[Scan]
initial_time=2015-12-15T18:59:18
final_time=2015-12-15T18:59:38
ip_count=19
run=1017
dataset=3
scan=143
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.81562E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-7.49695E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=4.84574E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.35991E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=9.32324E-10
mult1=-2.183E-8
mult2=-2.85145E-9
rf_tmon=-3.63978E-3
rf_agc=3.45218E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.81741E-3
ql5_imon=4.97377E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68568E0
bslens_imon=2.51848E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19936E1
lens5a_imon=1.98651E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.05174E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53511E1
cs_ef1b_imon=2.79381E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02379E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04823E1
cs_ea1_imon=2.55742E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96989E0
lens1_imon=1.52037E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64301E1
os_ef1alow_imon=2.99538E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0405E1
cs_ea2_imon=1.55117E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84307E1
cs_ef1a_imon=2.92031E-5
olens2_vset=0.0E0
olens2_vmon=1.97887E-3
olens2_imon=4.49717E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11413E1
os_restr1_imon=2.86471E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15123E1
os_ea1_imon=1.89024E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63601E1
os_ef1bup_imon=3.08608E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24915E0
cs_ionrep_imon=1.18342E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93335E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01757E1
cs_anode1_imon=2.89494E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99982E1
olens4_imon=3.36766E-11
tplens_vset=0.0E0
tplens_vmon=-1.59719E0
tplens_imon=-2.49335E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99693E1
iondef3_imon=8.71599E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98322E1
iondef2_imon=9.38847E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98427E-4
ql6_vset=1.0E-1
ql6_vmon=9.29117E-2
ql6_imon=5.84173E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.281E0
ionrepsh_imon=1.76424E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3351E1
lens5b_imon=2.18967E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74924E1
cs_ef2b_imon=3.1264E-5
os_ea2_vset=2.0E1
os_ea2_vmon=1.99526E1
os_ea2_imon=9.23982E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71171E1
cs_ef2a_imon=3.17644E-5
os_ef2alow_vset=-6.7E1
os_ef2alow_vmon=-6.73181E1
os_ef2alow_imon=3.09859E-5
os_ef2bup_vset=-7.0E1
os_ef2bup_vmon=-7.0235E1
os_ef2bup_imon=2.9999E-5
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=2.86645E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23097E2
cs_ionfoca_imon=6.29327E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01838E1
cs_anode2_imon=2.2548E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58136E1
iondef1_imon=5.16242E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50115E1
iondef4_imon=5.18218E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.40738E-9
olens1_vset=0.0E0
olens1_vmon=7.39098E-4
olens1_imon=5.03838E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15389E0
cs_ionaccel_imon=-1.76137E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47285E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56197E1
einzel_imon=7.73302E-6
window_vset=0.0E0
window_vmon=2.0726E-1
window_imon=-1.06632E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.8639E1
mask2_imon=-7.15322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.32146E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.70206E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.41348E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38489E0
defgridb_imon=6.30919E-5
os_fil1_bias_vset=0.0E0
os_fil1_bias_vmon=9.8015E-2
os_fil1_imon=5.098E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.98623E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63192E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30877E1
cs_fil1_imon=9.97995E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63692E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62591E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=7.49021E-3
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.17651E-4
os_fil2_shield_vset=-7.3E1
os_fil2_shield_vmon=-7.62864E1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33522E-1
cs_fil2_imon=-2.62285E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.27523E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22298E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31004E-3
inlet_lpb_pmon=2.00315E-1
chamber_ion_pmon=1.16989E-7
chamber_cvt_pmon=2.51814E-3
foreline_cvt_pmon=2.51814E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.928E-1
res40_imon=2.84681E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=184
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.063E3	1.0E0	1.47E2	4.1E1	-7.37103E-2	-8.80021E1	-8.34465E-4	-8.80001E1	4.05312E-4	6.17504E-3	9.31501E-2	1.57915E1	-1.98669E1	-1.9984E1	1.50082E1	1.16774E-7	2.51632E-3	2.51632E-3	6.33436E-3	1.98661E-1
2.0E0	1.24022E5	1.05E2	3.16E2	1.6E2	-7.40192E-2	-8.80022E1	-4.52995E-4	-8.80002E1	3.33786E-4	6.19888E-3	9.31501E-2	1.57932E1	-1.98576E1	-1.9975E1	1.50064E1	1.1688E-7	2.52538E-3	2.52538E-3	6.31837E-3	1.9911E-1
3.0E0	2.4E1	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80017E1	-6.19888E-4	-8.80003E1	3.09944E-4	5.79357E-3	9.33647E-2	1.58185E1	-1.9841E1	-1.996E1	1.50136E1	1.16981E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.00151E-1
4.0E0	2.3754E4	1.6E1	6.55E2	3.98E2	-7.31692E-2	-8.80021E1	-5.72205E-4	-8.80002E1	2.38419E-4	5.84126E-3	9.29832E-2	1.58303E1	-1.9857E1	-2.00068E1	1.50136E1	1.16923E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.00363E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.36328E-2	-8.80022E1	-9.05991E-4	-8.79998E1	1.66893E-4	6.1512E-3	9.32217E-2	1.58152E1	-1.98696E1	-2.00073E1	1.50106E1	1.16829E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.00847E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.80023E1	-5.96046E-4	-8.79999E1	2.6226E-4	6.07967E-3	9.31025E-2	1.57923E1	-1.98597E1	-1.99745E1	1.50241E1	1.16861E-7	2.52509E-3	2.52509E-3	6.3126E-3	2.01261E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.44059E-2	-8.80023E1	-8.82149E-4	-8.80002E1	3.8147E-4	5.96046E-3	9.30309E-2	1.58011E1	-1.98747E1	-1.99786E1	1.50394E1	1.16886E-7	2.51693E-3	2.51693E-3	6.29624E-3	2.00463E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.41738E-2	-8.80022E1	-1.07288E-3	-8.80002E1	7.15256E-5	5.8651E-3	9.33647E-2	1.57861E1	-1.98158E1	-1.99912E1	1.50052E1	1.16886E-7	2.51915E-3	2.51915E-3	6.31858E-3	2.00285E-1
1.2E1	2.54E2	0.0E0	4.85E2	3.23E2	-7.37874E-2	-8.80019E1	-4.52995E-4	-8.80003E1	2.6226E-4	5.91278E-3	9.30071E-2	1.5805E1	-1.98747E1	-1.99484E1	1.5037E1	1.16774E-7	2.52599E-3	2.52599E-3	6.33977E-3	1.9917E-1
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80022E1	-7.39098E-4	-8.79999E1	3.09944E-4	5.88894E-3	9.31501E-2	1.58173E1	-1.98537E1	-1.9945E1	1.501E1	1.16626E-7	2.52428E-3	2.52428E-3	6.34588E-3	1.99456E-1
1.4E1	3.745E3	3.0E0	5.66E2	3.82E2	-7.40967E-2	-8.80027E1	-8.10623E-4	-8.79998E1	2.86102E-4	5.96046E-3	9.32693E-2	1.57945E1	-1.98236E1	-1.99179E1	1.50172E1	1.16829E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.99283E-1
1.5E1	7.9E1	0.0E0	6.06E2	4.11E2	-7.47149E-2	-8.80021E1	-1.00136E-3	-8.80003E1	4.76837E-5	5.93662E-3	9.31978E-2	1.57735E1	-1.98537E1	-1.99834E1	1.50149E1	1.1688E-7	2.52538E-3	2.52538E-3	6.29645E-3	1.98937E-1
1.6E1	1.032E3	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80017E1	-8.34465E-4	-8.79999E1	1.43051E-4	5.65052E-3	9.33409E-2	1.58059E1	-1.98458E1	-1.99882E1	1.50091E1	1.16873E-7	2.51954E-3	2.51954E-3	6.32896E-3	1.9951E-1
1.7E1	6.44E2	0.0E0	6.87E2	4.7E2	-7.33239E-2	-8.8002E1	-6.67572E-4	-8.80001E1	2.14577E-4	5.62668E-3	9.33647E-2	1.57927E1	-1.98525E1	-1.99678E1	1.50172E1	1.17093E-7	2.52139E-3	2.52139E-3	6.32978E-3	2.0064E-1
1.8E1	2.835E3	2.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80024E1	-5.96046E-4	-8.8E1	1.43051E-4	5.93662E-3	9.3174E-2	1.58126E1	-1.98305E1	-1.99561E1	1.50142E1	1.16774E-7	2.52492E-3	2.52492E-3	6.32896E-3	2.01391E-1
1.9E1	2.43E3	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80024E1	-7.86781E-4	-8.80001E1	1.43051E-4	6.07967E-3	9.28879E-2	1.58161E1	-1.98771E1	-1.99768E1	1.50208E1	1.16753E-7	2.52538E-3	2.52538E-3	6.31288E-3	1.9937E-1
2.0E1	3.2297E4	1.3E1	8.08E2	5.58E2	-7.36328E-2	-8.80025E1	-9.05991E-4	-8.80003E1	1.43051E-4	6.4373E-3	9.31978E-2	1.58065E1	-1.98464E1	-1.99618E1	1.50178E1					
2.1E1	7.6E1	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80024E1	-8.10623E-4	-8.79999E1	-2.6226E-4	6.1512E-3	9.32455E-2	1.58023E1	-1.98819E1	-1.99636E1	1.5013E1	1.17023E-7	2.51954E-3	2.51954E-3	6.33436E-3	1.9968E-1
2.2E1	2.232E3	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80026E1	-7.86781E-4	-8.80002E1	9.53674E-5	6.1512E-3	9.33409E-2	1.57967E1	-1.98605E1	-1.99555E1	1.49883E1	1.1688E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.98419E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80023E1	-5.72205E-4	-8.80002E1	3.33786E-4	5.81741E-3	9.29117E-2	1.58136E1	-1.98322E1	-1.99693E1	1.50115E1	1.16989E-7	2.51814E-3	2.51814E-3	6.31004E-3	2.00315E-1