[Scan]
initial_time=2015-12-15T23:34:52
final_time=2015-12-15T23:35:11
ip_count=19
run=1017
dataset=3
scan=206
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09627E0
qbias_imon=-1.08803E-4
ql1_vset=
ql1_vmon=-8.18872E-1
ql1_imon=2.9247E-9
ql2_vset=
ql2_vmon=-7.98917E-1
ql2_imon=5.94568E-10
ql3_vset=
ql3_vmon=-9.13084E0
ql3_imon=1.13434E-9
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=5.00298E-10
mult1=-9.55978E-9
mult2=-2.64276E-9
rf_tmon=-3.473E-3
rf_agc=3.33696E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=6.28507E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62905E0
bslens_imon=2.35213E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19889E1
lens5a_imon=2.02191E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.04813E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53941E1
cs_ef1b_imon=2.93116E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02178E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04758E1
cs_ea1_imon=2.29869E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39498E0
lens1_imon=2.87242E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.9618E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0372E1
cs_ea2_imon=1.52816E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83829E1
cs_ef1a_imon=2.95964E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=2.11782E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11322E1
os_restr1_imon=3.09623E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15129E1
os_ea1_imon=1.95961E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63335E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24207E0
cs_ionrep_imon=1.21952E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.9354E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=3.12217E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=6.27154E-9
tplens_vset=1.4E-1
tplens_vmon=1.5848E0
tplens_imon=-5.60803E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26458E1
iondef3_imon=1.51188E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26615E1
iondef2_imon=1.55754E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98385E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=9.93621E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27628E0
ionrepsh_imon=1.87679E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3413E1
lens5b_imon=2.21056E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.111E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.62527E-1
os_ea2_imon=-8.93508E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0607E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71618E1
cs_ef2a_imon=3.19678E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.5477E0
os_ef2alow_imon=-2.706E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.56869E-1
os_ef2bup_imon=-5.55313E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10997E1
os_restr2_imon=2.94918E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.29008E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.26479E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73159E1
iondef1_imon=1.08856E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67914E1
iondef4_imon=1.08053E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.76628E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=1.22728E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11753E0
cs_ionaccel_imon=-1.91313E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02111E2
cs_ionfocb_imon=1.471E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.75271E-6
window_vset=0.0E0
window_vmon=1.43461E-1
window_imon=-1.24639E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39257E-4
mask2_vset=0.0E0
mask2_vmon=-1.86236E1
mask2_imon=-6.84173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.15511E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.32689E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.15511E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38489E0
defgridb_imon=6.30919E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3346E1
os_fil1_imon=8.94271E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.74302E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65593E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30681E1
cs_fil1_imon=1.00052E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63153E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65847E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.76206E-2
os_fil2_imon=-3.08042E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.68592E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.67872E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.55184E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.86051E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22322E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=1.83655E-1
chamber_ion_pmon=9.20859E-8
chamber_cvt_pmon=2.53196E-3
foreline_cvt_pmon=2.53196E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.87523E-1
res40_imon=-2.55463E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.18682E-1	-7.99441E-1	-9.13072E0	-9.1419E0	5.60284E-3	9.34362E-2	2.73216E1	-3.26655E1	-3.26048E1	2.68453E1	9.21259E-8	2.52099E-3	2.52099E-3	6.31837E-3	1.81909E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.19135E-1	-7.99513E-1	-9.13057E0	-9.14176E0	5.53131E-3	9.3174E-2	2.73129E1	-3.26681E1	-3.25966E1	2.68178E1	9.20502E-8	2.51919E-3	2.51919E-3	6.31269E-3	1.82911E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.19159E-1	-7.99441E-1	-9.13105E0	-9.14173E0	5.74589E-3	9.31025E-2	2.73775E1	-3.26446E1	-3.26474E1	2.68331E1	9.21659E-8	2.51771E-3	2.51771E-3	6.32936E-3	1.83975E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.19016E-1	-7.99704E-1	-9.13045E0	-9.14199E0	5.4121E-3	9.32455E-2	2.73263E1	-3.27021E1	-3.26089E1	2.67986E1	9.20481E-8	2.51954E-3	2.51954E-3	6.29665E-3	1.82729E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.18586E-1	-7.99608E-1	-9.13067E0	-9.14211E0	6.22272E-3	9.33886E-2	2.73454E1	-3.26422E1	-3.26428E1	2.6795E1	9.21659E-8	2.52061E-3	2.52061E-3	6.31278E-3	1.83041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.18968E-1	-7.99131E-1	-9.13062E0	-9.14176E0	5.81741E-3	9.34124E-2	2.73092E1	-3.26498E1	-3.2633E1	2.68314E1	9.21266E-8	2.52492E-3	2.52492E-3	6.32896E-3	1.83041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.1892E-1	-7.99179E-1	-9.13053E0	-9.14185E0	5.4121E-3	9.35793E-2	2.73151E1	-3.26756E1	-3.26089E1	2.68004E1	9.21659E-8	2.52599E-3	2.52599E-3	6.33436E-3	1.83041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.1892E-1	-7.9906E-1	-9.13055E0	-9.14164E0	5.6982E-3	9.33886E-2	2.72877E1	-3.26849E1	-3.26284E1	2.68487E1	9.20873E-8	2.52276E-3	2.52276E-3	6.29128E-3	1.83667E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.18968E-1	-7.99108E-1	-9.13084E0	-9.14168E0	5.81741E-3	9.31025E-2	2.73132E1	-3.26648E1	-3.26272E1	2.67972E1	9.21659E-8	2.51417E-3	2.51417E-3	6.32356E-3	1.82418E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.18872E-1	-7.98965E-1	-9.1311E0	-9.14192E0	5.88894E-3	9.32455E-2	2.73063E1	-3.26886E1	-3.26422E1	2.67787E1	9.21273E-8	2.51498E-3	2.51498E-3	6.31798E-3	1.82604E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09704E0	-8.19087E-1	-7.99012E-1	-9.13093E0	-9.14185E0	5.67436E-3	9.34124E-2	2.73323E1	-3.26973E1	-3.26133E1	2.67884E1	9.20887E-8	2.51498E-3	2.51498E-3	6.33919E-3	1.82451E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09657E0	-8.19182E-1	-7.99036E-1	-9.13084E0	-9.1419E0	5.55515E-3	9.31978E-2	2.72841E1	-3.26452E1	-3.26368E1	2.67968E1	9.20873E-8	2.52599E-3	2.52599E-3	6.29128E-3	1.82574E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.19039E-1	-7.99227E-1	-9.13069E0	-9.14168E0	5.79357E-3	9.3317E-2	2.73069E1	-3.26744E1	-3.26407E1	2.68046E1	9.21659E-8	2.52209E-3	2.52209E-3	6.33486E-3	1.83655E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.19087E-1	-7.99203E-1	-9.13084E0	-9.14161E0	5.72205E-3	9.32217E-2	2.72921E1	-3.26579E1	-3.26278E1	2.67891E1	9.21259E-8	2.52647E-3	2.52647E-3	6.32386E-3	1.82859E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.18896E-1	-7.99108E-1	-9.1311E0	-9.14145E0	5.76973E-3	9.31501E-2	2.73003E1	-3.26705E1	-3.26543E1	2.68298E1	9.20859E-8	2.52428E-3	2.52428E-3	6.29645E-3	1.83177E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.18944E-1	-7.9906E-1	-9.13069E0	-9.1418E0	5.55515E-3	9.30786E-2	2.73369E1	-3.26494E1	-3.26182E1	2.67968E1	9.21659E-8	2.51954E-3	2.51954E-3	6.3074E-3	1.83041E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.1892E-1	-7.98965E-1	-9.13036E0	-9.14202E0	5.8651E-3	9.31501E-2	2.72985E1	-3.26747E1	-3.26687E1	2.6777E1	9.20059E-8	2.52428E-3	2.52428E-3	6.30192E-3	1.83496E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.18753E-1	-7.99227E-1	-9.13069E0	-9.14192E0	5.91278E-3	9.29832E-2	2.73122E1	-3.26785E1	-3.26313E1	2.67782E1	9.21659E-8	2.5199E-3	2.5199E-3	6.31288E-3	1.82383E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.18706E-1	-7.98821E-1	-9.13072E0	-9.14199E0	5.65052E-3	9.33409E-2	2.72962E1	-3.26661E1	-3.26372E1	2.6798E1	9.20088E-8	2.52599E-3	2.52599E-3	6.32356E-3	1.83041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09627E0	-8.18872E-1	-7.98917E-1	-9.13084E0	-9.14199E0	5.14984E-3	9.30548E-2	2.73159E1	-3.26615E1	-3.26458E1	2.67914E1	9.20859E-8	2.53196E-3	2.53196E-3	6.32936E-3	1.83655E-1