[Scan]
initial_time=2015-12-15T23:43:11
final_time=2015-12-15T23:43:31
ip_count=19
run=1017
dataset=3
scan=223
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08872E-4
ql1_vset=
ql1_vmon=-8.17919E-1
ql1_imon=2.73622E-9
ql2_vset=
ql2_vmon=-7.98774E-1
ql2_imon=6.20937E-10
ql3_vset=
ql3_vmon=-9.13088E0
ql3_imon=6.63626E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=5.45239E-10
mult1=-8.83734E-9
mult2=-2.59885E-9
rf_tmon=-4.57852E-3
rf_agc=3.17955E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=6.11866E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68273E0
bslens_imon=2.49371E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19647E1
lens5a_imon=1.97412E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12559E2
lens4a_imon=2.05228E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53364E1
cs_ef1b_imon=2.96648E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02018E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05012E1
cs_ea1_imon=2.28488E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40088E0
lens1_imon=2.56095E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64981E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.57382E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83908E1
cs_ef1a_imon=2.97369E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=2.13534E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.117E1
os_restr1_imon=3.0955E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15311E1
os_ea1_imon=1.93555E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.05442E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26803E0
cs_ionrep_imon=1.23262E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93473E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02169E1
cs_anode1_imon=3.14956E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=6.29669E-9
tplens_vset=1.4E-1
tplens_vmon=1.60545E0
tplens_imon=-3.02427E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26284E1
iondef3_imon=1.49312E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2653E1
iondef2_imon=1.57169E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98406E-4
ql6_vset=1.0E-1
ql6_vmon=9.2721E-2
ql6_imon=9.45759E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26862E0
ionrepsh_imon=1.89555E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33976E1
lens5b_imon=2.1787E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.10415E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.18874E-1
os_ea2_imon=-4.33385E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0615E2
lens4b_imon=2.00414E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70813E1
cs_ef2a_imon=3.18885E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.57413E0
os_ef2alow_imon=-2.45732E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.35245E-1
os_ef2bup_imon=-5.68648E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10727E1
os_restr2_imon=2.96612E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.29999E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01347E1
cs_anode2_imon=2.27164E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73177E1
iondef1_imon=1.10662E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67866E1
iondef4_imon=1.10323E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.78502E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=1.24022E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-2.24109E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.4745E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56525E1
einzel_imon=7.51125E-6
window_vset=0.0E0
window_vmon=2.07732E-1
window_imon=-1.11305E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8269E2
mask1_imon=2.39225E-4
mask2_vset=0.0E0
mask2_vmon=-1.86086E1
mask2_imon=-1.00132E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.29314E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.71268E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.14449E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31992E0
defgridb_imon=5.92693E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33408E1
os_fil1_imon=8.95605E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.731E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65733E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30743E1
cs_fil1_imon=1.0015E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63261E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65943E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.63543E-2
os_fil2_imon=-3.04438E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.67991E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64202E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38586E-1
cs_fil2_imon=-2.16742E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.17866E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22544E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.7611E-1
res40_imon=-2.62671E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09642E0	-8.18205E-1	-7.98154E-1	-9.13105E0	-9.14178E0	5.74589E-3	9.30309E-2	2.72678E1	-3.27107E1	-3.25467E1	2.68478E1	1.1929E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.80714E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09704E0	-8.17966E-1	-7.98655E-1	-9.13126E0	-9.14207E0	5.57899E-3	9.30309E-2	2.73123E1	-3.26518E1	-3.26182E1	2.68016E1	1.19238E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.81435E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09711E0	-8.183E-1	-7.98941E-1	-9.13098E0	-9.14161E0	5.72205E-3	9.2721E-2	2.73184E1	-3.26868E1	-3.26144E1	2.67879E1	1.1929E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.80649E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0965E0	-8.178E-1	-7.98559E-1	-9.13126E0	-9.14209E0	5.65052E-3	9.31025E-2	2.73075E1	-3.26939E1	-3.265E1	2.68262E1	1.19264E-7	2.51793E-3	2.51793E-3	6.31278E-3	1.80714E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09665E0	-8.17752E-1	-7.98631E-1	-9.13103E0	-9.14211E0	5.43594E-3	9.29832E-2	2.73039E1	-3.26344E1	-3.25942E1	2.68082E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.17513E-1	-7.98726E-1	-9.13126E0	-9.14195E0	5.76973E-3	9.28879E-2	2.72781E1	-3.26609E1	-3.26122E1	2.68028E1	1.1929E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.80963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09665E0	-8.1749E-1	-7.98774E-1	-9.13124E0	-9.1418E0	5.48363E-3	9.32932E-2	2.73122E1	-3.26526E1	-3.26048E1	2.67914E1	1.19238E-7	2.52318E-3	2.52318E-3	6.29645E-3	1.80806E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09642E0	-8.1768E-1	-7.98559E-1	-9.13088E0	-9.14207E0	5.67436E-3	9.30548E-2	2.73129E1	-3.26753E1	-3.26458E1	2.68454E1	1.1929E-7	2.51203E-3	2.51203E-3	6.33436E-3	1.80099E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.17585E-1	-7.99131E-1	-9.13126E0	-9.14183E0	5.67436E-3	9.29832E-2	2.72979E1	-3.26464E1	-3.26524E1	2.68364E1	1.1929E-7	2.52538E-3	2.52538E-3	6.3074E-3	1.80963E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0965E0	-8.17776E-1	-7.98655E-1	-9.13119E0	-9.14202E0	5.74589E-3	9.29594E-2	2.73021E1	-3.26903E1	-3.26508E1	2.68016E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.80492E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09634E0	-8.17728E-1	-7.98559E-1	-9.131E0	-9.14187E0	5.55515E-3	9.30309E-2	2.73159E1	-3.26759E1	-3.25611E1	2.67926E1	1.1929E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.80406E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09673E0	-8.1811E-1	-7.98917E-1	-9.13098E0	-9.14204E0	6.00815E-3	9.29356E-2	2.73027E1	-3.26837E1	-3.26518E1	2.68142E1	1.19238E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.80335E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09657E0	-8.18086E-1	-7.98893E-1	-9.13107E0	-9.14223E0	5.62668E-3	9.27687E-2	2.73075E1	-3.26891E1	-3.265E1	2.68238E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.80963E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09657E0	-8.17895E-1	-7.98821E-1	-9.13076E0	-9.14202E0	5.81741E-3	9.32455E-2	2.73442E1	-3.26627E1	-3.2629E1	2.68196E1	1.1929E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.80806E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09642E0	-8.17895E-1	-7.98917E-1	-9.13067E0	-9.14202E0	5.43594E-3	9.3174E-2	2.73027E1	-3.26484E1	-3.26142E1	2.6849E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.81593E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09657E0	-8.18038E-1	-7.98392E-1	-9.13088E0	-9.14195E0	5.60284E-3	9.27687E-2	2.73081E1	-3.26663E1	-3.26128E1	2.68304E1	1.1929E-7	2.52061E-3	2.52061E-3	6.30202E-3	1.80869E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09688E0	-8.1799E-1	-7.98488E-1	-9.13107E0	-9.14211E0	5.55515E-3	9.31025E-2	2.73039E1	-3.26506E1	-3.26386E1	2.68316E1	1.1929E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.81435E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.17823E-1	-7.98559E-1	-9.13081E0	-9.14192E0	5.55515E-3	9.31501E-2	2.72974E1	-3.2659E1	-3.26236E1	2.67998E1	1.19186E-7	2.51334E-3	2.51334E-3	6.33486E-3	1.81435E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09619E0	-8.17871E-1	-7.98631E-1	-9.13105E0	-9.14178E0	5.88894E-3	9.31501E-2	2.72756E1	-3.26195E1	-3.26531E1	2.68059E1	1.19214E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.80946E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.17919E-1	-7.98774E-1	-9.13088E0	-9.14176E0	5.60284E-3	9.2721E-2	2.73177E1	-3.2653E1	-3.26284E1	2.67866E1