[Scan]
initial_time=2015-12-15T19:02:24
final_time=2015-12-15T19:02:44
ip_count=19
run=1017
dataset=3
scan=150
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.85896E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-7.88486E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=4.64845E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.20665E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=9.21798E-10
mult1=-2.02259E-8
mult2=-2.73495E-9
rf_tmon=-4.29951E-3
rf_agc=3.39851E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.98431E-3
ql5_imon=4.80795E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67182E0
bslens_imon=2.29196E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19332E1
lens5a_imon=2.00598E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12532E2
lens4a_imon=2.04658E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53978E1
cs_ef1b_imon=2.85912E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.0213E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05416E1
cs_ea1_imon=2.5245E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02918E0
lens1_imon=1.55753E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64726E1
os_ef1alow_imon=2.96881E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03499E1
cs_ea2_imon=1.54851E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84409E1
cs_ef1a_imon=2.95289E-5
olens2_vset=0.0E0
olens2_vmon=1.38283E-3
olens2_imon=4.3751E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11035E1
os_restr1_imon=2.86619E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15624E1
os_ea1_imon=1.92192E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63915E1
os_ef1bup_imon=3.09708E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25062E0
cs_ionrep_imon=1.222E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91953E2
cs_nozzle_imon=1.93048E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01712E1
cs_anode1_imon=2.95642E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99983E1
olens4_imon=2.42949E-11
tplens_vset=0.0E0
tplens_vmon=-1.58244E0
tplens_imon=-3.80294E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99848E1
iondef3_imon=8.65405E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98733E1
iondef2_imon=9.67163E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.9831E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=6.15692E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29487E0
ionrepsh_imon=1.80158E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33519E1
lens5b_imon=2.18118E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.13688E-5
os_ea2_vset=2.0E1
os_ea2_vmon=1.99888E1
os_ea2_imon=9.15841E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00738E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71169E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=-6.7E1
os_ef2alow_vmon=-6.72408E1
os_ef2alow_imon=3.08204E-5
os_ef2bup_vset=-7.0E1
os_ef2bup_vmon=-7.02396E1
os_ef2bup_imon=2.98562E-5
os_restr2_vset=4.1E1
os_restr2_vmon=4.10858E1
os_restr2_imon=2.86442E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.2984E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01594E1
cs_anode2_imon=2.25847E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58096E1
iondef1_imon=5.30046E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50087E1
iondef4_imon=5.14016E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.3833E-9
olens1_vset=0.0E0
olens1_vmon=8.82149E-4
olens1_imon=4.25434E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15078E0
cs_ionaccel_imon=-1.67133E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47005E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5642E1
einzel_imon=7.79399E-6
window_vset=0.0E0
window_vmon=1.47338E-1
window_imon=-1.06095E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39341E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-8.04415E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.7161E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.77816E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.02592E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26677E0
defgridb_imon=6.27379E-5
os_fil1_bias_vset=0.0E0
os_fil1_bias_vmon=9.91556E-2
os_fil1_imon=5.54452E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.12208E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6641E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30928E1
cs_fil1_imon=9.97693E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63551E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65652E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=-1.24725E-3
os_fil2_imon=-2.65286E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.52885E-4
os_fil2_shield_vset=-7.3E1
os_fil2_shield_vmon=-7.64702E1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35054E-1
cs_fil2_imon=-1.91569E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.03301E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22697E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32328E-3
inlet_lpb_pmon=2.00399E-1
chamber_ion_pmon=1.17014E-7
chamber_cvt_pmon=2.52342E-3
foreline_cvt_pmon=2.52342E-3
chamber_tmon=1.40066E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.29132E-1
res40_imon=2.64556E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=230
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.164E3	1.0E0	1.47E2	4.1E1	-7.30918E-2	-8.8002E1	-6.91414E-4	-8.8E1	1.90735E-4	6.07967E-3	9.30548E-2	1.58109E1	-1.98395E1	-1.99627E1	1.50011E1	1.17398E-7	2.52169E-3	2.52169E-3	6.28056E-3	2.01133E-1
2.0E0	1.29917E5	1.25E2	3.16E2	1.6E2	-7.24736E-2	-8.80023E1	-5.24521E-4	-8.79999E1	1.90735E-4	5.93662E-3	9.29117E-2	1.581E1	-1.98753E1	-1.99765E1	1.50204E1	1.16808E-7	2.51956E-3	2.51956E-3	6.31251E-3	1.98693E-1
3.0E0	2.2E1	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80024E1	-5.00679E-4	-8.79999E1	2.86102E-4	5.84126E-3	9.30309E-2	1.58101E1	-1.98579E1	-1.9993E1	1.5007E1	1.17224E-7	2.51874E-3	2.51874E-3	6.27268E-3	2.00202E-1
4.0E0	2.4894E4	5.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80022E1	-5.24521E-4	-8.79999E1	7.15256E-5	5.96046E-3	9.31501E-2	1.58138E1	-1.98729E1	-1.99697E1	1.50052E1	1.17032E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.99977E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80019E1	-7.39098E-4	-8.8E1	4.05312E-4	5.93662E-3	9.29356E-2	1.57994E1	-1.98368E1	-1.99627E1	1.50095E1	1.16823E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.9968E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80024E1	-5.96046E-4	-8.8E1	4.76837E-4	5.91278E-3	9.29832E-2	1.57784E1	-1.98645E1	-1.99746E1	1.49978E1	1.16853E-7	2.51439E-3	2.51439E-3	6.3153E-3	1.98661E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80023E1	-7.15256E-4	-8.80003E1	2.86102E-4	5.8651E-3	9.29356E-2	1.58008E1	-1.98452E1	-1.99791E1	1.5013E1	1.16857E-7	2.51096E-3	2.51096E-3	6.3074E-3	1.99567E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80024E1	-5.24521E-4	-8.8E1	1.43051E-4	5.57899E-3	9.31025E-2	1.57963E1	-1.98735E1	-2.00015E1	1.50076E1	1.17023E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.99E-1
1.2E1	2.64E2	1.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80023E1	-6.91414E-4	-8.80001E1	4.52995E-4	5.98431E-3	9.32455E-2	1.57813E1	-1.98741E1	-1.99684E1	1.50016E1	1.16778E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99803E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80025E1	-5.72205E-4	-8.80001E1	1.90735E-4	6.07967E-3	9.33409E-2	1.58221E1	-1.98482E1	-1.99591E1	1.50082E1	1.16727E-7	2.52099E-3	2.52099E-3	6.34037E-3	2.00673E-1
1.4E1	4.079E3	6.0E0	5.66E2	3.82E2	-7.36328E-2	-8.80019E1	-4.29153E-4	-8.8E1	1.43051E-4	5.79357E-3	9.32455E-2	1.58113E1	-1.98717E1	-1.99924E1	1.50184E1	1.16923E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.00021E-1
1.5E1	6.9E1	1.0E0	6.06E2	4.11E2	-7.42513E-2	-8.80024E1	-5.96046E-4	-8.79999E1	3.57628E-4	5.65052E-3	9.31263E-2	1.57913E1	-1.9869E1	-1.99578E1	1.49938E1	1.16724E-7	2.52707E-3	2.52707E-3	6.32896E-3	1.99E-1
1.6E1	1.033E3	0.0E0	6.47E2	4.41E2	-7.42513E-2	-8.80023E1	-6.19888E-4	-8.8E1	2.14577E-4	6.17504E-3	9.29594E-2	1.57989E1	-1.98594E1	-1.99671E1	1.5006E1	1.16818E-7	2.51919E-3	2.51919E-3	6.3074E-3	1.99562E-1
1.7E1	7.22E2	1.0E0	6.87E2	4.7E2	-7.51013E-2	-8.80022E1	-6.67572E-4	-8.79999E1	1.66893E-4	5.91278E-3	9.32932E-2	1.58227E1	-1.99011E1	-1.99678E1	1.49932E1	1.16783E-7	2.52362E-3	2.52362E-3	6.35786E-3	1.99754E-1
1.8E1	2.955E3	0.0E0	7.27E2	5.0E2	-7.48695E-2	-8.80022E1	-7.15256E-4	-8.80002E1	-7.15256E-5	5.91278E-3	9.34601E-2	1.5768E1	-1.98513E1	-1.99744E1	1.50088E1	1.16778E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99803E-1
1.9E1	2.169E3	1.0E0	7.68E2	5.29E2	-7.37103E-2	-8.8002E1	-5.72205E-4	-8.79998E1	-2.38419E-5	5.93662E-3	9.32455E-2	1.57994E1	-1.98788E1	-1.99274E1	1.50057E1	1.16981E-7	2.52099E-3	2.52099E-3	6.29098E-3	1.98764E-1
2.0E1	3.3761E4	1.3E1	8.08E2	5.58E2	-7.31692E-2	-8.80023E1	-7.86781E-4	-8.79997E1	-1.66893E-4	5.65052E-3	9.29832E-2	1.5821E1	-1.98915E1	-1.99502E1	1.49904E1	1.16818E-7	2.52025E-3	2.52025E-3	6.31798E-3	2.00231E-1
2.1E1	6.7E1	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80023E1	-7.39098E-4	-8.8E1	1.66893E-4	5.60284E-3	9.32217E-2	1.57873E1	-1.98169E1	-2.00098E1	1.50167E1	1.16999E-7	2.53319E-3	2.53319E-3	6.3074E-3	2.0115E-1
2.2E1	2.505E3	1.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80024E1	-7.86781E-4	-8.79999E1	2.38419E-5	5.67436E-3	9.30548E-2	1.57949E1	-1.98818E1	-1.99573E1	1.5019E1	1.16973E-7	2.52923E-3	2.52923E-3	6.3074E-3	2.00705E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80026E1	-3.57628E-4	-8.79999E1	1.43051E-4	5.98431E-3	9.31263E-2	1.58096E1	-1.98733E1	-1.99848E1	1.50087E1	1.17014E-7	2.52342E-3	2.52342E-3	6.32328E-3	2.00399E-1