[Scan]
initial_time=2015-12-15T23:37:09
final_time=2015-12-15T23:37:31
ip_count=19
run=1017
dataset=3
scan=211
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08805E-4
ql1_vset=
ql1_vmon=-8.18253E-1
ql1_imon=2.81323E-9
ql2_vset=
ql2_vmon=-7.98941E-1
ql2_imon=5.98621E-10
ql3_vset=
ql3_vmon=-9.13076E0
ql3_imon=8.80122E-10
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=4.96972E-10
mult1=-9.70427E-9
mult2=-2.58088E-9
rf_tmon=-4.18197E-3
rf_agc=3.34057E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=6.42025E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68509E0
bslens_imon=2.34151E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19636E1
lens5a_imon=1.96138E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.04959E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53694E1
cs_ef1b_imon=2.93549E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04577E2
lens23_imon=1.01877E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05165E1
cs_ea1_imon=2.31816E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36666E0
lens1_imon=2.48309E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64795E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0395E1
cs_ea2_imon=1.57099E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84694E1
cs_ef1a_imon=2.96504E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=2.11686E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=3.09514E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15176E1
os_ea1_imon=1.94829E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63779E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21434E0
cs_ionrep_imon=1.22165E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91853E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01701E1
cs_anode1_imon=3.12398E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20577E0
olens4_imon=6.20844E-9
tplens_vset=1.4E-1
tplens_vmon=1.61312E0
tplens_imon=-1.6085E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.49878E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26452E1
iondef2_imon=1.58585E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98356E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=1.00369E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26508E0
ionrepsh_imon=1.88139E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33463E1
lens5b_imon=2.17764E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.13565E-1
os_ea2_imon=-7.90865E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00177E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.17623E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.58014E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.74288E-1
os_ef2bup_imon=-5.49186E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=2.9427E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.231E2
cs_ionfoca_imon=6.3007E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02163E1
cs_anode2_imon=2.25974E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72757E1
iondef1_imon=1.10874E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68268E1
iondef4_imon=1.08305E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.72523E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=1.22321E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10431E0
cs_ionaccel_imon=-1.83384E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47183E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55859E1
einzel_imon=7.68063E-6
window_vset=0.0E0
window_vmon=1.37455E-1
window_imon=-1.04817E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39207E-4
mask2_vset=0.0E0
mask2_vmon=-1.86777E1
mask2_imon=-7.81481E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.52675E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.51447E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=6.93566E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=6.08975E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33428E1
os_fil1_imon=8.96554E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.79227E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6563E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30714E1
cs_fil1_imon=1.00149E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.60972E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65346E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.42016E-2
os_fil2_imon=-3.05039E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.89015E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75212E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.99032E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.67701E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22319E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34588E-3
inlet_lpb_pmon=1.82225E-1
chamber_ion_pmon=1.19186E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.25365E-1
res40_imon=-2.47174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.18419E-1	-7.99203E-1	-9.13079E0	-9.1419E0	5.65052E-3	9.31978E-2	2.73216E1	-3.26744E1	-3.26018E1	2.67663E1	1.1929E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.81642E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.18157E-1	-7.99274E-1	-9.1311E0	-9.14183E0	6.07967E-3	9.32217E-2	2.73228E1	-3.2664E1	-3.2648E1	2.67947E1	1.1929E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.81797E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.18205E-1	-7.99346E-1	-9.13103E0	-9.14197E0	5.60284E-3	9.32455E-2	2.72957E1	-3.26956E1	-3.26307E1	2.68435E1	1.1929E-7	2.51359E-3	2.51359E-3	6.32418E-3	1.82186E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.18157E-1	-7.99513E-1	-9.13107E0	-9.14178E0	5.6982E-3	9.29117E-2	2.73358E1	-3.26585E1	-3.26449E1	2.68082E1	1.1929E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.82107E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.18515E-1	-7.99465E-1	-9.13088E0	-9.14159E0	5.67436E-3	9.30309E-2	2.72895E1	-3.26464E1	-3.26326E1	2.67986E1	1.1929E-7	2.5131E-3	2.5131E-3	6.33977E-3	1.81332E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.18443E-1	-7.99251E-1	-9.13079E0	-9.14149E0	5.91278E-3	9.36747E-2	2.73694E1	-3.2675E1	-3.26124E1	2.6807E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.81909E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.18133E-1	-7.99274E-1	-9.13069E0	-9.14195E0	5.74589E-3	9.32693E-2	2.72847E1	-3.26428E1	-3.26188E1	2.67445E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32356E-3	1.82574E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.18348E-1	-7.9875E-1	-9.13088E0	-9.14197E0	5.72205E-3	9.31501E-2	2.73117E1	-3.26506E1	-3.26591E1	2.68124E1	1.1929E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.80963E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.18229E-1	-7.98941E-1	-9.13064E0	-9.14161E0	5.57899E-3	9.32932E-2	2.73234E1	-3.26956E1	-3.25888E1	2.684E1	1.1929E-7	2.52538E-3	2.52538E-3	6.30192E-3	1.82383E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09665E0	-8.18372E-1	-7.98893E-1	-9.13093E0	-9.14209E0	6.31809E-3	9.32217E-2	2.73069E1	-3.26266E1	-3.26488E1	2.68088E1	1.19239E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.81797E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0968E0	-8.18205E-1	-7.99084E-1	-9.13081E0	-9.14214E0	5.81741E-3	9.31263E-2	2.73081E1	-3.26981E1	-3.26404E1	2.6807E1	1.1929E-7	2.51116E-3	2.51116E-3	6.30192E-3	1.81593E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09673E0	-8.183E-1	-7.98845E-1	-9.13057E0	-9.14218E0	5.6982E-3	9.30309E-2	2.73099E1	-3.26374E1	-3.26609E1	2.6846E1	1.1929E-7	2.51007E-3	2.51007E-3	6.30192E-3	1.81593E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09657E0	-8.18443E-1	-7.98273E-1	-9.13069E0	-9.14176E0	5.67436E-3	9.29117E-2	2.73195E1	-3.26645E1	-3.26278E1	2.67956E1	1.19186E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.82067E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.183E-1	-7.98416E-1	-9.13084E0	-9.14199E0	5.55515E-3	9.33647E-2	2.72949E1	-3.26561E1	-3.2596E1	2.68406E1	1.19186E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.82067E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.18062E-1	-7.98321E-1	-9.13095E0	-9.14161E0	5.50747E-3	9.31263E-2	2.73171E1	-3.26951E1	-3.26609E1	2.67866E1	1.1929E-7	2.52099E-3	2.52099E-3	6.33486E-3	1.82383E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-8.18443E-1	-7.98917E-1	-9.13098E0	-9.14199E0	5.96046E-3	9.31025E-2	2.73134E1	-3.26797E1	-3.26119E1	2.6807E1	1.1929E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.81593E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.18658E-1	-7.99012E-1	-9.13091E0	-9.14195E0	5.84126E-3	9.29356E-2	2.72849E1	-3.26634E1	-3.26407E1	2.68394E1	1.19239E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.82418E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.18348E-1	-7.98488E-1	-9.13072E0	-9.14187E0	5.79357E-3	9.29356E-2	2.73039E1	-3.26626E1	-3.26384E1	2.68117E1	1.1929E-7	2.51581E-3	2.51581E-3	6.31299E-3	1.81864E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.18348E-1	-7.98917E-1	-9.13074E0	-9.1423E0	6.07967E-3	9.32693E-2	2.73448E1	-3.26873E1	-3.26681E1	2.67938E1	1.19239E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.81023E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.18253E-1	-7.98941E-1	-9.13076E0	-9.14214E0	5.74589E-3	9.3317E-2	2.72757E1	-3.26452E1	-3.26248E1	2.68268E1	1.19186E-7	2.51662E-3	2.51662E-3	6.34588E-3	1.82225E-1