[Scan]
initial_time=2015-12-15T21:32:43
final_time=2015-12-15T21:33:10
ip_count=19
run=1017
dataset=3
scan=191
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.8886E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-8.96549E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=6.39927E-10
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-2.35189E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=3.26353E-9
mult1=-1.10528E-8
mult2=-2.76053E-9
rf_tmon=-5.17934E-3
rf_agc=3.28469E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.19888E-3
ql5_imon=5.14817E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68309E0
bslens_imon=2.44081E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20436E1
lens5a_imon=1.96932E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.04958E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53766E1
cs_ef1b_imon=2.87027E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02264E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04785E1
cs_ea1_imon=2.45078E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08116E0
lens1_imon=1.39447E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6466E1
os_ef1alow_imon=2.97244E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04073E1
cs_ea2_imon=1.53862E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84475E1
cs_ef1a_imon=2.94499E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=1.90851E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11297E1
os_restr1_imon=3.09373E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15346E1
os_ea1_imon=1.97801E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63965E1
os_ef1bup_imon=3.07427E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23877E0
cs_ionrep_imon=1.21081E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93142E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0207E1
cs_anode1_imon=3.03569E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=7.12087E-9
tplens_vset=1.4E-1
tplens_vmon=1.56785E0
tplens_imon=-5.00065E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26188E1
iondef3_imon=1.48161E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26765E1
iondef2_imon=1.58103E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98193E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=5.94318E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.266E0
ionrepsh_imon=1.81081E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34098E1
lens5b_imon=2.19319E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74721E1
cs_ef2b_imon=3.11527E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.0715E-1
os_ea2_imon=-6.3216E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00345E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.1754E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.51908E0
os_ef2alow_imon=-2.60933E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.70963E-1
os_ef2bup_imon=-5.31308E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11002E1
os_restr2_imon=2.9436E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.29407E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02087E1
cs_anode2_imon=2.24299E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73183E1
iondef1_imon=1.09054E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67944E1
iondef4_imon=1.06001E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=2.63243E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=1.13117E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16026E0
cs_ionaccel_imon=-1.65712E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47174E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56538E1
einzel_imon=7.71912E-6
window_vset=0.0E0
window_vmon=1.49339E-1
window_imon=-1.12193E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.38883E-4
mask2_vset=0.0E0
mask2_vmon=-1.86031E1
mask2_imon=-7.81352E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92617E3
multa_neg_imon=7.53345E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.49058E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.13716E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2702E0
defgridb_imon=5.97611E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33432E1
os_fil1_imon=8.84134E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.73021E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66158E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30871E1
cs_fil1_imon=9.96901E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62939E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66248E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.57347E-2
os_fil2_imon=-3.09201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.65954E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.49492E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38641E-1
cs_fil2_imon=-2.6576E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.35028E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22555E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.2863E-3
inlet_lpb_pmon=7.45725E-2
chamber_ion_pmon=5.63233E-8
chamber_cvt_pmon=2.51498E-3
foreline_cvt_pmon=2.51498E-3
chamber_tmon=1.39998E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.95899E-1
res40_imon=-2.69274E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.622E3	2.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80023E1	-5.96046E-4	-8.8E1	3.09944E-4	6.1512E-3	9.30309E-2	2.73003E1	-3.27191E1	-3.26284E1	2.68022E1	5.63474E-8	2.51632E-3	2.51632E-3	6.31817E-3	7.52571E-2
2.0E0	1.0717E4	8.0E0	3.16E2	1.6E2	-7.40967E-2	-8.80022E1	-5.48363E-4	-8.79999E1	3.33786E-4	6.00815E-3	9.29594E-2	2.73033E1	-3.26844E1	-3.26178E1	2.68041E1	5.63723E-8	2.52209E-3	2.52209E-3	6.29098E-3	7.51205E-2
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80026E1	-7.62939E-4	-8.8E1	-4.76837E-5	6.00815E-3	9.32455E-2	2.73004E1	-3.26571E1	-3.26288E1	2.67951E1	5.63233E-8	2.51077E-3	2.51077E-3	6.2863E-3	7.51998E-2
4.0E0	2.335E3	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80022E1	-8.10623E-4	-8.79999E1	3.33786E-4	5.84126E-3	9.31025E-2	2.7312E1	-3.26439E1	-3.26497E1	2.68305E1	5.63233E-8	2.51939E-3	2.51939E-3	6.31753E-3	7.52462E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80023E1	-7.39098E-4	-8.79998E1	1.43051E-4	5.74589E-3	9.30071E-2	2.73108E1	-3.27073E1	-3.25896E1	2.67818E1	5.6338E-8	2.51662E-3	2.51662E-3	6.29754E-3	7.5225E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80023E1	-7.39098E-4	-8.80003E1	2.38419E-4	5.98431E-3	9.30786E-2	2.73055E1	-3.27034E1	-3.25753E1	2.68107E1	5.63233E-8	2.51559E-3	2.51559E-3	6.30432E-3	7.52839E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80023E1	-7.15256E-4	-8.8E1	2.14577E-4	6.05583E-3	9.28164E-2	2.72641E1	-3.27418E1	-3.26395E1	2.68148E1	5.63403E-8	2.51536E-3	2.51536E-3	6.31499E-3	7.53972E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80026E1	-9.05991E-4	-8.80001E1	5.00679E-4	6.17504E-3	9.30548E-2	2.72871E1	-3.26479E1	-3.26111E1	2.68379E1	5.62872E-8	2.52287E-3	2.52287E-3	6.3277E-3	7.51912E-2
1.2E1	1.75E2	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80024E1	-7.39098E-4	-8.79996E1	3.57628E-4	6.50883E-3	9.30548E-2	2.73196E1	-3.26292E1	-3.26214E1	2.68047E1	5.63233E-8	2.51639E-3	2.51639E-3	6.34399E-3	7.49982E-2
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80026E1	-9.29832E-4	-8.79999E1	2.86102E-4	6.22272E-3	9.30309E-2	2.73213E1	-3.26685E1	-3.26022E1	2.68251E1	5.63091E-8	2.51672E-3	2.51672E-3	6.3074E-3	7.49334E-2
1.4E1	2.977E3	1.0E0	5.66E2	3.82E2	-7.44059E-2	-8.80025E1	-7.15256E-4	-8.8E1	2.6226E-4	6.00815E-3	9.29356E-2	2.72502E1	-3.26325E1	-3.26343E1	2.67908E1	5.63091E-8	2.52117E-3	2.52117E-3	6.31377E-3	7.53124E-2
1.5E1	8.4E1	0.0E0	6.06E2	4.11E2	-7.41738E-2	-8.80026E1	-1.09673E-3	-8.79999E1	3.8147E-4	6.1512E-3	9.28164E-2	2.72222E1	-3.25816E1	-3.28063E1	2.68781E1	5.63233E-8	2.51771E-3	2.51771E-3	6.32936E-3	7.55131E-2
1.6E1	1.073E3	0.0E0	6.47E2	4.41E2	-7.46377E-2	-8.80024E1	-8.34465E-4	-8.79999E1	3.57628E-4	6.03199E-3	9.31978E-2	2.73275E1	-3.26654E1	-3.26279E1	2.68288E1	5.63233E-8	2.52342E-3	2.52342E-3	6.29684E-3	7.50739E-2
1.7E1	4.028E3	4.0E0	6.87E2	4.7E2	-7.50241E-2	-8.80019E1	-7.86781E-4	-8.8E1	2.6226E-4	6.34193E-3	9.3174E-2	2.73055E1	-3.26374E1	-3.26648E1	2.68172E1	5.63233E-8	2.51684E-3	2.51684E-3	6.3074E-3	7.52353E-2
1.8E1	1.7644E4	9.0E0	7.27E2	5.0E2	-7.54877E-2	-8.80022E1	-8.58307E-4	-8.79998E1	2.38419E-4	6.17504E-3	9.33409E-2	2.73443E1	-3.26663E1	-3.26361E1	2.68049E1	5.63405E-8	2.51709E-3	2.51709E-3	6.31894E-3	7.47089E-2
1.9E1	2.345E3	0.0E0	7.68E2	5.29E2	-7.37874E-2	-8.80023E1	-9.53674E-4	-8.79995E1	-4.76837E-5	6.10352E-3	9.32455E-2	2.73076E1	-3.26321E1	-3.26585E1	2.68225E1	5.63233E-8	2.51854E-3	2.51854E-3	6.31761E-3	7.46673E-2
2.0E1	7.702E3	6.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80025E1	-1.12057E-3	-8.79997E1	1.19209E-4	6.12736E-3	9.31263E-2	2.7316E1	-3.26409E1	-3.26227E1	2.68115E1	5.63088E-8	2.52488E-3	2.52488E-3	6.31391E-3	7.48807E-2
2.1E1	1.2E1	0.0E0	8.49E2	5.88E2	-7.42513E-2	-8.80025E1	-8.10623E-4	-8.79998E1	2.38419E-4	6.19888E-3	9.32217E-2	2.73297E1	-3.26526E1	-3.26457E1	2.68285E1	5.63233E-8	2.51709E-3	2.51709E-3	6.31949E-3	7.48586E-2
2.2E1	5.96E2	0.0E0	8.89E2	6.17E2	-7.46377E-2	-8.80024E1	-6.91414E-4	-8.8E1	0.0E0	5.88894E-3	9.33647E-2	2.73216E1	-3.26366E1	-3.26231E1	2.68123E1	5.62833E-8	2.51632E-3	2.51632E-3	6.28949E-3	7.48304E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80025E1	-5.72205E-4	-8.79997E1	2.38419E-5	6.19888E-3	9.33409E-2	2.73183E1	-3.26765E1	-3.26188E1	2.67944E1	5.63233E-8	2.51498E-3	2.51498E-3	6.2863E-3	7.45725E-2