[Scan]
initial_time=2015-12-15T23:35:45
final_time=2015-12-15T23:36:05
ip_count=19
run=1017
dataset=3
scan=208
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08768E-4
ql1_vset=
ql1_vmon=-8.18181E-1
ql1_imon=2.85975E-9
ql2_vset=
ql2_vmon=-7.98821E-1
ql2_imon=6.06549E-10
ql3_vset=
ql3_vmon=-9.13064E0
ql3_imon=1.04177E-9
ql4_vset=
ql4_vmon=-9.14149E0
ql4_imon=5.162E-10
mult1=-1.01016E-8
mult2=-2.70863E-9
rf_tmon=-4.55448E-3
rf_agc=3.26006E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.84126E-3
ql5_imon=6.07324E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68056E0
bslens_imon=2.1376E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19586E1
lens5a_imon=1.98884E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.05147E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5367E1
cs_ef1b_imon=2.94125E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02395E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04135E1
cs_ea1_imon=2.26786E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38878E0
lens1_imon=2.9343E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64656E1
os_ef1alow_imon=2.98666E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03925E1
cs_ea2_imon=1.54976E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84923E1
cs_ef1a_imon=2.97621E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=2.12188E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.10949E1
os_restr1_imon=3.08217E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1524E1
os_ea1_imon=1.93837E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6396E1
os_ef1bup_imon=3.0692E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22566E0
cs_ionrep_imon=1.24117E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.93467E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=3.1319E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=6.17565E-9
tplens_vset=1.4E-1
tplens_vmon=1.58556E0
tplens_imon=-6.31002E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26488E1
iondef3_imon=1.47658E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26705E1
iondef2_imon=1.57571E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0296E2
lens6_imon=2.98371E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=9.98175E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24969E0
ionrepsh_imon=1.85618E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33417E1
lens5b_imon=2.19216E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7488E1
cs_ef2b_imon=3.11352E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.803E-1
os_ea2_imon=-5.91347E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00677E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71402E1
cs_ef2a_imon=3.18308E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.56572E0
os_ef2alow_imon=-2.64833E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.42453E-1
os_ef2bup_imon=-5.41258E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10829E1
os_restr2_imon=2.95135E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.2571E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01947E1
cs_anode2_imon=2.26623E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72913E1
iondef1_imon=1.12257E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68238E1
iondef4_imon=1.07909E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71791E1
olens3_imon=2.72547E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=1.23063E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13795E0
cs_ionaccel_imon=-2.09693E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55732E1
einzel_imon=7.54368E-6
window_vset=0.0E0
window_vmon=1.63283E-1
window_imon=-1.11305E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.38972E-4
mask2_vset=0.0E0
mask2_vmon=-1.86584E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.78656E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.70508E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=6.83846E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59405E0
defgridb_imon=6.44913E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3346E1
os_fil1_imon=8.94145E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.75923E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65537E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30731E1
cs_fil1_imon=9.99147E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63285E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65639E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.64809E-2
os_fil2_imon=-3.08643E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.65589E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68629E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37938E-1
cs_fil2_imon=-2.4257E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10618E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22457E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=1.82299E-1
chamber_ion_pmon=1.08609E-7
chamber_cvt_pmon=2.51603E-3
foreline_cvt_pmon=2.51603E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.36177E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.18801E-1	-7.99251E-1	-9.13045E0	-9.1419E0	5.62668E-3	9.28402E-2	2.73417E1	-3.26944E1	-3.25918E1	2.67752E1	9.34802E-8	2.51915E-3	2.51915E-3	6.35223E-3	1.83156E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.18753E-1	-7.98607E-1	-9.13057E0	-9.14197E0	5.6982E-3	9.28879E-2	2.73351E1	-3.26823E1	-3.2626E1	2.67788E1	9.34719E-8	2.51632E-3	2.51632E-3	6.3074E-3	1.83354E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.18729E-1	-7.98821E-1	-9.13043E0	-9.1424E0	5.88894E-3	9.30071E-2	2.73271E1	-3.26932E1	-3.26104E1	2.68094E1	9.41482E-8	2.51552E-3	2.51552E-3	6.32386E-3	1.83018E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.18825E-1	-7.98321E-1	-9.13043E0	-9.14187E0	5.55515E-3	9.28879E-2	2.73171E1	-3.26591E1	-3.26146E1	2.68088E1	9.43529E-8	2.51525E-3	2.51525E-3	6.29128E-3	1.82418E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.18849E-1	-7.98798E-1	-9.13043E0	-9.14195E0	5.36442E-3	9.30309E-2	2.73147E1	-3.26524E1	-3.26212E1	2.68316E1	9.54047E-8	2.51739E-3	2.51739E-3	6.31278E-3	1.83041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.18515E-1	-7.98869E-1	-9.13053E0	-9.14166E0	5.84126E-3	9.30548E-2	2.73243E1	-3.26927E1	-3.26242E1	2.67842E1	9.62149E-8	2.52647E-3	2.52647E-3	6.32936E-3	1.82225E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.19016E-1	-7.98798E-1	-9.13084E0	-9.14176E0	5.55515E-3	9.27925E-2	2.73129E1	-3.26524E1	-3.26458E1	2.68304E1	9.66757E-8	2.5188E-3	2.5188E-3	6.30192E-3	1.83177E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.18968E-1	-7.98965E-1	-9.13057E0	-9.14195E0	5.55515E-3	9.31978E-2	2.73198E1	-3.26496E1	-3.26284E1	2.67949E1	9.66337E-8	2.52099E-3	2.52099E-3	6.32386E-3	1.83018E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.1892E-1	-7.99131E-1	-9.13069E0	-9.14185E0	5.4121E-3	9.32932E-2	2.73105E1	-3.26518E1	-3.26488E1	2.67938E1	9.86731E-8	2.51203E-3	2.51203E-3	6.33436E-3	1.82574E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.18682E-1	-7.99227E-1	-9.13079E0	-9.14199E0	5.6982E-3	9.31025E-2	2.72698E1	-3.26306E1	-3.25831E1	2.68099E1	9.87121E-8	2.51334E-3	2.51334E-3	6.31288E-3	1.83177E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.18849E-1	-7.98917E-1	-9.1305E0	-9.14202E0	5.53131E-3	9.32932E-2	2.73309E1	-3.2641E1	-3.2617E1	2.68138E1	9.88837E-8	2.51182E-3	2.51182E-3	6.32328E-3	1.83217E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.18777E-1	-7.98559E-1	-9.13074E0	-9.1418E0	5.88894E-3	9.32455E-2	2.73039E1	-3.26982E1	-3.2593E1	2.67866E1	1.00471E-7	2.52362E-3	2.52362E-3	6.32418E-3	1.82832E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.18849E-1	-7.98988E-1	-9.13062E0	-9.14164E0	5.91278E-3	9.34124E-2	2.73393E1	-3.26705E1	-3.2638E1	2.67625E1	1.0123E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.82542E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.18777E-1	-7.99012E-1	-9.13084E0	-9.14204E0	5.88894E-3	9.33409E-2	2.72686E1	-3.26301E1	-3.26683E1	2.67943E1	1.03049E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.83337E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.18896E-1	-7.98845E-1	-9.13026E0	-9.14187E0	5.8651E-3	9.32693E-2	2.73261E1	-3.26909E1	-3.2629E1	2.68202E1	1.03676E-7	2.51847E-3	2.51847E-3	6.29128E-3	1.82729E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.18849E-1	-7.98726E-1	-9.13045E0	-9.14171E0	5.8651E-3	9.3317E-2	2.72757E1	-3.26458E1	-3.26645E1	2.67884E1	1.04698E-7	2.52169E-3	2.52169E-3	6.29128E-3	1.83041E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.18825E-1	-7.98702E-1	-9.1305E0	-9.14187E0	5.79357E-3	9.32217E-2	2.73069E1	-3.26795E1	-3.2638E1	2.67956E1	1.06137E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.82067E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.19039E-1	-7.99227E-1	-9.13069E0	-9.1419E0	5.74589E-3	9.32217E-2	2.72974E1	-3.26944E1	-3.26602E1	2.67868E1	1.07423E-7	2.5208E-3	2.5208E-3	6.29655E-3	1.82951E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.18372E-1	-7.98488E-1	-9.13055E0	-9.14187E0	5.76973E-3	9.30071E-2	2.73399E1	-3.26312E1	-3.26034E1	2.68146E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.18181E-1	-7.98821E-1	-9.13064E0	-9.14149E0	5.84126E-3	9.32693E-2	2.72913E1	-3.26705E1	-3.26488E1	2.68238E1	1.08609E-7	2.51603E-3	2.51603E-3	6.31269E-3	1.82299E-1