[Scan]
initial_time=2015-12-15T23:31:19
final_time=2015-12-15T23:31:38
ip_count=19
run=1017
dataset=3
scan=198
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08832E-4
ql1_vset=
ql1_vmon=-8.20518E-1
ql1_imon=3.56478E-9
ql2_vset=
ql2_vmon=-7.99084E-1
ql2_imon=5.98812E-10
ql3_vset=
ql3_vmon=-9.13022E0
ql3_imon=3.10104E-9
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=3.28624E-10
mult1=-9.29489E-9
mult2=-2.7246E-9
rf_tmon=-5.66E-3
rf_agc=3.18976E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=5.81932E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67936E0
bslens_imon=2.49449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19622E1
lens5a_imon=1.97154E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05003E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53706E1
cs_ef1b_imon=2.9308E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02027E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05138E1
cs_ea1_imon=2.3122E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34732E0
lens1_imon=2.38274E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03858E1
cs_ea2_imon=1.55228E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84268E1
cs_ef1a_imon=2.97549E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=2.0996E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11538E1
os_restr1_imon=3.07568E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14999E1
os_ea1_imon=1.9445E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22386E0
cs_ionrep_imon=1.22459E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91854E2
cs_nozzle_imon=1.93355E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=3.11244E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=6.18677E-9
tplens_vset=1.4E-1
tplens_vmon=1.58916E0
tplens_imon=-1.40728E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.50001E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26987E1
iondef2_imon=1.56814E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98425E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=9.85754E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29536E0
ionrepsh_imon=1.86952E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33532E1
lens5b_imon=2.19E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.41246E-1
os_ea2_imon=-6.92286E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.53449E0
os_ef2alow_imon=-2.64473E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.41853E-1
os_ef2bup_imon=-5.35491E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10985E1
os_restr2_imon=2.96937E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.30865E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01947E1
cs_anode2_imon=2.25506E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73069E1
iondef1_imon=1.09878E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68058E1
iondef4_imon=1.0708E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.77297E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=1.21213E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14696E0
cs_ionaccel_imon=-2.03566E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02043E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56555E1
einzel_imon=7.46439E-6
window_vset=0.0E0
window_vmon=1.41659E-1
window_imon=-1.13107E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82605E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86002E1
mask2_imon=-8.46352E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.13407E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93768E3
defgrida_imon=6.66182E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.13046E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30532E0
defgridb_imon=6.17875E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33469E1
os_fil1_imon=8.94061E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.77906E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65404E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30758E1
cs_fil1_imon=9.99969E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62804E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65353E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.67389E-2
os_fil2_imon=-3.02036E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.63787E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.88092E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38068E-1
cs_fil2_imon=-2.70801E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.13641E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22499E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=1.81435E-1
chamber_ion_pmon=9.17665E-8
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.52685E-1
res40_imon=-2.76006E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09627E0	-8.20446E-1	-7.98774E-1	-9.1306E0	-9.14176E0	5.88894E-3	9.29117E-2	2.73111E1	-3.26627E1	-3.26651E1	2.68316E1	9.01078E-8	2.52099E-3	2.52099E-3	6.3514E-3	1.81278E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.21066E-1	-7.98535E-1	-9.13041E0	-9.14204E0	5.60284E-3	9.30548E-2	2.73159E1	-3.26528E1	-3.26669E1	2.67883E1	9.00687E-8	2.51334E-3	2.51334E-3	6.32386E-3	1.8112E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.20851E-1	-7.99179E-1	-9.13045E0	-9.14204E0	5.45979E-3	9.32693E-2	2.73446E1	-3.2659E1	-3.26425E1	2.68058E1	9.00296E-8	2.51647E-3	2.51647E-3	6.27745E-3	1.80697E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.20827E-1	-7.99274E-1	-9.13026E0	-9.14235E0	5.79357E-3	9.35078E-2	2.73411E1	-3.26785E1	-3.26231E1	2.68286E1	9.01448E-8	2.51525E-3	2.51525E-3	6.30202E-3	1.80869E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.21161E-1	-7.98941E-1	-9.13024E0	-9.14233E0	5.38826E-3	9.32932E-2	2.73163E1	-3.26626E1	-3.25824E1	2.68094E1	9.01064E-8	2.51954E-3	2.51954E-3	6.31278E-3	1.81177E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.20804E-1	-7.99036E-1	-9.13043E0	-9.14209E0	5.53131E-3	9.31978E-2	2.72691E1	-3.2695E1	-3.26437E1	2.68117E1	9.01448E-8	2.51632E-3	2.51632E-3	6.29665E-3	1.8056E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09611E0	-8.20541E-1	-7.99251E-1	-9.13053E0	-9.14214E0	5.50747E-3	9.33647E-2	2.72833E1	-3.27033E1	-3.26189E1	2.6846E1	9.01064E-8	2.52276E-3	2.52276E-3	6.31278E-3	1.80253E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.20899E-1	-7.98845E-1	-9.13055E0	-9.14207E0	5.4121E-3	9.3174E-2	2.73063E1	-3.26422E1	-3.26536E1	2.68364E1	9.01448E-8	2.51632E-3	2.51632E-3	6.33977E-3	1.81023E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.20661E-1	-7.98774E-1	-9.13043E0	-9.14218E0	5.36442E-3	9.34839E-2	2.7248E1	-3.26452E1	-3.26254E1	2.68046E1	9.0147E-8	2.52318E-3	2.52318E-3	6.31837E-3	1.80492E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.20756E-1	-7.99203E-1	-9.12995E0	-9.1419E0	5.36442E-3	9.31263E-2	2.73219E1	-3.26975E1	-3.26326E1	2.68286E1	9.00296E-8	2.51662E-3	2.51662E-3	6.31288E-3	1.80963E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.20732E-1	-7.99084E-1	-9.13002E0	-9.1418E0	5.36442E-3	9.32217E-2	2.72853E1	-3.27251E1	-3.26038E1	2.67794E1	9.01078E-8	2.51334E-3	2.51334E-3	6.31837E-3	1.80179E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.20613E-1	-7.98988E-1	-9.13038E0	-9.14211E0	5.26905E-3	9.31025E-2	2.72862E1	-3.26455E1	-3.26042E1	2.68196E1	9.0147E-8	2.52318E-3	2.52318E-3	6.3074E-3	1.80649E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.20661E-1	-7.98798E-1	-9.13045E0	-9.14185E0	5.48363E-3	9.29117E-2	2.7358E1	-3.26927E1	-3.2608E1	2.68267E1	9.02602E-8	2.51954E-3	2.51954E-3	6.32896E-3	1.80869E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.20637E-1	-7.99108E-1	-9.13024E0	-9.14187E0	5.48363E-3	9.30309E-2	2.73225E1	-3.27041E1	-3.26314E1	2.68178E1	9.0147E-8	2.5188E-3	2.5188E-3	6.32386E-3	1.81278E-1
1.8E1	6.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.20494E-1	-7.98893E-1	-9.13038E0	-9.14178E0	5.24521E-3	9.28164E-2	2.7251E1	-3.26693E1	-3.26609E1	2.68256E1	9.04214E-8	2.5199E-3	2.5199E-3	6.30192E-3	1.80649E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.20446E-1	-7.99036E-1	-9.13041E0	-9.14192E0	5.26905E-3	9.3317E-2	2.7349E1	-3.26248E1	-3.26705E1	2.68382E1	9.01078E-8	2.51334E-3	2.51334E-3	6.37351E-3	1.8112E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09627E0	-8.20661E-1	-7.98893E-1	-9.13074E0	-9.14152E0	5.6982E-3	9.34124E-2	2.7324E1	-3.26502E1	-3.26343E1	2.68184E1	9.08544E-8	2.52318E-3	2.52318E-3	6.32386E-3	1.79866E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.20494E-1	-7.98869E-1	-9.13043E0	-9.14195E0	5.43594E-3	9.3317E-2	2.73558E1	-3.26944E1	-3.2695E1	2.68076E1	9.13833E-8	2.52276E-3	2.52276E-3	6.30202E-3	1.8056E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.20398E-1	-7.98845E-1	-9.13031E0	-9.14164E0	5.50747E-3	9.3317E-2	2.73747E1	-3.26927E1	-3.26242E1	2.68279E1	9.07619E-8	2.52061E-3	2.52061E-3	6.34518E-3	1.81177E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-8.20518E-1	-7.99084E-1	-9.13022E0	-9.14168E0	5.60284E-3	9.32455E-2	2.73069E1	-3.26987E1	-3.26296E1	2.68058E1	9.17665E-8	2.51771E-3	2.51771E-3	6.34037E-3	1.81435E-1