[Scan]
initial_time=2015-12-15T18:59:45
final_time=2015-12-15T19:00:04
ip_count=19
run=1017
dataset=3
scan=144
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.39421E-2
qbias_imon=-3.83191E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-7.62129E-10
ql2_vset=
ql2_vmon=-8.58307E-4
ql2_imon=4.4688E-10
ql3_vset=
ql3_vmon=-8.79995E1
ql3_imon=-2.3293E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=9.53078E-10
mult1=-1.74343E-8
mult2=-2.59885E-9
rf_tmon=-5.26346E-3
rf_agc=3.2925E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.19888E-3
ql5_imon=4.75228E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6497E0
bslens_imon=2.69191E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19919E1
lens5a_imon=2.01164E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53796E1
cs_ef1b_imon=2.79601E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02146E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0513E1
cs_ea1_imon=2.58078E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97638E0
lens1_imon=1.39649E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64716E1
os_ef1alow_imon=2.98378E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03749E1
cs_ea2_imon=1.54444E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=2.93116E-5
olens2_vset=0.0E0
olens2_vmon=1.66893E-3
olens2_imon=4.16279E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=2.87602E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14904E1
os_ea1_imon=1.8867E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63545E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24325E0
cs_ionrep_imon=1.2089E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93473E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.90233E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99988E1
olens4_imon=3.20435E-11
tplens_vset=0.0E0
tplens_vmon=-1.59424E0
tplens_imon=-2.2102E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99372E1
iondef3_imon=8.80801E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98771E1
iondef2_imon=9.45926E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98392E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=5.75519E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27156E0
ionrepsh_imon=1.76388E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33581E1
lens5b_imon=2.17162E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75528E1
cs_ef2b_imon=3.13623E-5
os_ea2_vset=2.0E1
os_ea2_vmon=1.99225E1
os_ea2_imon=9.33538E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00651E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.1856E-5
os_ef2alow_vset=-6.7E1
os_ef2alow_vmon=-6.73084E1
os_ef2alow_imon=3.09154E-5
os_ef2bup_vset=-7.0E1
os_ef2bup_vmon=-7.02198E1
os_ef2bup_imon=2.99604E-5
os_restr2_vset=4.1E1
os_restr2_vmon=4.10823E1
os_restr2_imon=2.87494E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23109E2
cs_ionfoca_imon=6.30601E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01989E1
cs_anode2_imon=2.25434E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58095E1
iondef1_imon=5.19428E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49961E1
iondef4_imon=5.27679E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27964E1
olens3_imon=2.36715E-9
olens1_vset=0.0E0
olens1_vmon=6.91414E-4
olens1_imon=3.94952E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-1.77618E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56279E1
einzel_imon=7.59414E-6
window_vset=0.0E0
window_vmon=1.62682E-1
window_imon=-9.79699E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.8605E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.51613E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9376E3
defgrida_imon=7.07016E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.16219E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30516E0
defgridb_imon=5.97648E-5
os_fil1_bias_vset=0.0E0
os_fil1_bias_vmon=1.01817E-1
os_fil1_imon=5.28678E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.35306E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63369E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3087E1
cs_fil1_imon=9.98414E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62594E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62687E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.43805E-3
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.53906E-4
os_fil2_shield_vset=-7.3E1
os_fil2_shield_vmon=-7.63119E1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.02326E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.98064E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22335E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.99E-1
chamber_ion_pmon=1.16873E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.8512E-1
res40_imon=2.89456E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.111E3	1.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80024E1	-6.91414E-4	-8.79997E1	-9.53674E-5	5.88894E-3	9.31501E-2	1.57907E1	-1.98643E1	-1.99442E1	1.50109E1	1.16677E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.00673E-1
2.0E0	1.27512E5	1.18E2	3.16E2	1.6E2	-7.42513E-2	-8.80023E1	-9.53674E-4	-8.80001E1	1.66893E-4	5.67436E-3	9.29594E-2	1.57829E1	-1.98772E1	-2.00026E1	1.49979E1	1.17063E-7	2.51814E-3	2.51814E-3	6.31798E-3	2.0124E-1
3.0E0	2.5E1	0.0E0	4.85E2	2.79E2	-7.39421E-2	-8.80025E1	-9.29832E-4	-8.80002E1	1.66893E-4	5.74589E-3	9.32932E-2	1.58095E1	-1.984E1	-1.99829E1	1.50262E1	1.16683E-7	2.51952E-3	2.51952E-3	6.3074E-3	2.00606E-1
4.0E0	2.4803E4	1.4E1	6.55E2	3.98E2	-7.30918E-2	-8.80023E1	-7.39098E-4	-8.79999E1	2.38419E-5	6.22272E-3	9.34601E-2	1.5811E1	-1.98616E1	-1.99558E1	1.5011E1	1.16813E-7	2.51575E-3	2.51575E-3	6.323E-3	1.9994E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80026E1	-5.96046E-4	-8.80001E1	1.19209E-4	5.91278E-3	9.33886E-2	1.57948E1	-1.98817E1	-1.9957E1	1.50091E1	1.16938E-7	2.52027E-3	2.52027E-3	6.32418E-3	2.01174E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80023E1	-5.00679E-4	-8.79999E1	-2.38419E-5	5.72205E-3	9.31978E-2	1.57957E1	-1.98428E1	-1.99714E1	1.50034E1	1.17073E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.00363E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.42513E-2	-8.80023E1	-6.91414E-4	-8.79999E1	4.05312E-4	6.36578E-3	9.35078E-2	1.57619E1	-1.98352E1	-1.99838E1	1.50068E1	1.16873E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.00021E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80018E1	-9.77516E-4	-8.8E1	4.05312E-4	6.27041E-3	9.32693E-2	1.58083E1	-1.98489E1	-1.996E1	1.50209E1	1.16774E-7	2.51847E-3	2.51847E-3	6.32896E-3	1.9968E-1
1.2E1	2.79E2	0.0E0	4.85E2	3.23E2	-7.36328E-2	-8.80021E1	-1.12057E-3	-8.79999E1	6.4373E-4	6.07967E-3	9.31978E-2	1.5768E1	-1.98452E1	-1.99828E1	1.50248E1	1.16886E-7	2.52362E-3	2.52362E-3	6.31858E-3	2.00996E-1
1.3E1	2.3E1	0.0E0	5.25E2	3.53E2	-7.42513E-2	-8.80022E1	-1.09673E-3	-8.8E1	4.52995E-4	5.8651E-3	9.31501E-2	1.57977E1	-1.98569E1	-1.99861E1	1.5011E1	1.16724E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.9917E-1
1.4E1	3.922E3	1.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80019E1	-7.39098E-4	-8.79996E1	4.29153E-4	6.12736E-3	9.31978E-2	1.57921E1	-1.9835E1	-1.9969E1	1.50184E1	1.16886E-7	2.51915E-3	2.51915E-3	6.32418E-3	1.99401E-1
1.5E1	7.3E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.8002E1	-8.82149E-4	-8.80001E1	2.14577E-4	6.00815E-3	9.32217E-2	1.58095E1	-1.9841E1	-1.99738E1	1.50112E1	1.16956E-7	2.52154E-3	2.52154E-3	6.29372E-3	1.9963E-1
1.6E1	1.013E3	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.8002E1	-1.0252E-3	-8.79999E1	1.90735E-4	6.00815E-3	9.31501E-2	1.58539E1	-1.99449E1	-1.99284E1	1.50058E1					
1.7E1	6.78E2	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.8002E1	-6.4373E-4	-8.79998E1	2.38419E-4	6.00815E-3	9.29117E-2	1.57921E1	-1.98278E1	-1.9951E1	1.50172E1	1.16981E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.99977E-1
1.8E1	3.023E3	5.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80019E1	-6.67572E-4	-8.8E1	2.6226E-4	6.05583E-3	9.32217E-2	1.58065E1	-1.98921E1	-1.99726E1	1.49991E1	1.16923E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.00021E-1
1.9E1	2.393E3	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80023E1	-8.10623E-4	-8.8E1	2.6226E-4	6.12736E-3	9.29832E-2	1.58083E1	-1.98645E1	-1.99762E1	1.49976E1	1.17093E-7	2.51693E-3	2.51693E-3	6.3074E-3	2.00285E-1
2.0E1	3.3817E4	2.0E1	8.08E2	5.58E2	-7.27053E-2	-8.80023E1	-5.48363E-4	-8.79999E1	1.43051E-4	6.10352E-3	9.29832E-2	1.58053E1	-1.98747E1	-1.99438E1	1.50128E1	1.17023E-7	2.52276E-3	2.52276E-3	6.33977E-3	2.00534E-1
2.1E1	9.9E1	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80021E1	-8.10623E-4	-8.79996E1	9.53674E-5	6.00815E-3	9.3317E-2	1.57955E1	-1.98717E1	-1.99844E1	1.50057E1	1.16783E-7	2.51693E-3	2.51693E-3	6.31299E-3	1.99754E-1
2.2E1	2.44E3	1.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80022E1	-4.76837E-4	-8.79996E1	1.90735E-4	6.12736E-3	9.29594E-2	1.58309E1	-1.98953E1	-1.99756E1	1.50152E1	1.16916E-7	2.51814E-3	2.51814E-3	6.31269E-3	2.00735E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.39421E-2	-8.80019E1	-8.58307E-4	-8.79995E1	3.33786E-4	6.19888E-3	9.32455E-2	1.58095E1	-1.98771E1	-1.99372E1	1.49961E1	1.16873E-7	2.52061E-3	2.52061E-3	6.32896E-3	1.99E-1