[Scan]
initial_time=2015-12-15T23:34:25
final_time=2015-12-15T23:34:45
ip_count=19
run=1017
dataset=3
scan=205
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08824E-4
ql1_vset=
ql1_vmon=-8.18896E-1
ql1_imon=2.92624E-9
ql2_vset=
ql2_vmon=-7.98917E-1
ql2_imon=6.50001E-10
ql3_vset=
ql3_vmon=-9.13053E0
ql3_imon=1.2345E-9
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=4.98259E-10
mult1=-9.07378E-9
mult2=-2.7311E-9
rf_tmon=-3.44765E-3
rf_agc=3.4306E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=6.06704E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67498E0
bslens_imon=2.45819E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19735E1
lens5a_imon=1.97697E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12524E2
lens4a_imon=2.05124E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53829E1
cs_ef1b_imon=2.95402E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05295E1
cs_ea1_imon=2.31242E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3911E0
lens1_imon=2.55552E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64817E1
os_ef1alow_imon=2.97175E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04235E1
cs_ea2_imon=1.57999E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84556E1
cs_ef1a_imon=2.97175E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=2.11735E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11199E1
os_restr1_imon=3.09616E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1523E1
os_ea1_imon=1.96584E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63386E1
os_ef1bup_imon=3.07531E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23182E0
cs_ionrep_imon=1.21394E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91834E2
cs_nozzle_imon=1.93323E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=3.13369E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20589E0
olens4_imon=6.2809E-9
tplens_vset=1.4E-1
tplens_vmon=1.59392E0
tplens_imon=-1.94159E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26242E1
iondef3_imon=1.49239E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.58868E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98231E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=1.01274E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29903E0
ionrepsh_imon=1.88103E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33657E1
lens5b_imon=2.17268E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74316E1
cs_ef2b_imon=3.10068E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.4365E-1
os_ea2_imon=-5.52208E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00174E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71292E1
cs_ef2a_imon=3.18513E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.56774E0
os_ef2alow_imon=-2.66146E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.6575E-1
os_ef2bup_imon=-5.46252E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11158E1
os_restr2_imon=2.96097E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.31214E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01479E1
cs_anode2_imon=2.27287E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72986E1
iondef1_imon=1.0954E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67902E1
iondef4_imon=1.08781E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.72768E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=1.23259E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13767E0
cs_ionaccel_imon=-1.98031E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47209E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.50365E-6
window_vset=0.0E0
window_vmon=1.53394E-1
window_imon=-9.20362E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82674E2
mask1_imon=2.38893E-4
mask2_vset=0.0E0
mask2_vmon=-1.86234E1
mask2_imon=-6.42342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92591E3
multa_neg_imon=6.88687E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.70611E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5009E3
multb_neg_imon=7.75592E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2557E0
defgridb_imon=6.1673E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33434E1
os_fil1_imon=8.93761E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.76207E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65239E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30757E1
cs_fil1_imon=1.00044E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62621E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65441E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.53616E-2
os_fil2_imon=-3.19627E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.69429E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.10023E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37892E-1
cs_fil2_imon=-2.34483E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04354E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22424E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.82107E-1
chamber_ion_pmon=9.20481E-8
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.80261E-1
res40_imon=-2.60933E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=190
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09627E0	-8.19016E-1	-7.98845E-1	-9.13081E0	-9.14176E0	5.55515E-3	9.31263E-2	2.72989E1	-3.26666E1	-3.25961E1	2.68001E1	9.21659E-8	2.52871E-3	2.52871E-3	6.30212E-3	1.81841E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09627E0	-8.19039E-1	-7.99012E-1	-9.13069E0	-9.14199E0	5.24521E-3	9.31501E-2	2.73129E1	-3.26386E1	-3.26669E1	2.68082E1	9.21251E-8	2.52473E-3	2.52473E-3	6.32978E-3	1.80901E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.19087E-1	-7.98655E-1	-9.13064E0	-9.14207E0	5.67436E-3	9.32217E-2	2.73022E1	-3.26706E1	-3.26364E1	2.67943E1	9.21659E-8	2.52139E-3	2.52139E-3	6.31858E-3	1.81864E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.19039E-1	-7.99346E-1	-9.1306E0	-9.14202E0	5.05447E-3	9.31978E-2	2.73051E1	-3.26332E1	-3.26446E1	2.68358E1	9.20502E-8	2.52131E-3	2.52131E-3	6.32328E-3	1.81385E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.19087E-1	-7.99179E-1	-9.13038E0	-9.14202E0	5.53131E-3	9.31263E-2	2.73093E1	-3.26356E1	-3.26609E1	2.68232E1	9.20481E-8	2.52923E-3	2.52923E-3	6.32356E-3	1.82107E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-8.19373E-1	-7.99465E-1	-9.13057E0	-9.14192E0	5.60284E-3	9.31025E-2	2.72762E1	-3.26608E1	-3.2613E1	2.68557E1	9.18809E-8	2.52585E-3	2.52585E-3	6.28511E-3	1.81864E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09627E0	-8.1923E-1	-7.99131E-1	-9.13064E0	-9.14187E0	5.84126E-3	9.3317E-2	2.73087E1	-3.26933E1	-3.26056E1	2.68256E1	9.21659E-8	2.52384E-3	2.52384E-3	6.31278E-3	1.81952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09627E0	-8.18944E-1	-7.98988E-1	-9.13064E0	-9.14192E0	5.72205E-3	9.30309E-2	2.72943E1	-3.26939E1	-3.2641E1	2.68138E1	9.21259E-8	2.52538E-3	2.52538E-3	6.32386E-3	1.82225E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0965E0	-8.19016E-1	-7.99155E-1	-9.13091E0	-9.14185E0	5.50747E-3	9.30548E-2	2.72919E1	-3.2641E1	-3.26074E1	2.68296E1	9.21259E-8	2.52154E-3	2.52154E-3	6.31837E-3	1.81988E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09634E0	-8.19039E-1	-7.98678E-1	-9.13076E0	-9.14168E0	5.57899E-3	9.32455E-2	2.73129E1	-3.26753E1	-3.26176E1	2.67974E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09627E0	-8.19111E-1	-7.99203E-1	-9.13095E0	-9.14187E0	5.55515E-3	9.30309E-2	2.73273E1	-3.2638E1	-3.26807E1	2.68124E1	9.19696E-8	2.52061E-3	2.52061E-3	6.32896E-3	1.81487E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0968E0	-8.19087E-1	-7.98559E-1	-9.13043E0	-9.14199E0	5.67436E-3	9.30548E-2	2.73458E1	-3.26826E1	-3.26396E1	2.68154E1	9.20459E-8	2.52099E-3	2.52099E-3	6.31288E-3	1.82067E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.19135E-1	-7.98845E-1	-9.13084E0	-9.14166E0	5.8651E-3	9.29356E-2	2.73087E1	-3.26332E1	-3.26567E1	2.6828E1	9.21259E-8	2.52647E-3	2.52647E-3	6.3514E-3	1.82383E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.19206E-1	-7.98416E-1	-9.1306E0	-9.14195E0	5.65052E-3	9.28879E-2	2.73033E1	-3.26603E1	-3.26086E1	2.68184E1	9.20088E-8	2.52276E-3	2.52276E-3	6.31817E-3	1.81487E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09673E0	-8.18992E-1	-7.99298E-1	-9.1305E0	-9.14192E0	5.84126E-3	9.27925E-2	2.72868E1	-3.26537E1	-3.26113E1	2.68226E1	9.21259E-8	2.51662E-3	2.51662E-3	6.31288E-3	1.82859E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-8.19135E-1	-7.99179E-1	-9.13038E0	-9.14176E0	5.91278E-3	9.29356E-2	2.73045E1	-3.26074E1	-3.26657E1	2.6783E1	9.20859E-8	2.51662E-3	2.51662E-3	6.30192E-3	1.81751E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.19063E-1	-7.98631E-1	-9.1305E0	-9.14195E0	5.62668E-3	9.29594E-2	2.73207E1	-3.26549E1	-3.2602E1	2.68221E1	9.20859E-8	2.5188E-3	2.5188E-3	6.29645E-3	1.82383E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.19135E-1	-7.98583E-1	-9.13072E0	-9.14178E0	5.6982E-3	9.30786E-2	2.72957E1	-3.2688E1	-3.26419E1	2.68454E1	9.21659E-8	2.52599E-3	2.52599E-3	6.33977E-3	1.82262E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.18992E-1	-7.98774E-1	-9.13045E0	-9.14183E0	5.43594E-3	9.30786E-2	2.72962E1	-3.26803E1	-3.26567E1	2.68076E1	9.20088E-8	2.52492E-3	2.52492E-3	6.32896E-3	1.82418E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.18896E-1	-7.98917E-1	-9.13053E0	-9.1418E0	5.26905E-3	9.29356E-2	2.72986E1	-3.26567E1	-3.26242E1	2.67902E1	9.20481E-8	2.52276E-3	2.52276E-3	6.32896E-3	1.82107E-1