[Scan]
initial_time=2015-12-15T23:41:13
final_time=2015-12-15T23:41:35
ip_count=19
run=1017
dataset=3
scan=219
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08788E-4
ql1_vset=
ql1_vmon=-8.18229E-1
ql1_imon=2.79154E-9
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=5.85449E-10
ql3_vset=
ql3_vmon=-9.13088E0
ql3_imon=6.35087E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=5.18048E-10
mult1=-1.04387E-8
mult2=-2.83838E-9
rf_tmon=-5.28148E-3
rf_agc=3.221E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=6.30593E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67672E0
bslens_imon=2.47209E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.201E1
lens5a_imon=1.97106E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.05128E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53441E1
cs_ef1b_imon=2.94221E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04584E2
lens23_imon=1.02076E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0544E1
cs_ea1_imon=2.30338E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38589E0
lens1_imon=2.55552E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64811E1
os_ef1alow_imon=2.96306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0347E1
cs_ea2_imon=1.56712E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83311E1
cs_ef1a_imon=2.96028E-5
olens2_vset=9.7E-1
olens2_vmon=9.70697E-1
olens2_imon=2.13817E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=3.09199E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15392E1
os_ea1_imon=1.96793E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63722E1
os_ef1bup_imon=3.07809E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23066E0
cs_ionrep_imon=1.24245E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93357E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01954E1
cs_anode1_imon=3.12223E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=6.31107E-9
tplens_vset=1.4E-1
tplens_vmon=1.57944E0
tplens_imon=-4.79207E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26549E1
iondef3_imon=1.46979E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26843E1
iondef2_imon=1.59632E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98262E-4
ql6_vset=1.0E-1
ql6_vmon=9.27448E-2
ql6_imon=1.04469E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25442E0
ionrepsh_imon=1.90536E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33773E1
lens5b_imon=2.17824E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74629E1
cs_ef2b_imon=3.12327E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.51182E-1
os_ea2_imon=-4.20112E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00585E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71223E1
cs_ef2a_imon=3.18478E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.53762E0
os_ef2alow_imon=-2.74139E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.588E-1
os_ef2bup_imon=-5.30613E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10915E1
os_restr2_imon=2.95368E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.29546E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01775E1
cs_anode2_imon=2.28399E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73772E1
iondef1_imon=1.09297E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68214E1
iondef4_imon=1.05306E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=2.74832E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=1.23438E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14694E0
cs_ionaccel_imon=-2.01159E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47212E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56706E1
einzel_imon=7.73997E-6
window_vset=0.0E0
window_vmon=1.72508E-1
window_imon=-1.33044E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-6.97946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.23797E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93747E3
defgrida_imon=6.50101E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.17192E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.276E0
defgridb_imon=5.90658E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33431E1
os_fil1_imon=8.95875E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.76496E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65575E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30645E1
cs_fil1_imon=1.0008E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.628E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65758E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.6854E-2
os_fil2_imon=-3.12676E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.72904E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.88645E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37767E-1
cs_fil2_imon=-2.54176E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.87156E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2246E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.80869E-1
chamber_ion_pmon=1.19188E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.54573E-1
res40_imon=-2.63366E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09657E0	-8.18038E-1	-7.98917E-1	-9.13107E0	-9.14195E0	5.57899E-3	9.33647E-2	2.73027E1	-3.26813E1	-3.26699E1	2.68316E1	1.1929E-7	2.51814E-3	2.51814E-3	6.30212E-3	1.80778E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09619E0	-8.17609E-1	-7.9906E-1	-9.13103E0	-9.14202E0	5.34058E-3	9.31501E-2	2.73296E1	-3.26897E1	-3.26156E1	2.68094E1	1.19239E-7	2.51954E-3	2.51954E-3	6.32896E-3	1.81023E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.1768E-1	-7.99155E-1	-9.13119E0	-9.14209E0	5.74589E-3	9.30071E-2	2.73173E1	-3.26324E1	-3.26405E1	2.68277E1	1.19237E-7	2.51693E-3	2.51693E-3	6.29067E-3	1.80901E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.17657E-1	-7.98798E-1	-9.13105E0	-9.14185E0	5.6982E-3	9.29356E-2	2.72935E1	-3.26602E1	-3.26034E1	2.68238E1	1.1929E-7	2.50882E-3	2.50882E-3	6.32896E-3	1.80714E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.17704E-1	-7.99012E-1	-9.13129E0	-9.14171E0	5.17368E-3	9.30071E-2	2.73271E1	-3.26407E1	-3.2645E1	2.68232E1	1.19241E-7	2.51679E-3	2.51679E-3	6.323E-3	1.80839E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.17823E-1	-7.99179E-1	-9.13076E0	-9.14173E0	5.62668E-3	9.29832E-2	2.73069E1	-3.26673E1	-3.26402E1	2.68016E1	1.19237E-7	2.5225E-3	2.5225E-3	6.31858E-3	1.80581E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.17943E-1	-7.98965E-1	-9.13098E0	-9.14164E0	5.45979E-3	9.31025E-2	2.73225E1	-3.2653E1	-3.26296E1	2.67914E1	1.19238E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.80806E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.1799E-1	-7.98798E-1	-9.13086E0	-9.14187E0	5.60284E-3	9.29832E-2	2.7301E1	-3.2682E1	-3.26307E1	2.68065E1	1.1929E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.81278E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09719E0	-8.17919E-1	-7.9906E-1	-9.13117E0	-9.14173E0	5.48363E-3	9.28164E-2	2.73045E1	-3.26817E1	-3.26395E1	2.68088E1	1.1929E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.81177E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09627E0	-8.17895E-1	-7.99203E-1	-9.13086E0	-9.14216E0	5.62668E-3	9.28879E-2	2.73568E1	-3.26422E1	-3.26795E1	2.68454E1	1.1929E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.80649E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09773E0	-8.18133E-1	-7.98774E-1	-9.131E0	-9.14185E0	5.36442E-3	9.27687E-2	2.73659E1	-3.27233E1	-3.26649E1	2.6818E1	1.19238E-7	2.52318E-3	2.52318E-3	6.27461E-3	1.8112E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09619E0	-8.1799E-1	-7.98655E-1	-9.13084E0	-9.14178E0	5.50747E-3	9.29117E-2	2.73653E1	-3.26602E1	-3.26113E1	2.6819E1	1.19238E-7	2.52757E-3	2.52757E-3	6.32936E-3	1.80806E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-8.18443E-1	-7.98941E-1	-9.13103E0	-9.14173E0	5.4121E-3	9.28164E-2	2.73069E1	-3.26402E1	-3.2616E1	2.68285E1	1.1929E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.80869E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.18038E-1	-7.98845E-1	-9.13079E0	-9.1419E0	5.57899E-3	9.28164E-2	2.73189E1	-3.2653E1	-3.26801E1	2.68118E1	1.1929E-7	2.52131E-3	2.52131E-3	6.31269E-3	1.81233E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.18086E-1	-7.99084E-1	-9.13086E0	-9.14192E0	5.36442E-3	9.26495E-2	2.73153E1	-3.26789E1	-3.26266E1	2.67866E1	1.19237E-7	2.52139E-3	2.52139E-3	6.33538E-3	1.80901E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.18443E-1	-7.99108E-1	-9.1311E0	-9.14195E0	5.48363E-3	9.2864E-2	2.7348E1	-3.26828E1	-3.26515E1	2.67937E1	1.19239E-7	2.51203E-3	2.51203E-3	6.32356E-3	1.8056E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.18157E-1	-7.98965E-1	-9.13062E0	-9.1418E0	5.48363E-3	9.31501E-2	2.72751E1	-3.26915E1	-3.26385E1	2.68238E1	1.1929E-7	2.52131E-3	2.52131E-3	6.33919E-3	1.80929E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.18205E-1	-7.99012E-1	-9.13098E0	-9.14209E0	5.36442E-3	9.29117E-2	2.73069E1	-3.26777E1	-3.2647E1	2.68232E1	1.19235E-7	2.51642E-3	2.51642E-3	6.3074E-3	1.80437E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09634E0	-8.18205E-1	-7.9875E-1	-9.13088E0	-9.14214E0	5.84126E-3	9.30309E-2	2.73135E1	-3.26717E1	-3.26176E1	2.68202E1	1.1929E-7	2.51662E-3	2.51662E-3	6.34588E-3	1.80649E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.18229E-1	-7.98607E-1	-9.13088E0	-9.14197E0	5.53131E-3	9.27448E-2	2.73772E1	-3.26843E1	-3.26549E1	2.68214E1	1.19188E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.80869E-1