E-1
1.4E1	3.843E3	1.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80023E1	-6.4373E-4	-8.80001E1	3.09944E-4	6.12736E-3	9.30309E-2	1.58029E1	-1.98603E1	-1.99744E1	1.49916E1	1.1699E-7	2.52139E-3	2.52139E-3	6.30461E-3	1.99312E-1
1.5E1	8.1E1	0.0E0	6.06E2	4.11E2	-7.36328E-2	-8.80023E1	-6.91414E-4	-8.8E1	3.33786E-4	5.88894E-3	9.31025E-2	1.58167E1	-1.98563E1	-1.99763E1	1.49851E1					
1.6E1	9.92E2	3.0E0	6.47E2	4.41E2	-7.3401E-2	-8.8002E1	-8.82149E-4	-8.79999E1	3.33786E-4	5.76973E-3	9.31501E-2	1.57902E1	-1.98375E1	-1.99838E1	1.50086E1	1.1693E-7	2.52099E-3	2.52099E-3	6.29645E-3	2.00151E-1
1.7E1	6.94E2	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80024E1	-5.24521E-4	-8.79999E1	5.24521E-4	5.79357E-3	9.31025E-2	1.57458E1	-1.98507E1	-1.99618E1	1.50166E1	1.16774E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.00021E-1
1.8E1	2.832E3	2.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80024E1	-3.57628E-4	-8.79996E1	1.43051E-4	5.60284E-3	9.31263E-2	1.58215E1	-1.98783E1	-1.99528E1	1.50172E1	1.16783E-7	2.51693E-3	2.51693E-3	6.32418E-3	1.99224E-1
1.9E1	2.408E3	2.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80022E1	-5.96046E-4	-8.79998E1	3.09944E-4	5.84126E-3	9.31501E-2	1.57843E1	-1.9823E1	-1.99546E1	1.50449E1	1.17023E-7	2.51954E-3	2.51954E-3	6.28592E-3	2.00363E-1
2.0E1	3.202E4	2.0E1	8.08E2	5.58E2	-7.24736E-2	-8.80023E1	-7.86781E-4	-8.79997E1	5.00679E-4	5.36442E-3	9.2864E-2	1.57767E1	-1.98558E1	-1.9972E1	1.50202E1	1.1693E-7	2.52428E-3	2.52428E-3	6.28552E-3	2.00673E-1
2.1E1	7.0E1	0.0E0	8.49E2	5.88E2	-7.14689E-2	-8.80024E1	-8.58307E-4	-8.8E1	3.8147E-4	5.67436E-3	9.30786E-2	1.57686E1	-1.98567E1	-1.99792E1	1.50142E1	1.16727E-7	2.52757E-3	2.52757E-3	6.32386E-3	1.99803E-1
2.2E1	2.362E3	0.0E0	8.89E2	6.17E2	-7.13143E-2	-8.80024E1	-1.07288E-3	-8.80002E1	4.05312E-4	5.8651E-3	9.31263E-2	1.57861E1	-1.9844E1	-1.99832E1	1.501E1	1.16973E-7	2.51847E-3	2.51847E-3	6.35059E-3	1.9934E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80023E1	-9.29832E-4	-8.8E1	5.24521E-4	6.19888E-3	9.30786E-2	1.58107E1	-1.98699E1	-1.99967E1	1.50311E1	1.16981E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.00325E-1