[Scan]
initial_time=2015-12-15T23:37:39
final_time=2015-12-15T23:38:02
ip_count=19
run=1017
dataset=3
scan=212
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08832E-4
ql1_vset=
ql1_vmon=-8.18253E-1
ql1_imon=2.79939E-9
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=6.44684E-10
ql3_vset=
ql3_vmon=-9.13064E0
ql3_imon=8.85344E-10
ql4_vset=
ql4_vmon=-9.14166E0
ql4_imon=5.9284E-10
mult1=-1.04387E-8
mult2=-2.88429E-9
rf_tmon=-3.89357E-3
rf_agc=3.22521E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=6.50382E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68897E0
bslens_imon=2.68556E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=1.9755E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.04891E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=2.94198E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05198E1
cs_ea1_imon=2.31761E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43084E0
lens1_imon=2.60985E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04177E1
cs_ea2_imon=1.55408E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84508E1
cs_ef1a_imon=2.96324E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=2.12399E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=3.08433E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15546E1
os_ea1_imon=1.94846E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63936E1
os_ef1bup_imon=3.07388E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28274E0
cs_ionrep_imon=1.22928E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=3.12253E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=6.24508E-9
tplens_vset=1.4E-1
tplens_vmon=1.60358E0
tplens_imon=-4.39939E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.48415E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.55697E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.98306E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=1.02798E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29356E0
ionrepsh_imon=1.89583E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3391E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.11425E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.57469E-1
os_ea2_imon=-8.00434E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00443E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.16326E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.51887E0
os_ef2alow_imon=-2.65194E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.52064E-1
os_ef2bup_imon=-5.45222E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10979E1
os_restr2_imon=2.94306E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.30902E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01473E1
cs_anode2_imon=2.25578E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73129E1
iondef1_imon=1.08039E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68232E1
iondef4_imon=1.08089E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.82019E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=1.22296E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10672E0
cs_ionaccel_imon=-2.00683E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.4714E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.6482E-6
window_vset=0.0E0
window_vmon=1.59679E-1
window_imon=-1.0698E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.38976E-4
mask2_vset=0.0E0
mask2_vmon=-1.862E1
mask2_imon=-7.38233E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.28187E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.07782E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=6.80241E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.08276E0
defgridb_imon=6.25085E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33427E1
os_fil1_imon=8.96067E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.78506E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65616E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30684E1
cs_fil1_imon=1.00053E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6233E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6586E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.5836E-2
os_fil2_imon=-3.05039E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.61985E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.82679E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3755E-1
cs_fil2_imon=-2.65996E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.77601E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22511E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33021E-3
inlet_lpb_pmon=1.81654E-1
chamber_ion_pmon=1.19236E-7
chamber_cvt_pmon=2.51725E-3
foreline_cvt_pmon=2.51725E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.52995E-1
res40_imon=-2.58346E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0965E0	-8.18372E-1	-7.98869E-1	-9.13088E0	-9.14187E0	5.65052E-3	9.31025E-2	2.72889E1	-3.26631E1	-3.26515E1	2.68024E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.82067E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0965E0	-8.18419E-1	-7.98917E-1	-9.13112E0	-9.14202E0	5.65052E-3	9.3174E-2	2.72889E1	-3.27015E1	-3.26123E1	2.68182E1	1.1924E-7	2.51287E-3	2.51287E-3	6.31798E-3	1.81689E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09642E0	-8.18467E-1	-7.98965E-1	-9.13086E0	-9.14202E0	5.65052E-3	9.32693E-2	2.73231E1	-3.26596E1	-3.26156E1	2.68001E1	1.1929E-7	2.52635E-3	2.52635E-3	6.29035E-3	1.8231E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.18419E-1	-7.98965E-1	-9.13098E0	-9.14199E0	5.65052E-3	9.35555E-2	2.72624E1	-3.26404E1	-3.26368E1	2.68004E1	1.1924E-7	2.51814E-3	2.51814E-3	6.3074E-3	1.82146E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-8.1861E-1	-7.98917E-1	-9.13041E0	-9.14178E0	5.6982E-3	9.33409E-2	2.73197E1	-3.26415E1	-3.26137E1	2.68037E1	1.19238E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.81435E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.18419E-1	-7.98702E-1	-9.13088E0	-9.1419E0	5.72205E-3	9.34839E-2	2.73283E1	-3.26567E1	-3.26196E1	2.68204E1	1.1925E-7	2.51768E-3	2.51768E-3	6.31992E-3	1.82116E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.18229E-1	-7.98798E-1	-9.13076E0	-9.14185E0	5.79357E-3	9.3317E-2	2.73394E1	-3.2634E1	-3.26138E1	2.68232E1	1.1929E-7	2.51498E-3	2.51498E-3	6.31269E-3	1.82146E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.18443E-1	-7.98631E-1	-9.13091E0	-9.14199E0	5.79357E-3	9.33409E-2	2.73145E1	-3.26567E1	-3.26396E1	2.68004E1	1.1929E-7	2.5225E-3	2.5225E-3	6.31299E-3	1.81061E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.18586E-1	-7.99394E-1	-9.13055E0	-9.14195E0	6.07967E-3	9.35078E-2	2.72953E1	-3.26658E1	-3.26266E1	2.67992E1	1.1929E-7	2.51417E-3	2.51417E-3	6.32356E-3	1.81332E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.18372E-1	-7.9875E-1	-9.13062E0	-9.14185E0	5.53131E-3	9.33886E-2	2.7308E1	-3.26018E1	-3.26626E1	2.68274E1	1.1929E-7	2.51693E-3	2.51693E-3	6.32978E-3	1.81061E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09642E0	-8.18419E-1	-7.99108E-1	-9.13055E0	-9.14202E0	5.76973E-3	9.34124E-2	2.72949E1	-3.26771E1	-3.2623E1	2.68175E1	1.1929E-7	2.51203E-3	2.51203E-3	6.29665E-3	1.81797E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.18205E-1	-7.98488E-1	-9.13062E0	-9.14183E0	5.67436E-3	9.32932E-2	2.73201E1	-3.26482E1	-3.26681E1	2.68046E1	1.19238E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.82225E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.18563E-1	-7.99036E-1	-9.13045E0	-9.14195E0	5.62668E-3	9.30071E-2	2.73165E1	-3.26867E1	-3.26284E1	2.6789E1	1.19238E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.80649E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.1811E-1	-7.98845E-1	-9.13081E0	-9.14176E0	5.72205E-3	9.3317E-2	2.73352E1	-3.26626E1	-3.26231E1	2.67914E1	1.19264E-7	2.51918E-3	2.51918E-3	6.3074E-3	1.81149E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.18181E-1	-7.98821E-1	-9.13069E0	-9.14187E0	5.60284E-3	9.32217E-2	2.73147E1	-3.26831E1	-3.26524E1	2.67902E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.17966E-1	-7.99036E-1	-9.13079E0	-9.14197E0	5.84126E-3	9.31978E-2	2.73128E1	-3.26549E1	-3.26431E1	2.68023E1	1.19186E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.81435E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.18205E-1	-7.98726E-1	-9.13055E0	-9.14161E0	5.8651E-3	9.34601E-2	2.72979E1	-3.26885E1	-3.26344E1	2.68052E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.81023E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.18324E-1	-7.98345E-1	-9.13038E0	-9.14178E0	5.50747E-3	9.34839E-2	2.7333E1	-3.26374E1	-3.26613E1	2.68383E1	1.1929E-7	2.52428E-3	2.52428E-3	6.32936E-3	1.80492E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.18539E-1	-7.98535E-1	-9.13033E0	-9.14173E0	5.53131E-3	9.33409E-2	2.73107E1	-3.26547E1	-3.26291E1	2.68063E1	1.1929E-7	2.52197E-3	2.52197E-3	6.31779E-3	1.81137E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.18253E-1	-7.98678E-1	-9.13064E0	-9.14166E0	5.48363E-3	9.31501E-2	2.73129E1	-3.26554E1	-3.26266E1	2.68232E1	1.19236E-7	2.51725E-3	2.51725E-3	6.33021E-3	1.81654E-1