[Scan]
initial_time=2015-12-15T23:40:42
final_time=2015-12-15T23:41:05
ip_count=19
run=1017
dataset=3
scan=218
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08854E-4
ql1_vset=
ql1_vmon=-8.17919E-1
ql1_imon=2.79683E-9
ql2_vset=
ql2_vmon=-7.99036E-1
ql2_imon=6.05452E-10
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=7.55894E-10
ql4_vset=
ql4_vmon=-9.14166E0
ql4_imon=5.40328E-10
mult1=-9.76447E-9
mult2=-2.8244E-9
rf_tmon=-4.39827E-3
rf_agc=3.23542E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=5.99778E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66253E0
bslens_imon=2.45844E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19827E1
lens5a_imon=1.95928E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53508E1
cs_ef1b_imon=2.93441E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.02034E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05054E1
cs_ea1_imon=2.31473E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38337E0
lens1_imon=2.48368E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64542E1
os_ef1alow_imon=2.97549E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03925E1
cs_ea2_imon=1.56418E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84815E1
cs_ef1a_imon=2.95459E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=2.12749E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.1131E1
os_restr1_imon=3.08505E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14927E1
os_ea1_imon=1.9445E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6387E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=1.21161E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91824E2
cs_nozzle_imon=1.93211E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=3.13082E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=6.31206E-9
tplens_vset=1.4E-1
tplens_vmon=1.59036E0
tplens_imon=-3.06556E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26386E1
iondef3_imon=1.48703E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26723E1
iondef2_imon=1.5703E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98205E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=1.01691E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29536E0
ionrepsh_imon=1.89295E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.18531E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74832E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.19617E-1
os_ea2_imon=-7.35545E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00334E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7118E1
cs_ef2a_imon=3.18056E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.56392E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.44255E-1
os_ef2bup_imon=-5.36573E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10673E1
os_restr2_imon=2.95387E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.30757E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.26731E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72985E1
iondef1_imon=1.09481E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6822E1
iondef4_imon=1.08197E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.68862E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=1.2239E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-1.99241E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02115E2
cs_ionfocb_imon=1.47028E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55792E1
einzel_imon=7.57612E-6
window_vset=0.0E0
window_vmon=1.86108E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.3894E-4
mask2_vset=0.0E0
mask2_vmon=-1.86596E1
mask2_imon=-6.91381E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.19175E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.65821E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.23861E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23013E0
defgridb_imon=6.34819E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33467E1
os_fil1_imon=8.965E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.75863E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65554E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30702E1
cs_fil1_imon=1.0007E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62738E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6611E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.49332E-2
os_fil2_imon=-3.06841E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.64388E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.966E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.61191E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04011E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22522E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.81023E-1
chamber_ion_pmon=1.19239E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.01939E-1
res40_imon=-2.55463E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09696E0	-8.18038E-1	-7.98893E-1	-9.13122E0	-9.14204E0	5.74589E-3	9.31501E-2	2.72871E1	-3.2638E1	-3.26741E1	2.68388E1	1.1929E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.80714E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09696E0	-8.18157E-1	-7.98321E-1	-9.13119E0	-9.14221E0	5.60284E-3	9.28402E-2	2.73195E1	-3.26999E1	-3.26356E1	2.67986E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.80179E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0968E0	-8.1799E-1	-7.98917E-1	-9.13124E0	-9.14195E0	6.00815E-3	9.31025E-2	2.73381E1	-3.26738E1	-3.26077E1	2.67862E1	1.19237E-7	2.51693E-3	2.51693E-3	6.3074E-3	1.81382E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.17704E-1	-7.98583E-1	-9.13119E0	-9.14178E0	5.72205E-3	9.33647E-2	2.72925E1	-3.26747E1	-3.26639E1	2.68113E1	1.1929E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.8056E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.178E-1	-7.98774E-1	-9.13119E0	-9.14192E0	5.43594E-3	9.30548E-2	2.73021E1	-3.26416E1	-3.26464E1	2.68094E1	1.19238E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.8112E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.17752E-1	-7.98678E-1	-9.131E0	-9.14199E0	5.6982E-3	9.32455E-2	2.73051E1	-3.26669E1	-3.2629E1	2.68233E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.81278E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.18133E-1	-7.98345E-1	-9.1311E0	-9.14171E0	5.60284E-3	9.32693E-2	2.73196E1	-3.26585E1	-3.26503E1	2.68024E1	1.19239E-7	2.50989E-3	2.50989E-3	6.32356E-3	1.80869E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09619E0	-8.17895E-1	-7.9875E-1	-9.13084E0	-9.14202E0	5.48363E-3	9.31025E-2	2.73138E1	-3.26828E1	-3.2631E1	2.68013E1	1.1929E-7	2.51709E-3	2.51709E-3	6.31798E-3	1.80778E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.18014E-1	-7.99108E-1	-9.13107E0	-9.1418E0	5.45979E-3	9.31501E-2	2.73607E1	-3.26816E1	-3.2626E1	2.67885E1	1.19264E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.81278E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.1799E-1	-7.98798E-1	-9.13112E0	-9.14178E0	5.79357E-3	9.29832E-2	2.73302E1	-3.26566E1	-3.26021E1	2.68169E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.17752E-1	-7.9906E-1	-9.13081E0	-9.14199E0	5.93662E-3	9.29594E-2	2.7364E1	-3.26939E1	-3.26428E1	2.6825E1	1.19237E-7	2.5147E-3	2.5147E-3	6.31858E-3	1.80901E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.17919E-1	-7.98917E-1	-9.13115E0	-9.14183E0	5.67436E-3	9.31025E-2	2.73099E1	-3.26843E1	-3.26158E1	2.68262E1	1.19238E-7	2.52209E-3	2.52209E-3	6.33486E-3	1.80649E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.18157E-1	-7.98893E-1	-9.13119E0	-9.14166E0	5.55515E-3	9.31263E-2	2.73051E1	-3.26573E1	-3.26089E1	2.67943E1	1.19186E-7	2.51771E-3	2.51771E-3	6.34588E-3	1.79866E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09634E0	-8.18253E-1	-7.98535E-1	-9.13115E0	-9.14164E0	5.48363E-3	9.31025E-2	2.73363E1	-3.26747E1	-3.26482E1	2.6798E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.80492E-1
1.8E1	7.0E0	0.0E0	7.27E2	5.0E2	-2.09634E0	-8.17919E-1	-7.98702E-1	-9.13136E0	-9.14178E0	5.8651E-3	9.29117E-2	2.73673E1	-3.26567E1	-3.26242E1	2.68249E1	1.19238E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.80806E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.18062E-1	-7.98416E-1	-9.13143E0	-9.14147E0	5.50747E-3	9.32693E-2	2.73008E1	-3.26848E1	-3.26242E1	2.68138E1	1.19251E-7	2.51334E-3	2.51334E-3	6.31563E-3	1.80963E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.18038E-1	-7.98678E-1	-9.13124E0	-9.14147E0	5.45979E-3	9.32932E-2	2.73352E1	-3.26661E1	-3.26195E1	2.68065E1	1.19238E-7	2.52318E-3	2.52318E-3	6.3074E-3	1.80806E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.18181E-1	-7.99155E-1	-9.13155E0	-9.14195E0	5.43594E-3	9.32932E-2	2.73222E1	-3.26124E1	-3.26172E1	2.67728E1	1.1929E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.81023E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.18014E-1	-7.98869E-1	-9.13153E0	-9.14176E0	5.55515E-3	9.30071E-2	2.72773E1	-3.26527E1	-3.26376E1	2.6825E1	1.1929E-7	2.51632E-3	2.51632E-3	6.33436E-3	1.80406E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.17919E-1	-7.99036E-1	-9.13131E0	-9.14166E0	5.65052E-3	9.30786E-2	2.72985E1	-3.26723E1	-3.26386E1	2.6822E1	1.19239E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.81023E-1