[Scan]
initial_time=2015-12-15T23:32:39
final_time=2015-12-15T23:32:58
ip_count=19
run=1017
dataset=3
scan=201
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.088E-4
ql1_vset=
ql1_vmon=-8.19421E-1
ql1_imon=3.13486E-9
ql2_vset=
ql2_vmon=-7.98917E-1
ql2_imon=6.07443E-10
ql3_vset=
ql3_vmon=-9.13062E0
ql3_imon=1.8338E-9
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=4.47273E-10
mult1=-8.63265E-9
mult2=-2.62679E-9
rf_tmon=-5.35959E-3
rf_agc=3.21079E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=6.03151E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67034E0
bslens_imon=2.62113E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19311E1
lens5a_imon=1.99288E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.04721E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53875E1
cs_ef1b_imon=2.93188E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02086E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05023E1
cs_ea1_imon=2.32559E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39144E0
lens1_imon=2.48309E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6453E1
os_ef1alow_imon=2.99279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03932E1
cs_ea2_imon=1.5763E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=2.95855E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=2.10927E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.1122E1
os_restr1_imon=3.07929E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15394E1
os_ea1_imon=1.93802E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.09659E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19429E0
cs_ionrep_imon=1.19829E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9185E2
cs_nozzle_imon=1.93296E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01743E1
cs_anode1_imon=3.11533E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=6.21939E-9
tplens_vset=1.4E-1
tplens_vmon=1.58185E0
tplens_imon=-4.68779E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2641E1
iondef3_imon=1.49206E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26897E1
iondef2_imon=1.5586E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.983E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=9.69088E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30283E0
ionrepsh_imon=1.88422E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33752E1
lens5b_imon=2.16844E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74892E1
cs_ef2b_imon=3.12794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.17104E-1
os_ea2_imon=-8.7935E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00439E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71594E1
cs_ef2a_imon=3.16542E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.57773E0
os_ef2alow_imon=-2.63392E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.88104E-1
os_ef2bup_imon=-5.46303E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10931E1
os_restr2_imon=2.94918E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.31025E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.26659E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73429E1
iondef1_imon=1.07936E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67854E1
iondef4_imon=1.07945E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=2.72734E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=1.22088E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13915E0
cs_ionaccel_imon=-1.7978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47251E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.61576E-6
window_vset=0.0E0
window_vmon=1.41059E-1
window_imon=-1.14548E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.86236E1
mask2_imon=-7.85084E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92566E3
multa_neg_imon=8.05058E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.77639E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.20112E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=6.07913E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33465E1
os_fil1_imon=8.94998E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.75683E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65575E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30705E1
cs_fil1_imon=1.00049E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63153E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65543E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.77472E-2
os_fil2_imon=-2.89422E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.76401E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.57494E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.49178E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.81826E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22377E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=1.81751E-1
chamber_ion_pmon=9.21659E-8
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.06744E-1
res40_imon=-2.44291E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=147
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.19683E-1	-7.99036E-1	-9.13067E0	-9.14199E0	5.65052E-3	9.34124E-2	2.73074E1	-3.26834E1	-3.26335E1	2.68128E1	9.21259E-8	2.52538E-3	2.52538E-3	6.32936E-3	1.79866E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.19635E-1	-7.98893E-1	-9.13084E0	-9.1419E0	5.57899E-3	9.33886E-2	2.73207E1	-3.26819E1	-3.26068E1	2.67926E1	9.21273E-8	2.51393E-3	2.51393E-3	6.29157E-3	1.80929E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.19826E-1	-7.99036E-1	-9.13093E0	-9.14211E0	5.74589E-3	9.34601E-2	2.72886E1	-3.26608E1	-3.25829E1	2.68352E1	9.21259E-8	2.5188E-3	2.5188E-3	6.3514E-3	1.80649E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.19635E-1	-7.99155E-1	-9.13093E0	-9.14209E0	5.6982E-3	9.33647E-2	2.73189E1	-3.27125E1	-3.26452E1	2.68184E1	9.20116E-8	2.52659E-3	2.52659E-3	6.30212E-3	1.80929E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.19588E-1	-7.99417E-1	-9.13086E0	-9.14207E0	5.36442E-3	9.32693E-2	2.73381E1	-3.27104E1	-3.26136E1	2.68348E1	9.20859E-8	2.52428E-3	2.52428E-3	6.32936E-3	1.82542E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.19373E-1	-7.98678E-1	-9.1305E0	-9.14207E0	5.74589E-3	9.30071E-2	2.72913E1	-3.26729E1	-3.26182E1	2.68211E1	9.21266E-8	2.51632E-3	2.51632E-3	6.31817E-3	1.82262E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.19683E-1	-7.98965E-1	-9.13067E0	-9.1419E0	5.8651E-3	9.33886E-2	2.72955E1	-3.26398E1	-3.26122E1	2.68548E1	9.21251E-8	2.51581E-3	2.51581E-3	6.31858E-3	1.82348E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.19397E-1	-7.99441E-1	-9.13024E0	-9.14173E0	5.8651E-3	9.33647E-2	2.73462E1	-3.26451E1	-3.26225E1	2.67668E1	9.20873E-8	2.52061E-3	2.52061E-3	6.32356E-3	1.81952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.19588E-1	-7.99155E-1	-9.13026E0	-9.14197E0	5.55515E-3	9.32217E-2	2.73081E1	-3.26561E1	-3.26164E1	2.6836E1	9.21659E-8	2.52384E-3	2.52384E-3	6.29665E-3	1.81797E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.19278E-1	-7.98917E-1	-9.13033E0	-9.14183E0	5.60284E-3	9.30786E-2	2.73452E1	-3.26354E1	-3.26343E1	2.68112E1	9.21659E-8	2.52318E-3	2.52318E-3	6.3514E-3	1.83018E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.19826E-1	-7.99179E-1	-9.13033E0	-9.14197E0	5.60284E-3	9.30548E-2	2.72951E1	-3.26528E1	-3.26385E1	2.68157E1	9.20873E-8	2.52061E-3	2.52061E-3	6.29128E-3	1.81332E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.1985E-1	-7.99155E-1	-9.13043E0	-9.14173E0	5.4121E-3	9.3174E-2	2.7321E1	-3.2662E1	-3.26579E1	2.67994E1	9.20844E-8	2.51804E-3	2.51804E-3	6.32978E-3	1.81864E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.1954E-1	-7.99274E-1	-9.13019E0	-9.14176E0	5.57899E-3	9.31978E-2	2.73093E1	-3.26843E1	-3.26056E1	2.68052E1	9.21259E-8	2.51771E-3	2.51771E-3	6.29645E-3	1.80649E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.19421E-1	-7.98917E-1	-9.13014E0	-9.14159E0	5.72205E-3	9.32217E-2	2.73405E1	-3.26518E1	-3.26212E1	2.67992E1	9.21259E-8	2.51225E-3	2.51225E-3	6.31288E-3	1.82067E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.19492E-1	-7.98869E-1	-9.13014E0	-9.14199E0	5.76973E-3	9.29356E-2	2.72954E1	-3.26585E1	-3.26289E1	2.68244E1	9.21259E-8	2.52099E-3	2.52099E-3	6.3074E-3	1.82383E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.19731E-1	-7.98845E-1	-9.12988E0	-9.14187E0	5.4121E-3	9.31978E-2	2.72789E1	-3.26422E1	-3.26566E1	2.68007E1	9.2128E-8	2.52197E-3	2.52197E-3	6.33863E-3	1.82484E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.19492E-1	-7.98917E-1	-9.13041E0	-9.14161E0	5.126E-3	9.31978E-2	2.73351E1	-3.26434E1	-3.25948E1	2.68605E1	9.19168E-8	2.52407E-3	2.52407E-3	6.27335E-3	1.82146E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.19445E-1	-7.99036E-1	-9.13012E0	-9.14173E0	5.14984E-3	9.30309E-2	2.73063E1	-3.26633E1	-3.26543E1	2.6798E1	9.20459E-8	2.51771E-3	2.51771E-3	6.32936E-3	1.81909E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.19087E-1	-7.98416E-1	-9.13045E0	-9.1419E0	5.4121E-3	9.30786E-2	2.7352E1	-3.26687E1	-3.25665E1	2.68196E1	9.21259E-8	2.51771E-3	2.51771E-3	6.27461E-3	1.81593E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.19421E-1	-7.98917E-1	-9.13062E0	-9.14207E0	5.60284E-3	9.31025E-2	2.73429E1	-3.26897E1	-3.2641E1	2.67854E1	9.21659E-8	2.52209E-3	2.52209E-3	6.31288E-3	1.81751E-1