[Scan]
initial_time=2015-12-15T23:46:27
final_time=2015-12-15T23:46:47
ip_count=19
run=1017
dataset=3
scan=230
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08814E-4
ql1_vset=
ql1_vmon=-8.1768E-1
ql1_imon=2.71167E-9
ql2_vset=
ql2_vmon=-7.98345E-1
ql2_imon=6.16908E-10
ql3_vset=
ql3_vmon=-9.13105E0
ql3_imon=5.99802E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=5.3736E-10
mult1=-9.22264E-9
mult2=-2.56491E-9
rf_tmon=-4.62057E-3
rf_agc=3.2889E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.76973E-3
ql5_imon=5.94711E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61076E0
bslens_imon=2.31674E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20414E1
lens5a_imon=1.96103E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12441E2
lens4a_imon=2.05252E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53712E1
cs_ef1b_imon=2.9636E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04642E2
lens23_imon=1.01972E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04852E1
cs_ea1_imon=2.30506E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3584E0
lens1_imon=2.52202E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04622E1
cs_ea2_imon=1.56461E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8464E1
cs_ef1a_imon=2.96684E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=2.14392E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11027E1
os_restr1_imon=3.07172E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14627E1
os_ea1_imon=1.92422E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63924E1
os_ef1bup_imon=3.1056E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.34471E0
cs_ionrep_imon=1.24288E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91837E2
cs_nozzle_imon=1.9319E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=3.12794E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=6.27046E-9
tplens_vset=1.4E-1
tplens_vmon=1.59247E0
tplens_imon=-4.44003E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26074E1
iondef3_imon=1.49878E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27119E1
iondef2_imon=1.5763E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98579E-4
ql6_vset=1.0E-1
ql6_vmon=9.27925E-2
ql6_imon=1.01876E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25918E0
ionrepsh_imon=1.86299E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33746E1
lens5b_imon=2.21303E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73246E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.27132E-1
os_ea2_imon=-1.0811E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00796E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71438E1
cs_ef2a_imon=3.18164E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.5477E0
os_ef2alow_imon=-2.37083E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.09127E-1
os_ef2bup_imon=-5.11705E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10697E1
os_restr2_imon=2.95639E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.30459E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01473E1
cs_anode2_imon=2.26767E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7263E1
iondef1_imon=1.1098E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68028E1
iondef4_imon=1.09747E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.69763E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=1.23866E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15837E0
cs_ionaccel_imon=-2.10774E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47125E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.29501E-6
window_vset=0.0E0
window_vmon=1.21237E-1
window_imon=-1.09142E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39034E-4
mask2_vset=0.0E0
mask2_vmon=-1.86464E1
mask2_imon=-9.07619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.21882E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.91089E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=6.86134E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.71561E0
defgridb_imon=6.10036E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33443E1
os_fil1_imon=8.9716E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.79708E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65788E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30728E1
cs_fil1_imon=1.00154E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63165E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65819E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.67342E-2
os_fil2_imon=-3.0624E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.86612E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58127E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.65395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.1033E-5
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22505E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=1.80179E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40091E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.27767E-1
res40_imon=-2.82493E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.17466E-1	-7.98225E-1	-9.13067E0	-9.1419E0	5.17368E-3	9.29117E-2	2.7321E1	-3.27098E1	-3.26337E1	2.6741E1	1.19238E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.80022E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.17847E-1	-7.98225E-1	-9.13088E0	-9.14199E0	5.38826E-3	9.30071E-2	2.73045E1	-3.26346E1	-3.26762E1	2.69716E1	1.1924E-7	2.51919E-3	2.51919E-3	6.29684E-3	1.80324E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.1749E-1	-7.98726E-1	-9.13088E0	-9.14214E0	5.19753E-3	9.31025E-2	2.73296E1	-3.2696E1	-3.26431E1	2.67685E1	1.19182E-7	2.51725E-3	2.51725E-3	6.33592E-3	1.7986E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.17537E-1	-7.97987E-1	-9.13088E0	-9.1419E0	5.36442E-3	9.31501E-2	2.72892E1	-3.26596E1	-3.2639E1	2.68629E1	1.1929E-7	2.51575E-3	2.51575E-3	6.30221E-3	1.79652E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.1749E-1	-7.98631E-1	-9.13088E0	-9.14207E0	5.10216E-3	9.3174E-2	2.73153E1	-3.26332E1	-3.26488E1	2.67589E1	1.1929E-7	2.52026E-3	2.52026E-3	6.29926E-3	1.79983E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.1749E-1	-7.98535E-1	-9.13064E0	-9.14197E0	5.34058E-3	9.29356E-2	2.72733E1	-3.26903E1	-3.2632E1	2.68046E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.17466E-1	-7.98845E-1	-9.131E0	-9.14211E0	5.14984E-3	9.2864E-2	2.73069E1	-3.26374E1	-3.26254E1	2.67998E1	1.1929E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.80406E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.17752E-1	-7.98702E-1	-9.13072E0	-9.14214E0	4.98295E-3	9.30309E-2	2.72997E1	-3.26837E1	-3.26062E1	2.68466E1	1.19237E-7	2.5147E-3	2.5147E-3	6.31858E-3	1.80102E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.178E-1	-7.98321E-1	-9.13112E0	-9.14209E0	5.34058E-3	9.31263E-2	2.73273E1	-3.26621E1	-3.26032E1	2.68791E1	1.1929E-7	2.52099E-3	2.52099E-3	6.34588E-3	1.79398E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.17537E-1	-7.98655E-1	-9.131E0	-9.14185E0	5.34058E-3	9.32217E-2	2.73045E1	-3.26969E1	-3.26146E1	2.68325E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.79554E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.1749E-1	-7.98583E-1	-9.13107E0	-9.14187E0	5.34058E-3	9.31501E-2	2.73706E1	-3.26543E1	-3.25723E1	2.68082E1	1.1929E-7	2.50989E-3	2.50989E-3	6.3074E-3	1.79639E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.17418E-1	-7.98631E-1	-9.13095E0	-9.14202E0	5.65052E-3	9.31025E-2	2.7352E1	-3.26771E1	-3.26116E1	2.68142E1	1.1929E-7	2.5188E-3	2.5188E-3	6.28552E-3	1.80179E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.1749E-1	-7.9844E-1	-9.13129E0	-9.14202E0	5.05447E-3	9.30786E-2	2.73261E1	-3.26675E1	-3.26765E1	2.68226E1	1.19239E-7	2.52169E-3	2.52169E-3	6.33436E-3	1.80099E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.17513E-1	-7.98512E-1	-9.13098E0	-9.14197E0	5.29289E-3	9.2721E-2	2.73556E1	-3.26945E1	-3.26146E1	2.68094E1	1.19132E-7	2.52027E-3	2.52027E-3	6.32418E-3	1.80261E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.17561E-1	-7.98512E-1	-9.13115E0	-9.14178E0	5.84126E-3	9.30309E-2	2.7278E1	-3.26956E1	-3.25947E1	2.67932E1	1.19239E-7	2.51417E-3	2.51417E-3	6.32356E-3	1.80714E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.17633E-1	-7.98821E-1	-9.13084E0	-9.14183E0	5.45979E-3	9.29832E-2	2.72787E1	-3.26759E1	-3.26296E1	2.68058E1	1.1929E-7	2.52099E-3	2.52099E-3	6.30466E-3	1.79944E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.17704E-1	-7.99036E-1	-9.131E0	-9.14197E0	5.72205E-3	9.30786E-2	2.73135E1	-3.27239E1	-3.26284E1	2.67692E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.18181E-1	-7.98416E-1	-9.13086E0	-9.14173E0	5.53131E-3	9.31025E-2	2.73153E1	-3.26428E1	-3.2623E1	2.67914E1	1.1929E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.7971E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09642E0	-8.17847E-1	-7.98512E-1	-9.13067E0	-9.14173E0	5.67436E-3	9.29117E-2	2.72325E1	-3.25139E1	-3.26071E1	2.68597E1	1.1929E-7	2.52384E-3	2.52384E-3	6.31278E-3	1.80099E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.1768E-1	-7.98345E-1	-9.13105E0	-9.14197E0	5.76973E-3	9.27925E-2	2.7263E1	-3.27119E1	-3.26074E1	2.68028E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.80179E-1