[Scan]
initial_time=2015-12-15T23:36:12
final_time=2015-12-15T23:36:31
ip_count=19
run=1017
dataset=3
scan=209
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08766E-4
ql1_vset=
ql1_vmon=-8.18467E-1
ql1_imon=2.92203E-9
ql2_vset=
ql2_vmon=-7.99155E-1
ql2_imon=6.20508E-10
ql3_vset=
ql3_vmon=-9.13103E0
ql3_imon=9.75406E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=5.07236E-10
mult1=-9.54665E-9
mult2=-2.77617E-9
rf_tmon=-3.70721E-3
rf_agc=3.30142E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=6.27565E-10
bslens_vset=-6.2E0
bslens_vmon=-6.57065E0
bslens_imon=1.86015E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19441E1
lens5a_imon=1.99961E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12606E2
lens4a_imon=2.0544E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54449E1
cs_ef1b_imon=2.92448E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04553E2
lens23_imon=1.00854E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04215E1
cs_ea1_imon=2.34116E-5
lens1_vset=-5.0E0
lens1_vmon=-5.52888E0
lens1_imon=3.15204E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64041E1
os_ef1alow_imon=2.99329E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04068E1
cs_ea2_imon=1.51542E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84655E1
cs_ef1a_imon=2.93109E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=2.11967E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11152E1
os_restr1_imon=3.11979E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14191E1
os_ea1_imon=1.909E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63977E1
os_ef1bup_imon=3.0555E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27746E0
cs_ionrep_imon=1.26093E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91906E2
cs_nozzle_imon=1.93693E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02076E1
cs_anode1_imon=3.15559E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=6.27711E-9
tplens_vset=1.4E-1
tplens_vmon=1.53761E0
tplens_imon=-1.24037E-6
iondef3_vset=-3.249E1
iondef3_vmon=-3.26207E1
iondef3_imon=1.5225E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27015E1
iondef2_imon=1.63576E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.97737E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=1.00691E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.16951E0
ionrepsh_imon=1.86546E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34424E1
lens5b_imon=2.23073E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73818E1
cs_ef2b_imon=3.09373E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.35981E-1
os_ea2_imon=-8.68732E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0604E2
lens4b_imon=1.99713E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71605E1
cs_ef2a_imon=3.20355E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.48607E0
os_ef2alow_imon=-2.79005E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.05137E-1
os_ef2bup_imon=-4.98293E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10926E1
os_restr2_imon=2.9641E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23017E2
cs_ionfoca_imon=6.33892E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01838E1
cs_anode2_imon=2.25237E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73275E1
iondef1_imon=1.11051E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68545E1
iondef4_imon=1.09233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.73229E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=1.22106E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.22629E0
cs_ionaccel_imon=-2.15755E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02043E2
cs_ionfocb_imon=1.47428E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57222E1
einzel_imon=7.5106E-6
window_vset=0.0E0
window_vmon=1.8525E-1
window_imon=-8.16104E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82667E2
mask1_imon=2.38879E-4
mask2_vset=0.0E0
mask2_vmon=-1.86732E1
mask2_imon=-6.00639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92728E3
multa_neg_imon=6.14284E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93766E3
defgrida_imon=7.44888E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50064E3
multb_neg_imon=7.13741E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.72151E0
defgridb_imon=5.81013E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33437E1
os_fil1_imon=8.95736E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.75569E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65656E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3068E1
cs_fil1_imon=1.00096E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.632E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65702E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.42016E-2
os_fil2_imon=-3.15572E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.60741E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68505E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36519E-1
cs_fil2_imon=-2.22899E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10146E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22401E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=1.81435E-1
chamber_ion_pmon=1.16778E-7
chamber_cvt_pmon=2.52538E-3
foreline_cvt_pmon=2.52538E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.89122E-1
res40_imon=-2.79005E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.18515E-1	-7.98607E-1	-9.13084E0	-9.14178E0	5.88894E-3	9.31263E-2	2.72638E1	-3.25535E1	-3.26502E1	2.68641E1	1.13582E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.81952E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.18491E-1	-7.98893E-1	-9.13105E0	-9.14185E0	5.55515E-3	9.33409E-2	2.7338E1	-3.2688E1	-3.26365E1	2.6813E1	1.13436E-7	2.50989E-3	2.50989E-3	6.31817E-3	1.82262E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.18181E-1	-7.98869E-1	-9.1311E0	-9.14199E0	5.74589E-3	9.30548E-2	2.73358E1	-3.26926E1	-3.25901E1	2.67897E1	1.13706E-7	2.51932E-3	2.51932E-3	6.32483E-3	1.8202E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.18324E-1	-7.98917E-1	-9.13072E0	-9.14192E0	5.72205E-3	9.31025E-2	2.73265E1	-3.26915E1	-3.26242E1	2.6807E1	1.13824E-7	2.51287E-3	2.51287E-3	6.33919E-3	1.81993E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.1799E-1	-7.9906E-1	-9.13079E0	-9.1418E0	5.57899E-3	9.29117E-2	2.72791E1	-3.26248E1	-3.26095E1	2.68233E1	1.13873E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.82225E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.18276E-1	-7.98917E-1	-9.13064E0	-9.14187E0	5.72205E-3	9.30071E-2	2.73252E1	-3.2652E1	-3.26396E1	2.68424E1	1.13824E-7	2.51739E-3	2.51739E-3	6.30202E-3	1.81952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.18563E-1	-7.99036E-1	-9.13074E0	-9.14168E0	5.43594E-3	9.32217E-2	2.72823E1	-3.26861E1	-3.26014E1	2.6843E1	1.13921E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.81487E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.18539E-1	-7.98965E-1	-9.13086E0	-9.14176E0	5.29289E-3	9.31263E-2	2.73105E1	-3.26603E1	-3.26146E1	2.68262E1	1.13824E-7	2.51116E-3	2.51116E-3	6.3074E-3	1.81909E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.18205E-1	-7.98392E-1	-9.13107E0	-9.14214E0	5.55515E-3	9.32455E-2	2.73399E1	-3.26627E1	-3.26038E1	2.68262E1	1.15768E-7	2.52209E-3	2.52209E-3	6.29645E-3	1.82383E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.18372E-1	-7.98869E-1	-9.13091E0	-9.14209E0	5.6982E-3	9.30071E-2	2.73405E1	-3.26868E1	-3.2652E1	2.67787E1	1.16121E-7	2.51443E-3	2.51443E-3	6.34037E-3	1.81909E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.18491E-1	-7.99036E-1	-9.13074E0	-9.1419E0	5.17368E-3	9.32693E-2	2.72991E1	-3.26783E1	-3.26344E1	2.68388E1	1.16475E-7	2.52061E-3	2.52061E-3	6.28592E-3	1.81487E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.18777E-1	-7.98297E-1	-9.13067E0	-9.14159E0	4.93526E-3	9.33409E-2	2.7346E1	-3.26434E1	-3.26488E1	2.68292E1	1.16323E-7	2.52538E-3	2.52538E-3	6.32936E-3	1.81909E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.18539E-1	-7.98321E-1	-9.13072E0	-9.14204E0	5.24521E-3	9.29594E-2	2.73309E1	-3.27077E1	-3.26344E1	2.68112E1	1.16373E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.81909E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.18729E-1	-7.98297E-1	-9.13086E0	-9.14221E0	5.53131E-3	9.29356E-2	2.73225E1	-3.26879E1	-3.26398E1	2.67481E1	1.16525E-7	2.52867E-3	2.52867E-3	6.32386E-3	1.81751E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.18324E-1	-7.98965E-1	-9.13115E0	-9.14221E0	5.6982E-3	9.32217E-2	2.72986E1	-3.26708E1	-3.25877E1	2.68148E1	1.16373E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.81751E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.18229E-1	-7.9906E-1	-9.13119E0	-9.14197E0	5.74589E-3	9.29356E-2	2.72961E1	-3.26573E1	-3.26536E1	2.6819E1	1.16674E-7	2.52384E-3	2.52384E-3	6.33436E-3	1.81797E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.18419E-1	-7.98726E-1	-9.13103E0	-9.14183E0	5.53131E-3	9.32932E-2	2.73183E1	-3.26392E1	-3.265E1	2.6792E1	1.16778E-7	2.52428E-3	2.52428E-3	6.31837E-3	1.81278E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.18491E-1	-7.99155E-1	-9.13076E0	-9.14199E0	5.65052E-3	9.31501E-2	2.72744E1	-3.26697E1	-3.26001E1	2.67978E1	1.17032E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.81593E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.1861E-1	-7.98559E-1	-9.13053E0	-9.1418E0	5.57899E-3	9.30548E-2	2.73039E1	-3.26549E1	-3.26428E1	2.68124E1	1.17123E-7	2.5131E-3	2.5131E-3	6.3074E-3	1.81797E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.18467E-1	-7.99155E-1	-9.13103E0	-9.14199E0	5.26905E-3	9.32932E-2	2.73275E1	-3.27015E1	-3.26207E1	2.68545E1	1.16778E-7	2.52538E-3	2.52538E-3	6.33486E-3	1.81435E-1