[Scan]
initial_time=2015-12-15T19:00:38
final_time=2015-12-15T19:00:58
ip_count=19
run=1017
dataset=3
scan=146
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40192E-2
qbias_imon=-3.84568E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-8.08275E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=4.5011E-10
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-2.20861E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=9.22263E-10
mult1=-2.19495E-8
mult2=-2.76452E-9
rf_tmon=-4.88494E-3
rf_agc=3.2943E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.10352E-3
ql5_imon=5.24342E-10
bslens_vset=-6.2E0
bslens_vmon=-6.52051E0
bslens_imon=2.53264E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.21234E1
lens5a_imon=2.07925E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12523E2
lens4a_imon=2.04544E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=2.84247E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04456E2
lens23_imon=1.01831E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05932E1
cs_ea1_imon=2.6367E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09377E0
lens1_imon=1.24783E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64718E1
os_ef1alow_imon=2.98426E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0241E1
cs_ea2_imon=1.47153E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84435E1
cs_ef1a_imon=2.93456E-5
olens2_vset=0.0E0
olens2_vmon=1.97887E-3
olens2_imon=4.44484E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11291E1
os_restr1_imon=2.87131E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15058E1
os_ea1_imon=1.95183E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.08261E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.38129E0
cs_ionrep_imon=1.26801E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91815E2
cs_nozzle_imon=1.92712E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01838E1
cs_anode1_imon=2.94916E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99988E1
olens4_imon=3.82662E-11
tplens_vset=0.0E0
tplens_vmon=-1.49219E0
tplens_imon=-5.60803E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99882E1
iondef3_imon=9.68932E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98428E1
iondef2_imon=8.84341E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02798E2
lens6_imon=2.97797E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=5.95415E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29221E0
ionrepsh_imon=1.84423E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3525E1
lens5b_imon=2.1826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74901E1
cs_ef2b_imon=3.13126E-5
os_ea2_vset=2.0E1
os_ea2_vmon=1.98293E1
os_ea2_imon=8.65582E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.01033E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.18443E-5
os_ef2alow_vset=-6.7E1
os_ef2alow_vmon=-6.72937E1
os_ef2alow_imon=3.09547E-5
os_ef2bup_vset=-7.0E1
os_ef2bup_vmon=-7.02483E1
os_ef2bup_imon=2.98356E-5
os_restr2_vset=4.1E1
os_restr2_vmon=4.10874E1
os_restr2_imon=2.87235E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23204E2
cs_ionfoca_imon=6.35697E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01873E1
cs_anode2_imon=2.26349E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58179E1
iondef1_imon=4.19262E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50046E1
iondef4_imon=5.18566E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27964E1
olens3_imon=2.41295E-9
olens1_vset=0.0E0
olens1_vmon=1.07288E-3
olens1_imon=4.67575E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16142E0
cs_ionaccel_imon=-1.72315E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02059E2
cs_ionfocb_imon=1.47178E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56226E1
einzel_imon=7.62876E-6
window_vset=0.0E0
window_vmon=1.71349E-1
window_imon=-1.02462E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39112E-4
mask2_vset=0.0E0
mask2_vmon=-1.86321E1
mask2_imon=-6.38866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92605E3
multa_neg_imon=6.3375E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93774E3
defgrida_imon=7.01707E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.58692E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35831E0
defgridb_imon=5.48451E-5
os_fil1_bias_vset=0.0E0
os_fil1_bias_vmon=9.58605E-2
os_fil1_imon=5.23701E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.32796E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66107E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30863E1
cs_fil1_imon=9.98592E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63692E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65782E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.66523E-3
os_fil2_imon=-2.44909E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.06067E-4
os_fil2_shield_vset=-7.3E1
os_fil2_shield_vmon=-7.64474E1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35769E-1
cs_fil2_imon=-2.18844E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15938E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22645E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=1.9963E-1
chamber_ion_pmon=1.16829E-7
chamber_cvt_pmon=2.52867E-3
foreline_cvt_pmon=2.52867E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.24657E-1
res40_imon=2.79121E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=193
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.144E3	1.0E0	1.47E2	4.1E1	-7.37103E-2	-8.8002E1	-5.72205E-4	-8.80001E1	-4.76837E-5	5.8651E-3	9.2721E-2	1.58935E1	-1.99054E1	-1.98517E1	1.50112E1	1.17073E-7	2.51954E-3	2.51954E-3	6.29665E-3	1.9883E-1
2.0E0	1.29782E5	1.23E2	3.16E2	1.6E2	-7.42513E-2	-8.80021E1	-7.62939E-4	-8.80002E1	7.15256E-5	5.84126E-3	9.29832E-2	1.58179E1	-1.98796E1	-1.99904E1	1.50216E1	1.17123E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.00021E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.42513E-2	-8.80022E1	-5.96046E-4	-8.8E1	2.6226E-4	5.74589E-3	9.31025E-2	1.57973E1	-1.98541E1	-1.99962E1	1.50091E1	1.17104E-7	2.51838E-3	2.51838E-3	6.3245E-3	1.99163E-1
4.0E0	2.4919E4	1.4E1	6.55E2	3.98E2	-7.44059E-2	-8.80021E1	-8.82149E-4	-8.79997E1	3.57628E-4	5.57899E-3	9.31978E-2	1.58047E1	-1.98729E1	-1.99684E1	1.50172E1	1.16818E-7	2.51709E-3	2.51709E-3	6.31798E-3	1.99394E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40192E-2	-8.80024E1	-5.96046E-4	-8.79998E1	3.09944E-4	5.88894E-3	9.32932E-2	1.5779E1	-1.98423E1	-1.99762E1	1.49952E1	1.16727E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.9911E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.44059E-2	-8.80023E1	-7.62939E-4	-8.8E1	1.90735E-4	6.12736E-3	9.3317E-2	1.58228E1	-1.98591E1	-1.99477E1	1.50283E1	1.16973E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9883E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.80023E1	-8.10623E-4	-8.79998E1	4.05312E-4	5.79357E-3	9.32455E-2	1.57747E1	-1.98576E1	-1.99527E1	1.50101E1	1.16788E-7	2.51611E-3	2.51611E-3	6.33021E-3	1.99703E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80025E1	-4.29153E-4	-8.80001E1	2.86102E-4	5.93662E-3	9.30071E-2	1.58029E1	-1.98645E1	-1.99906E1	1.50232E1	1.17063E-7	2.51919E-3	2.51919E-3	6.32328E-3	1.99562E-1
1.2E1	3.05E2	2.0E0	4.85E2	3.23E2	-7.286E-2	-8.80023E1	-9.05991E-4	-8.8E1	4.52995E-4	5.79357E-3	9.34124E-2	1.58185E1	-1.98747E1	-1.99618E1	1.5007E1	1.16923E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.00192E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80024E1	-8.58307E-4	-8.79998E1	2.6226E-4	6.24657E-3	9.36985E-2	1.58137E1	-1.98741E1	-2.00171E1	1.49992E1	1.16829E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.00325E-1
1.4E1	3.997E3	6.0E0	5.66E2	3.82E2	-7.38649E-2	-8.80024E1	-9.53674E-4	-8.79998E1	4.29153E-4	5.6982E-3	9.32693E-2	1.58126E1	-1.98924E1	-1.99614E1	1.50184E1	1.16981E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.99977E-1
1.5E1	6.0E1	1.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80023E1	-8.58307E-4	-8.79997E1	4.05312E-4	5.76973E-3	9.32217E-2	1.58158E1	-1.98529E1	-1.99754E1	1.50145E1	1.17123E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.00021E-1
1.6E1	1.035E3	1.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80024E1	-5.24521E-4	-8.79999E1	-2.38419E-5	5.88894E-3	9.29356E-2	1.5816E1	-1.98839E1	-1.99787E1	1.50222E1	1.17092E-7	2.52262E-3	2.52262E-3	6.31761E-3	2.00307E-1
1.7E1	6.81E2	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80022E1	-4.76837E-4	-8.79999E1	-1.19209E-4	6.22272E-3	9.31978E-2	1.58163E1	-1.98791E1	-1.99423E1	1.50191E1	1.16783E-7	2.52809E-3	2.52809E-3	6.3074E-3	2.00285E-1
1.8E1	3.002E3	2.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80022E1	-5.00679E-4	-8.79996E1	4.76837E-5	5.67436E-3	9.30786E-2	1.5838E1	-1.98778E1	-1.99651E1	1.50511E1	1.16849E-7	2.52353E-3	2.52353E-3	6.30351E-3	2.00187E-1
1.9E1	2.359E3	1.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80024E1	-6.67572E-4	-8.79997E1	2.14577E-4	5.79357E-3	9.32455E-2	1.57849E1	-1.98493E1	-1.99785E1	1.49958E1	1.16876E-7	2.52141E-3	2.52141E-3	6.31499E-3	2.00485E-1
2.0E1	3.4098E4	1.6E1	8.08E2	5.58E2	-7.31692E-2	-8.80024E1	-5.48363E-4	-8.79997E1	2.6226E-4	5.60284E-3	9.29594E-2	1.58157E1	-1.98539E1	-1.99576E1	1.50097E1	1.16873E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.00534E-1
2.1E1	6.9E1	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80021E1	-9.05991E-4	-8.79995E1	6.19888E-4	5.8651E-3	9.3317E-2	1.57873E1	-1.98284E1	-1.99828E1	1.49746E1	1.17073E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.00705E-1
2.2E1	2.463E3	3.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80021E1	-4.52995E-4	-8.79999E1	3.8147E-4	6.19888E-3	9.31263E-2	1.58286E1	-1.98688E1	-1.99349E1	1.50172E1	1.17023E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.00363E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.40192E-2	-8.80021E1	-4.76837E-4	-8.79997E1	5.24521E-4	6.10352E-3	9.3317E-2	1.58179E1	-1.98428E1	-1.99882E1	1.50046E1	1.16829E-7	2.52867E-3	2.52867E-3	6.29098E-3	1.9963E-1