[Scan]
initial_time=2015-12-15T23:30:26
final_time=2015-12-15T23:30:45
ip_count=19
run=1017
dataset=3
scan=196
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08831E-4
ql1_vset=
ql1_vmon=-8.21424E-1
ql1_imon=5.54222E-9
ql2_vset=
ql2_vmon=-7.99632E-1
ql2_imon=3.78203E-10
ql3_vset=
ql3_vmon=-9.13198E0
ql3_imon=8.21948E-9
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=-1.28448E-10
mult1=-8.94571E-9
mult2=-2.58487E-9
rf_tmon=-5.49778E-3
rf_agc=3.10204E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=4.24159E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61017E0
bslens_imon=2.33797E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20072E1
lens5a_imon=2.00916E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12533E2
lens4a_imon=2.05114E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53962E1
cs_ef1b_imon=2.9158E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0457E2
lens23_imon=1.02064E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04705E1
cs_ea1_imon=2.32523E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39262E0
lens1_imon=2.77686E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6411E1
os_ef1alow_imon=2.98356E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03808E1
cs_ea2_imon=1.54798E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=2.96549E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=2.10444E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=3.08017E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1491E1
os_ea1_imon=1.94793E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63815E1
os_ef1bup_imon=3.07044E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26921E0
cs_ionrep_imon=1.24607E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.93275E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0196E1
cs_anode1_imon=3.10415E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=6.07024E-9
tplens_vset=1.4E-1
tplens_vmon=1.573E0
tplens_imon=-3.51978E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26176E1
iondef3_imon=1.50232E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26939E1
iondef2_imon=1.60567E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98084E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=9.17554E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26213E0
ionrepsh_imon=1.86511E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34071E1
lens5b_imon=2.201E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74351E1
cs_ef2b_imon=3.11249E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.47189E-1
os_ea2_imon=-8.40417E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06057E2
lens4b_imon=2.00343E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71374E1
cs_ef2a_imon=3.17435E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.5382E0
os_ef2alow_imon=-2.70664E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.57641E-1
os_ef2bup_imon=-5.33046E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10944E1
os_restr2_imon=2.95194E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23096E2
cs_ionfoca_imon=6.33149E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01624E1
cs_anode2_imon=2.26384E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72943E1
iondef1_imon=1.11617E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6834E1
iondef4_imon=1.07808E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=2.21771E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82952E-1
olens1_imon=1.21429E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13593E0
cs_ionaccel_imon=-1.95251E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47101E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.62528E-6
window_vset=0.0E0
window_vmon=1.4876E-1
window_imon=-9.48164E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39042E-4
mask2_vset=0.0E0
mask2_vmon=-1.86425E1
mask2_imon=-5.86738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92705E3
multa_neg_imon=7.62585E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.73038E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.34978E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.61816E0
defgridb_imon=6.0048E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33458E1
os_fil1_imon=8.94305E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.73832E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65438E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30736E1
cs_fil1_imon=1.00151E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62795E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65482E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.52146E-2
os_fil2_imon=-2.96458E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.64795E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.7787E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38891E-1
cs_fil2_imon=-2.73869E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.87156E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2235E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=1.80492E-1
chamber_ion_pmon=9.00687E-8
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.54196E-1
res40_imon=-2.60238E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.22496E-1	-7.99012E-1	-9.13179E0	-9.14164E0	5.76973E-3	9.32693E-2	2.73198E1	-3.26685E1	-3.26366E1	2.67788E1	9.0068E-8	2.51632E-3	2.51632E-3	6.29128E-3	1.79945E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.22496E-1	-7.99131E-1	-9.13165E0	-9.14187E0	6.03199E-3	9.35078E-2	2.72763E1	-3.26536E1	-3.26407E1	2.67842E1	9.01448E-8	2.51417E-3	2.51417E-3	6.33436E-3	1.79485E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.22186E-1	-7.99108E-1	-9.13184E0	-9.14192E0	5.76973E-3	9.31501E-2	2.73092E1	-3.26718E1	-3.26509E1	2.68472E1	9.01492E-8	2.51804E-3	2.51804E-3	6.31858E-3	1.79942E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.21757E-1	-7.98941E-1	-9.13167E0	-9.14197E0	5.98431E-3	9.32932E-2	2.72985E1	-3.2632E1	-3.2641E1	2.68233E1	9.01064E-8	2.51847E-3	2.51847E-3	6.25382E-3	1.80714E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.21114E-1	-7.99036E-1	-9.13148E0	-9.14133E0	5.67436E-3	9.32455E-2	2.73236E1	-3.26484E1	-3.26579E1	2.67998E1	9.0068E-8	2.51632E-3	2.51632E-3	6.32896E-3	1.80253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.21209E-1	-7.98821E-1	-9.13184E0	-9.14178E0	5.53131E-3	9.33409E-2	2.7292E1	-3.26653E1	-3.26185E1	2.68718E1	9.01753E-8	2.52262E-3	2.52262E-3	6.33809E-3	1.80022E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.21948E-1	-7.99227E-1	-9.13155E0	-9.14195E0	5.96046E-3	9.35793E-2	2.72937E1	-3.26801E1	-3.26386E1	2.68371E1	9.02736E-8	2.52179E-3	2.52179E-3	6.33021E-3	1.79536E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09665E0	-8.21924E-1	-7.99346E-1	-9.13179E0	-9.14176E0	5.79357E-3	9.34839E-2	2.73552E1	-3.26502E1	-3.26337E1	2.68815E1	9.00296E-8	2.52318E-3	2.52318E-3	6.31288E-3	1.79554E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.21614E-1	-7.99417E-1	-9.13153E0	-9.14209E0	5.81741E-3	9.33647E-2	2.72775E1	-3.26639E1	-3.26146E1	2.6777E1	9.00296E-8	2.51847E-3	2.51847E-3	6.28056E-3	1.79945E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.21376E-1	-7.99346E-1	-9.13146E0	-9.14207E0	5.55515E-3	9.35078E-2	2.73057E1	-3.26777E1	-3.26302E1	2.68124E1	9.00687E-8	2.5199E-3	2.5199E-3	6.32386E-3	1.80179E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.21447E-1	-7.99465E-1	-9.13146E0	-9.14209E0	5.88894E-3	9.35316E-2	2.73051E1	-3.26803E1	-3.26071E1	2.68106E1	9.0147E-8	2.51662E-3	2.51662E-3	6.33486E-3	1.80179E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.21495E-1	-7.99298E-1	-9.1315E0	-9.1419E0	5.74589E-3	9.34839E-2	2.73412E1	-3.26891E1	-3.25985E1	2.68244E1	9.02253E-8	2.51225E-3	2.51225E-3	6.32936E-3	1.80335E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.214E-1	-7.9906E-1	-9.13138E0	-9.14154E0	5.4121E-3	9.33647E-2	2.73234E1	-3.26685E1	-3.26077E1	2.68383E1	9.01265E-8	2.52406E-3	2.52406E-3	6.31827E-3	1.8076E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.2159E-1	-7.99012E-1	-9.1316E0	-9.14176E0	5.62668E-3	9.33886E-2	2.73159E1	-3.26549E1	-3.26266E1	2.68028E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09595E0	-8.214E-1	-7.99155E-1	-9.1315E0	-9.14183E0	5.81741E-3	9.30786E-2	2.73151E1	-3.26272E1	-3.26384E1	2.67992E1	9.00296E-8	2.5188E-3	2.5188E-3	6.26916E-3	1.81435E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.21686E-1	-7.98941E-1	-9.13148E0	-9.14171E0	5.81741E-3	9.31501E-2	2.73333E1	-3.26639E1	-3.25996E1	2.67968E1	9.00296E-8	2.51771E-3	2.51771E-3	6.3074E-3	1.80649E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.21328E-1	-7.98988E-1	-9.13124E0	-9.14211E0	6.00815E-3	9.32217E-2	2.72871E1	-3.26476E1	-3.26392E1	2.68232E1	9.00296E-8	2.51417E-3	2.51417E-3	6.3074E-3	1.81177E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.21543E-1	-7.99108E-1	-9.1311E0	-9.14221E0	5.88894E-3	9.31978E-2	2.72883E1	-3.26753E1	-3.26185E1	2.68337E1	9.01078E-8	2.52757E-3	2.52757E-3	6.34588E-3	1.80649E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.2159E-1	-7.99274E-1	-9.13157E0	-9.14197E0	5.79357E-3	9.33409E-2	2.73015E1	-3.26506E1	-3.2617E1	2.68406E1	9.0105E-8	2.52448E-3	2.52448E-3	6.37114E-3	1.80475E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.21424E-1	-7.99632E-1	-9.13198E0	-9.14168E0	5.8651E-3	9.33409E-2	2.72943E1	-3.26939E1	-3.26176E1	2.6834E1	9.00687E-8	2.5199E-3	2.5199E-3	6.32386E-3	1.80492E-1