[Scan]
initial_time=2015-12-15T23:36:39
final_time=2015-12-15T23:37:01
ip_count=19
run=1017
dataset=3
scan=210
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0965E0
qbias_imon=-1.08811E-4
ql1_vset=
ql1_vmon=-8.18563E-1
ql1_imon=2.82952E-9
ql2_vset=
ql2_vmon=-7.99131E-1
ql2_imon=5.93114E-10
ql3_vset=
ql3_vmon=-9.13074E0
ql3_imon=9.32658E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=5.12421E-10
mult1=-9.47571E-9
mult2=-2.8428E-9
rf_tmon=-5.08758E-3
rf_agc=3.24007E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.72205E-3
ql5_imon=6.2151E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65712E0
bslens_imon=2.55217E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20061E1
lens5a_imon=1.9719E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.04729E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54673E1
cs_ef1b_imon=2.90089E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.02388E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05204E1
cs_ea1_imon=2.30103E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36114E0
lens1_imon=2.48007E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6435E1
os_ef1alow_imon=3.02018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03804E1
cs_ea2_imon=1.57355E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=2.93729E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=2.11554E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11213E1
os_restr1_imon=3.14776E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1524E1
os_ea1_imon=1.95207E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63425E1
os_ef1bup_imon=3.0382E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26712E0
cs_ionrep_imon=1.24225E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91841E2
cs_nozzle_imon=1.93265E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02482E1
cs_anode1_imon=3.14884E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=6.31974E-9
tplens_vset=1.4E-1
tplens_vmon=1.55912E0
tplens_imon=-6.86289E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26319E1
iondef3_imon=1.48667E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26384E1
iondef2_imon=1.55697E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98559E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=9.89568E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28094E0
ionrepsh_imon=1.85942E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33339E1
lens5b_imon=2.19252E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74267E1
cs_ef2b_imon=3.08938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.34637E-1
os_ea2_imon=-6.74261E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00792E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.72117E1
cs_ef2a_imon=3.19678E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.46061E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.92308E-1
os_ef2bup_imon=-5.11345E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10631E1
os_restr2_imon=2.9809E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23094E2
cs_ionfoca_imon=6.27585E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01893E1
cs_anode2_imon=2.25614E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72915E1
iondef1_imon=1.07426E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68292E1
iondef4_imon=1.12486E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.7433E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=1.22798E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.26109E0
cs_ionaccel_imon=-2.54382E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.47486E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57048E1
einzel_imon=7.1941E-6
window_vset=0.0E0
window_vmon=1.37455E-1
window_imon=-5.11183E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8257E2
mask1_imon=2.38695E-4
mask2_vset=0.0E0
mask2_vmon=-1.86692E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=8.06054E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93677E3
defgrida_imon=6.76997E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.26385E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4166E0
defgridb_imon=5.88315E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33454E1
os_fil1_imon=8.95148E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.79287E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65355E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30738E1
cs_fil1_imon=9.99591E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64258E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65931E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.64809E-2
os_fil2_imon=-3.01435E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.78803E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.81776E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38974E-1
cs_fil2_imon=-2.11937E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.64077E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22491E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=1.81751E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.33754E-1
res40_imon=-2.8934E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.18419E-1	-7.98869E-1	-9.13022E0	-9.1423E0	5.50747E-3	9.38416E-2	2.72576E1	-3.26573E1	-3.26554E1	2.68166E1	1.16626E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.82067E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.18563E-1	-7.99084E-1	-9.13029E0	-9.14207E0	5.38826E-3	9.34839E-2	2.73285E1	-3.26609E1	-3.26579E1	2.6855E1	1.16829E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.81593E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.1861E-1	-7.99322E-1	-9.1306E0	-9.14211E0	5.76973E-3	9.35078E-2	2.73144E1	-3.26706E1	-3.26121E1	2.68487E1	1.16727E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.82067E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.18253E-1	-7.99131E-1	-9.13048E0	-9.1423E0	5.4121E-3	9.31501E-2	2.73207E1	-3.26879E1	-3.26242E1	2.68382E1	1.16774E-7	2.52276E-3	2.52276E-3	6.30202E-3	1.81952E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.18276E-1	-7.99131E-1	-9.13043E0	-9.14171E0	5.36442E-3	9.32455E-2	2.72985E1	-3.26506E1	-3.26158E1	2.68274E1	1.17573E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.81642E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.18253E-1	-7.99131E-1	-9.13074E0	-9.14192E0	5.53131E-3	9.30309E-2	2.73171E1	-3.26951E1	-3.2638E1	2.68484E1	1.1929E-7	2.51116E-3	2.51116E-3	6.29098E-3	1.81909E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.18133E-1	-7.99322E-1	-9.13045E0	-9.14156E0	5.45979E-3	9.31025E-2	2.73213E1	-3.26561E1	-3.26314E1	2.67908E1	1.19238E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.82383E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.18133E-1	-7.99179E-1	-9.13081E0	-9.14197E0	5.48363E-3	9.31263E-2	2.72877E1	-3.26711E1	-3.26428E1	2.68268E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.81909E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.18419E-1	-7.99274E-1	-9.13107E0	-9.14166E0	5.17368E-3	9.31501E-2	2.73187E1	-3.26472E1	-3.26201E1	2.68424E1	1.19184E-7	2.51136E-3	2.51136E-3	6.31299E-3	1.82025E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.183E-1	-7.99203E-1	-9.1306E0	-9.14214E0	5.31673E-3	9.30071E-2	2.73099E1	-3.26609E1	-3.26783E1	2.67897E1	1.1929E-7	2.51287E-3	2.51287E-3	6.32858E-3	1.82146E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.18419E-1	-7.99227E-1	-9.1306E0	-9.14202E0	5.07832E-3	9.33647E-2	2.72941E1	-3.26866E1	-3.25642E1	2.68431E1	1.19238E-7	2.50898E-3	2.50898E-3	6.32386E-3	1.81593E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.18586E-1	-7.98535E-1	-9.13095E0	-9.14218E0	5.43594E-3	9.31263E-2	2.72534E1	-3.26032E1	-3.265E1	2.67758E1	1.19237E-7	2.52139E-3	2.52139E-3	6.31299E-3	1.81703E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.18443E-1	-7.98893E-1	-9.1306E0	-9.14204E0	5.6982E-3	9.28879E-2	2.73249E1	-3.26747E1	-3.26326E1	2.6834E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.81751E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.18372E-1	-7.98941E-1	-9.13095E0	-9.14192E0	5.45979E-3	9.32932E-2	2.73165E1	-3.26699E1	-3.26591E1	2.67908E1	1.19186E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.81593E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.18181E-1	-7.98845E-1	-9.13076E0	-9.14185E0	5.38826E-3	9.32455E-2	2.72803E1	-3.26248E1	-3.26779E1	2.67734E1	1.19186E-7	2.51552E-3	2.51552E-3	6.34037E-3	1.81593E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.18491E-1	-7.98941E-1	-9.13103E0	-9.14176E0	5.29289E-3	9.31501E-2	2.73381E1	-3.26861E1	-3.26218E1	2.68448E1	1.1929E-7	2.50989E-3	2.50989E-3	6.2752E-3	1.81952E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09627E0	-8.18586E-1	-7.99179E-1	-9.13057E0	-9.14204E0	5.48363E-3	9.31978E-2	2.73216E1	-3.26909E1	-3.25954E1	2.67726E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.82067E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09627E0	-8.18443E-1	-7.9906E-1	-9.13062E0	-9.14185E0	5.45979E-3	9.3317E-2	2.73057E1	-3.26384E1	-3.26425E1	2.68372E1	1.19237E-7	2.5147E-3	2.5147E-3	6.32418E-3	1.82348E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0965E0	-8.18682E-1	-7.98988E-1	-9.13072E0	-9.14207E0	5.88894E-3	9.31501E-2	2.73387E1	-3.26849E1	-3.26861E1	2.68292E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.82574E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0965E0	-8.18563E-1	-7.99131E-1	-9.13074E0	-9.1419E0	5.72205E-3	9.3174E-2	2.72915E1	-3.26384E1	-3.26319E1	2.68292E1	1.1929E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.81751E-1