[Scan]
initial_time=2015-12-15T23:35:19
final_time=2015-12-15T23:35:38
ip_count=19
run=1017
dataset=3
scan=207
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08817E-4
ql1_vset=
ql1_vmon=-8.18777E-1
ql1_imon=2.8882E-9
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=6.09648E-10
ql3_vset=
ql3_vmon=-9.1306E0
ql3_imon=1.07911E-9
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=5.23472E-10
mult1=-9.01795E-9
mult2=-2.67869E-9
rf_tmon=-4.8609E-3
rf_agc=3.218E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.72205E-3
ql5_imon=6.33109E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70399E0
bslens_imon=2.69998E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19658E1
lens5a_imon=1.97226E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.04974E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53796E1
cs_ef1b_imon=2.9499E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02388E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0521E1
cs_ea1_imon=2.34032E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38337E0
lens1_imon=2.32146E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.5786E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83349E1
cs_ef1a_imon=2.97117E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=2.1291E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11099E1
os_restr1_imon=3.0937E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15552E1
os_ea1_imon=1.93729E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.07388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28875E0
cs_ionrep_imon=1.21197E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91847E2
cs_nozzle_imon=1.93261E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=3.12289E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=6.25252E-9
tplens_vset=1.4E-1
tplens_vmon=1.58796E0
tplens_imon=-9.02587E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26284E1
iondef3_imon=1.47802E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2635E1
iondef2_imon=1.57355E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98378E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=9.95505E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27673E0
ionrepsh_imon=1.88754E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33988E1
lens5b_imon=2.16296E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74958E1
cs_ef2b_imon=3.11713E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.02193E-1
os_ea2_imon=-4.36334E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00774E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71552E1
cs_ef2a_imon=3.19389E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.53749E0
os_ef2alow_imon=-2.84655E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.80896E-1
os_ef2bup_imon=-5.44501E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11009E1
os_restr2_imon=2.95819E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.30793E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01419E1
cs_anode2_imon=2.26515E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73183E1
iondef1_imon=1.09301E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6831E1
iondef4_imon=1.06107E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.76645E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=1.21402E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12714E0
cs_ionaccel_imon=-1.86267E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.4706E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56579E1
einzel_imon=7.81398E-6
window_vset=0.0E0
window_vmon=1.68088E-1
window_imon=-1.08061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.39153E-4
mask2_vset=0.0E0
mask2_vmon=-1.86236E1
mask2_imon=-7.74273E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.16651E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.48157E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.33594E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.22111E0
defgridb_imon=6.11747E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33421E1
os_fil1_imon=8.95142E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.73281E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65621E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30711E1
cs_fil1_imon=1.00159E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62744E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65972E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.6094E-2
os_fil2_imon=-3.17052E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.76401E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.70691E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.15541E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.95952E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22497E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.82885E-1
chamber_ion_pmon=9.20873E-8
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.15153E-1
res40_imon=-2.51138E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=139
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.18706E-1	-7.99012E-1	-9.13031E0	-9.14183E0	4.88758E-3	9.3174E-2	2.73177E1	-3.26891E1	-3.26422E1	2.68064E1	9.21266E-8	2.52815E-3	2.52815E-3	6.31817E-3	1.82729E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.1892E-1	-7.98845E-1	-9.13081E0	-9.14185E0	5.14984E-3	9.32693E-2	2.73116E1	-3.26885E1	-3.26195E1	2.68412E1	9.21259E-8	2.51771E-3	2.51771E-3	6.3074E-3	1.82542E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.18992E-1	-7.98917E-1	-9.13062E0	-9.14178E0	5.26905E-3	9.30071E-2	2.73057E1	-3.26679E1	-3.26242E1	2.68154E1	9.21266E-8	2.51954E-3	2.51954E-3	6.33436E-3	1.82729E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.19182E-1	-7.98702E-1	-9.13112E0	-9.14168E0	5.48363E-3	9.3174E-2	2.72913E1	-3.26885E1	-3.26128E1	2.6807E1	9.20873E-8	2.52169E-3	2.52169E-3	6.30202E-3	1.82885E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.19087E-1	-7.98702E-1	-9.13103E0	-9.14197E0	5.76973E-3	9.32217E-2	2.72856E1	-3.26408E1	-3.26372E1	2.68395E1	9.21659E-8	2.52538E-3	2.52538E-3	6.29098E-3	1.82859E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.19087E-1	-7.98941E-1	-9.1311E0	-9.14211E0	5.55515E-3	9.29832E-2	2.73004E1	-3.26567E1	-3.26413E1	2.68376E1	9.21266E-8	2.51632E-3	2.51632E-3	6.30202E-3	1.83667E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.19206E-1	-7.99155E-1	-9.13067E0	-9.14199E0	5.62668E-3	9.28402E-2	2.73546E1	-3.26378E1	-3.26248E1	2.6807E1	9.20481E-8	2.52169E-3	2.52169E-3	6.31278E-3	1.83041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.19206E-1	-7.99131E-1	-9.13093E0	-9.14195E0	5.6982E-3	9.31263E-2	2.72967E1	-3.26867E1	-3.26272E1	2.68331E1	9.21259E-8	2.5199E-3	2.5199E-3	6.31837E-3	1.83496E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.19159E-1	-7.98988E-1	-9.13107E0	-9.14192E0	5.62668E-3	9.31978E-2	2.7298E1	-3.26549E1	-3.26095E1	2.67989E1	9.21259E-8	2.52318E-3	2.52318E-3	6.31837E-3	1.82383E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.19135E-1	-7.99036E-1	-9.13076E0	-9.14197E0	5.53131E-3	9.32455E-2	2.73057E1	-3.26885E1	-3.25936E1	2.6807E1	9.22052E-8	2.52599E-3	2.52599E-3	6.29128E-3	1.83354E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.18992E-1	-7.99108E-1	-9.13084E0	-9.1419E0	5.81741E-3	9.30309E-2	2.73177E1	-3.26867E1	-3.26687E1	2.68094E1	9.21659E-8	2.52169E-3	2.52169E-3	6.34518E-3	1.82885E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.19016E-1	-7.98821E-1	-9.13124E0	-9.14204E0	5.57899E-3	9.33647E-2	2.72962E1	-3.26602E1	-3.26455E1	2.67974E1	9.21659E-8	2.52099E-3	2.52099E-3	6.3074E-3	1.83337E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-8.18992E-1	-7.98798E-1	-9.13079E0	-9.14218E0	5.74589E-3	9.32932E-2	2.73253E1	-3.27136E1	-3.26352E1	2.68364E1	9.20859E-8	2.52099E-3	2.52099E-3	6.3074E-3	1.83018E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.19063E-1	-7.98798E-1	-9.13084E0	-9.14218E0	5.57899E-3	9.31025E-2	2.73057E1	-3.26354E1	-3.2695E1	2.681E1	9.21259E-8	2.52538E-3	2.52538E-3	6.33486E-3	1.82701E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.19135E-1	-7.98845E-1	-9.13081E0	-9.1424E0	5.43594E-3	9.35555E-2	2.72919E1	-3.26621E1	-3.2647E1	2.68016E1	9.20059E-8	2.52209E-3	2.52209E-3	6.3074E-3	1.82859E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.19039E-1	-7.98941E-1	-9.13088E0	-9.14199E0	5.07832E-3	9.34362E-2	2.72853E1	-3.26368E1	-3.26458E1	2.67845E1	9.21659E-8	2.52428E-3	2.52428E-3	6.3074E-3	1.83018E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.18753E-1	-7.99036E-1	-9.13067E0	-9.14197E0	5.4121E-3	9.31978E-2	2.73063E1	-3.26384E1	-3.25912E1	2.68226E1	9.21659E-8	2.51847E-3	2.51847E-3	6.3074E-3	1.83041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.18801E-1	-7.98941E-1	-9.13081E0	-9.14207E0	5.67436E-3	9.31501E-2	2.7311E1	-3.26396E1	-3.26478E1	2.68046E1	9.21064E-8	2.52026E-3	2.52026E-3	6.33188E-3	1.82951E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.18729E-1	-7.98941E-1	-9.13072E0	-9.14204E0	5.8651E-3	9.32455E-2	2.72979E1	-3.26452E1	-3.26296E1	2.68123E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.18777E-1	-7.98655E-1	-9.1306E0	-9.14216E0	5.72205E-3	9.33409E-2	2.73183E1	-3.2635E1	-3.26284E1	2.6831E1	9.20873E-8	2.52384E-3	2.52384E-3	6.31278E-3	1.82885E-1