[Scan]
initial_time=2015-12-15T19:01:31
final_time=2015-12-15T19:01:51
ip_count=19
run=1017
dataset=3
scan=148
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.86619E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-7.39825E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=4.89473E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.24323E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=1.03422E-9
mult1=-2.24673E-8
mult2=-2.67669E-9
rf_tmon=-4.73473E-3
rf_agc=3.41447E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.96046E-3
ql5_imon=5.05948E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67093E0
bslens_imon=2.44769E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19665E1
lens5a_imon=1.98651E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.04874E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.537E1
cs_ef1b_imon=2.8371E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02241E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05118E1
cs_ea1_imon=2.51424E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96104E0
lens1_imon=1.36464E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.9964E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03897E1
cs_ea2_imon=1.52957E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=2.93441E-5
olens2_vset=0.0E0
olens2_vmon=1.52588E-3
olens2_imon=4.6941E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=2.8735E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15547E1
os_ea1_imon=1.89626E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63503E1
os_ef1bup_imon=3.09118E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2751E0
cs_ionrep_imon=1.2082E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93639E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=2.95351E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99981E1
olens4_imon=1.42455E-11
tplens_vset=0.0E0
tplens_vmon=-1.59601E0
tplens_imon=-3.48439E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99894E1
iondef3_imon=8.67351E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98729E1
iondef2_imon=9.35308E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98498E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=5.90909E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25092E0
ionrepsh_imon=1.75574E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33894E1
lens5b_imon=2.20879E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74922E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=2.0E1
os_ea2_vmon=1.99007E1
os_ea2_imon=9.14072E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00439E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.18921E-5
os_ef2alow_vset=-6.7E1
os_ef2alow_vmon=-6.7327E1
os_ef2alow_imon=3.08974E-5
os_ef2bup_vset=-7.0E1
os_ef2bup_vmon=-7.02414E1
os_ef2bup_imon=2.9809E-5
os_restr2_vset=4.1E1
os_restr2_vmon=4.11003E1
os_restr2_imon=2.86881E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.29503E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02025E1
cs_anode2_imon=2.24677E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58101E1
iondef1_imon=5.17304E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49854E1
iondef4_imon=5.08217E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.38781E-9
olens1_vset=0.0E0
olens1_vmon=1.09673E-3
olens1_imon=4.90987E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-1.83384E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.68063E-6
window_vset=0.0E0
window_vmon=1.99323E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39149E-4
mask2_vset=0.0E0
mask2_vmon=-1.86152E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.37455E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.54279E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50108E3
multb_neg_imon=7.08786E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27858E0
defgridb_imon=6.08267E-5
os_fil1_bias_vset=0.0E0
os_fil1_bias_vmon=9.54802E-2
os_fil1_imon=5.46098E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.70745E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66362E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30893E1
cs_fil1_imon=9.99207E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63327E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65648E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=-3.6084E-4
os_fil2_imon=-2.50379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.15753E-4
os_fil2_shield_vset=-7.3E1
os_fil2_shield_vmon=-7.64623E1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.34161E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=3.79383E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22714E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.17073E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.45186E-1
res40_imon=2.95583E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.194E3	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80023E1	-5.72205E-4	-8.80003E1	3.57628E-4	5.98431E-3	9.29594E-2	1.58224E1	-1.98958E1	-1.99342E1	1.50216E1	1.16873E-7	2.52061E-3	2.52061E-3	6.33436E-3	2.01219E-1
2.0E0	1.30954E5	1.44E2	3.16E2	1.6E2	-7.40192E-2	-8.80022E1	-7.39098E-4	-8.80002E1	3.57628E-4	6.07967E-3	9.29356E-2	1.57988E1	-1.98787E1	-1.99605E1	1.5007E1	1.17118E-7	2.51498E-3	2.51498E-3	6.32222E-3	2.01792E-1
3.0E0	2.9E1	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80024E1	-7.39098E-4	-8.80005E1	1.90735E-4	6.36578E-3	9.32693E-2	1.57772E1	-1.98234E1	-1.99773E1	1.50086E1	1.16696E-7	2.5273E-3	2.5273E-3	6.27052E-3	2.02424E-1
4.0E0	2.4967E4	9.0E0	6.55E2	3.98E2	-7.40967E-2	-8.80025E1	-9.05991E-4	-8.80003E1	1.19209E-4	6.27041E-3	9.30071E-2	1.58248E1	-1.98485E1	-1.99943E1	1.50062E1	1.17023E-7	2.52707E-3	2.52707E-3	6.32356E-3	2.01219E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80022E1	-1.12057E-3	-8.80002E1	2.38419E-5	6.1512E-3	9.31978E-2	1.58422E1	-1.98516E1	-1.99626E1	1.50178E1	1.17005E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.0027E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.80025E1	-8.34465E-4	-8.80004E1	1.43051E-4	6.00815E-3	9.28164E-2	1.58433E1	-1.98788E1	-1.99502E1	1.50158E1	1.16841E-7	2.52066E-3	2.52066E-3	6.3074E-3	1.99883E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.42513E-2	-8.80025E1	-8.58307E-4	-8.8E1	1.19209E-4	6.05583E-3	9.3317E-2	1.57818E1	-1.98612E1	-1.99671E1	1.49973E1	1.17108E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.00325E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80024E1	-5.00679E-4	-8.80001E1	2.38419E-4	6.10352E-3	9.32217E-2	1.58038E1	-1.98839E1	-1.99383E1	1.50208E1					
1.2E1	2.63E2	2.0E0	4.85E2	3.23E2	-7.44059E-2	-8.80025E1	-4.76837E-4	-8.79999E1	1.19209E-4	6.31809E-3	9.30548E-2	1.5792E1	-1.9856E1	-1.99496E1	1.49978E1	1.16628E-7	2.52473E-3	2.52473E-3	6.29624E-3	1.99577E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80024E1	-1.04904E-3	-8.80003E1	4.76837E-5	6.17504E-3	9.30548E-2	1.57855E1	-1.9864E1	-1.998E1	1.49926E1	1.17041E-7	2.5259E-3	2.5259E-3	6.3375E-3	2.00234E-1
1.4E1	4.057E3	4.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80023E1	-8.34465E-4	-8.79999E1	-3.8147E-4	6.07967E-3	9.30548E-2	1.58249E1	-1.97987E1	-2.00232E1	1.50219E1	1.16926E-7	2.52384E-3	2.52384E-3	6.3232E-3	2.00283E-1
1.5E1	6.6E1	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80024E1	-4.52995E-4	-8.79998E1	2.38419E-5	6.10352E-3	9.29117E-2	1.57831E1	-1.98783E1	-1.99792E1	1.50094E1	1.17293E-7	2.53333E-3	2.53333E-3	6.35493E-3	2.00158E-1
1.6E1	1.007E3	1.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80023E1	-7.15256E-4	-8.79997E1	0.0E0	6.19888E-3	9.3317E-2	1.5782E1	-1.98139E1	-1.99832E1	1.50016E1	1.17134E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.99977E-1
1.7E1	6.96E2	1.0E0	6.87E2	4.7E2	-7.33239E-2	-8.80021E1	-1.0252E-3	-8.79998E1	1.90735E-4	6.19888E-3	9.31978E-2	1.57692E1	-1.97886E1	-1.99027E1	1.49692E1	1.16873E-7	2.52276E-3	2.52276E-3	6.31278E-3	1.9917E-1
1.8E1	3.034E3	6.0E0	7.27E2	5.0E2	-7.38649E-2	-8.80019E1	-6.67572E-4	-8.79998E1	-2.38419E-5	6.07967E-3	9.30071E-2	1.57854E1	-1.98731E1	-1.99396E1	1.502E1	1.16841E-7	2.52635E-3	2.52635E-3	6.31879E-3	2.00064E-1
1.9E1	2.268E3	1.0E0	7.68E2	5.29E2	-7.33239E-2	-8.8002E1	-9.77516E-4	-8.79999E1	1.19209E-4	5.96046E-3	9.31978E-2	1.58911E1	-2.00148E1	-1.99596E1	1.49611E1	1.16893E-7	2.51952E-3	2.51952E-3	6.32165E-3	1.99793E-1
2.0E1	3.4333E4	1.7E1	8.08E2	5.58E2	-7.39421E-2	-8.8002E1	-8.34465E-4	-8.80003E1	7.15256E-5	6.03199E-3	9.31501E-2	1.58139E1	-1.98463E1	-1.99566E1	1.50107E1	1.17746E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.00325E-1
2.1E1	7.2E1	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80023E1	-8.82149E-4	-8.8E1	7.15256E-5	6.48499E-3	9.31263E-2	1.57891E1	-1.98753E1	-1.99618E1	1.49746E1	1.16867E-7	2.51621E-3	2.51621E-3	6.31357E-3	1.99771E-1
2.2E1	2.446E3	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80021E1	-1.00136E-3	-8.8E1	-1.43051E-4	5.93662E-3	9.32693E-2	1.58044E1	-1.98411E1	-1.99838E1	1.4964E1	1.16829E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.99283E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80024E1	-6.91414E-4	-8.79999E1	2.38419E-5	5.96046E-3	9.30309E-2	1.58101E1	-1.98729E1	-1.99894E1	1.49854E1	1.17073E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.9951E-1