[Scan]
initial_time=2015-12-15T18:58:51
final_time=2015-12-15T18:59:11
ip_count=19
run=1017
dataset=3
scan=142
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.82555E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-7.8057E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=4.74012E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.32222E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=9.58991E-10
mult1=-2.38453E-8
mult2=-2.71542E-9
rf_tmon=-2.84248E-3
rf_agc=3.49688E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.88894E-3
ql5_imon=5.20205E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66307E0
bslens_imon=2.58549E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19734E1
lens5a_imon=1.97129E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.05137E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53823E1
cs_ef1b_imon=2.78721E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02144E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04809E1
cs_ea1_imon=2.58348E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99795E0
lens1_imon=1.58866E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64481E1
os_ef1alow_imon=2.978E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04166E1
cs_ea2_imon=1.53228E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84834E1
cs_ef1a_imon=2.92205E-5
olens2_vset=0.0E0
olens2_vmon=1.50204E-3
olens2_imon=4.52125E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11291E1
os_restr1_imon=2.87305E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15283E1
os_ea1_imon=1.8961E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64012E1
os_ef1bup_imon=3.08678E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24035E0
cs_ionrep_imon=1.18423E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93309E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0174E1
cs_anode1_imon=2.89251E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99984E1
olens4_imon=5.00679E-12
tplens_vset=0.0E0
tplens_vmon=-1.6308E0
tplens_imon=-1.93559E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99825E1
iondef3_imon=8.6571E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98803E1
iondef2_imon=9.49954E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98309E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=6.19602E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27671E0
ionrepsh_imon=1.75682E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33752E1
lens5b_imon=2.18542E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74936E1
cs_ef2b_imon=3.12744E-5
os_ea2_vset=2.0E1
os_ea2_vmon=1.99223E1
os_ea2_imon=9.28473E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71292E1
cs_ef2a_imon=3.18826E-5
os_ef2alow_vset=-6.7E1
os_ef2alow_vmon=-6.73082E1
os_ef2alow_imon=3.09199E-5
os_ef2bup_vset=-7.0E1
os_ef2bup_vmon=-7.0228E1
os_ef2bup_imon=2.98739E-5
os_restr2_vset=4.1E1
os_restr2_vmon=4.10932E1
os_restr2_imon=2.86471E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.30667E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01746E1
cs_anode2_imon=2.25028E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58155E1
iondef1_imon=5.14973E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49959E1
iondef4_imon=5.24126E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27964E1
olens3_imon=2.39065E-9
olens1_vset=0.0E0
olens1_vmon=7.62939E-4
olens1_imon=4.4831E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15215E0
cs_ionaccel_imon=-1.83435E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47164E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56596E1
einzel_imon=7.61486E-6
window_vset=0.0E0
window_vmon=1.97414E-1
window_imon=-1.1532E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39251E-4
mask2_vset=0.0E0
mask2_vmon=-1.86089E1
mask2_imon=-8.2653E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.3582E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93686E3
defgrida_imon=6.65001E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50162E3
multb_neg_imon=6.95879E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3495E0
defgridb_imon=6.18348E-5
os_fil1_bias_vset=0.0E0
os_fil1_bias_vmon=1.00478E-1
os_fil1_imon=5.3181E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.61756E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62861E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30828E1
cs_fil1_imon=9.96796E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63414E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62575E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=6.75444E-3
os_fil2_imon=-2.44909E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.88691E-4
os_fil2_shield_vset=-7.3E1
os_fil2_shield_vmon=-7.63036E1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31774E-1
cs_fil2_imon=-2.12473E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=2.08033E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2232E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.00876E-1
chamber_ion_pmon=1.17073E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.29087E-1
res40_imon=2.73908E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=241
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.036E3	1.0E0	1.47E2	4.1E1	-7.40967E-2	-8.80022E1	-9.05991E-4	-8.79998E1	3.57628E-4	5.93662E-3	9.29356E-2	1.57849E1	-1.98801E1	-2.00309E1	1.50163E1	1.16717E-7	2.52093E-3	2.52093E-3	6.33341E-3	1.99119E-1
2.0E0	1.23432E5	1.21E2	3.16E2	1.6E2	-7.35556E-2	-8.80022E1	-7.39098E-4	-8.8E1	3.8147E-4	6.10352E-3	9.29832E-2	1.58097E1	-1.98503E1	-2.00032E1	1.49787E1	1.16829E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.00847E-1
3.0E0	1.5E1	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80026E1	-7.39098E-4	-8.79997E1	2.14577E-4	5.93662E-3	9.29117E-2	1.57919E1	-1.98498E1	-2.00143E1	1.49825E1	1.16841E-7	2.51838E-3	2.51838E-3	6.3245E-3	2.00244E-1
4.0E0	2.3597E4	1.3E1	6.55E2	3.98E2	-7.24736E-2	-8.80022E1	-8.10623E-4	-8.79997E1	5.48363E-4	5.88894E-3	9.31263E-2	1.58292E1	-1.98464E1	-1.99573E1	1.50445E1	1.1672E-7	2.52236E-3	2.52236E-3	6.31798E-3	1.98561E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80021E1	-1.14441E-3	-8.79996E1	4.05312E-4	5.6982E-3	9.31025E-2	1.58059E1	-1.98272E1	-1.99756E1	1.50178E1	1.16923E-7	2.52815E-3	2.52815E-3	6.32356E-3	1.9934E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.8002E1	-1.07288E-3	-8.79997E1	4.52995E-4	5.96046E-3	9.31263E-2	1.57957E1	-1.98507E1	-1.99624E1	1.49764E1	1.16854E-7	2.5199E-3	2.5199E-3	6.31563E-3	1.99716E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80022E1	-1.09673E-3	-8.79997E1	4.29153E-4	5.81741E-3	9.28164E-2	1.57777E1	-1.98308E1	-1.99738E1	1.49992E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80021E1	-8.10623E-4	-8.8E1	2.6226E-4	6.00815E-3	9.29594E-2	1.58132E1	-1.98635E1	-1.99514E1	1.50022E1	1.1693E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.9911E-1
1.2E1	2.31E2	1.0E0	4.85E2	3.23E2	-7.39421E-2	-8.80022E1	-9.53674E-4	-8.79998E1	2.14577E-4	6.07967E-3	9.28879E-2	1.58065E1	-1.98915E1	-1.99366E1	1.4971E1	1.16769E-7	2.52025E-3	2.52025E-3	6.31269E-3	1.99896E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.8002E1	-9.05991E-4	-8.79996E1	6.67572E-4	6.03199E-3	9.30309E-2	1.57908E1	-1.98405E1	-2.00027E1	1.49938E1	1.16626E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.99456E-1
1.4E1	3.816E3	1.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80022E1	-8.34465E-4	-8.79999E1	6.67572E-4	5.84126E-3	9.33409E-2	1.57985E1	-1.98611E1	-1.9906E1	1.50149E1	1.16724E-7	2.52169E-3	2.52169E-3	6.3074E-3	1.98491E-1
1.5E1	9.4E1	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80023E1	-8.10623E-4	-8.8E1	4.52995E-4	5.81741E-3	9.33409E-2	1.58227E1	-1.98417E1	-1.99608E1	1.49698E1	1.16823E-7	2.52815E-3	2.52815E-3	6.3074E-3	1.9968E-1
1.6E1	1.019E3	1.0E0	6.47E2	4.41E2	-7.36328E-2	-8.8002E1	-4.76837E-4	-8.79998E1	3.8147E-4	6.05583E-3	9.31263E-2	1.57945E1	-1.98807E1	-1.99834E1	1.49926E1	1.1688E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.00325E-1
1.7E1	6.8E2	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80019E1	-7.39098E-4	-8.8E1	2.86102E-4	6.07967E-3	9.30548E-2	1.58041E1	-1.98374E1	-1.999E1	1.49878E1	1.16927E-7	2.52134E-3	2.52134E-3	6.31827E-3	2.00775E-1
1.8E1	2.819E3	4.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80022E1	-9.05991E-4	-8.79999E1	4.76837E-4	5.84126E-3	9.2864E-2	1.58101E1	-1.98867E1	-1.99564E1	1.50028E1					
1.9E1	2.429E3	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80021E1	-9.29832E-4	-8.8E1	1.90735E-4	5.88894E-3	9.28164E-2	1.58141E1	-1.98537E1	-1.99943E1	1.49927E1	1.16677E-7	2.52867E-3	2.52867E-3	6.33486E-3	1.99803E-1
2.0E1	3.2113E4	7.0E0	8.08E2	5.58E2	-7.38649E-2	-8.80019E1	-7.86781E-4	-8.80001E1	9.53674E-5	6.00815E-3	9.31025E-2	1.58142E1	-1.98477E1	-1.99879E1	1.50064E1	1.16936E-7	2.51941E-3	2.51941E-3	6.28893E-3	2.01004E-1
2.1E1	8.6E1	0.0E0	8.49E2	5.88E2	-7.37874E-2	-8.80023E1	-4.29153E-4	-8.80001E1	2.6226E-4	6.00815E-3	9.28402E-2	1.58002E1	-1.98499E1	-1.9975E1	1.50213E1	1.16829E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.01197E-1
2.2E1	2.368E3	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.8002E1	-8.10623E-4	-8.80001E1	2.38419E-4	6.27041E-3	9.28164E-2	1.58233E1	-1.98712E1	-1.99437E1	1.50346E1	1.16724E-7	2.52061E-3	2.52061E-3	6.33436E-3	2.01734E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80022E1	-3.8147E-4	-8.80001E1	5.00679E-4	5.88894E-3	9.29594E-2	1.58155E1	-1.98803E1	-1.99825E1	1.49959E1	1.17073E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.00876E-1