[Scan]
initial_time=2015-12-15T23:38:10
final_time=2015-12-15T23:38:32
ip_count=19
run=1017
dataset=3
scan=213
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08822E-4
ql1_vset=
ql1_vmon=-8.18157E-1
ql1_imon=2.85735E-9
ql2_vset=
ql2_vmon=-7.98917E-1
ql2_imon=5.47087E-10
ql3_vset=
ql3_vmon=-9.13072E0
ql3_imon=9.49216E-10
ql4_vset=
ql4_vmon=-9.14171E0
ql4_imon=5.2563E-10
mult1=-9.03363E-9
mult2=-2.69345E-9
rf_tmon=-5.99692E-3
rf_agc=3.08185E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=6.21808E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70338E0
bslens_imon=2.5468E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20125E1
lens5a_imon=2.00881E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.0504E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53526E1
cs_ef1b_imon=2.93405E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05112E1
cs_ea1_imon=2.2817E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3584E0
lens1_imon=2.70607E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64464E1
os_ef1alow_imon=2.96756E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04038E1
cs_ea2_imon=1.58125E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=2.96396E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=2.13351E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11159E1
os_restr1_imon=3.08577E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15311E1
os_ea1_imon=1.96351E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64074E1
os_ef1bup_imon=3.09118E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26744E0
cs_ionrep_imon=1.23439E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.93204E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02103E1
cs_anode1_imon=3.11713E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=6.26963E-9
tplens_vset=1.4E-1
tplens_vmon=1.60309E0
tplens_imon=-2.35178E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26291E1
iondef3_imon=1.50975E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26285E1
iondef2_imon=1.58302E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02978E2
lens6_imon=2.9813E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=1.00608E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28041E0
ionrepsh_imon=1.88564E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33711E1
lens5b_imon=2.18897E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74411E1
cs_ef2b_imon=3.10127E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.57807E-1
os_ea2_imon=-5.50185E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00389E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7154E1
cs_ef2a_imon=3.18777E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.56332E0
os_ef2alow_imon=-2.70239E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.6648E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10727E1
os_restr2_imon=2.95387E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.30388E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.26984E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73253E1
iondef1_imon=1.1052E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.08485E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.76004E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=1.23016E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-1.8879E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55642E1
einzel_imon=7.55449E-6
window_vset=0.0E0
window_vmon=1.48267E-1
window_imon=-1.01934E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39034E-4
mask2_vset=0.0E0
mask2_vmon=-1.865E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.95501E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.69145E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=7.03477E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3524E0
defgridb_imon=6.16407E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33456E1
os_fil1_imon=8.96746E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.76164E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65435E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30698E1
cs_fil1_imon=1.00173E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63351E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65701E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.63543E-2
os_fil2_imon=-3.10445E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.5718E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66859E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.80412E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.74038E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22431E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.80649E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.25365E-1
res40_imon=-2.45012E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.17943E-1	-7.9906E-1	-9.13053E0	-9.14164E0	5.74589E-3	9.33886E-2	2.73231E1	-3.26843E1	-3.26182E1	2.67848E1	1.1929E-7	2.51334E-3	2.51334E-3	6.30192E-3	1.8112E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.18205E-1	-7.98607E-1	-9.13069E0	-9.14187E0	5.4121E-3	9.33409E-2	2.73173E1	-3.26976E1	-3.26529E1	2.68046E1	1.19238E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.80492E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.1811E-1	-7.98678E-1	-9.13055E0	-9.14195E0	5.53131E-3	9.34362E-2	2.73205E1	-3.26568E1	-3.26238E1	2.67925E1	1.1929E-7	2.5147E-3	2.5147E-3	6.31858E-3	1.80421E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.18467E-1	-7.98631E-1	-9.13057E0	-9.14202E0	5.60284E-3	9.33647E-2	2.72803E1	-3.26527E1	-3.2654E1	2.67895E1	1.19242E-7	2.52023E-3	2.52023E-3	6.30239E-3	1.80811E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.18348E-1	-7.98392E-1	-9.13072E0	-9.14161E0	5.48363E-3	9.35555E-2	2.73015E1	-3.26735E1	-3.26188E1	2.68322E1	1.1929E-7	2.5199E-3	2.5199E-3	6.34231E-3	1.81268E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.18372E-1	-7.98702E-1	-9.13053E0	-9.14168E0	5.60284E-3	9.31025E-2	2.72949E1	-3.26711E1	-3.262E1	2.67878E1	1.19238E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.80963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.18086E-1	-7.98655E-1	-9.13057E0	-9.14156E0	5.67436E-3	9.33886E-2	2.7278E1	-3.26313E1	-3.2603E1	2.6795E1	1.1929E-7	2.51334E-3	2.51334E-3	6.34588E-3	1.80963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.18205E-1	-7.9844E-1	-9.13064E0	-9.14173E0	5.65052E-3	9.34839E-2	2.7298E1	-3.26372E1	-3.26119E1	2.68192E1	1.1929E-7	2.52492E-3	2.52492E-3	6.3074E-3	1.81023E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0965E0	-8.18181E-1	-7.99036E-1	-9.1306E0	-9.14197E0	5.76973E-3	9.33886E-2	2.72895E1	-3.26518E1	-3.26086E1	2.6813E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.81023E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.18253E-1	-7.98631E-1	-9.13069E0	-9.14192E0	5.67436E-3	9.3317E-2	2.73275E1	-3.27098E1	-3.26644E1	2.68262E1	1.19238E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.80963E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.19039E-1	-7.98488E-1	-9.13043E0	-9.14197E0	5.26905E-3	9.32693E-2	2.73165E1	-3.26741E1	-3.26218E1	2.68166E1	1.19213E-7	2.51376E-3	2.51376E-3	6.30469E-3	1.81305E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.18181E-1	-7.98655E-1	-9.13041E0	-9.14199E0	5.72205E-3	9.33886E-2	2.73442E1	-3.26735E1	-3.2605E1	2.67854E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.18181E-1	-7.98774E-1	-9.13076E0	-9.14173E0	5.76973E-3	9.30548E-2	2.72964E1	-3.26434E1	-3.26191E1	2.6814E1	1.19238E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.80806E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.18372E-1	-7.98583E-1	-9.13067E0	-9.1419E0	5.48363E-3	9.32217E-2	2.72727E1	-3.2682E1	-3.26231E1	2.66981E1	1.1929E-7	2.52093E-3	2.52093E-3	6.323E-3	1.81137E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.18133E-1	-7.98845E-1	-9.1306E0	-9.14178E0	5.43594E-3	9.32455E-2	2.72919E1	-3.26657E1	-3.2635E1	2.68052E1	1.19186E-7	2.51007E-3	2.51007E-3	6.32386E-3	1.80806E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.18181E-1	-7.98345E-1	-9.13076E0	-9.14192E0	5.26905E-3	9.30548E-2	2.73111E1	-3.26699E1	-3.26386E1	2.68052E1	1.19238E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.8112E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.18181E-1	-7.98726E-1	-9.13072E0	-9.14202E0	5.55515E-3	9.32217E-2	2.73028E1	-3.26538E1	-3.26567E1	2.6825E1	1.1929E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.81023E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.18324E-1	-7.98893E-1	-9.13093E0	-9.14166E0	5.81741E-3	9.29356E-2	2.73145E1	-3.26862E1	-3.26425E1	2.68064E1	1.1929E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.81332E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09619E0	-8.18586E-1	-7.98702E-1	-9.13098E0	-9.14161E0	5.60284E-3	9.29117E-2	2.73484E1	-3.26753E1	-3.26536E1	2.6828E1	1.1929E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.80869E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.18157E-1	-7.98917E-1	-9.13072E0	-9.14171E0	5.67436E-3	9.31501E-2	2.73253E1	-3.26285E1	-3.26291E1	2.68082E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.80649E-1